公开(公告)号：US08139716B2

公开(公告)日：2012-03-20

申请号：US12971849

申请日：2010-12-17

申请人： Masahiko Okunuki ,  Osamu Tsujii ,  Takeo Tsukamoto

发明人： Masahiko Okunuki ,  Osamu Tsujii ,  Takeo Tsukamoto

IPC分类号： H01J35/06

CPC分类号： H01J35/065 ,  H01J35/08 ,  H01J35/16 ,  H01J35/18 ,  H01J2235/062 ,  H01J2235/068 ,  H01J2235/087 ,  H01J2235/166 ,  H01J2235/168

摘要： A compact apparatus can form multi-X-ray beams with good controllability. Electron beams (e) emitted from electron emission elements (15) of a multi-electron beam generating unit (12) receive the lens effect of a lens electrode (19). The resultant electron beams are accelerated to the final potential level by portions of a transmission-type target portion (13) of an anode electrode (20). The multi-X-ray beams (x) generated by the transmission-type target portion (13) pass through an X-ray shielding plate (23) and X-ray extraction portions (24) in a vacuum chamber and are extracted from the X-ray extraction windows (27) of a wall portion (25) into the atmosphere.

摘要翻译： 紧凑的装置可以形成具有良好可控性的多X射线束。 从多电子束产生单元（12）的电子发射元件（15）发射的电子束（e）接收透镜电极（19）的透镜效应。 通过阳极电极（20）的透射型目标部分（13）的部分将所得的电子束加速到最终的电位。 由透射型目标部分（13）产生的多个X射线束（x）通过真空室中的X射线屏蔽板（23）和X射线提取部分（24），并从 壁部分（25）的X射线提取窗口（27）进入大气。

公开(公告)号：US5201681A

公开(公告)日：1993-04-13

申请号：US848727

申请日：1992-03-09

申请人： Masahiko Okunuki ,  Akira Suzuki ,  Isamu Shimoda ,  Tetsuya Kaneko ,  Takeo Tsukamoto ,  Toshihiko Takeda ,  Takao Yonehara ,  Takeshi Ichikawa

发明人： Masahiko Okunuki ,  Akira Suzuki ,  Isamu Shimoda ,  Tetsuya Kaneko ,  Takeo Tsukamoto ,  Toshihiko Takeda ,  Takao Yonehara ,  Takeshi Ichikawa

IPC分类号： H01J1/304 ,  H01J3/02 ,  H01J9/02 ,  H01J31/12

CPC分类号： H01J9/025 ,  H01J1/3042 ,  H01J3/022 ,  H01J31/127 ,  H01J2201/30446

摘要： A method of emitting electrons by applying a voltage between a voltage application electrode and a target to be irradiated with the electrons emitted from an electron emission electrode with a conical portion in an electron emission device. The voltage application electrode is formed to oppose the electron emission electrode so as to sandwich an insulating layer therebetween and the target. A charge of the electron emission electrode which is lost by electron emission during an electron emission operation is supplied after the electron emission operation is completed.

摘要翻译： 通过在电子发射装置中通过在电压施加电极和被电子发射电子发射的电子与电子发射电极发射的锥形部分之间施加电压来照射电子的方法。 电压施加电极形成为与电子发射电极相对以在其间夹有绝缘层和靶。 在电子发射操作完成之后，供给在电子发射操作期间被电子发射损失的电子发射电极的电荷。

公开(公告)号：US5185559A

公开(公告)日：1993-02-09

申请号：US593561

申请日：1990-10-09

申请人： Isamu Shimoda ,  Takeo Tsukamoto ,  Akira Shimizu ,  Akira Suzuki ,  Masao Sugata ,  Masahiko Okunuki

发明人： Isamu Shimoda ,  Takeo Tsukamoto ,  Akira Shimizu ,  Akira Suzuki ,  Masao Sugata ,  Masahiko Okunuki

IPC分类号： H01J1/13

CPC分类号： H01J1/135

摘要： An electron emission device is provided in which a drive current for driving an electron emission element is maintained at a constant level. The device comprises a transistor having its base provided with a divided voltage. The electron emission element is responsive to the transistor.

摘要翻译： 提供一种电子发射器件，其中用于驱动电子发射元件的驱动电流保持在恒定水平。 该器件包括其基极设置有分压的晶体管。 电子发射元件响应晶体管。

公开(公告)号：US4974736A

公开(公告)日：1990-12-04

申请号：US469730

申请日：1990-01-24

申请人： Masahiko Okunuki ,  Mitsuaki Seki ,  Isamu Shimoda ,  Mamoru Miyawaki ,  Takeo Tsukamoto ,  Akira Suzuki ,  Tetsuya Kaneko ,  Toshihiko Takeda

发明人： Masahiko Okunuki ,  Mitsuaki Seki ,  Isamu Shimoda ,  Mamoru Miyawaki ,  Takeo Tsukamoto ,  Akira Suzuki ,  Tetsuya Kaneko ,  Toshihiko Takeda

IPC分类号： H01J37/073 ,  H01J37/317

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/073 ,  H01J37/3177

摘要： A multi-electron-beam pattern drawing apparatus having a plurality of electron beam sources and a plurality of electron beam sensors, provided on a common base member, is disclosed. The electron beam sources can be selectively driven for different uses, such as a pattern drawing (exposure) purpose and position detecting purpose, for example. In another aspect, the apparatus is provided with a function for correcting the pattern drawing magnification.

公开(公告)号：US4897552A

公开(公告)日：1990-01-30

申请号：US186967

申请日：1988-04-27

申请人： Masahiko Okunuki ,  Isamu Shimoda ,  Mamoru Miyawaki ,  Takeo Tsukamoto ,  Akira Suzuki ,  Tetsuya Kaneko ,  Toshihiko Takeda ,  Mitsuaki Seki

发明人： Masahiko Okunuki ,  Isamu Shimoda ,  Mamoru Miyawaki ,  Takeo Tsukamoto ,  Akira Suzuki ,  Tetsuya Kaneko ,  Toshihiko Takeda ,  Mitsuaki Seki

IPC分类号： H01J37/30 ,  H01J37/317

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/3007 ,  H01J37/3177

摘要： A charged-particle beam pattern drawing apparatus for drawing, by use of a charged-particle beam, a desired circuit pattern on a workpiece having a surface coated with a sensitive material, is disclosed. The apparatus includes a data source having data stored therein related to the circuit pattern, a plurality of charged-particle beam producing sources for emitting charged-particle beams toward the workpiece, in accordance with the data supplied thereto from the data source, and a plurality of deflecting electrodes each being provided for a corresponding one of the charged-particle beam producing source, for deflecting the charged-particle beams from the charged-particle beam producing sources independently of each other and in accordance with the data supplied from the data source.

公开(公告)号：US4833507A

公开(公告)日：1989-05-23

申请号：US179863

申请日：1988-04-11

申请人： Akira Shimizu ,  Takeo Tsukamoto ,  Akira Suzuki ,  Masao Sugata ,  Isamu Shimoda ,  Masahiko Okunuki

发明人： Akira Shimizu ,  Takeo Tsukamoto ,  Akira Suzuki ,  Masao Sugata ,  Isamu Shimoda ,  Masahiko Okunuki

IPC分类号： H01J1/30 ,  H01J1/308 ,  H01J9/02

CPC分类号： H01J1/308

摘要： An electron emission device comprises a P-type semiconductor layer which emits electron injected into the P-type semiconductor layer by utilizing the negative electron affinity state. At least one of said N-type semiconductor layer and the P-type semiconductor layer is made to have a super-lattice structure.

公开(公告)号：US20100329429A1

公开(公告)日：2010-12-30

申请号：US12875745

申请日：2010-09-03

申请人： Masahiko Okunuki ,  Osamu Tsujii ,  Takeo Tsukamoto

发明人： Masahiko Okunuki ,  Osamu Tsujii ,  Takeo Tsukamoto

IPC分类号： H01J35/06 ,  H01J35/00

CPC分类号： H01J35/065 ,  H01J35/08 ,  H01J35/16 ,  H01J35/18 ,  H01J2235/062 ,  H01J2235/068 ,  H01J2235/087 ,  H01J2235/166 ,  H01J2235/168

摘要： A compact apparatus can form multi X-ray beams with good controllability. Electron beams (e) emitted from electron emission elements (15) of a multi electron beam generating unit (12) receive the lens effect of a lens electrode (19). The resultant electron beams are accelerated to the final potential level by portions of a transmission-type target portion (13) of an anode electrode (20). The multi X-ray beams (x) generated by the transmission-type target portion (13) pass through an X-ray shielding plate (23) and X-ray extraction portions (24) in a vacuum chamber and are extracted from the X-ray extraction windows (27) of a wall portion (25) into the atmosphere.

摘要翻译： 紧凑的装置可以形成具有良好可控性的多个X射线束。 从多电子束产生单元（12）的电子发射元件（15）发射的电子束（e）接收透镜电极（19）的透镜效应。 通过阳极电极（20）的透射型目标部分（13）的部分将所得的电子束加速到最终的电位。 由透射型目标部分（13）产生的多个X射线束（x）穿过真空室中的X射线屏蔽板（23）和X射线提取部分（24），并从X 将壁部分（25）的射线提取窗口（27）进入大气。

公开(公告)号：US5361015A

公开(公告)日：1994-11-01

申请号：US011006

申请日：1993-01-29

申请人： Masahiko Okunuki ,  Akira Suzuki ,  Isamu Shimoda ,  Tetsuya Kaneko ,  Takeo Tsukamoto ,  Toshihiko Takeda ,  Takao Yonehara ,  Takeshi Ichikawa

发明人： Masahiko Okunuki ,  Akira Suzuki ,  Isamu Shimoda ,  Tetsuya Kaneko ,  Takeo Tsukamoto ,  Toshihiko Takeda ,  Takao Yonehara ,  Takeshi Ichikawa

IPC分类号： H01J1/304 ,  H01J3/02 ,  H01J9/02 ,  H01J31/12 ,  H01J7/06 ,  H01L21/02

CPC分类号： H01J9/025 ,  H01J1/3042 ,  H01J3/022 ,  H01J31/127 ,  H01J2201/30446

摘要： A multi type electron emission element comprises a plurality of electrodes formed on a deposition surface of an insulating material and each having a conical portion of a single crystal, an insulating layer formed on the deposition surface and having openings respectively centered on the conical portions, and a deriving electrodes, part of which is formed near at least the conical portions, the deriving electrode being formed on the insulating layer.

摘要翻译： 多型电子发射元件包括形成在绝缘材料的沉积表面上并且各自具有单晶的锥形部分的多个电极，形成在沉积表面上并具有分别以锥形部分为中心的开口的绝缘层，以及 导电电极，其一部分形成在至少锥形部分附近，导电电极形成在绝缘层上。

公开(公告)号：US4994708A

公开(公告)日：1991-02-19

申请号：US515352

申请日：1990-04-30

申请人： Akira Shimizu ,  Takeo Tsukamoto ,  Akira Suzuki ,  Masao Sugata ,  Isamu Shimoda ,  Masahiko Okunuki

发明人： Akira Shimizu ,  Takeo Tsukamoto ,  Akira Suzuki ,  Masao Sugata ,  Isamu Shimoda ,  Masahiko Okunuki

IPC分类号： H01J1/308 ,  H01J21/10

CPC分类号： H01J1/308 ,  H01J21/105

摘要： A cold cathode device wherein a cold cathode and an anode face each other with an electron transit path intermediated therebetween, and one or more control electrodes structurally insulated from the said cathode and the anode, are provided exposing to the electron transit path. A cold cathode vacuum tube has an electron emission element having a p-type semiconductor region on an electron emission side and a work function lowering region with junctional relation to the p-type semiconductor region; and a plate electrode structurally insulated from the electron emission element by using an insulation layer which is formed with an electron transmit path corresponding in position to an electron emission area of the electron emission element.

摘要翻译： 一种冷阴极器件，其中冷阴极和阳极彼此面对并具有中间的电子传输路径，以及与所述阴极和阳极结构绝缘的一个或多个控制电极暴露于电子传输路径。 冷阴极真空管具有在电子发射侧具有p型半导体区域的电子发射元件和与p型半导体区域具有连接关系的功函数降低区域; 以及通过使用形成有与电子发射元件的电子发射区域相对应的电子发射路径的绝缘层与电子发射元件结构地绝缘的平板电极。

公开(公告)号：US20110085641A1

公开(公告)日：2011-04-14

申请号：US12971849

申请日：2010-12-17

申请人： Masahiko Okunuki ,  Osamu Tsujii ,  Takeo Tsukamoto

发明人： Masahiko Okunuki ,  Osamu Tsujii ,  Takeo Tsukamoto

IPC分类号： G01N23/04 ,  H01J35/00 ,  H01J35/12 ,  H01J35/30 ,  H01J35/08

CPC分类号： H01J35/065 ,  H01J35/08 ,  H01J35/16 ,  H01J35/18 ,  H01J2235/062 ,  H01J2235/068 ,  H01J2235/087 ,  H01J2235/166 ,  H01J2235/168

摘要： A compact apparatus can form multi-X-ray beams with good controllability. Electron beams (e) emitted from electron emission elements (15) of a multi-electron beam generating unit (12) receive the lens effect of a lens electrode (19). The resultant electron beams are accelerated to the final potential level by portions of a transmission-type target portion (13) of an anode electrode (20). The multi-X-ray beams (x) generated by the transmission-type target portion (13) pass through an X-ray shielding plate (23) and X-ray extraction portions (24) in a vacuum chamber and are extracted from the X-ray extraction windows (27) of a wall portion (25) into the atmosphere.

摘要翻译： 紧凑的装置可以形成具有良好可控性的多X射线束。 从多电子束产生单元（12）的电子发射元件（15）发射的电子束（e）接收透镜电极（19）的透镜效应。 通过阳极电极（20）的透射型目标部分（13）的部分将所得的电子束加速到最终的电位。 由透射型目标部分（13）产生的多个X射线束（x）通过真空室中的X射线屏蔽板（23）和X射线提取部分（24），并从 壁部分（25）的X射线提取窗口（27）进入大气。