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公开(公告)号:US20170139016A1
公开(公告)日:2017-05-18
申请号:US15347872
申请日:2016-11-10
Applicant: NXP B.V.
Inventor: Klaus Reimann , Robert van Veldhoven , Jaap Ruigrok , Selcuk Ersoy , Ralf van Otten , Jörg Kock
CPC classification number: G01R33/0029 , G01R33/0017 , G01R33/0035 , G01R33/0082 , G01R33/096
Abstract: A magnetic field sensor is disclosed for providing an output signal in response to an external magnetic field. The sensor comprises a primary magnetic field transducer for producing a primary signal in response to the external magnetic field and having a first magnetic field saturation characteristic; a secondary magnetic field transducer for producing a secondary signal in response to the external magnetic field and having a second magnetic field saturation characteristic. The first magnetic field saturation characteristic is different from the second magnetic field saturation characteristic. The sensor is configured to use the secondary signal to correct for errors in the output signal arising from saturation of the primary transducer.
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公开(公告)号:US09576738B2
公开(公告)日:2017-02-21
申请号:US14543146
申请日:2014-11-17
Applicant: NXP B.V.
Inventor: Peter G. Steeneken , Klaus Reimann
CPC classification number: H01G5/16 , H01G5/013 , H01G5/0136 , H01G7/06 , H01G2005/02 , H03J5/248
Abstract: A capacitive MEMS structure comprising first and second opposing capacitor electrode arrangements, wherein at least one of the electrode arrangements is movable, and a dielectric material located adjacent to the second electrode arrangement, wherein the second electrode arrangement is patterned such that it includes electrode areas and spaces adjacent to the electrode areas, and wherein the dielectric material extends at least partially in or over the spaces.
Abstract translation: 一种电容MEMS结构,包括第一和第二相对电容器电极布置,其中至少一个电极布置是可移动的,以及位于第二电极布置附近的介电材料,其中第二电极布置被图案化,使得其包括电极区域和 与电极区域相邻的空间,并且其中电介质材料至少部分地在空间中或上方延伸。
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公开(公告)号:US08901682B2
公开(公告)日:2014-12-02
申请号:US13861757
申请日:2013-04-12
Applicant: NXP B.V.
Inventor: Klaus Reimann , Iris Bominaar-Silkens , Twan Van Lippen , Remco Henricus Wilhelmus Pijnenburg
CPC classification number: B81B3/0072 , H04R19/005 , H04R19/04 , H04R2410/03
Abstract: A MEMS device, such as a microphone, uses a perforated plate. The plate comprises an array of holes across the plate area. The plate has an area formed as a grid of polygonal cells, wherein each cell comprises a line of material following a path around the polygon thereby defining an opening in the center. In one aspect, the line of material forms a path along each side of the polygon which forms a track which extends at least once inwardly from the polygon perimeter towards the center of the polygon and back outwardly to the polygon perimeter. This defines a meandering hexagon side wall, which functions as a local spring suspension.
Abstract translation: 诸如麦克风的MEMS装置使用多孔板。 该板包括穿过板区域的孔阵列。 板具有形成为多边形单元格的区域,其中每个单元包括沿着围绕多边形的路径的材料线,从而限定中心的开口。 在一个方面,材料线形成沿着多边形的每一侧的路径,其形成轨道,该轨道从多边形周边至少向内延伸到多边形的中心并向外延伸到多边形周边。 这定义了一个弯曲的六边形侧壁,其作为本地弹簧悬架起作用。
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公开(公告)号:US10006972B2
公开(公告)日:2018-06-26
申请号:US15347872
申请日:2016-11-10
Applicant: NXP B.V.
Inventor: Klaus Reimann , Robert van Veldhoven , Jaap Ruigrok , Selcuk Ersoy , Ralf van Otten , Jörg Kock
CPC classification number: G01R33/0029 , G01R33/0017 , G01R33/0035 , G01R33/0082 , G01R33/096
Abstract: A magnetic field sensor is disclosed for providing an output signal in response to an external magnetic field. The sensor comprises a primary magnetic field transducer for producing a primary signal in response to the external magnetic field and having a first magnetic field saturation characteristic; a secondary magnetic field transducer for producing a secondary signal in response to the external magnetic field and having a second magnetic field saturation characteristic. The first magnetic field saturation characteristic is different from the second magnetic field saturation characteristic. The sensor is configured to use the secondary signal to correct for errors in the output signal arising from saturation of the primary transducer.
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公开(公告)号:US09307319B2
公开(公告)日:2016-04-05
申请号:US13860164
申请日:2013-04-10
Applicant: NXP B.V.
Inventor: Klaus Reimann , Twan van Lippen , Remco Henricus Wilhelmus Pijnenburg , Iris Bominaar-Silkens , Robert Hendrikus Margaretha van Veldhoven
IPC: H04R3/02 , G01L9/12 , G01P15/125 , G01D5/24
CPC classification number: H04R3/02 , G01D5/24 , G01L9/12 , G01P15/125 , H04R3/06 , H04R2410/07
Abstract: A read out circuit for a sensor uses a feedback loop to bias the sensor to a desired operating point, such as the maximal possible sensitivity, but without the problem of an instable sensor position as known for the conventional read-out with constant charge. The reference bias to which the circuit is controlled is also varied using feedback control, but with a slower response than the main bias control feedback loop.
Abstract translation: 用于传感器的读出电路使用反馈回路将传感器偏置到期望的操作点,例如最大可能的灵敏度,但不存在如常规电荷的传统读出所知的不稳定的传感器位置的问题。 控制电路的参考偏压也可以使用反馈控制来改变,但是响应比主偏压控制反馈回路慢。
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公开(公告)号:US09236734B2
公开(公告)日:2016-01-12
申请号:US14301445
申请日:2014-06-11
Applicant: NXP B.V.
Inventor: Michael in 't Zandt , Klaus Reimann , Olaf Wunnicke
CPC classification number: H02H9/06 , H01J9/025 , H01J9/18 , H01L23/60 , H01L27/0288 , H01L2924/0002 , H01L2924/00
Abstract: The invention provides a method of forming an electric field gap device, such as a lateral field emission ESD protection structure, in which a cathode layer is formed between dielectric layers. Anode channels are formed and they are lined with a sacrificial dielectric layer. Conductive anode pillars are formed in the anode channels, and then the sacrificial dielectric layer is etched away in the vicinity of the anode pillars. The etching leaves a suspended portion of the cathode layer which defines a lateral gap to an adjacent anode pillar. This portion has a sharp end face defined by the corners of the cathode layer and the lateral gap can be defined accurately as it corresponds to the thickness of the sacrificial dielectric layer.
Abstract translation: 本发明提供一种形成诸如横向场发射ESD保护结构的电场间隙器件的方法,其中在电介质层之间形成阴极层。 形成阳极通道并且衬有牺牲介电层。 在阳极通道中形成导电阳极柱,然后在阳极柱附近刻蚀牺牲介电层。 蚀刻离开阴极层的悬浮部分,其限定与相邻阳极柱的横向间隙。 该部分具有由阴极层的角部限定的尖端面,并且可以精确地限定横向间隙,因为其对应于牺牲介电层的厚度。
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17.
公开(公告)号:US09190237B1
公开(公告)日:2015-11-17
申请号:US14261246
申请日:2014-04-24
Applicant: NXP B.V.
Inventor: Klaus Reimann , Olaf Wunnicke , Michael in 't Zandt
CPC classification number: H01J9/025 , H01J1/304 , H01J1/308 , H01J9/24 , H01J19/24 , H01J19/54 , H01J21/04 , H01L27/0248
Abstract: Embodiments of a method for forming a field emission diode for an electrostatic discharge device include forming a first electrode, a sacrificial layer, and a second electrode. The sacrificial layer separates the first and second electrodes. The method further includes forming a cavity between the first and second electrode by removing the sacrificial layer. The cavity separates the first and second electrodes. The method further includes depositing an electron emission material on at least one of the first and second electrodes through at least one access hole after formation of the first and second electrodes. The access hole is located remotely from a location of electron emission on the first and second electrode.
Abstract translation: 用于形成用于静电放电装置的场致发射二极管的方法的实施例包括形成第一电极,牺牲层和第二电极。 牺牲层分离第一和第二电极。 该方法还包括通过去除牺牲层在第一和第二电极之间形成空腔。 腔分离第一和第二电极。 该方法还包括在形成第一和第二电极之后,通过至少一个进入孔,在第一和第二电极中的至少一个上沉积电子发射材料。 进入孔远离第一和第二电极上的电子发射位置。
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公开(公告)号:US20150002966A1
公开(公告)日:2015-01-01
申请号:US14301445
申请日:2014-06-11
Applicant: NXP B.V.
Inventor: Michael In 't Zandt , Klaus Reimann , Olaf Wunnicke
CPC classification number: H02H9/06 , H01J9/025 , H01J9/18 , H01L23/60 , H01L27/0288 , H01L2924/0002 , H01L2924/00
Abstract: The invention provides a method of forming an electric field gap device, such as a lateral field emission ESD protection structure, in which a cathode layer is formed between dielectric layers. Anode channels are formed and they are lined with a sacrificial dielectric layer. Conductive anode pillars are formed in the anode channels, and then the sacrificial dielectric layer is etched away in the vicinity of the anode pillars. The etching leaves a suspended portion of the cathode layer which defines a lateral gap to an adjacent anode pillar. This portion has a sharp end face defined by the corners of the cathode layer and the lateral gap can be defined accurately as it corresponds to the thickness of the sacrificial dielectric layer.
Abstract translation: 本发明提供一种形成诸如横向场发射ESD保护结构的电场间隙器件的方法,其中在电介质层之间形成阴极层。 形成阳极通道并且衬有牺牲介电层。 在阳极通道中形成导电阳极柱,然后在阳极柱附近刻蚀牺牲介电层。 蚀刻离开阴极层的悬浮部分,其限定与相邻阳极柱的横向间隙。 该部分具有由阴极层的角部限定的尖端面,并且可以精确地限定横向间隙,因为其对应于牺牲介电层的厚度。
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