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    MICROELECTROMECHANICAL RESONATOR SYSTEM WITH IMPROVED STABILITY WITH RESPECT TO TEMPERATURE VARIATIONS
    11.
    发明申请
    MICROELECTROMECHANICAL RESONATOR SYSTEM WITH IMPROVED STABILITY WITH RESPECT TO TEMPERATURE VARIATIONS 审中-公开

    公开(公告)号：US20190131952A1

    公开(公告)日：2019-05-02

    申请号：US16171885

    申请日：2018-10-26

    Applicant: STMicroelectronics S.r.l.

    Inventor： Carlo Valzasina ,  Gabriele Gattere ,  Alessandro Tocchio ,  Giacomo Langfelder

    IPC: H03H9/02 ,  H03B5/30

    Abstract: A MEMS resonator system has a micromechanical resonant structure and an electronic processing circuit including a first resonant loop that excites a first vibrational mode of the structure and generates a first signal at a first resonance frequency. A compensation module compensates, as a function of a measurement of temperature variation, a first variation of the first resonance frequency caused by the temperature variation to generate a clock signal at a desired frequency that is stable relative to temperature. The electronic processing circuit further includes a second resonant loop, which excites a second vibrational mode of the structure and generates a second signal at a second resonance frequency. A temperature-sensing module receives the first and second signals and generates the measurement of temperature variation as a function of the first variation of the first resonance frequency and a second variation of the second resonance frequency caused by the temperature variation.

    MICROELECTROMECHANICAL RESONATOR WITH IMPROVED ELECTRICAL FEATURES
    13.
    发明申请
    MICROELECTROMECHANICAL RESONATOR WITH IMPROVED ELECTRICAL FEATURES 审中-公开

    公开(公告)号：US20180339898A1

    公开(公告)日：2018-11-29

    申请号：US15978958

    申请日：2018-05-14

    Applicant: STMicroelectronics S.r.l.

    Inventor： Gabriele Gattere ,  Alessandro Tocchio ,  Carlo Valzasina

    IPC: B81B3/00 ,  B81B7/00 ,  H03H9/02

    Abstract: A MEMS resonator is equipped with a substrate, a moving structure suspended above the substrate in a horizontal plane formed by first and second axes, having first and second arms, parallel to one another and extending along the second axis, coupled at their respective ends by first and second transverse joining elements, forming an internal window. A first electrode structure is positioned outside the window and capacitively coupled to the moving structure. A second electrode structure is positioned inside the window. One of the first and second electrode structures causes an oscillatory movement of the flexing arms in opposite directions along the first horizontal axis at a resonance frequency, and the other electrode structure has a function of detecting the oscillation. A suspension structure has a suspension arm in the window. An attachment arrangement is coupled to the suspension element centrally in the window, near the second electrode structure.

    Micromechanical detection structure for a MEMS sensor device, in particular a MEMS gyroscope, with improved driving features
    15.
    发明授权
    Micromechanical detection structure for a MEMS sensor device, in particular a MEMS gyroscope, with improved driving features 有权

    公开(公告)号：US11015933B2

    公开(公告)日：2021-05-25

    申请号：US16664041

    申请日：2019-10-25

    Applicant: STMicroelectronics S.r.l.

    Inventor： Gabriele Gattere ,  Luca Giuseppe Falorni ,  Carlo Valzasina

    IPC: G01C19/5712

    Abstract: A micromechanical detection structure includes a substrate of semiconductor material and a driving-mass arrangement is coupled to a set of driving electrodes and driven in a driving movement following upon biasing of the set of driving electrodes. A first anchorage unit is coupled to the driving-mass arrangement for elastically coupling the driving-mass arrangement to the substrate at first anchorages. A driven-mass arrangement is elastically coupled to the driving-mass arrangement by a coupling unit and designed to be driven by the driving movement. A second anchorage unit is coupled to the driven-mass arrangement for elastically coupling the driven-mass arrangement to the substrate at second anchorages. Following upon the driving movement, the resultant of the forces and of the torques exerted on the substrate at the first and second anchorages is substantially zero.

    MEMS triaxial magnetic sensor with improved configuration
    16.
    发明授权
    MEMS triaxial magnetic sensor with improved configuration 有权

    公开(公告)号：US10705158B2

    公开(公告)日：2020-07-07

    申请号：US16290778

    申请日：2019-03-01

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Giacomo Laghi ,  Giacomo Langfelder ,  Gabriele Gattere ,  Alessandro Tocchio ,  Dario Paci

    IPC: G01R33/02 ,  G01R33/028 ,  G01R33/00 ,  G01R33/038

    Abstract: A MEMS triaxial magnetic sensor device includes a sensing structure having: a substrate; an outer frame, which internally defines a window and is elastically coupled to first anchorages fixed with respect to the substrate by first elastic elements; a mobile structure arranged in the window, suspended above the substrate, which is elastically coupled to the outer frame by second elastic elements and carries a conductive path for flow of an electric current; and an elastic arrangement operatively coupled to the mobile structure. The mobile structure performs, due to the first and second elastic elements and the arrangement of elastic elements, first, second, and third sensing movements in response to Lorentz forces from first, second, and third magnetic-field components, respectively. The first, second, and third sensing movements are distinct and decoupled from one another.

    MEMS accelerometric sensor having high accuracy and low sensitivity to temperature and aging
    17.
    发明授权
    MEMS accelerometric sensor having high accuracy and low sensitivity to temperature and aging 有权

    公开(公告)号：US10591507B2

    公开(公告)日：2020-03-17

    申请号：US15265111

    申请日：2016-09-14

    Applicant: STMicroelectronics S.R.L.

    Inventor： Alessandro Tocchio ,  Gabriele Gattere

    IPC: G01P15/125 ,  B81B3/00 ,  G01P15/08

    Abstract: A MEMS accelerometric sensor includes a bearing structure and a suspended region that is made of semiconductor material, mobile with respect to the bearing structure. At least one modulation electrode is fixed to the bearing structure and is biased with an electrical modulation signal including at least one periodic component having a first frequency. At least one variable capacitor is formed by the suspended region and by the modulation electrode in such a way that the suspended region is subjected to an electrostatic force that depends upon the electrical modulation signal. A sensing assembly generates, when the accelerometric sensor is subjected to an acceleration, an electrical sensing signal indicating the position of the suspended region with respect to the bearing structure and includes a frequency-modulated component that is a function of the acceleration and of the first frequency.

    MEMS TRIAXIAL MAGNETIC SENSOR WITH IMPROVED CONFIGURATION
    19.
    发明申请
    MEMS TRIAXIAL MAGNETIC SENSOR WITH IMPROVED CONFIGURATION 审中-公开

    公开(公告)号：US20180188336A1

    公开(公告)日：2018-07-05

    申请号：US15638204

    申请日：2017-06-29

    Applicant: STMICROELECTRONICS S.R.L. ,  Politecnico Di Milano

    Inventor： Giacomo Laghi ,  Giacomo Langfelder ,  Gabriele Gattere ,  Alessandro Tocchio ,  Dario Paci

    IPC: G01R33/02 ,  G01R33/038

    CPC classification number: G01R33/0206 ,  G01R33/0286 ,  G01R33/038

    Abstract: A MEMS triaxial magnetic sensor device includes a sensing structure having: a substrate; an outer frame, which internally defines a window and is elastically coupled to first anchorages fixed with respect to the substrate by first elastic elements; a mobile structure arranged in the window, suspended above the substrate, which is elastically coupled to the outer frame by second elastic elements and carries a conductive path for flow of an electric current; and an elastic arrangement operatively coupled to the mobile structure. The mobile structure performs, due to the first and second elastic elements and the arrangement of elastic elements, first, second, and third sensing movements in response to Lorentz forces from first, second, and third magnetic-field components, respectively. The first, second, and third sensing movements are distinct and decoupled from one another.

    MEMS GYROSCOPE HAVING A HIGH STABILITY WITH RESPECT TO TEMPERATURE AND HUMIDITY VARIATIONS
    20.
    发明申请
    MEMS GYROSCOPE HAVING A HIGH STABILITY WITH RESPECT TO TEMPERATURE AND HUMIDITY VARIATIONS 审中-公开

    公开(公告)号：US20180094929A1

    公开(公告)日：2018-04-05

    申请号：US15466722

    申请日：2017-03-22

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Gabriele Gattere ,  Alessandro Tocchio ,  Carlo Valzasina

    IPC: G01C19/574

    Abstract: A MEMS device including a main die that may be coupled to a secondary die, which forms a frame, and at least one first mobile mass elastically coupled to the frame, the main die forming: a driving stage that drives the first mobile mass so that it oscillates, parallel to a first direction, with frequency-modulated displacements; and a processing stage, which generates an output signal indicating an angular velocity of the MEMS device as a function of displacements parallel to a second direction that are made by the first mobile mass, when driven by the driving stage, on account of a Coriolis force.

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