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公开(公告)号：US20210190814A1
公开(公告)日：2021-06-24
申请号：US17122793
申请日：2020-12-15
Applicant: STMicroelectronics S.r.l.
Inventor： Jean Marie DARMANIN , Carlo VALZASINA , Alessandro TOCCHIO , Gabriele GATTERE
IPC: G01P15/125
Abstract: A micromechanical device includes a semiconductor body, a first mobile structure, an elastic assembly, coupled to the first mobile structure and to the semiconductor body and adapted to undergo deformation in a direction, and at least one abutment element. The elastic assembly is configured to enable an oscillation of the first mobile structure as a function of a force applied thereto. The first mobile structure, the abutment element and the elastic assembly are arranged with respect to one another in such a way that: when the force is lower than a force threshold, the elastic assembly operates with a first elastic constant; and when the force is greater than the threshold force, then the first mobile structure is in contact with the abutment element, and a deformation of the elastic assembly is generated, which operates with a second elastic constant different from the first elastic constant.
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12.发明申请公开(公告)号：US20210095949A1
公开(公告)日：2021-04-01
申请号：US17025977
申请日：2020-09-18
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Gabriele GATTERE , Carlo VALZASINA , Enri DUQI
Abstract: A button device includes a MEMS sensor having a MEMS strain detection structure and a deformable substrate configured to undergo deformation under the action of an external force. The MEMS strain detection structure includes a mobile element carried by the deformable substrate via at least a first and a second anchorage, the latter fixed with respect to the deformable substrate and configured to displace and generate a deformation force on the mobile element in the presence of the external force; and stator elements capacitively coupled to the mobile element. The deformation of the mobile element causes a capacitance variation between the mobile element and the stator elements. Furthermore, the MEMS sensor is configured to generate detection signals correlated to the capacitance variation.
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13.发明公开公开(公告)号：US20240154599A1
公开(公告)日：2024-05-09
申请号：US18505574
申请日：2023-11-09
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Federico VERCESI , Lorenzo CORSO , Giorgio ALLEGATO , Gabriele GATTERE
CPC classification number: H03H9/1021 , B81B7/0038 , B81C1/00285 , H03H3/02 , H03H9/17 , B81B2201/0271 , B81B2203/0118 , B81B2203/0315 , B81B2203/04 , B81B2207/07 , B81C2201/0105 , B81C2203/0118 , H03H2003/022 , H03H2003/027 , H03H2009/155
Abstract: A microelectromechanical resonator device has: a main body, with a first surface and a second surface, opposite to one another along a vertical axis, and made of a first layer and a second layer, arranged on the first layer; a cap, having a respective first surface and a respective second surface, opposite to one another along the vertical axis, and coupled to the main body by bonding elements; and a piezoelectric resonator structure formed by: a mobile element, constituted by a resonator portion of the first layer, suspended in cantilever fashion with respect to an internal cavity provided in the second layer and moreover, on the opposite side, with respect to a housing cavity provided in the cap; a region of piezoelectric material, arranged on the mobile element on the first surface of the main body; and a top electrode, arranged on the region of piezoelectric material, the mobile element constituting a bottom electrode of the piezoelectric resonator structure.
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14.发明公开公开(公告)号：US20240051817A1
公开(公告)日：2024-02-15
申请号：US18363599
申请日：2023-08-01
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Federico VERCESI , Gabriele GATTERE , Giorgio ALLEGATO , Mikel AZPEITIA URQUIA , Alessandro DANEI
IPC: B81B7/00 , B81B7/02 , H03K17/975
CPC classification number: B81B7/0058 , B81B7/02 , H03K17/975 , H01H2231/028 , B81B2203/04
Abstract: A microelectromechanical button device is provided with a detection structure having: a substrate of semiconductor material with a front surface and a rear surface; a buried electrode arranged on the substrate; a mobile electrode, arranged in a structural layer overlying the substrate and elastically suspended above the buried electrode at a separation distance so as to form a detection capacitor; and a cap coupled over the structural layer and having a first main surface facing the structural layer and a second main surface that is designed to be mechanically coupled to a deformable portion of a case of an electronic apparatus of a portable or wearable type. The cap has, on its first main surface, an actuation portion arranged over the mobile electrode and configured to cause, in the presence of a pressure applied on the second main surface, a deflection of the mobile electrode and its approach to the buried electrode, with a consequent capacitive variation of the detection capacitor, which is indicative of an actuation of the microelectromechanical button device.
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15.发明公开公开(公告)号：US20240010490A1
公开(公告)日：2024-01-11
申请号：US18334296
申请日：2023-06-13
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Gabriele GATTERE , Francesco RIZZINI , Federico VERCESI
CPC classification number: B81B7/02 , B81C1/00198 , B81B2201/0235 , B81B2203/04 , B81B2203/033 , B81B2203/0307 , B81B2203/06 , B81B2207/015 , B81C2201/014 , B81C2203/0707
Abstract: The detection structure for a MEMS accelerometer is formed by a substrate; a first movable mass and a second movable mass which extend at a distance from each other, suspended on the substrate and which are configured to undergo a movement, with respect to the substrate, in response to an acceleration. The detection structure also has a first movable electrode integral with the first movable mass; a second movable electrode integral with the second movable mass; a first fixed electrode integral with the substrate and configured to form, with the first movable electrode, a first variable capacitor; and a second fixed electrode integral with the substrate and configured to form, with the second movable electrode, a second variable capacitor. The detection structure has an insulation region, of electrically insulating material, which is suspended on the substrate and extends between the first movable mass and the second movable mass.
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Patent Agency Ranking
16.发明公开公开(公告)号：US20240010489A1
公开(公告)日：2024-01-11
申请号：US18341565
申请日：2023-06-26
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Manuel RIANI , Gabriele GATTERE , Federico VERCESI
CPC classification number: B81B3/0021 , B81C1/0015 , B81B2203/0118 , B81B2203/0307 , B81B2203/0315 , B81C2201/0109 , B81C2201/0133
Abstract: A MEMS device comprising: a semiconductor body defining a main cavity and forming an anchorage structure; and a first deformable structure having a first end and a second end that are opposite to one another along a first axis, the first deformable structure being fixed to the anchorage structure via the first end so as to be suspended over the main cavity. The second end is configured to oscillate, with respect to the anchorage structure, along a second axis. The first deformable structure comprises a main body having a first outer surface and a second outer surface, and a piezoelectric structure, which extends over the first outer surface. The main body comprises a bottom portion and a top portion that delimit along the second axis a first buried cavity aligned with the piezoelectric structure along the second axis, wherein a maximum thickness of the top portion of the main body along the second axis is smaller than a minimum thickness of the bottom portion of the main body along the second axis.
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公开(公告)号：US20230296643A1
公开(公告)日：2023-09-21
申请号：US18322488
申请日：2023-05-23
Applicant: STMicroelectronics S.r.l.
Inventor： Jean Marie DARMANIN , Carlo VALZASINA , Alessandro TOCCHIO , Gabriele GATTERE
IPC: G01P15/125
CPC classification number: G01P15/125
Abstract: A micromechanical device includes a semiconductor body, a first mobile structure, an elastic assembly, coupled to the first mobile structure and to the semiconductor body and adapted to undergo deformation in a direction, and at least one abutment element. The elastic assembly is configured to enable an oscillation of the first mobile structure as a function of a force applied thereto. The first mobile structure, the abutment element and the elastic assembly are arranged with respect to one another in such a way that: when the force is lower than a force threshold, the elastic assembly operates with a first elastic constant; and when the force is greater than the threshold force, then the first mobile structure is in contact with the abutment element, and a deformation of the elastic assembly is generated, which operates with a second elastic constant different from the first elastic constant.
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公开(公告)号：US20220033254A1
公开(公告)日：2022-02-03
申请号：US17385555
申请日：2021-07-26
Applicant: STMicroelectronics S.r.l.
Inventor： Gabriele GATTERE , Patrick FEDELI , Carlo VALZASINA
Abstract: A MEMS accelerometer includes a supporting structure, at least one deformable group and one second deformable group, which include, respectively, a first deformable cantilever element and a second deformable cantilever element, which each have a respective first end, which is fixed to the supporting structure, and a respective second end. The first and second deformable groups further include, respectively, a first piezoelectric detection structure and a second piezoelectric detection structure. The MEMS accelerometer further includes: a first mobile mass and a second mobile mass, which are fixed, respectively, to the second ends of the first and second deformable cantilever elements and are vertically staggered with respect to the first and second deformable cantilever elements, respectively; and a first elastic structure, which elastically couples the first and second mobile masses.
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19.发明申请公开(公告)号：US20210099154A1
公开(公告)日：2021-04-01
申请号：US17031181
申请日：2020-09-24
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Federico VERCESI , Lorenzo CORSO , Giorgio ALLEGATO , Gabriele GATTERE
Abstract: A microelectromechanical resonator device has: a main body, with a first surface and a second surface, opposite to one another along a vertical axis, and made of a first layer and a second layer, arranged on the first layer; a cap, having a respective first surface and a respective second surface, opposite to one another along the vertical axis, and coupled to the main body by bonding elements; and a piezoelectric resonator structure formed by: a mobile element, constituted by a resonator portion of the first layer, suspended in cantilever fashion with respect to an internal cavity provided in the second layer and moreover, on the opposite side, with respect to a housing cavity provided in the cap; a region of piezoelectric material, arranged on the mobile element on the first surface of the main body; and a top electrode, arranged on the region of piezoelectric material, the mobile element constituting a bottom electrode of the piezoelectric resonator structure.
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20.发明申请公开(公告)号：US20200174035A1
公开(公告)日：2020-06-04
申请号：US16781963
申请日：2020-02-04
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Alessandro TOCCHIO , Gabriele GATTERE
IPC: G01P15/125 , B81B3/00
Abstract: A MEMS accelerometric sensor includes a bearing structure and a suspended region that is made of semiconductor material, mobile with respect to the bearing structure. At least one modulation electrode is fixed to the bearing structure and is biased with an electrical modulation signal including at least one periodic component having a first frequency. At least one variable capacitor is formed by the suspended region and by the modulation electrode in such a way that the suspended region is subjected to an electrostatic force that depends upon the electrical modulation signal. A sensing assembly generates, when the accelerometric sensor is subjected to an acceleration, an electrical sensing signal indicating the position of the suspended region with respect to the bearing structure and includes a frequency-modulated component that is a function of the acceleration and of the first frequency.
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