公开(公告)号：US07099081B2

公开(公告)日：2006-08-29

申请号：US10081078

申请日：2002-02-21

申请人： Adam E. Norton ,  Kenneth C. Johnson ,  Fred E. Stanke

发明人： Adam E. Norton ,  Kenneth C. Johnson ,  Fred E. Stanke

IPC分类号： G02B5/30 ,  G02B27/28

CPC分类号： G01J3/02 ,  G01J3/0224 ,  G01J3/0243 ,  G01J3/28 ,  G01N21/21 ,  G01N21/31 ,  G01N21/956 ,  G01N2021/213 ,  G02B5/3083 ,  G02B27/28 ,  G02B27/286 ,  G02B27/288 ,  G03F7/70625 ,  G03F7/70991

摘要： A small-spot imaging, spectrometry instrument for measuring properties of a sample has a polarization-scrambling element, such as a birefringent plate depolarizer, incorporated between the polarization-introducing components of the system, such as the beamsplitter, and the microscope objective of the system. The plate depolarizer varies polarization with wavelength, and may be a Lyot depolarizer with two plates, or a depolarizer with more than two plates (such as a three-plate depolarizer). Sinusoidal perturbation in the resulting measured spectrum can be removed by data processing techniques or, if the depolarizer is thick or highly birefringent, the perturbation may be narrower than the wavelength resolution of the instrument.

公开(公告)号：US07042580B1

公开(公告)日：2006-05-09

申请号：US09533613

申请日：2000-03-22

申请人： Fred E. Stanke ,  Clinton B. Carlisle ,  Hung Pham ,  Edric Tong ,  Douglas E. Ruth ,  James M. Cahill ,  Michael Weber ,  Elliot Burke

发明人： Fred E. Stanke ,  Clinton B. Carlisle ,  Hung Pham ,  Edric Tong ,  Douglas E. Ruth ,  James M. Cahill ,  Michael Weber ,  Elliot Burke

IPC分类号： G01B11/24

CPC分类号： G01B11/0625 ,  B24B37/042 ,  B24B49/12 ,  G01B11/30 ,  G01N21/55 ,  G01N21/8422 ,  G01N21/9501 ,  G01N2021/8825 ,  H01L21/67259

摘要： This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.

摘要翻译： 本发明是一种用于成像测量的装置，其在特定实施例中可以与处理器站集成，使得计量站离开处理站而不是耦合到处理站。 计量站设置有具有包含测量区域的第一视野的第一成像照相机。 替代实施例包括具有第二视野的第二成像相机。 优选实施例包括宽带紫外光源，但是其他实施例可以具有宽或窄光带宽的可见光或近红外光源。 包括宽带宽源的实施例通常包括光谱仪或成像光谱仪。 具体实施例可以包括弯曲的，反射光学的或由液体润湿的测量区域。 在典型的实施例中，计量站和测量区域被配置为具有相对于彼此的4个移动自由度。

公开(公告)号：US06768967B2

公开(公告)日：2004-07-27

申请号：US09927177

申请日：2001-08-10

申请人： Kenneth C. Johnson ,  Fred E. Stanke

发明人： Kenneth C. Johnson ,  Fred E. Stanke

IPC分类号： G01B1106

CPC分类号： G02B5/18 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956

摘要： A database interpolation method is used to rapidly calculate a predicted optical response characteristic of a diffractive microstructure as part of a real-time optical measurement process. The interpolated optical response is a continuous and (in a preferred embodiment) smooth function of measurement parameters, and it matches the theoretically-calculated optical response at the database-stored interpolation points.

摘要翻译： 数据库插值方法用于快速计算衍射微结构的预测光学响应特性，作为实时光学测量过程的一部分。 内插的光学响应是连续的（在优选实施例中）测量参数的平滑功能，并且它与在数据库存储的插值点处的理论计算的光学响应相匹配。

公开(公告)号：US5274604A

公开(公告)日：1993-12-28

申请号：US960524

申请日：1992-10-13

申请人： Ralph M. D'Angelo ,  Fred E. Stanke ,  Hung-Wen Chang ,  Kai Hsu

发明人： Ralph M. D'Angelo ,  Fred E. Stanke ,  Hung-Wen Chang ,  Kai Hsu

IPC分类号： G01V1/50 ,  G01V1/40

CPC分类号： G01V1/50

摘要： A method and apparatus for spatially filtering a signal set to enhance interface echoes representing a borehole configuration. The spatial filtering technique provides information regarding the various interfaces formed between materials in the borehole environment, as well as thicknesses of the various materials present in the borehole. Further, the presence of channels formed during the cementing procedure are detected.

摘要翻译： 一种用于空间滤波信号集以增强表示井眼配置的接口回波的方法和装置。 空间滤波技术提供了有关钻孔环境中材料之间形成的各种界面的信息以及钻孔中存在的各种材料的厚度。 此外，检测在固井过程中形成的通道的存在。

公开(公告)号：US06950780B2

公开(公告)日：2005-09-27

申请号：US10777353

申请日：2004-02-12

申请人： Kenneth C. Johnson ,  Fred E. Stanke

发明人： Kenneth C. Johnson ,  Fred E. Stanke

IPC分类号： G01B11/00 ,  G01B11/14 ,  G01N21/47 ,  G01N21/95 ,  G01N21/956 ,  G02B5/18 ,  G06F17/10 ,  H01L21/66 ,  G01N21/00

CPC分类号： G02B5/18 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956

摘要： A database interpolation method is used to rapidly calculate a predicted optical response characteristic of a diffractive microstructure as part of a real-time optical measurement process. The interpolated optical response is a continuous and (in a preferred embodiment) smooth function of measurement parameters, and it matches the theoretically-calculated optical response at the database-stored interpolation points.

摘要翻译： 数据库插值方法用于快速计算衍射微结构的预测光学响应特性，作为实时光学测量过程的一部分。 内插的光学响应是连续的（在优选实施例中）测量参数的平滑功能，并且它与在数据库存储的插值点处的理论计算的光学响应相匹配。

公开(公告)号：US06738136B2

公开(公告)日：2004-05-18

申请号：US10290730

申请日：2002-11-07

申请人： Adam Norton ,  Abdurrahman Sezginer ,  Fred E. Stanke ,  Rodney Smedt

发明人： Adam Norton ,  Abdurrahman Sezginer ,  Fred E. Stanke ,  Rodney Smedt

IPC分类号： G01J308

CPC分类号： G01J3/02 ,  G01J3/0218 ,  G01J3/08 ,  G01J3/42 ,  G01N21/55

摘要： The invention is a method and apparatus for determining characteristics of a sample. The system and method provide for detecting a monitor beam reflected off a mirror, where the monitor beam corresponds to the intensity of light incident upon the sample. The system and method also provide for detecting a measurement beam, where the measurement beam has been reflected off the sample being characterized. Both the monitor beam and the measurement beam are transmitted through the same transmission path, and detected by the same detector. Thus, potential sources of variations between the monitor beam and the measurement beam which are not due to the characteristics of the sample are minimized. Reflectivity information for the sample can be determined by comparing data corresponding to the measurement beam relative to data corresponding the monitor beam.

摘要翻译： 本发明是用于确定样品特性的方法和装置。 该系统和方法提供用于检测从反射镜反射的监视光束，其中监视光束对应于入射在样本上的光的强度。 该系统和方法还提供了用于检测测量光束，其中测量光束已经从被表征的样品反射出来。 监测光束和测量光束都通过相同的传输路径传输，并由相同的检测器检测。 因此，监测光束和测量光束之间不是由于样品特性引起的变化的潜在来源被最小化。 可以通过将与测量光束相对应的数据相对于监视光束对应的数据进行比较来确定样本的反射率信息。

公开(公告)号：US06690473B1

公开(公告)日：2004-02-10

申请号：US09495821

申请日：2000-02-01

申请人： Fred E. Stanke ,  Talat F. Hasan ,  Michael Weber

发明人： Fred E. Stanke ,  Talat F. Hasan ,  Michael Weber

IPC分类号： G01B1124

CPC分类号： G01N21/9501 ,  B24B37/34 ,  B24B49/12 ,  G01B11/0625 ,  G01B11/30 ,  G01N21/211 ,  H01L21/67 ,  H01L22/12

摘要： This invention is an instrument adaptable for integration into a process tool the combines a number of instruments for surface characterization. As an integrated process monitor, the invention is capable of monitoring surface dishing, surface erosion and thickness of residue layers on work-pieces with little time delay. The invention is adaptable to making measurements while a wafer or work-piece is either wet or dry. A preferred embodiment includes an integrated optical profiler adapted to surface profiling in the presence of optical interference arising from retro-reflections from underlying optical non-uniformities. Alternate embodiments include an integrated stylus profiler with vibration isolation.

摘要翻译： 本发明是适用于集成到工艺工具中的仪器，其结合了许多用于表面表征的仪器。 作为集成过程监视器，本发明能够以很小的时间延迟来监测工件上的表面凹陷，表面侵蚀和残余层的厚度。 本发明适用于在晶片或工件湿或干时进行测量。 一个优选实施例包括一个集成的光学轮廓仪，其适于在存在由于潜在的光学非均匀性的反射引起的光学干涉的情况下进行表面成像。 替代实施例包括具有隔振的集成式触针分析器。

公开(公告)号：US06182510B2

公开(公告)日：2001-02-06

申请号：US09568659

申请日：2000-05-10

申请人： Fred E. Stanke ,  B. T. Khuri-Yakub ,  Hung Pham ,  Talat Hasan

发明人： Fred E. Stanke ,  B. T. Khuri-Yakub ,  Hung Pham ,  Talat Hasan

IPC分类号： G01N2918

CPC分类号： G01N29/46 ,  G01N29/041 ,  G01N29/07 ,  G01N29/449 ,  G01N2291/02854 ,  G01N2291/02881 ,  G01N2291/0423 ,  G01N2291/0427 ,  G01N2291/044 ,  G01N2291/102 ,  G01N2291/2698

摘要： An apparatus and method are disclosed for characterizing semiconductor wafers or other test objects that can support acoustic waves. Source and receiving transducers are configured in various arrangements to respectively excite and detect acoustic waves (e.g., Lamb waves) in a wafer to be characterized. Signals representing the detected waves are digitally processed and used to compute a measurement set correlated with the waves' velocity in the wafer. A characterization sensitivity is provided that describes how different wafer characteristics of interest vary with changes in the propagation of the acoustic waves. Using the characterization sensitivity and measurement sets computed at a setup time when all wafer characteristics are known and one or more process times when at least one of the characteristics is not known the perturbation in wafer characteristics between the setup and the process times can be determined. Characterization accuracy is improved by a wafer calibration procedure wherein measurement offsets from known conditions are determined for each wafer being characterized. An apparatus and technique are disclosed for correcting for anisotropy of acoustic wave velocity due to the direction of wave propagation with respect to a preferred crystallographic axis of the wafer. An apparatus and technique are also described for measuring wafer temperature using a single transducer whose temperature is related to the temperature of the wafer and, optionally, resonator structures. For characterization steps that occur when the wafer is chucked, a chuck structure is described that reduces the likelihood of the chuck interfering with the waves in the wafer.

摘要翻译： 公开了用于表征可支持声波的半导体晶片或其它测试对象的装置和方法。 源和接收换能器被配置成各种布置以分别激发和检测要表征的晶片中的声波（例如，兰姆波）。 表示检测到的波的信号被数字处理并用于计算与晶片中的波速相关的测量集。 提供了表征灵敏度，其描述不同的感兴趣的晶片特性随着声波传播的变化而变化。 使用在所有晶片特性已知的建立时间计算的表征灵敏度和测量集，以及当至少一个特性未知时的一个或多个处理时间，可以确定设置和处理时间之间的晶片特性的扰动。 通过晶片校准程序改进表征精度，其中针对每个被表征的晶片确定对已知条件的测量偏移。 公开了一种用于校正由于相对于晶片的优选结晶轴的波传播方向引起的声波速度的各向异性的装置和技术。 还描述了一种用于使用单个换能器来测量晶片温度的装置和技术，其温度与晶片的温度和可选的谐振器结构相关。 对于在夹持晶片时发生的表征步骤，描述了一种卡盘结构，其减小卡盘干扰晶片中的波的可能性。

公开(公告)号：US6018496A

公开(公告)日：2000-01-25

申请号：US442610

申请日：1995-05-17

申请人： Fred E. Stanke ,  Ralph M. D'Angelo

发明人： Fred E. Stanke ,  Ralph M. D'Angelo

IPC分类号： E21B47/00 ,  G01V1/50 ,  G01V1/40

CPC分类号： E21B47/0005 ,  G01V1/50

摘要： A method and apparatus for determining the hydraulic isolation of layers in an earth formation. The characteristics of various interfaces between the materials in the borehole are evaluated. An acoustic investigation is performed by directing an acoustic signal at a radial segment of the borehole. The signal passes through the casing and the fill material and produces a resulting signal which has travelled along a path encountering various interfaces in the borehole. This signal is processed to make hydraulic isolation determinations.

摘要翻译： 一种用于确定地层中层的液压隔离的方法和装置。 评估井眼中材料之间各种界面的特征。 通过在井眼的径向段处引导声信号来执行声学研究。 信号通过壳体和填充材料，并产生沿着沿着钻孔中的各种界面的路径行进的结果信号。 该信号被处理以进行液压隔离确定。

公开(公告)号：US4928269A

公开(公告)日：1990-05-22

申请号：US368065

申请日：1989-06-15

申请人： Christopher V. Kimball ,  Fred E. Stanke ,  Curtis J. Randall ,  Andrew J. Hayman

发明人： Christopher V. Kimball ,  Fred E. Stanke ,  Curtis J. Randall ,  Andrew J. Hayman

IPC分类号： G01V1/30 ,  G01V1/50

CPC分类号： G01V1/50 ,  G01V1/306

摘要： The present invention is directed to a method of calculating the impedance of a material behind the section of a casing. An acoustic excitation pulse is directed towards a section of the casing, resulting in a return waveform having a reverberation segment and an initial reflection segment. The return waveform is analyzed to choose a resonance frequency indicative of the casing's nominal thickness. The return waveform is bandpass filtered about the chosen frequency. A time window of the reverberation segment is selected, and the energy content in the time window of the filtered reverberation segment is calculated. Both the bandpass filter and time windows are selected based on the chosen resonance frequency, thereby removing variations in the thickness of the casing. The energy content calculation produces a cementation signal indicative of the impedance of the cement behind the section of the casing. The impedance value is indicative of the cement quality. In accordance with another aspect, a time portion of the initial reflection segment is chosen, and the energy content in the time window of the filtered initial reflection segment is calculated. This energy is used to normalize the cementation signal calculated from the reverberation segment. In accordance with another aspect of the present invention, the impedance of the material behind the casing is determined.

摘要翻译： 本发明涉及一种计算外壳部分之后的材料的阻抗的方法。 声学激发脉冲指向壳体的一部分，导致具有混响段和初始反射段的返回波形。 分析返回波形以选择表示外壳标称厚度的共振频率。 返回波形关于所选择的频率进行带通滤波。 选择混响段的时间窗口，并计算滤波后的混响段的时间窗口中的能量内容。 基于所选择的共振频率来选择带通滤波器和时间窗，从而消除壳体厚度的变化。 能量含量计算产生表示水泥在套管部分后面的阻抗的胶结信号。 阻抗值表示水泥质量。 根据另一方面，选择初始反射段的时间部分，并且计算滤波后的初始反射段的时间窗中的能量含量。 该能量用于归一化从混响段计算的胶结信号。 根据本发明的另一方面，确定了壳体后面的材料的阻抗。