Positive o-quinone diazide photoresist containing base copolymer
utilizing monomer having anhydride function and further monomer that
increases etch resistance
    12.
    发明授权
    Positive o-quinone diazide photoresist containing base copolymer utilizing monomer having anhydride function and further monomer that increases etch resistance 失效
    含邻苯醌二叠氮化物光致抗蚀剂含有具有酸酐官能团的单体的基础共聚物和增加耐蚀性的其它单体

    公开(公告)号:US5360693A

    公开(公告)日:1994-11-01

    申请号:US59518

    申请日:1993-05-10

    CPC classification number: G03F7/0233 G03F7/0758

    Abstract: An aqueous-alkaline developable photoresist suitable for a lithography in deep ultraviolet light and having a structural resolution in the sub-.mu.m range. The photoresist contains a developable base polymer that comprises anhydride functions that act as solubility-mediating groups and also contains a photo-active component. In addition to being constructed of monomers carrying anhydride groups, the base polymer can be constructed of further monomers that produce designationally defined properties in the photoresist, for example, exhibit resistance to plasma etching processes. The photoresist of the present invention is therefore very versatile.

    Abstract translation: 一种含水碱性可显影光致抗蚀剂,适用于深紫外光下的平版印刷,其结构分辨率在多个范围之内。 光致抗蚀剂包含可显影的基础聚合物,其包含作为溶解介导基团并且还含有光活性组分的酸酐官能团。 除了由负载酸酐基团的单体构成之外,基础聚合物可以由在光致抗蚀剂中产生指定性质的其它单体构成,例如显示出对等离子体蚀刻工艺的抗性。 因此,本发明的光刻胶是非常通用的。

    Photostructuring method
    13.
    发明授权
    Photostructuring method 失效
    光结构方法

    公开(公告)号:US5234794A

    公开(公告)日:1993-08-10

    申请号:US847881

    申请日:1992-03-10

    CPC classification number: G03F7/405 G03F7/40

    Abstract: A simple method for diminishing the trench width in a photoresist structure to below the resolution limit is provided. A photoresist structure is produced and treated with an agent then contains a bulging constituent that reacts with functional groups of the photoresist structure. The bulging constituent causes a volume increase of the photoresist structure. The extent of the volume increase of the photoresist structures is controllable by varying various parameters.

    Abstract translation: 提供了一种用于将光致抗蚀剂结构中的沟槽宽度减小到分辨率极限以下的简单方法。 制备光致抗蚀剂结构并用试剂处理,然后含有与光致抗蚀剂结构的官能团反应的凸起成分。 凸起成分导致光致抗蚀剂结构的体积增加。 通过改变各种参数可以控制光致抗蚀剂结构体积增加的程度。

    NOR and NAND memory arrangement of resistive memory elements
    16.
    发明授权
    NOR and NAND memory arrangement of resistive memory elements 有权
    NOR和NAND存储器布置的电阻存储器元件

    公开(公告)号:US07746683B2

    公开(公告)日:2010-06-29

    申请号:US11737236

    申请日:2007-04-19

    Abstract: A memory arrangement includes: a first line for applying a reference voltage, a second line for applying an operating voltage, and a plurality of resistive memory elements, each element includes a resistive memory cell and a MOS memory cell selection transistor. A NOR memory arrangement is configured with each memory element including the resistive memory cell and selection transistor connected in series with the transistor connected to the first line, and the memory cell connected to the second line. A NAND memory arrangement is configured with a series of resistive memory elements forming a chain with each memory element including the resistive memory cell and selection transistor connected in parallel. The chain is connected to the first line disposed on a side of the memory cells facing the selection transistors and the second line disposed on a side of the memory cells which is remote from the selection transistors.

    Abstract translation: 存储器装置包括:用于施加参考电压的第一线,用于施加工作电压的第二线和多个电阻性存储器元件,每个元件包括电阻存储器单元和MOS存储单元选择晶体管。 NOR存储器配置配置有每个存储器元件,其包括与连接到第一线路的晶体管串联连接的电阻存储器单元和选择晶体管,以及连接到第二线路的存储器单元。 NAND存储器配置配置有一系列形成链的电阻存储元件,每个存储元件包括并联连接的电阻存储单元和选择晶体管。 链条连接到布置在面向选择晶体管的存储单元的一侧上的第一行,而第二行设置在远离选择晶体管的存储单元的一侧。

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