POWER SEMICONDUCTOR DEVICE
    12.
    发明申请
    POWER SEMICONDUCTOR DEVICE 有权
    功率半导体器件

    公开(公告)号:US20140145291A1

    公开(公告)日:2014-05-29

    申请号:US13795858

    申请日:2013-03-12

    Abstract: Disclosed herein is a power semiconductor device. The power semiconductor device includes a second conductive type first junction termination extension (JTE) layer that is formed so as to be in contact with one side of the second conductive type well layer, a second conductive type second JTE layer that is formed on the same line as the second conductive type first JTE layer, and is formed so as to be spaced apart from the second conductive type first JTE layer in a length direction of the substrate, and a poly silicon layer that is formed so as to be in contact with the second conductive type well layer and an upper portion of the second conductive type first JTE layer.

    Abstract translation: 这里公开了功率半导体器件。 功率半导体器件包括形成为与第二导电类型阱层的一侧接触的第二导电型第一结端接延伸(JTE)层,形成在其上的第二导电型第二JTE层 线作为第二导电型第一JTE层,并且形成为在基板的长度方向上与第二导电型第一JTE层间隔开,并且形成为与第二导电型第一JTE层接触的多晶硅层 第二导电类型阱层和第二导电型第一JTE层的上部。

    POWER SEMICONDUCTOR DEVICE
    17.
    发明申请
    POWER SEMICONDUCTOR DEVICE 审中-公开
    功率半导体器件

    公开(公告)号:US20150187869A1

    公开(公告)日:2015-07-02

    申请号:US14272009

    申请日:2014-05-07

    Abstract: A power semiconductor device may include: a first conductivity-type first semiconductor region; a resurf region disposed in the first semiconductor region and including first conductivity-type second semiconductor regions and second conductivity-type third semiconductor regions alternately disposed in a width direction; a first conductivity-type first cover region disposed in the first semiconductor region, disposed to be contiguous with an upper surface of the resurf region, and having an impurity concentration higher than that of the first semiconductor region; a second conductivity-type fourth semiconductor region disposed above the first semiconductor region; a first conductivity-type fifth semiconductor region disposed on an inner side of an upper portion of the fourth semiconductor region; and a trench gate disposed to penetrate from the fifth semiconductor region to a portion of an upper portion of the first semiconductor region and including a gate insulating layer and a conductive material.

    Abstract translation: 功率半导体器件可以包括:第一导电类型的第一半导体区域; 设置在所述第一半导体区域中并且包括在宽度方向上交替布置的第一导电类型的第二半导体区域和第二导电类型的第三半导体区域的再生区域; 设置在所述第一半导体区域中的第一导电类型的第一覆盖区域,被设置为与所述复原区域的上表面邻接,并且具有高于所述第一半导体区域的杂质浓度的杂质浓度; 设置在所述第一半导体区域上方的第二导电型第四半导体区域; 设置在第四半导体区域的上部的内侧的第一导电型第五半导体区域; 以及沟槽栅极,设置成从第五半导体区域穿透到第一半导体区域的上部的一部分,并且包括栅极绝缘层和导电材料。

    Power semiconductor device and method of fabricating the same
    18.
    发明授权
    Power semiconductor device and method of fabricating the same 有权
    功率半导体器件及其制造方法

    公开(公告)号:US08981423B2

    公开(公告)日:2015-03-17

    申请号:US13937589

    申请日:2013-07-09

    Abstract: There is provided a power semiconductor device, including a plurality of trench gates formed to be spaced apart from each other by a predetermined distance, a current increasing part formed between the trench gates and including a first conductivity-type emitter layer and a gate oxide formed on a surface of the trench gate, and an immunity improving part formed between the trench gates and including a second conductivity-type body layer, a preventing film formed on the surface of the trench gate, and a gate oxide having a thickness less than that the gate oxide of the current increasing part.

    Abstract translation: 提供了一种功率半导体器件,包括形成为彼此间隔开预定距离的多个沟槽栅极,形成在沟槽栅极之间并包括第一导电型发射极层和形成的栅极氧化物的电流增加部分 在所述沟槽栅极的表面上形成的抗扰度改善部以及形成在所述沟槽栅极之间并且包括第二导电型体层的抗扰度改善部,以及形成在所述沟槽栅极的表面上的防止膜和厚度小于所述沟槽栅极的厚度的栅极氧化物。 电流增加部分的栅极氧化物。

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