DETECTION PAD STRUCTURE FOR ANALYSIS IN A SEMICONDUCTOR DEVICE

    公开(公告)号:US20220326301A1

    公开(公告)日:2022-10-13

    申请号:US17540745

    申请日:2021-12-02

    Abstract: A detection pad structure in a semiconductor device may include a lower wiring on a substrate, an upper wiring on the lower wiring, and a first pad pattern on the upper wiring. The upper wiring may be connected to the lower wiring and include metal patterns and via contacts on the metal patterns that are stacked in a plurality of layers. The first pad pattern may be connected to the upper wiring. A semiconductor device may include an actual upper wiring including actual metal patterns and actual via contacts stacked in a plurality of layers. At least one of the metal patterns of each layer in the upper wiring may have a minimum line width and a minimum space of the metal patterns of each layer in the actual upper wiring. Metal patterns and via contacts of each layer in the upper wiring may be regularly and repeatedly arranged.

    SEMICONDUCTOR DEVICES
    20.
    发明申请

    公开(公告)号:US20230077803A1

    公开(公告)日:2023-03-16

    申请号:US17751740

    申请日:2022-05-24

    Abstract: A semiconductor device includes a substrate, an etch stop layer on the substrate, a through-hole electrode extending through the substrate and the etch stop layer in a vertical direction substantially perpendicular to an upper surface of the substrate, and a conductive pad. The etch stop layer includes a first surface adjacent to the substrate and a second surface opposite the first surface. The through-hole electrode includes a protrusion portion that protrudes from the second surface of the etch stop layer. The conductive pad covers the protrusion portion of the through-hole electrode. The protrusion portion of the through-hole electrode is not flat.

Patent Agency Ranking