Abstract:
This disclosure provides systems, methods, and apparatus for providing protective coatings on electromechanical systems (EMS) devices. A display apparatus can include an electrostatic actuation assembly for controlling the position of a suspended portion of a display element. The electrostatic actuation assembly can include a load beam, drive beam, and a coating disposed over a portion of the drive beam. The coating can include a plurality of raised tabs spaced apart from each other. One or both of the size of the raised tabs and a pitch between raised tabs can be varied along a surface of the drive beam. The voltage used to actuate the actuator is, in part, related to the shape and relative position of the load and drive beams. The raised tabs can be sized, spaced, or positioned to affect a desired rest position and rest shape of the drive beam relative to the load beam.
Abstract:
This disclosure provides systems, methods and apparatus for modulating light to form an image on a display, as well as methods manufacturing such apparatus. The display apparatus includes shutters having asymmetric light obstructing portions extending out from opposing sides of a shutter aperture along an axis of motion of the shutter. Actuators move the shutters laterally along the axis of motion to move the shutter between fully closed, partially open, and fully open states to modulate light, thereby forming an image.
Abstract:
This disclosure provides systems, methods and apparatus for displaying images. Some such apparatus include an array of display elements coupled to a substrate and an elevated aperture layer (EAL) suspended over the array of display elements. The EAL is coupled to the substrate, and includes, for each of the display elements, at least one aperture for allowing passage of light therethrough. Methods for manufacturing such apparatus include at least one of forming etch holes through the EAL, employing an at least partially sublimatable sacrificial mold, employing a two phase release process, and releasing the apparatus such that a portion of a sacrificial mold remains surrounding portions of the apparatus.
Abstract:
This disclosure provides systems, methods and apparatus including processes that use two layers of resist, with a layer of etch stop material in between. The two layers of resist may be etched in separate processes to form devices having vias with sidewalls that extend through both layers of resist
Abstract:
This disclosure provides systems, methods and apparatus for providing relatively thinner and less stiff compliant beams for a shutter assembly. A protective coating is deposited and patterned over the shutter assembly before it is released from a sacrificial mold over which the shutter assembly is formed. Because some primary surfaces of the compliant beams are in contact with the sacrificial mold, these primary surfaces are not coated with the protective coating. Therefore, when the shutter assembly is finally released, the resulting compliant beams are relatively thinner and less stiff providing a reduction in an actuation voltage used to operate the shutter assembly. In some instances, the protective coating is patterned into discontinuous segments before release.
Abstract:
This disclosure provides systems, methods and apparatus for modulating light to form an image on a display, as well as methods manufacturing such apparatus. The display apparatus includes dual-level shutter assemblies. Each dual-level shutter assembly includes front and rear light obstructing levels positioned adjacent to respective front and rear light blocking layers. The front and rear light blocking layers define apertures providing optical paths from a backlight to the front of the display. The dual-level shutters selectively obstruct these optical paths to generate an image.
Abstract:
This disclosure provides systems, methods and apparatus for displaying images. Some such apparatus include a transparent substrate, a display element formed on the substrate, a light blocking elevated aperture layer (EAL) supported over the substrate by an anchor formed on the substrate, and an electrical interconnect disposed on the EAL for carrying an electrical signal to the display element. The electrical interconnect can include one or more of a data voltage interconnect, a scan-line interconnect or a global interconnect. In some implementations, a dielectric layer can separate the electrical interconnect from the EAL. The EAL can include an aperture formed through it that corresponds to the display element. In some implementations, a second electrical interconnect disposed on the substrate can be electrically coupled to a plurality of display elements.
Abstract:
This disclosure provides systems, methods and apparatus for providing multi-level multi-state shutter assemblies. The shutter assembly includes at least a first shutter at a first height over a substrate and a second shutter at a second height over the substrate. Both the first shutter and the second shutter can be operated in an open or closed state for passing or partially blocking light propagating through an aperture. In some implementations, the shutter assembly can operate in four states: a fully transmissive state, a fully obstructive state and two partially transmissive states based on the open or closed states of the first and second shutters.
Abstract:
This disclosure provides systems, methods and apparatus for providing relatively thinner and less stiff compliant beams for a shutter assembly. A protective coating is deposited and patterned over the shutter assembly before it is released from a sacrificial mold over which the shutter assembly is formed. Because some primary surfaces of the compliant beams are in contact with the sacrificial mold, these primary surfaces are not coated with the protective coating. Therefore, when the shutter assembly is finally released, the resulting compliant beams are relatively thinner and less stiff providing a reduction in an actuation voltage used to operate the shutter assembly. In some instances, the protective coating is patterned into discontinuous segments before release.