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公开(公告)号：US20210219058A1
公开(公告)日：2021-07-15
申请号：US17147310
申请日：2021-01-12
Applicant: Robert Bosch GmbH
Inventor： Heribert Weber , Andreas Scheurle , Christoph Hermes , Peter Schmollngruber , Thomas Friedrich
Abstract: A micromechanical component for a sensor device or microphone device. The component includes a diaphragm support structure with a diaphragm, a cavity formed in the diaphragm support structure and adjoined by a diaphragm inner side, and a separating trench structured through the surface of the diaphragm support structure and extends to the cavity and completely frames the diaphragm, and that is sealed off media-tight and/or air-tight using at least one separating trench closure material. An etching channel is formed in the diaphragm support structure, separately from the separating trench, and extends from its first etching channel end section to its second etching channel end section. The first etching channel end section opens into the cavity, and the second etching channel end section is sealed off media-tight and/or air-tight using at least one etching channel closure structure formed on an outer partial surface of the surface of the diaphragm support structure.
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公开(公告)号：US10018650B2
公开(公告)日：2018-07-10
申请号：US14614120
申请日：2015-02-04
Applicant: Robert Bosch GmbH
Inventor： Andreas Scheurle , Guenther-Nino-Carlo Ullrich , Markus Heitz , Andrea Orto
IPC: G01P15/125 , G01P15/08
CPC classification number: G01P15/125 , G01P2015/0831
Abstract: A rocker device for a micromechanical Z sensor includes: two trough-shaped rocker arms mountable around a torsion pivot, the rocker device being configured asymmetrically with respect to the torsion pivot; and for each rocker arm, a strike region having at least one first strike element is provided, the strike region on each rocker arm being configured in definedly elevated fashion relative to a sensing region of the rocker device.
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公开(公告)号：US11905166B2
公开(公告)日：2024-02-20
申请号：US17446898
申请日：2021-09-03
Applicant: Robert Bosch GmbH
Inventor： Heribert Weber , Peter Schmollngruber , Thomas Friedrich , Andreas Scheurle , Joachim Fritz , Sophielouise Mach
CPC classification number: B81C1/00158 , B81B3/0021 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81B2203/0315 , B81C2201/016 , B81C2201/0132 , H04R3/00
Abstract: A production method for a micromechanical component for a sensor or microphone device. The method includes: patterning a plurality of first trenches through a substrate surface of a monocrystalline substrate made of at least one semiconductor material using anisotropic etching, covering the lateral walls of the plurality of first trenches with a passivation layer, while bottom areas of the plurality of first trenches are kept free or are freed of the passivation layer, etching at least one first cavity, into which the plurality of first trenches opens, into the monocrystalline substrate using an isotropic etching method, in which an etching medium of the isotropic etching method is conducted through the plurality of first trenches, and by covering the plurality of first trenches by epitaxially growing a monocrystalline sealing layer on the substrate surface of the monocrystalline substrate made of the at least one identical semiconductor material as the monocrystalline substrate.
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公开(公告)号：US20230375424A1
公开(公告)日：2023-11-23
申请号：US18247926
申请日：2021-11-15
Applicant: Robert Bosch GmbH
Inventor： Heribert Weber , Andreas Scheurle , Peter Schmollngruber , Thomas Friedrich
CPC classification number: G01L9/0072 , G01L19/14
Abstract: A sensor device. The sensor device includes a housing component with a gas-tight internal volume, at least one electrode structure arranged in the internal volume in an adjustable and/or bendable manner, at least one counter electrode fixedly disposed on and/or in the housing component, and an electronic device configured to apply an electrical excitation voltage signal between the electrode structure and the counter electrode such that the at least one electrode structure is set in an oscillating motion relative to the housing component. The electronic device is configured to detect and/or determine the internal pressure in the internal volume and/or a change in the internal pressure while taking into consideration at least one sensor signal, which is dependent on an electric voltage or capacitance between the electrode structure and the counter electrode.
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Patent Agency Ranking
15.发明公开公开(公告)号：US20230242393A1
公开(公告)日：2023-08-03
申请号：US18043374
申请日：2021-08-18
Applicant: Robert Bosch GmbH
Inventor： Heribert Weber , Andreas Scheurle , Peter Schmollngruber , Thomas Friedrich
CPC classification number: B81B3/0086 , B81B3/001 , B81C1/00968 , B81C1/00698 , B81B2201/0228 , B81B2201/0257 , B81B2201/0264 , B81B2203/04 , B81C2201/0105 , B81B2201/0221
Abstract: A micromechanical component for a sensor or microphone device. An electrode surface of a first electrode structure is aligned with a second electrode structure. A substructure of the first electrode structure is entirely made of at least one electrically conductive material. The electrode surface and an opposite surface of the first electrode structure are outer surfaces of the substructure. A stop structure protruding from the electrode surface towards the second electrode structure is formed on the first electrode structure. The first electrode structure includes an insulating region which extends from the electrode surface to the opposite surface of the first electrode structure. The stop structure is formed either as a projection of the at least one insulating region protruding from the electrode surface towards the second electrode structure or is bordered by the at least one insulating region.
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公开(公告)号：US20210354978A1
公开(公告)日：2021-11-18
申请号：US17315975
申请日：2021-05-10
Applicant: Robert Bosch GmbH
Inventor： Heribert Weber , Andreas Scheurle , Joachim Fritz , Peter Schmollngruber , Sophielouise Mach , Thomas Friedrich
IPC: B81B3/00
Abstract: A micromechanical component for a sensor or microphone device, including a substrate, a frame structure, which is situated on the substrate surface and/or at least one intermediate layer, and a diaphragm, which spans an inner volume, which is at least partially framed by the frame structure. The micromechanical component includes a bending beam structure, which is situated in the inner volume and includes at least one anchoring area, which is attached to the frame structure, to the substrate surface and/or to the at least one intermediate layer, and at least one self-supporting area, which is connected via at least one coupling structure to the diaphragm inner side of the diaphragm in such a way that the at least one self-supporting area is bendable by way of a warping of the diaphragm.
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公开(公告)号：US10336610B2
公开(公告)日：2019-07-02
申请号：US15791007
申请日：2017-10-23
Applicant: Robert Bosch GmbH
Inventor： Heiko Stahl , Andreas Scheurle , Hendrik Specht , Marlene Winker , Ralf Hausner , Volker Schmitz
Abstract: A method for producing a micromechanical component is provided, In a preparatory step, a substrate device of the micromechanical component and/or a cap device of the micromechanical component is patterned. In a first sub-step, a first pressure and/or a first chemical composition being adjusted, and the substrate device and the cap device being connected to each other so that a first cavern is formed, sealed from an environment of the micromechanical component, the first pressure prevailing in the first cavity and/or the first chemical composition being enclosed. In a second sub-step, a second pressure and/or a second chemical composition being adjusted, and the substrate device and the cap device being connected to each other so that a second cavity is formed, sealed from the environment of the micromechanical component and from the first cavity, the second pressure prevailing in the second cavity and/or the second chemical composition being enclosed.
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公开(公告)号：US20180111828A1
公开(公告)日：2018-04-26
申请号：US15791007
申请日：2017-10-23
Applicant: Robert Bosch GmbH
Inventor： Heiko Stahl , Andreas Scheurle , Hendrik Specht , Marlene Winker , Ralf Hausner , Volker Schmitz
CPC classification number: B81C3/001 , B81B7/02 , B81C1/00269 , B81C99/0035
Abstract: A method for producing a micromechanical component is provided, In a preparatory step, a substrate device of the micromechanical component and/or a cap device of the micromechanical component is patterned. In a first sub-step, a first pressure and/or a first chemical composition being adjusted, and the substrate device and the cap device being connected to each other so that a first cavern is formed, sealed from an environment of the micromechanical component, the first pressure prevailing in the first cavity and/or the first chemical composition being enclosed. In a second sub-step, a second pressure and/or a second chemical composition being adjusted, and the substrate device and the cap device being connected to each other so that a second cavity is formed, sealed from the environment of the micromechanical component and from the first cavity, the second pressure prevailing in the second cavity and/or the second chemical composition being enclosed.
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公开(公告)号：US20150233966A1
公开(公告)日：2015-08-20
申请号：US14614120
申请日：2015-02-04
Applicant: Robert Bosch GmbH
Inventor： Andreas Scheurle , Guenther-Nino-Carlo Ullrich , Markus Heitz , Andrea ORTO
IPC: G01P15/125
CPC classification number: G01P15/125 , G01P2015/0831
Abstract: A rocker device for a micromechanical Z sensor includes: two trough-shaped rocker arms mountable around a torsion pivot, the rocker device being configured asymmetrically with respect to the torsion pivot; and for each rocker arm, a strike region having at least one first strike element is provided, the strike region on each rocker arm being configured in definedly elevated fashion relative to a sensing region of the rocker device.
Abstract translation: 用于微机械Z传感器的摇杆装置包括：可绕扭转枢轴安装的两个槽形摇臂，所述摇臂装置相对于所述扭转枢轴不对称地构造; 并且对于每个摇臂，提供具有至少一个第一撞击元件的撞击区域，每个摇臂上的撞击区域相对于摇臂装置的感测区域以相对于高度的方式构造。
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