公开(公告)号：US11277112B2

公开(公告)日：2022-03-15

申请号：US16991820

申请日：2020-08-12

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Gattere ,  Lorenzo Corso ,  Alessandro Tocchio ,  Carlo Valzasina

IPC: H03H9/02 ,  H03H9/24 ,  H03H3/007

Abstract: A microelectromechanical device having a mobile structure including mobile arms formed from a composite material and having a fixed structure including fixed arms capacitively coupled to the mobile arms. The composite material includes core regions of insulating material and a silicon coating.

公开(公告)号：US11274036B2

公开(公告)日：2022-03-15

申请号：US16815883

申请日：2020-03-11

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Giorgio Allegato ,  Barbara Simoni ,  Carlo Valzasina ,  Lorenzo Corso

IPC: B81B7/00 ,  B81B7/02 ,  B81C1/00

Abstract: A microelectromechanical device includes: a body accommodating a microelectromechanical structure; and a cap bonded to the body and electrically coupled to the microelectromechanical structure through conductive bonding regions. The cap including a selection module, which has first selection terminals coupled to the microelectromechanical structure, second selection terminals, and at least one control terminal, and which can be controlled through the control terminal to couple the second selection terminals to respective first selection terminals according, selectively, to one of a plurality of coupling configurations corresponding to respective operating conditions.

公开(公告)号：US20200373904A1

公开(公告)日：2020-11-26

申请号：US16991820

申请日：2020-08-12

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Gattere ,  Lorenzo Corso ,  Alessandro Tocchio ,  Carlo Valzasina

IPC: H03H9/02 ,  H03H9/24 ,  H03H3/007

Abstract: A microelectromechanical device having a mobile structure including mobile arms formed from a composite material and having a fixed structure including fixed arms capacitively coupled to the mobile arms. The composite material includes core regions of insulating material and a silicon coating.

公开(公告)号：US10539420B2

公开(公告)日：2020-01-21

申请号：US15858909

申请日：2017-12-29

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Daniele Prati ,  Carlo Valzasina ,  Luca Giuseppe Falorni ,  Matteo Fabio Brunetto

IPC: G01C19/5747 ,  G01C19/5733 ,  G01C19/5762

Abstract: A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.

公开(公告)号：US10329141B2

公开(公告)日：2019-06-25

申请号：US15083034

申请日：2016-03-28

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alessandro Tocchio ,  Carlo Valzasina ,  Luca Guerinoni ,  Giorgio Allegato

IPC: H01L23/13 ,  B81B7/00 ,  B81C1/00 ,  H01L23/055 ,  H01L23/16

Abstract: An encapsulated device of semiconductor material wherein a chip of semiconductor material is fixed to a base element of a packaging body through at least one pillar element having elasticity and deformability greater than the chip, for example a Young's modulus lower than 300 MPa. In one example, four pillar elements are fixed in proximity of the corners of a fixing surface of the chip and operate as uncoupling structure, which prevents transfer of stresses and deformations of the base element to the chip.

公开(公告)号：US20180038692A1

公开(公告)日：2018-02-08

申请号：US15458704

申请日：2017-03-14

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Daniele Prati ,  Carlo Valzasina ,  Tiziano Chiarillo ,  Pasquale Franco

IPC: G01C19/5712 ,  G01C19/5776

CPC classification number: G01C19/5712 ,  G01C19/574 ,  G01C19/5776

Abstract: A MEMS gyroscope, wherein a suspended mass is mobile with respect to a supporting structure. The mobile mass is affected by quadrature error caused by a quadrature moment; a driving structure is coupled to the suspended mass for controlling the movement of the mobile mass in a driving direction at a driving frequency. Motion-sensing electrodes, coupled to the mobile mass, detect the movement of the mobile mass in the sensing direction and quadrature-compensation electrodes are coupled to the mobile mass to generate a compensation moment opposite to the quadrature moment. The gyroscope is configured to bias the quadrature-compensation electrodes with a compensation voltage so that the difference between the resonance frequency of the mobile mass and the driving frequency has a preset frequency-mismatch value.

公开(公告)号：US20170285061A1

公开(公告)日：2017-10-05

申请号：US15280720

申请日：2016-09-29

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alessandro Tocchio ,  Francesco Rizzini ,  Carlo Valzasina ,  Giacomo Langfelder

IPC: G01P1/00 ,  G01P15/125

CPC classification number: G01P1/006 ,  G01P15/125 ,  G01P2015/0817 ,  G01P2015/0834

Abstract: The accelerometric sensor has a suspended region, mobile with respect to a supporting structure, and a sensing assembly coupled to the suspended region and configured to detect a movement of the suspended region with respect to the supporting structure. The suspended region has a geometry variable between at least two configurations associated with respective centroids, different from each other. The suspended region is formed by a first region rotatably anchored to the supporting structure and by a second region coupled to the first region through elastic connection elements configured to allow a relative movement of the second region with respect to the first region. A driving assembly is coupled to the second region so as to control the relative movement of the latter with respect to the first region.

公开(公告)号：US20170284804A1

公开(公告)日：2017-10-05

申请号：US15273312

申请日：2016-09-22

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Carlo Valzasina ,  Luca Giuseppe Falorni

IPC: G01C19/5747

CPC classification number: G01C19/5747 ,  G01C19/5712

Abstract: A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.

公开(公告)号：US20170261322A1

公开(公告)日：2017-09-14

申请号：US15454907

申请日：2017-03-09

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Luca Giuseppe Falorni ,  Carlo Valzasina

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: A micromechanical detection structure includes a substrate of semiconductor material and a driving-mass arrangement is coupled to a set of driving electrodes and driven in a driving movement following upon biasing of the set of driving electrodes. A first anchorage unit is coupled to the driving-mass arrangement for elastically coupling the driving-mass arrangement to the substrate at first anchorages. A driven-mass arrangement is elastically coupled to the driving-mass arrangement by a coupling unit and designed to be driven by the driving movement. A second anchorage unit is coupled to the driven-mass arrangement for elastically coupling the driven-mass arrangement to the substrate at second anchorages. Following upon the driving movement, the resultant of the forces and of the torques exerted on the substrate at the first and second anchorages is substantially zero.

公开(公告)号：US20150114112A1

公开(公告)日：2015-04-30

申请号：US14067051

申请日：2013-10-30

Applicant: STMicroelectronics S.r.l

Inventor： Carlo Valzasina ,  Luca Giuseppe Falorni

IPC: G01C19/5712

CPC classification number: G01C19/5712 ,  G01C19/56 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

Abstract: A microelectromechanical gyroscope, includes: a supporting body; a first movable mass and a second movable mass, which are oscillatable according to a first driving axis and tiltable about respective a first and second sensing axes and are symmetrically arranged with respect to a center of symmetry; first sensing electrodes and a second sensing electrodes associated with the first and second movable masses and arranged on the supporting body symmetrically with respect to the first and second sensing axis, the first and second movable masses being capacitively coupled to the respective first sensing electrode and to the respective second sensing electrode, a bridge element elastically coupled to respective inner ends of the first movable mass and of the second movable mass and coupled to the supporting body so as to be tiltable about an axis transverse to the first driving axis.

Abstract translation: 一种微机电陀螺仪，包括：支撑体; 第一可移动质量块和第二可移动质量块，它们可根据第一驱动轴线振荡并围绕相应的第一和第二感测轴线可倾斜，并且相对于对称中心对称布置; 第一感测电极和与第一和第二可移动质量相关联并且相对于第一和第二感测轴对称地布置在支撑体上的第二感测电极，第一和第二可移动质量体电容耦合到相应的第一感测电极，并且 相应的第二感测电极，桥接元件，其弹性地联接到第一可移动质量块的相应内端和第二可移动质量块，并且联接到支撑体，以便能够围绕横向于第一驱动轴线的轴线倾斜。