公开(公告)号：US20110132773A1

公开(公告)日：2011-06-09

申请号：US12452673

申请日：2008-07-03

申请人： Dirk Liemersdorf ,  Richard Fix ,  Oliver Wolst ,  Alexander Martin ,  Martin Le-Huu

发明人： Dirk Liemersdorf ,  Richard Fix ,  Oliver Wolst ,  Alexander Martin ,  Martin Le-Huu

IPC分类号： G01N27/414 ,  H01L29/772

CPC分类号： G01N27/4148

摘要： An apparatus for detecting at least one substance present in a fluid flow includes at least one field effect transistor which acts as a measuring sensor, and at least one field effect transistor which acts as a reference element, the field effect transistors each having at least one source electrode, one drain electrode, and one gate electrode. The gate electrode of the field effect transistor which acts as the measuring sensor is sensitive to the at least one substance to be detected, and the gate electrode of the field effect transistor which acts as the reference element is essentially insensitive to the at least one substance to be detected. The source electrode of one of the field effect transistors and the drain electrode of the other of the field effect transistors are connected to one another and to a signal line. A method for detecting at least one substance present in a fluid flow by using the apparatus is also described, a potential of 0 volt being applied to the signal line and the current flowing on the signal line being measured.

摘要翻译： 用于检测存在于流体流中的至少一种物质的装置包括至少一个用作测量传感器的场效应晶体管和至少一个作为参考元件的场效应晶体管，每个场效应晶体管具有至少一个 源电极，一个漏电极和一个栅电极。 用作测量传感器的场效应晶体管的栅电极对待检测的至少一种物质敏感，作为参考元件的场效应晶体管的栅电极对至少一种物质基本上不敏感 被检测。 场效应晶体管中的一个的源电极和另一个场效应晶体管的漏电极彼此连接并连接到信号线。 还描述了通过使用该装置来检测存在于流体流中的至少一种物质的方法，将对信号线施加0伏的电位，并测量在信号线上流动的电流。

公开(公告)号：US08418527B2

公开(公告)日：2013-04-16

申请号：US12733141

申请日：2008-07-30

申请人： Richard Fix ,  Markus Widenmeyer ,  Alexander Martin ,  Dieter Elbe

发明人： Richard Fix ,  Markus Widenmeyer ,  Alexander Martin ,  Dieter Elbe

IPC分类号： G01N7/12 ,  G01N27/414

CPC分类号： G01N27/4141 ,  G01N33/0013 ,  G01N33/0037 ,  G01N33/0054 ,  Y02A50/245 ,  Y02A50/246

摘要： A gas sensor for determining gas components in gas mixtures, e.g., for exhaust gases of internal combustion engines, includes a housing and a sensor element configured as a field effect transistor which has source, drain, and gate electrodes applied on a semiconductor substrate. A porous, catalytically active material is provided inside the housing of the gas sensor.

摘要翻译： 用于确定例如用于内燃机排气的气体混合物中的气体成分的气体传感器包括壳体和配置成施加在半导体衬底上的源极，漏极和栅电极的场效应晶体管的传感器元件。 在气体传感器的壳体内部提供多孔催化活性材料。

公开(公告)号：US08242599B2

公开(公告)日：2012-08-14

申请号：US12448295

申请日：2008-01-09

申请人： Richard Fix ,  Oliver Wolst ,  Alexander Martin

发明人： Richard Fix ,  Oliver Wolst ,  Alexander Martin

IPC分类号： H01L23/532

CPC分类号： H01L23/4827 ,  G01N27/414 ,  H01L2924/0002 ,  H01L2924/3011 ,  H01L2924/00

摘要： An electronic component is described that includes a metallic layer on a substrate that is made of a semiconductor material and a diffusion barrier layer that is made of a material that has a small diffusion coefficient for the metal of the metallic layer which is formed between the metallic layer and the substrate.

摘要翻译： 描述了一种电子部件，其包括由半导体材料制成的基板上的金属层和由金属层的金属的扩散系数小的材料制成的扩散阻挡层，金属层形成在金属 层和基底。

公开(公告)号：US08237204B2

公开(公告)日：2012-08-07

申请号：US12619304

申请日：2009-11-16

申请人： Richard Fix ,  Oliver Wolst ,  Stefan Henneck ,  Alexander Martin ,  Martin Le-Huu

发明人： Richard Fix ,  Oliver Wolst ,  Stefan Henneck ,  Alexander Martin ,  Martin Le-Huu

IPC分类号： G01N27/403

CPC分类号： G01N27/414 ,  H01L23/291 ,  H01L23/296 ,  H01L29/78 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01L2924/12044 ,  H01L2924/3011 ,  H01L2924/00

摘要： The present invention relates to a method for passivating a semiconductor component having at least one chemosensitive electrode that is blinded by the application of a glass layer. The present invention also relates to a device for detecting at least one substance included in a fluid stream, including at least one semiconductor component acting as a measuring sensor as well as at least one semiconductor component acting as a reference element, the semiconductor components each having a chemosensitive electrode, and the chemosensitive electrode of the semiconductor component acting as the reference element being passivated. For the passivation, a glass layer may be applied at least to the chemosensitive electrode of the semiconductor component acting as reference element.

摘要翻译： 本发明涉及一种钝化半导体元件的方法，所述半导体元件具有通过施加玻璃层而被遮蔽的至少一个化学敏感电极。 本发明还涉及用于检测包括在流体流中的至少一种物质的装置，包括至少一个用作测量传感器的半导体部件以及用作参考元件的至少一个半导体部件，所述半导体部件各自具有 化学敏感电极和用作参考元件的半导体组件的化学敏感电极被钝化。 对于钝化，玻璃层可以至少施加到用作参考元件的半导体组件的化学敏感电极上。

公开(公告)号：US20100193375A1

公开(公告)日：2010-08-05

申请号：US12600555

申请日：2008-05-16

申请人： Dirk Liemersdorf ,  Richard Fix

发明人： Dirk Liemersdorf ,  Richard Fix

IPC分类号： G01N27/26

CPC分类号： G01N27/4141

摘要： In a method for operating a semiconductor gas sensor, the gas sensor including at least one gas-sensitive electrode, the method may provide for impression of a voltage sequence on the gas-sensitive electrode. The operation may take place in a measuring cycle which is subdivided into at least one initialization phase and at least one subsequent measuring phase, a first voltage sequence being impressed on the gas-sensitive electrode during the initialization phase, a second voltage sequence being impressed on the gas-sensitive electrode during the measuring phase, and the first voltage sequence differing from the second voltage sequence. A semiconductor gas sensor may be provided for implementing the method according to the invention, and a method may relate to the use of such a sensor.

摘要翻译： 在一种用于操作半导体气体传感器的方法中，气体传感器包括至少一个气敏电极，该方法可以提供气敏电极上的电压序列的印象。 操作可以在测量周期中进行，该测量周期被细分为至少一个初始化阶段和至少一个后续测量阶段，在初始化阶段期间将第一电压序列施加在气敏电极上，施加第二电压序列 所述气敏电极在所述测量阶段期间，所述第一电压序列与所述第二电压序列不同。 可以提供半导体气体传感器来实现根据本发明的方法，并且一种方法可以涉及这种传感器的使用。

公开(公告)号：US20100072621A1

公开(公告)日：2010-03-25

申请号：US12448295

申请日：2008-01-09

申请人： Richard Fix ,  Oliver Wolst ,  Alexander Martin

发明人： Richard Fix ,  Oliver Wolst ,  Alexander Martin

IPC分类号： H01L23/532

CPC分类号： H01L23/4827 ,  G01N27/414 ,  H01L2924/0002 ,  H01L2924/3011 ,  H01L2924/00

摘要： An electronic component has a metallic layer on a substrate made of a semiconductor material, a diffusion barrier layer that is made of a material that has a small diffusion coefficient for the metal of the metallic layer being formed between the metallic layer and the substrate.

摘要翻译： 电子部件在由半导体材料构成的基板上具有金属层，扩散阻挡层由在金属层和基板之间形成的金属层的金属的扩散系数小的材料构成。

公开(公告)号：US09080967B2

公开(公告)日：2015-07-14

申请号：US12931496

申请日：2011-02-01

申请人： Richard Fix ,  Markus Widenmeyer

发明人： Richard Fix ,  Markus Widenmeyer

IPC分类号： G01N27/414

CPC分类号： G01N27/414

摘要： A chemically sensitive field effect transistor includes a substrate, a conductor track structure situated on the substrate, and a functional layer which is contacted via the conductor track structure. To be able to form a thin, oxidation-stable and temperature-stable conductor track structure, the conductor track structure is made of a metal mixture which includes platinum and one or more metals selected from the group made up of rhodium, iridium, ruthenium, palladium, osmium, gold, scandium, yttrium, lanthanum, the lanthanides, titanium, zirconium, hafnium, niobium, tantalum, chromium, tungsten, rhenium, iron, cobalt, nickel, copper, boron, aluminum, gallium, indium, silicon, and germanium.

摘要翻译： 化学敏感的场效应晶体管包括衬底，位于衬底上的导体轨道结构以及经由导体轨迹结构接触的功能层。 为了能够形成薄的，氧化稳定和温度稳定的导体轨道结构，导体轨道结构由金属混合物制成，其包括铂和一种或多种金属，其选自铑，铱，钌， 钯，锇，金，钪，钇，镧，镧系元素，钛，锆，铪，铌，钽，铬，钨，铼，铁，钴，镍，铜，硼，铝，镓，铟，硅和 锗。

公开(公告)号：US20130045541A1

公开(公告)日：2013-02-21

申请号：US13576438

申请日：2010-12-20

申请人： Richard Fix ,  Petra Neff

发明人： Richard Fix ,  Petra Neff

IPC分类号： G01N21/75

CPC分类号： G01N21/3504 ,  G01N33/0013 ,  G01N2201/0612 ,  G01N2201/062

摘要： A gas sensor and method for ascertaining the concentration of one or more gas species, in the exhaust gas of an internal combustion engine. The gas sensor includes a measuring cell having a gas inlet, a gas outlet, a catalysis area, and an analysis area. The sensor also includes a catalytic converter for catalyzing a reaction of a first gas species to form a second gas species in the catalysis area, and a gas analyzer for spectroscopically measuring the concentration of the second gas species in the analysis area. Through the catalytic converter, a first gas species may be converted into a second gas species whose absorption and/or scattering wavelength(s) are within the emission wavelength range of semiconductor radiation sources, so that the gas analyzer may have a semiconductor radiation source.

摘要翻译： 一种用于确定内燃机的废气中的一种或多种气体种类的浓度的气体传感器和方法。 气体传感器包括具有气体入口，气体出口，催化区域和分析区域的测量池。 传感器还包括用于催化第一气体物质在催化区域中形成第二气体物质的反应的催化转化器，以及用于光谱测量分析区域中第二气体物质浓度的气体分析器。 通过催化转化器，第一气体物质可以被转换为其吸收和/或散射波长在半导体辐射源的发射波长范围内的第二气体物质，使得气体分析器可以具有半导体辐射源。

公开(公告)号：US20100133591A1

公开(公告)日：2010-06-03

申请号：US12619304

申请日：2009-11-16

申请人： Richard Fix ,  Oliver Wolst ,  Stefan Henneck ,  Alexander Martin ,  Martin Le-Huu

发明人： Richard Fix ,  Oliver Wolst ,  Stefan Henneck ,  Alexander Martin ,  Martin Le-Huu

IPC分类号： H01L29/66 ,  H01L21/3205 ,  H01L29/861

CPC分类号： G01N27/414 ,  H01L23/291 ,  H01L23/296 ,  H01L29/78 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01L2924/12044 ,  H01L2924/3011 ,  H01L2924/00

摘要： The present invention relates to a method for passivating a semiconductor component having at least one chemosensitive electrode that is blinded by the application of a glass layer. The present invention also relates to a device for detecting at least one substance included in a fluid stream, including at least one semiconductor component acting as a measuring sensor as well as at least one semiconductor component acting as a reference element, the semiconductor components each having a chemosensitive electrode, and the chemosensitive electrode of the semiconductor component acting as the reference element being passivated. For the passivation, a glass layer may be applied at least to the chemosensitive electrode of the semiconductor component acting as reference element.

摘要翻译： 本发明涉及一种钝化半导体元件的方法，所述半导体元件具有通过施加玻璃层而被遮蔽的至少一个化学敏感电极。 本发明还涉及用于检测包括在流体流中的至少一种物质的装置，包括至少一个用作测量传感器的半导体部件以及用作参考元件的至少一个半导体部件，所述半导体部件各自具有 化学敏感电极和用作参考元件的半导体组件的化学敏感电极被钝化。 对于钝化，玻璃层可以至少施加到用作参考元件的半导体组件的化学敏感电极上。