摘要:
A method for adjusting the meshing position of a hypoid gear having a first gear, and a second gear meshing with the first gear and transmitting the rotary motion thereof in the direction different from the extending direction of the axis of rotation of the first gear. The method for adjusting the meshing position comprises; a) a step for displacing the second gear a plurality of times along the axial direction of rotation while meshing with the first gear, b) a step for measuring the transmission error at each displacement position and plotting the relation of the displacement distance of the second gear and the measured transmission error, c) a step for evaluating the virtual transmission error between the measured transmission errors from the measured transmission error, d) a step for subtracting the measured transmission error and the virtual transmission error from a maximum allowable transmission error to determine the difference, e) a step for determining the area of a part surrounded by the difference and the maximum allowable transmission error by integrating the difference with the displacement distance of the second gear, and f) a step for dividing the part at a predetermined area ratio and setting a point where the division line intersects the displacement distance of the second gear at the meshing position of the second gear.
摘要:
A dry-etching gas suitable for selective etching of silicon nitride and a process for selectively dry-etching silicon nitride with the dry-etching gas are disclosed. Silicon nitride can be dry-etched with a higher selectivity or at a higher etching rate than silicon dioxide and silicon, and a process for fabricating semi-conductor devices can be simplified and devices with a novel structure can be realized.
摘要:
A first semiconductor circuit element including a first electrode is formed on a semiconductor substrate, an insulating layer for insulating the first electrode is formed on the first electrode, and a first opening is provided in a part of this insulating layer.Subsequently, a second semiconductor circuit element is formed by forming a second electrode overlaying in part the insulating layer at an area other than the first opening and, a subsidiary conductive layer is formed in the first opening. Another insulating layer is formed on the structure thus formed, whereupon second and third openings are respectively provided in this latter insulating layer.First and second conductors are respectively deposited in the second and third openings, whereby electrical contact to the first and second electrodes are provided, with contact to the first electrode being via the subsidiary conductive layer.
摘要:
A first semiconductor circuit element including a first electrode is formed on a semiconductor substrate, an inter-layer insulating layer for insulating the first electrode is formed on the first electrode, and a first penetrating opening is provided in a part of the inter-layer insulating layer.Subsequently, a step of forming a second semiconductor circuit element is carried out, this step including a step of forming a second electrode so that at least a part thereof may overlie the inter-layer insulating layer at an area other than the first penetrating opening. Further, a subsidiary interconnection conductive layer is buried into the first opening. Another insulating layer is formed on the structure thus formed, whereupon second and third penetrating openings are respectively provided in the insulating layer over the second electrode and the interconnection subsidiary conductive layer.First and second interconnection conductors are respectively buried into the second and third penetrating openings. The first electrode is conductively connected with the second interconnection conductor in the third opening via the subsidiary interconnection conductive layer in the first opening. The second electrode is conductively connected with the first interconnection conductor in the second opening.
摘要:
The present invention provides a heterocyclic compound represented by General Formula (1): wherein R1 is a group R5—Z1—, etc., Z1 is a lower alkylene group, etc., and R5 is a group represented by General Formula; wherein R13 is a hydrogen atom, etc., m is an integer from 1 to 5; R2 is a hydrogen atom: Y is CH or N: A1 is a heterocyclic ring selected from the group consisting of indolediyl groups, wherein the heterocyclic ring may have at least one substituent: T is a group —CO—, etc.: R3 is a hydrogen atom, etc.: R4 is a lower alkyl group optionally substituted by one or more hydroxy groups, etc.: R3 and R4, together with the nitrogen atom to which they bind, may bind to each other and form a 5- to 10-membered saturated heterocyclic ring, wherein the heterocyclic ring may have at least one substituent. The heterocyclic compound of the present invention has excellent effects of suppressing the production of collagen and/or treating tumors.
摘要:
A field effect transistor formed on a semi-insulator or compound semiconductor substrate comprises a first semiconductor layer forming a source region, a drain region and a channel layer, and a second semiconductor layer having a reverse conduction type to that of the first semiconductor layer. The second semiconductor layer is doped so that it will be totally depleted. Therefore, a portion of the second semiconductor layer adjacent to the substrate will remain conductive. The field effect transistor with this structure prevents the short channel effect and the soft error due to .alpha.-particles. A threshold voltage control arrangement is also provided using the feature of a control electrode coupled to the second semiconductor layer and a feedback arrangement.
摘要:
A semiconductor device and method of manufacturing the same. The device comprises a first n-type semiconductor layer and a second undoped semiconductor layer between which a hetero-junction is formed, and a third p-type embedded semiconductor layer, a gate metal formed without the exposure to air immediately after the third, second and first semiconductor layer are successively formed, and an external electrode connected with the third p-type embedded semiconductor layer, capable of controlling the carriers in the neighborhood of the hetero-junction. This semiconductor device greatly improves the controllability of the threshold voltage thereof, and provides the gate electrodes of good quality.