SEMICONDUCTOR DEVICE AND ELECTRONIC SYSTEM INCLUDING THE SAME

    公开(公告)号:US20230024655A1

    公开(公告)日:2023-01-26

    申请号:US17858388

    申请日:2022-07-06

    Abstract: Disclosed are semiconductor devices and electronic systems including the same. The semiconductor device may include a stack structure extending in a first direction and including gate electrodes vertically stacked on a substrate, selection structures horizontally spaced apart on the stack structure, an upper isolation structure between the selection structure and extending in the first direction on the stack structure, and vertical structures penetrating the stack structure and the selection structures. The vertical structures include first vertical structures arranged along the first direction and penetrating portions of the upper isolation structure. Each selection structure includes a selection gate electrode and a horizontal dielectric pattern that surrounds top, bottom, and sidewall surfaces of the selection gate electrode. Each selection gate electrode includes a line part extending in the first direction, and an electrode part vertically protruding from the line part and surrounding at least a portion of each first vertical structure.

    CAPACITOR STRUCTURE AND SEMICONDUCTOR DEVICE INCLUDING THE SAME

    公开(公告)号:US20200176556A1

    公开(公告)日:2020-06-04

    申请号:US16787426

    申请日:2020-02-11

    Abstract: A capacitor structure includes a plurality of bottom electrodes horizontally spaced apart from each other, a support structure covering sidewalls of the bottom electrodes, a top electrode surrounding the support structure and the bottom electrodes, and a dielectric layer interposed between the support structure and the top electrode, and between the top electrode and each of the bottom electrodes. An uppermost surface of the support structure is positioned at a higher level than an uppermost surface of each of the bottom electrodes.

    SEMICONDUCTOR DEVICE
    18.
    发明公开

    公开(公告)号:US20240038830A1

    公开(公告)日:2024-02-01

    申请号:US18309126

    申请日:2023-04-28

    Inventor: Jong-Min LEE

    CPC classification number: H01L28/90 H10B12/482 H10B12/315

    Abstract: The semiconductor device is provided. The semiconductor device comprises a substrate; a plurality of lower electrodes on the substrate and arranged in a honeycomb structure; and a supporter connecting the plurality of lower electrodes to each other, wherein the supporter has a plurality of supporter holes defined therein, wherein each of the plurality of supporter holes exposes at least a portion of each of the plurality of lower electrodes, wherein the supporter includes: a plurality of first extensions extending in a first direction; and a plurality of second extensions extending in a second direction so as to intersect the plurality of first extensions, wherein each of the plurality of first extensions has first and second sidewalls, wherein each of the plurality of second extensions has third and fourth sidewalls, wherein each of the first to fourth sidewalls includes a convex portion and a concave portion.

    THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE AND ELECTRONIC SYSTEM INCLUDING THE SAME

    公开(公告)号:US20230012115A1

    公开(公告)日:2023-01-12

    申请号:US17570874

    申请日:2022-01-07

    Abstract: A three-dimensional semiconductor devices including a substrate, a stack structure including gate electrodes on the substrate and string selection electrodes spaced apart from each other on the gate electrodes, a first separation structure running in a first direction across the stack structure and being between the string selection electrodes, vertical channel structures penetrating the stack structure, and bit lines connected to the vertical channel structures and extending in a second direction may be provided. A first subset of the vertical channel structures is connected in common to one of the bit lines. The vertical channel structures of the first subset may be adjacent to each other in the second direction across the first separation structure. Each of the string selection electrodes may surround each of the vertical channel structures of the first subset.

    CAPACITOR STRUCTURE AND SEMICONDUCTOR DEVICE INCLUDING THE SAME

    公开(公告)号:US20210183994A1

    公开(公告)日:2021-06-17

    申请号:US17156773

    申请日:2021-01-25

    Abstract: A capacitor structure includes a plurality of bottom electrodes horizontally spaced apart from each other, a support structure covering sidewalls of the bottom electrodes, a top electrode surrounding the support structure and the bottom electrodes, and a dielectric layer interposed between the support structure and the top electrode, and between the top electrode and each of the bottom electrodes. An uppermost surface of the support structure is positioned at a higher level than an uppermost surface of each of the bottom electrodes.

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