公开(公告)号：US20190390342A1

公开(公告)日：2019-12-26

申请号：US16434256

申请日：2019-06-07

Applicant: SAMSUNG DISPLAY CO .. LTD.

Inventor： WOO JIN KIM ,  Dong Kyun KO ,  Keun Hee PARK ,  Myung Soo HUH ,  Seon Uk PARK

IPC: C23C16/455 ,  C23C16/50 ,  C23C16/40

Abstract: A thin film processing apparatus includes a susceptor and a showerhead facing the susceptor. The showerhead includes a first plate including an inner tunnel, a first injection hole, and a second injection hole. The inner tunnel extends across the first pate in a thickness direction of the first plate. The first injection hole penetrates a first surface and a second surface of the first plate on opposite sides of the first plate in the thickness direction, The second injection hole penetrates the second surface of the first plate. The second injection is connected with the inner tunnel.

公开(公告)号：US20230150277A1

公开(公告)日：2023-05-18

申请号：US17920538

申请日：2021-04-01

Applicant: Samsung Display Co., LTD.

Inventor： Byung Chul LEE ,  Heung Cheol JEONG ,  Myung Soo HUH ,  Jin Oh KWAG

IPC: B41J11/00

CPC classification number: B41J11/00216

Abstract: Provided are an inkjet printing apparatus and a printing method of a bipolar element by using the inkjet printing apparatus. The inkjet printing apparatus includes: a stage that moves in a first direction; an inkjet device that sprays ink on the stage; a. plurality of electric field generating devices that generate an electric field on the stage, are spaced apart from the stage, and are movable in the first direction independently from the stage; a light irradiation device that irradiates the stage with light; and a drying device that dries the ink sprayed on the stage, wherein the inkjet device, the light irradiation device, and the drying device are arranged along the first direction,

公开(公告)号：US20230148067A1

公开(公告)日：2023-05-11

申请号：US17853693

申请日：2022-06-29

Applicant: Samsung Display Co., Ltd.

Inventor： Jeong Won HAN ,  Myung Soo HUH

IPC: B41J11/06

CPC classification number: B41J11/06

Abstract: An inkjet printing apparatus may form a material layer on a substrate. The inkjet printing apparatus includes a stage, an ink-receiving member, and an inkjet head. The stage may support the substrate. The inkjet head overlaps at least one of the stage and the ink-receiving member, may provide a first set of ink to the substrate, and may provide a second set of ink to the ink-receiving member when the substrate is supported by the stage.

公开(公告)号：US20210336142A1

公开(公告)日：2021-10-28

申请号：US17278126

申请日：2019-04-08

Applicant: Samsung Display Co., LTD.

Inventor： Heung Cheol JEONG ,  Byung Chul LEE ,  Myung Soo HUH ,  Jin Oh KWAG ,  Do Hun LEE

IPC: H01L51/00

Abstract: An inkjet printing apparatus, a dipole alignment method, and a display device manufacturing method are provided. The inkjet printing apparatus includes a stage, a print head part disposed above the stage, and an electric field generating part that provides an electric field to a space between the stage and the print head part. The dipole alignment method includes providing an electric field at an area above a target substrate, spraying ink including a dipole onto the target substrate through the area, and landing the dipole on the target substrate. The display device manufacturing method includes preparing a base layer on which first and second electrodes are disposed, spraying ink including a light emitting element onto the base layer through the area, landing the light emitting element between the first and second electrodes.

公开(公告)号：US20190214233A1

公开(公告)日：2019-07-11

申请号：US16172863

申请日：2018-10-29

Applicant: Samsung Display Co., Ltd.

Inventor： Soo Beom JO ,  Hae Young YOO ,  Ju Hee LEE ,  Yong Mun CHANG ,  Myung Soo HUH

IPC: H01J37/32 ,  H01L21/3065

CPC classification number: H01J37/32238 ,  H01J37/321 ,  H01J37/3211 ,  H01J37/32119 ,  H01J37/3222 ,  H01J37/3244 ,  H01J37/32449 ,  H01J37/32724 ,  H01J37/32834

Abstract: A plasma processing device including a chamber, a plurality of dielectric windows covering a top portion of the chamber, a lid frame supporting the dielectric windows on a same plane, a plurality of supporting bars supporting a top portion of the lid frame, and a plurality of antennas positioned above the dielectric windows, in which the antennas include a first antenna positioned inside an area defined by the supporting bars and having a loop form, and a second antenna positioned outside the area defined by the supporting bars and having a loop form, and a first current direction in the first antenna and a second current direction in the second antenna are the same as each other.

公开(公告)号：US20170002468A1

公开(公告)日：2017-01-05

申请号：US15049162

申请日：2016-02-22

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jai Hyuk CHOI ,  Won Woong PARK ,  Sung Hun KEY ,  Min Soo KIM ,  Byeong Chun LEE ,  Suk Won JUNG ,  Hyun Woo JOO ,  Myung Soo HUH

IPC: C23C16/50 ,  C23C16/458 ,  C23C16/455

CPC classification number: C23C16/50 ,  C23C16/042 ,  H01J37/32366 ,  H01J37/32715 ,  H01J37/32807

Abstract: A plasma enhanced chemical vapor deposition (PECVD) apparatus including a chamber; an upper electrode in the chamber; a spray unit in the upper electrode to spray a gas introduced from outside the chamber toward a substrate inside the chamber; a susceptor on which the substrate is mountable; a plurality of mask supports in a mask frame at an edge of the susceptor, the mask supports being formed of a conductive material that provides elastic force by supporting a mask to maintain and control a level of the mask; and a power supply unit to supply power to the upper electrode.

Abstract translation: 包括腔室的等离子体增强化学气相沉积（PECVD）装置; 室中的上电极; 上部电极中的喷射单元，用于将从室外引入的气体朝向室内的基板喷射; 可以安装基板的基座; 在基座的边缘处的掩模框架中的多个掩模支撑件，所述掩模支撑件由导电材料形成，所述导电材料通过支撑掩模来提供弹性力以维持和控制所述掩模的水平; 以及向上部电极供电的电源单元。

公开(公告)号：US20160138157A1

公开(公告)日：2016-05-19

申请号：US14702985

申请日：2015-05-04

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Choel Min JANG ,  Myung Soo HUH ,  Nam HA ,  Dong Kyun KO ,  In Kyo KIM

IPC: C23C16/455 ,  C23C16/50 ,  C23C16/44

CPC classification number: C23C16/4412 ,  C23C16/45536 ,  C23C16/45551 ,  C23C16/45574 ,  C23C16/45582 ,  C23C16/54

Abstract: A thin film deposition apparatus, including a plurality of linear nozzle parts separated from each other; and an exhaust plate to which is attached the plurality of linear nozzle parts, each linear nozzle part including a linear body member; a pair of first reaction gas pipes in the linear body member and inflowing a first reaction gas; a second reaction gas pipe between the pair of first reaction gas pipes and inflowing a second reaction gas; and a pair of control gas pipes between each of the first reaction gas pipes and the second reaction gas pipe and inflowing a control gas controlling a flow of the second reaction gas.

Abstract translation: 一种薄膜沉积设备，包括彼此分离的多个线性喷嘴部件; 以及排气板，多个直线喷嘴部附接有排气板，每个直线喷嘴部分包括线状体部件; 一对第一反应气体管道，并且流入第一反应气体; 在所述一对第一反应气体管之间的第二反应气体管道，并流入第二反应气体; 以及在所述第一反应气体管道和所述第二反应气体管道中的每一个之间的一对控制气体管道，并且输入控制所述第二反应气体的流动的控制气体。

公开(公告)号：US20250058565A1

公开(公告)日：2025-02-20

申请号：US18630473

申请日：2024-04-09

Applicant: Samsung Display Co., LTD.

Inventor： Lae Ho KIM ,  Yu KONTA ,  Cheong Wan MIN ,  Jae Bum PAHK ,  Min Woo LEE ,  Tae Ho LEE ,  Jai Hyuk CHOI ,  Myung Soo HUH

IPC: B41J2/175 ,  B41J2/18

Abstract: An inkjet printing apparatus includes: a plurality of inkjet heads configured to discharge ink, a supply storage device configured to supply the ink to the plurality of inkjet heads, a plurality of supply flow paths configured to move the ink from the supply storage device to the plurality of inkjet heads, a plurality of discharge flow paths configured to move the ink from the plurality of inkjet heads to the supply storage device, and a plurality of by-pass lines directly connecting the plurality of supply flow paths with the plurality of discharge flow paths.

公开(公告)号：US20230286292A1

公开(公告)日：2023-09-14

申请号：US18013633

申请日：2021-06-04

Applicant: Samsung Display Co., LTD.

Inventor： Byung Chul LEE ,  Heung Cheol JEONG ,  Myung Soo HUH ,  Jin Oh KWAG ,  Do Hun LEE

IPC: B41J11/00

CPC classification number: B41J11/0015 ,  B41J11/005

Abstract: An inkjet printing apparatus includes: an airflow stage extending in a first direction; a print head unit disposed above the airflow stage; and an electric field generating unit that moves in the first direction and generates electric field above the airflow stage.

公开(公告)号：US20230055700A1

公开(公告)日：2023-02-23

申请号：US17904370

申请日：2020-06-02

Applicant: Samsung Display Co., LTD.

Inventor： Byung Chul LEE ,  Heung Cheol JEONG ,  Myung Soo HUH ,  Cheol Lae ROH ,  Do Hun LEE

IPC: B41J2/045 ,  G01N15/14

Abstract: Provided are an inkjet printing apparatus and a method for inspecting an inkjet head using same. The inkjet printing apparatus comprises: an inspection stage unit on which an inspection substrate is seated; an inkjet head unit including at least one inkjet head that ejects ink containing dipoles and a solvent in which the dipoles disperse, on the inspection stage unit; and a particle count inspection unit that is located so as to be spaced apart from the inkjet head unit in one direction. The particle count inspection unit comprises: a first heat treatment unit that is located on the top portion of the inspection stage unit; and a first sensing unit that is located on the bottom portion of the inspection stage unit and measures the number of dipoles sprayed onto the inspection substrate.