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11.
公开(公告)号:US20210265116A1
公开(公告)日:2021-08-26
申请号:US17165229
申请日:2021-02-02
Applicant: TDK CORPORATION
Inventor: Yuuki ABURAKAWA , Tatsuo Namikawa , Akiyasu Iioka , Atsuo Matsutani , Hitoshi Saita , Kazuhiro Yoshikawa
Abstract: Disclosed herein a thin film capacitor that includes a lower electrode layer, an upper electrode layer, and a dielectric layer disposed between the lower electrode layer and the upper electrode layer. The dielectric layer has a through hole. The upper electrode layer has a connection part connected to the lower electrode layer through the through hole and an electrode part insulated from the connection part by a slit. A surface of the lower electrode layer that contacts the connection part through the through hole includes an annular area positioned along an inner wall surface of the through hole and a center area surrounded by the annular area. The annular area is lower in surface roughness than the center area.
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公开(公告)号:US10085343B2
公开(公告)日:2018-09-25
申请号:US15804324
申请日:2017-11-06
Applicant: TDK CORPORATION
Inventor: Hitoshi Saita , Yoshihiko Yano
IPC: H05K1/16 , H05K1/18 , H01L23/498 , H01L23/64 , H01L23/00 , H01L21/48 , H01G4/30 , H01G4/008 , H05K1/11
CPC classification number: H05K1/182 , H01G4/005 , H01G4/008 , H01G4/236 , H01G4/306 , H01G4/33 , H01L21/4857 , H01L21/486 , H01L23/49822 , H01L23/49827 , H01L23/49838 , H01L23/642 , H01L24/16 , H01L2224/16227 , H01L2224/16265 , H01L2924/1205 , H01L2924/14 , H01L2924/15313 , H05K1/115 , H05K1/162 , H05K2201/10015
Abstract: A thin-film capacitor includes a pair of electrode layers composed of a first electrode layer configured to store positive charges and a second electrode layer configured to store negative charges; and a dielectric layer sandwiched between the pair of electrode layers along a lamination direction. The first electrode layer includes a first main electrode layer in contact with the dielectric layer. The second electrode layer includes a second main electrode layer and a second sub-electrode layer, both of which are formed of different metallic materials. The second sub-electrode layer is sandwiched between the dielectric layer and the second main electrode layer along the lamination direction. The second main electrode layer is formed of a material having a melting point lower than both a melting point of a material of the first electrode layer, or the first main electrode layer, and that of a material of the second sub-electrode layer.
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公开(公告)号:US20160217925A1
公开(公告)日:2016-07-28
申请号:US15006632
申请日:2016-01-26
Applicant: TDK CORPORATION
Inventor: Hitoshi Saita , Hiroyasu Inoue , Yoshihiko Yano
CPC classification number: H01G4/1227 , H01G4/1236 , H01G4/33
Abstract: A thin film capacitor comprises a base material, a dielectric layer provided on the base material, and an upper electrode layer provided on the dielectric layer. The dielectric layer includes a plurality of columnar crystals that extend along a normal direction with respect to a surface of the upper electrode layer. The columnar crystal has a perovskite crystal structure represented by AyBO3. An element A is at least one of Ba, Ca, Sr, and Pb, and an element B is at least one of Ti, Zr, Sn, and Hf. Further, y≦0.995 is satisfied, and the dielectric layer contains 0.05 to 2.5 mol of Mg per 100 mol of AyBO3.
Abstract translation: 薄膜电容器包括基材,设置在基材上的电介质层和设置在电介质层上的上电极层。 电介质层包括相对于上电极层的表面沿着法线方向延伸的多个柱状晶体。 柱状晶体具有由AyBO 3表示的钙钛矿晶体结构。 元素A是Ba,Ca,Sr和Pb中的至少一种,元素B是Ti,Zr,Sn和Hf中的至少一种。 此外,y≤0.995,电介质层每100摩尔AyBO 3含有0.05〜2.5摩尔的Mg。
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公开(公告)号:US12183513B2
公开(公告)日:2024-12-31
申请号:US18080962
申请日:2022-12-14
Applicant: TDK CORPORATION
Inventor: Masahiro Hiraoka , Hitoshi Saita
Abstract: A dielectric device includes a first electrode, dielectric film, and second electrode, which are laminated. The dielectric film includes columnar crystals extending in a lamination direction. Provided that “x” denotes a reciprocal (1/μm) of a dielectric film thickness and “y” denotes a dielectric material average crystallite size (nm) calculated by the Scherrer equation, “x” and “y” are located within a quadrilateral having point A (0.10, 5), point B (10, 20), point C (10, 35), and point D (0.10, 10) as vertices. Alternatively, the columnar crystals have an average width of less than 40 nm within a distance range from one tenth to one third of the dielectric film thickness from one electrode to the other and an average width of 40 nm or more within a distance range from one tenth to one third of the dielectric film thickness from the other electrode to the one in the lamination direction.
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公开(公告)号:US11742142B2
公开(公告)日:2023-08-29
申请号:US17581060
申请日:2022-01-21
Applicant: TDK CORPORATION
Inventor: Hitoshi Saita
Abstract: Disclosed herein is a capacitor component that includes a lower electrode, a capacitive insulating film covering the lower electrode, a plurality of upper electrodes overlapping the lower electrode through the capacitive insulating film, a first external terminal connected to the lower electrode, a plurality of fuse wires connected respectively to the plurality of upper electrodes, and a second external terminal connected in common to the plurality of fuse wires. The resistance values of the plurality of respective fuse wires are higher than the resistance values of the plurality of corresponding upper electrodes.
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公开(公告)号:US11676767B2
公开(公告)日:2023-06-13
申请号:US17165339
申请日:2021-02-02
Applicant: TDK CORPORATION
Inventor: Yuuki Aburakawa , Tatsuo Namikawa , Akiyasu Iioka , Hitoshi Saita , Kazuhiro Yoshikawa
CPC classification number: H01G4/33 , H01G4/008 , H01G4/306 , H01L23/49822 , H01L23/642 , H01G4/1227 , H01G4/1245 , H01G4/1254
Abstract: Disclosed herein a thin film capacitor that includes a lower electrode layer, an upper electrode layer, and a dielectric layer disposed between the lower electrode layer and the upper electrode layer. The dielectric layer has a through hole. An inner wall surface of the through hole has a first tapered surface and a second tapered surface surrounded by the first tapered surface. The first and second tapered surfaces are not covered with the upper electrode layer and have respective first and second taper angles with respect to a surface of the lower electrode layer. The second taper angle is smaller than the first taper angle.
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公开(公告)号:US11462339B2
公开(公告)日:2022-10-04
申请号:US16702280
申请日:2019-12-03
Applicant: TDK CORPORATION
Inventor: Saori Takahashi , Masahito Furukawa , Masamitsu Haemori , Hiroki Uchiyama , Wakiko Sato , Hitoshi Saita
Abstract: A dielectric film may be exposed to an acid solution such as hydrochloric acid, nitric acid, or sulfuric acid during a wet process after film formation. The inventors have newly found that when a dielectric film includes Zr having a lower ionization tendency than Ti in a main component of a metal oxide expressed by a general formula (Ba, Ca)(Ti, Zr)O3 is provided and satisfies at least one between relationships such that degree of orientation of (100) plane is higher than degree of orientation of (110) plane, and degree of orientation of (111) plane is higher than degree of orientation of (110) plane in a film thickness direction, the dielectric film is less likely to be damaged during a wet process, and the resistance to a wet process is improved.
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18.
公开(公告)号:US11430611B2
公开(公告)日:2022-08-30
申请号:US17165229
申请日:2021-02-02
Applicant: TDK CORPORATION
Inventor: Yuuki Aburakawa , Tatsuo Namikawa , Akiyasu Iioka , Atsuo Matsutani , Hitoshi Saita , Kazuhiro Yoshikawa
Abstract: Disclosed herein a thin film capacitor that includes a lower electrode layer, an upper electrode layer, and a dielectric layer disposed between the lower electrode layer and the upper electrode layer. The dielectric layer has a through hole. The upper electrode layer has a connection part connected to the lower electrode layer through the through hole and an electrode part insulated from the connection part by a slit. A surface of the lower electrode layer that contacts the connection part through the through hole includes an annular area positioned along an inner wall surface of the through hole and a center area surrounded by the annular area. The annular area is lower in surface roughness than the center area.
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公开(公告)号:US11069483B2
公开(公告)日:2021-07-20
申请号:US16141031
申请日:2018-09-25
Applicant: TDK Corporation
Inventor: Hiroshi Takasaki , Masahiro Hiraoka , Hitoshi Saita
Abstract: A thin film capacitor includes a first electrode layer (10), a dielectric layer (20) stacked on the first electrode layer (10), and a second electrode layer (30) stacked on the dielectric layer (20), wherein the dielectric layer (20) includes a layered void aggregation region (22) which extends in a direction orthogonal to a stacking direction.
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公开(公告)号:US10529495B2
公开(公告)日:2020-01-07
申请号:US15725571
申请日:2017-10-05
Applicant: TDK CORPORATION
Inventor: Hiroshi Takasaki , Masahiro Hiraoka , Hitoshi Saita , Kenichi Yoshida
IPC: H01G4/33 , H01G4/232 , H01G4/005 , H01G4/40 , H01G7/06 , H01L49/02 , H01G4/30 , H01G4/012 , H01G4/12
Abstract: A thin-film capacitor includes a capacitor section in which electrode layers and dielectric layers are alternately stacked and which includes a hole portion that extends to the electrode layer. In a cross-section which is perpendicular to a stacking surface of the capacitor section and which passes through the hole portion, a side surface of the hole portion extends along a reference line extending in a direction intersecting the stacking surface, the dielectric layer extends up to the reference line toward the hole portion, and a gap is formed between the side surface of the pair electrode layer and the reference line.
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