中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

47 records (took 0.033 seconds)

    Frequency modulation MEMS triaxial gyroscope
    13.
    发明授权
    Frequency modulation MEMS triaxial gyroscope 有权

    公开(公告)号：US12038283B2

    公开(公告)日：2024-07-16

    申请号：US17821724

    申请日：2022-08-23

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Alessandro Tocchio ,  Luca Giuseppe Falorni ,  Claudia Comi ,  Valentina Zega

    IPC: G01C19/574 ,  G01C19/5747 ,  G01C19/5769

    CPC classification number: G01C19/5747 ,  G01C19/574 ,  G01C19/5769

    Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.

    MEMS tri-axial accelerometer with one or more decoupling elements
    14.
    发明授权
    MEMS tri-axial accelerometer with one or more decoupling elements 有权

    公开(公告)号：US11650221B2

    公开(公告)日：2023-05-16

    申请号：US16986056

    申请日：2020-08-05

    Applicant: STMICROELECTRONICS S.r.l.

    Inventor： Alessandro Tocchio ,  Francesco Rizzini

    IPC: G01P15/18 ,  G01P15/097 ,  G01P15/125 ,  G01P15/08

    CPC classification number: G01P15/18 ,  G01P15/097 ,  G01P15/125 ,  G01P2015/0845 ,  G01P2015/0848

    Abstract: A MEMS tri-axial accelerometer is provided with a sensing structure having: a single inertial mass, with a main extension in a horizontal plane defined by a first horizontal axis and a second horizontal axis and internally defining a first window that traverses it throughout a thickness thereof along a vertical axis orthogonal to the horizontal plane; and a suspension structure, arranged within the window for elastically coupling the inertial mass to a single anchorage element, which is fixed with respect to a substrate and arranged within the window, so that the inertial mass is suspended above the substrate and is able to carry out, by the inertial effect, a first sensing movement, a second sensing movement, and a third sensing movement in respective sensing directions parallel to the first, second, and third horizontal axes following upon detection of a respective acceleration component. In particular, the suspension structure has at least one first decoupling element for decoupling at least one of the first, second, and third sensing movements from the remaining sensing movements.

    Frequency modulation MEMS triaxial gyroscope
    15.
    发明授权
    Frequency modulation MEMS triaxial gyroscope 有权

    公开(公告)号：US11448507B2

    公开(公告)日：2022-09-20

    申请号：US16697092

    申请日：2019-11-26

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Alessandro Tocchio ,  Luca Giuseppe Falorni ,  Claudia Comi ,  Valentina Zega

    IPC: G01C19/574 ,  G01C19/5747 ,  G01C19/5769

    Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.

    FM inertial sensor and method for operating the FM inertial sensor
    16.
    发明授权
    FM inertial sensor and method for operating the FM inertial sensor 有权

    公开(公告)号：US10809280B2

    公开(公告)日：2020-10-20

    申请号：US16116467

    申请日：2018-08-29

    Applicant: STMicroelectronics S.r.l.

    Inventor： Alessandro Tocchio ,  Francesco Rizzini ,  Carlo Valzasina ,  Giacomo Langfelder ,  Cristiano Rocco Marra

    IPC: G01P15/125 ,  G01C19/5719 ,  G01P15/08 ,  G01P15/18 ,  G01P15/097

    Abstract: An inertial sensor for sensing an external acceleration includes: a first and a second proof mass; a first and a second capacitor formed between first and second fixed electrodes and the first proof mass; a third and a fourth capacitor formed between third and fourth fixed electrodes and the second proof mass; a driving assembly configured to cause an antiphase oscillation of the first and second proof masses; a biasing circuit configured to bias the first and third capacitors, thus generating first variation of the oscillation frequency in a first time interval, and to bias the second and fourth capacitors, thus generating first variation of the oscillation frequency in a second time interval; a sensing assembly, configured to generate an differential output signal which is a function of a difference between a value of the oscillating frequency during the first time interval and a value of the oscillating frequency during the second time interval. Such differential output signal can be correlated to the value and direction of the external acceleration.

    MICROELECTROMECHANICAL RESONATOR SYSTEM WITH IMPROVED STABILITY WITH RESPECT TO TEMPERATURE VARIATIONS
    17.
    发明申请
    MICROELECTROMECHANICAL RESONATOR SYSTEM WITH IMPROVED STABILITY WITH RESPECT TO TEMPERATURE VARIATIONS 审中-公开

    公开(公告)号：US20190131952A1

    公开(公告)日：2019-05-02

    申请号：US16171885

    申请日：2018-10-26

    Applicant: STMicroelectronics S.r.l.

    Inventor： Carlo Valzasina ,  Gabriele Gattere ,  Alessandro Tocchio ,  Giacomo Langfelder

    IPC: H03H9/02 ,  H03B5/30

    Abstract: A MEMS resonator system has a micromechanical resonant structure and an electronic processing circuit including a first resonant loop that excites a first vibrational mode of the structure and generates a first signal at a first resonance frequency. A compensation module compensates, as a function of a measurement of temperature variation, a first variation of the first resonance frequency caused by the temperature variation to generate a clock signal at a desired frequency that is stable relative to temperature. The electronic processing circuit further includes a second resonant loop, which excites a second vibrational mode of the structure and generates a second signal at a second resonance frequency. A temperature-sensing module receives the first and second signals and generates the measurement of temperature variation as a function of the first variation of the first resonance frequency and a second variation of the second resonance frequency caused by the temperature variation.

    MICROELECTROMECHANICAL RESONATOR WITH IMPROVED ELECTRICAL FEATURES
    19.
    发明申请
    MICROELECTROMECHANICAL RESONATOR WITH IMPROVED ELECTRICAL FEATURES 审中-公开

    公开(公告)号：US20180339898A1

    公开(公告)日：2018-11-29

    申请号：US15978958

    申请日：2018-05-14

    Applicant: STMicroelectronics S.r.l.

    Inventor： Gabriele Gattere ,  Alessandro Tocchio ,  Carlo Valzasina

    IPC: B81B3/00 ,  B81B7/00 ,  H03H9/02

    Abstract: A MEMS resonator is equipped with a substrate, a moving structure suspended above the substrate in a horizontal plane formed by first and second axes, having first and second arms, parallel to one another and extending along the second axis, coupled at their respective ends by first and second transverse joining elements, forming an internal window. A first electrode structure is positioned outside the window and capacitively coupled to the moving structure. A second electrode structure is positioned inside the window. One of the first and second electrode structures causes an oscillatory movement of the flexing arms in opposite directions along the first horizontal axis at a resonance frequency, and the other electrode structure has a function of detecting the oscillation. A suspension structure has a suspension arm in the window. An attachment arrangement is coupled to the suspension element centrally in the window, near the second electrode structure.

Patent Agency Ranking