公开(公告)号：US06550277B1

公开(公告)日：2003-04-22

申请号：US09709168

申请日：2000-11-10

Applicant: Bruno Uebbing ,  Jan Vydra

Inventor： Bruno Uebbing ,  Jan Vydra

IPC: C03B1906

CPC classification number: C03C4/0085 ,  C03B19/1453 ,  C03B2201/03 ,  C03B2201/04 ,  C03B2201/075 ,  C03C3/06 ,  C03C2201/06 ,  C03C2201/08 ,  C03C2201/23 ,  C03C2203/40 ,  Y10S65/08 ,  Y10S65/16 ,  Y10S501/905

Abstract: The invention concerns a quartz glass body for an optical component for the transmission of UV radiation with a wavelength of 250 nm and less, especially for a wavelength of 157 nm, as well as a process for the manufacture of the quartz glass body where fine quartz glass particles are formed by flame hydrolysis of a silicon compound, deposited and vitrified. Suitability of a quartz glass as represented by high base transmission and radiation resistance depends on structural properties caused by local stoichiometric deviations, and on the chemical composition. The quartz glass body according to the inventions is distinguished by a uniform base transmission (relative change of base transmission ≦1%) in the wavelength range from 155 nm to 250 nm (radiation penetration depth of 10 mm) of at least 80%, a low OH content (less than 10 ppm by weight) and a glass structure substantially free from oxygen defect centers. A quartz glass body of this kind is manufactured by a process which allows bulk embedding of hydrogen or oxygen into the glass network in that at least a two stage heat treatment takes place at temperatures ranging from 850° C. to 1600° C. before the vitrification, the last stage comprising sintering at a temperature between 1300° C. and 1600° C. in an atmosphere containing hydrogen or oxygen, or a nonflammable mixture of these substances.

Abstract translation: 本发明涉及一种用于传输波长为250nm以下，特别是波长为157nm的紫外线的光学部件的石英玻璃体，以及用于制造石英玻璃体的方法，其中精细的石英 通过硅化合物的火焰水解形成玻璃颗粒，沉积并玻璃化。 由高碱性透射和耐辐射性表示的石英玻璃的适用性取决于由局部化学计量偏差引起的结构特性以及化学成分。 根据本发明的石英玻璃体的特征在于在155nm至250nm（辐射穿透深度为10mm）的波长范围内的均匀的基底透射率（基底透射率的相对变化<= 1％）为至少80％ 低OH含量（小于10ppm重量）和基本上不含氧缺陷中心的玻璃结构。 这种石英玻璃体是通过允许将氢气或氧气大量嵌入玻璃网络的方法来制造的，因为至少在两个阶段之间的热处理在850℃至1600℃之间的温度下进行 玻璃化，最后阶段包括在含有氢气或氧气的气氛中在1300℃和1600℃之间的温度下烧结，或这些物质的不可燃混合物。

公开(公告)号：US06312656B1

公开(公告)日：2001-11-06

申请号：US08903501

申请日：1997-07-30

Applicant: Jeffery Lynn Blackwell ,  Xiaodong Fu ,  Daniel Warren Hawtof ,  Dale Robert Powers

Inventor： Jeffery Lynn Blackwell ,  Xiaodong Fu ,  Daniel Warren Hawtof ,  Dale Robert Powers

IPC: C01B3312

CPC classification number: B01J19/26 ,  B01J2219/00157 ,  B01J2219/00159 ,  C01B33/183 ,  C03B19/106 ,  C03B19/1415 ,  C03B19/1423 ,  C03B37/01413 ,  C03B37/0142 ,  C03B2201/06 ,  C03B2207/06 ,  C03B2207/14 ,  C03B2207/20 ,  C03B2207/32 ,  C03B2207/34 ,  C03B2207/42 ,  C03C1/00 ,  C03C3/06 ,  C03C2201/06 ,  C03C2203/40 ,  Y02P40/57

Abstract: The present invention is directed to a method for making silica. A liquid, preferably halide-free, silicon-containing compound capable of being converted by thermal oxidative decomposition to SiO2 is provided and introduced directly into the flame of a combustion burner, which converts the compound to silica, thereby forming finely divided amorphous soot. The soot is vaporized at the site where the liquid is converted into silica by pneumatically atomizing the liquid with a stream of oxygen gas, or a mixture of oxygen gas and nitrogen gas. The amorphous soot is deposited on a receptor surface where, either substantially simultaneously with or subsequently to its deposition, the soot is consolidated into a body of fused silica glass.

Abstract translation: 本发明涉及制备二氧化硅的方法。 提供能够通过热氧化分解转化为SiO 2的液体，优选不含卤素的含硅化合物，并将其直接引入燃烧器的火焰中，该燃烧器将该化合物转化为二氧化硅，从而形成细碎的无定形烟灰。 在通过用氧气流或氧气和氮气的混合物气动雾化液体的情况下，在将液体转化为二氧化硅的位置将烟灰气化。 无定形烟灰沉积在受体表面上，其中基本上同时或随后沉积，烟灰被固结成熔融石英玻璃体。

公开(公告)号：US09746773B2

公开(公告)日：2017-08-29

申请号：US13920628

申请日：2013-06-18

Applicant: SHIN-ETSU CHEMICAL CO., LTD.

Inventor： Shigeru Maida ,  Hisatoshi Otsuka ,  Tetsuji Ueda ,  Masanobu Ezaki

IPC: C03B19/14 ,  G03F7/20 ,  B82Y10/00 ,  B82Y40/00 ,  C03C3/06 ,  G03F1/24

CPC classification number: G03F7/2008 ,  B82Y10/00 ,  B82Y40/00 ,  C03B19/1423 ,  C03B19/1453 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2201/42 ,  C03B2207/06 ,  C03B2207/12 ,  C03B2207/36 ,  C03C3/06 ,  C03C2201/06 ,  G03F1/24

Abstract: Methods for selecting titania-doped quartz glass which experiences a reduction in OH group concentration of less than or equal to 100 ppm upon heat treatment at 900° C. for 100 hours as suitable material for the EUV lithography member.

公开(公告)号：US20130283858A1

公开(公告)日：2013-10-31

申请号：US13920628

申请日：2013-06-18

Applicant: Shigeru Maida ,  Hisatoshi Otsuka ,  Tetsuji Ueda ,  Masanobu Ezaki

Inventor： Shigeru Maida ,  Hisatoshi Otsuka ,  Tetsuji Ueda ,  Masanobu Ezaki

IPC: G03F7/20

CPC classification number: G03F7/2008 ,  B82Y10/00 ,  B82Y40/00 ,  C03B19/1423 ,  C03B19/1453 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2201/42 ,  C03B2207/06 ,  C03B2207/12 ,  C03B2207/36 ,  C03C3/06 ,  C03C2201/06 ,  G03F1/24

Abstract: Methods for selecting titania-doped quartz glass which experiences a reduction in OH group concentration of less than or equal to 100 ppm upon heat treatment at 900° C. for 100 hours as suitable material for the EUV lithography member.

Abstract translation: 用于选择在900℃热处理100小时时氧化铝基团浓度小于或等于100ppm的掺杂二氧化钛的石英玻璃作为EUV光刻元件的合适材料的方法。

公开(公告)号：US20040071432A1

公开(公告)日：2004-04-15

申请号：US10658606

申请日：2003-09-08

Inventor： Mara Bagnasco ,  Valeria Gusmeroli

IPC: G02B006/16 ,  G02B006/34

CPC classification number: G02B6/02114 ,  C03C13/046 ,  C03C25/6226 ,  C03C2201/06 ,  C03C2201/12 ,  C03C2201/31 ,  G02B6/02123 ,  G02B6/443

Abstract: The present invention provides an optical fiber providing high photosensitivity in the absence of hydrogen loading as well as a low numerical aperture. One aspect of the present invention relates to an optical fiber including a core, the core comprising silica doped with at least about 6 mol % germania and at least about 0.9 wt % fluorine; and a cladding surrounding the core. The optical fiber of the present invention is suitable for the production of fiber Bragg gratings.

Abstract translation: 本发明提供了一种在不存在氢负载和低数值孔径的情况下提供高光敏性的光纤。 本发明的一个方面涉及一种包括芯的光纤，所述芯包括掺杂有至少约6mol％的氧化锗和至少约0.9wt％的氟的二氧化硅; 以及围绕芯的包层。 本发明的光纤适用于制造光纤布拉格光栅。

公开(公告)号：US20030039865A1

公开(公告)日：2003-02-27

申请号：US10177579

申请日：2002-06-20

Applicant: Isonics Corporation

Inventor： Vic Kelsey ,  James E. Alexander ,  Stephen J. Burden

IPC: B32B009/04

CPC classification number: C03C4/0042 ,  C03C3/06 ,  C03C2201/06 ,  C03C2203/42 ,  G02B1/00

Abstract: The present invention is directed to isotopically enriched optical materials and methods of producing the same. The optical materials provide high isotopic purity silica, calcium, zinc, gallium and germanium materials with increased resistance to optical damage which can be used alone or in combination with other means of preventing damage to decrease lens degradation caused by energy-induced compaction during use.

Abstract translation: 本发明涉及同位素富集的光学材料及其制造方法。 光学材料提供高同位素纯度的二氧化硅，钙，锌，镓和锗材料，具有增加的抗光损伤性，可以单独使用或与其他防止损伤的方法相结合，减少在使用过程中由能量引起的压实引起的晶状体降解。

公开(公告)号：US06490399B1

公开(公告)日：2002-12-03

申请号：US09403476

申请日：2000-07-11

Applicant: Walter Heitmann ,  Karl-Friedrich Klein

Inventor： Walter Heitmann ,  Karl-Friedrich Klein

IPC: G02B600

CPC classification number: C03C4/0071 ,  C03C3/06 ,  C03C2201/06 ,  C03C2201/31 ,  G02B6/02

Abstract: Optical waveguides made of quartz glass with reduced infrared absorption and reduced attenuation coefficients are made of glass material composed of atoms having mass numbers higher than that of the natural isotope distribution. The quartz glass or doped quartz glass is made of silicon atoms, of which most or all have the mass numbers 29 and/or 30, as well as of oxygen atoms, of which most or all are composed of isotopes with the mass numbers 17 and/or 18. Atoms of the 76Ge isotope are preferably used for doping with germanium atoms having higher mass numbers than in the natural isotope mixture. Glass with atoms of preferably 30Si and/or 18O are preferably used for optical waveguides based on quartz glass having attenuation coefficients below 0.15 dB/km. As indicated, such optical waveguides are also suitable for transmitting high-energy, pulsed or continuous laser light in a wavelength range from 2.0 to 3.0 &mgr;m. These optical waveguides are also suitable for transmitting holmium laser light at 2.1 &mgr;m and Er laser light with a wavelength of 2.79 and 2.94 &mgr;m.

Abstract translation: 由石英玻璃制成的光波导具有降低的红外吸收和减小的衰减系数由由质子数高于天然同位素分布的原子组成的玻璃材料制成。 石英玻璃或掺杂的石英玻璃由硅原子制成，其大部分或全部具有质量数29和/或30以及氧原子，其中大部分或全部由质量数17的同位素组成， /或18.76Ge同位素的原子优选用于掺杂质子数高于天然同位素混合物的锗原子。 具有优选30Si和/或18O原子的玻璃优选用于基于衰减系数低于0.15dB / km的石英玻璃的光波导。 如所指出的，这种光波导也适用于在2.0-3.0μm的波长范围内传输高能，脉冲或连续的激光。 这些光波导也适用于传输波长为2.79和2.94 mum的2.1 mum的钬激光和Er激光。

公开(公告)号：US5152819A

公开(公告)日：1992-10-06

申请号：US750561

申请日：1991-08-26

Applicant: Jeffery L. Blackwell ,  Michael S. Dobbins ,  Robert E. McLay ,  Carlton M. Truesdale

Inventor： Jeffery L. Blackwell ,  Michael S. Dobbins ,  Robert E. McLay ,  Carlton M. Truesdale

IPC: C03B37/018 ,  C03B8/04 ,  C03B19/14 ,  C03B20/00 ,  C03B37/014 ,  C03C3/06 ,  C07F7/08 ,  C07F7/10 ,  G02B6/00

CPC classification number: C03B37/01413 ,  C03B19/1415 ,  C03B37/014 ,  C03B37/01446 ,  C03C3/06 ,  C03B2201/02 ,  C03B2201/10 ,  C03B2201/28 ,  C03B2201/30 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/40 ,  C03B2201/42 ,  C03B2201/50 ,  C03B2201/54 ,  C03B2207/06 ,  C03B2207/32 ,  C03B2207/50 ,  C03B2207/52 ,  C03B2207/85 ,  C03C2201/02 ,  C03C2201/06 ,  C03C2201/28 ,  C03C2203/40 ,  Y10S65/90 ,  Y10S65/901

Abstract: This invention relates to the production of high purity fused silica glass through oxidation and/or flame hydrolysis of a halide-free, organosilicon-R compound in vapor form having the following properties:(a) producing a gas stream of a halide-free silicon-containing compound in vapor form capable of being converted through thermal decomposition with oxidation or flame hydrolysis to SiO.sub.2 ;(b) passing said gas stream into the flame of a combustion burner to form amorphous particles of fused SiO.sub.2 ;(c) depositing said amorphous particles onto a support; and(d) either essentially simultaneously with said deposition or subsequently thereto consolidating said deposit of amorphous particles into a virtually nonporous body; the improvement comprising utilizing a halide-free, organosilicon-R compound in vapor form having the following properties:(1) a Si--R bond dissociation energy that is no higher than the dissociation energy of the Si--O bond;(2) a boiling point no higher than 350.degree. C.; and(3) which, upon pyrolysis and/or hydrolysis, will produce decomposition products beside SiO.sub.2 which are deemed to be environmentally safe or the emissions are below acceptable governmental standards.

Abstract translation: 本发明涉及通过氧化和/或火焰水解无蒸气的蒸气形式的有机硅-R化合物生产高纯度熔融石英玻璃，其具有以下特性：（a）产生无卤化硅的气流 的蒸汽形式的化合物，其能够通过氧化或火焰水解的热分解转化为SiO 2; （b）将所述气流送入燃烧器的火焰中以形成熔融SiO 2的无定形颗粒; （c）将所述无定形颗粒沉积到载体上; 和（d）基本上与所述沉积物同时或随后将所述无定形颗粒沉积物固结成几乎无孔的体; 该改进包括利用具有以下性质的蒸气形式的无卤化物的有机硅-R化合物：（1）不高于Si-O键的解离能的Si-R键离解能; （2）沸点不高于350℃。 和（3）在热解和/或水解后，将在SiO2之外产生被认为是环境安全的或排放低于可接受的政府标准的分解产物。

公开(公告)号：US3678144A

公开(公告)日：1972-07-18

申请号：US3678144D

申请日：1970-06-12

Applicant: CORNING GLASS WORKS

Inventor： SHOUP ROBERT D

IPC: C03B19/12 ,  C03C1/00 ,  C03C3/06 ,  B29H7/20

CPC classification number: C03C1/006 ,  C03B19/12 ,  C03C3/06 ,  C03C2201/06 ,  C03C2201/10 ,  C03C2201/28 ,  C03C2201/30 ,  C03C2201/31 ,  C03C2201/32 ,  C03C2201/80 ,  C03C2203/22 ,  C03C2203/24 ,  C03C2203/30 ,  Y10S65/901

Abstract: This invention relates to the discovery of a method for incorporating various oxides into silica-containing porous and nonporous glass materials by dissolving soluble compounds of the additive oxides, characterized as MxOy, into solutions, colloidal solutions, or suspensions of soluble silicates, reacting the mixture with an organic compound, and then firing the thus-formed body at temperatures below the softening point of the particular glass composition for a sufficient length of time to produce the porous body or non-porous glass body containing the added oxides intimately bonded to the silica network.

Abstract translation: 本发明涉及将各种氧化物掺入含二氧化硅的多孔和无孔玻璃材料中的方法的发现，通过将以MxOy为特征的添加剂氧化物的可溶性化合物溶解在可溶性硅酸盐的溶液，胶体溶液或悬浮液中，使混合物 与有机化合物反应，然后在低于特定玻璃组合物的软化点的温度下焙烧如此形成的本体足够长的时间以产生包含与二氧化硅紧密结合的添加氧化物的多孔体或无孔玻璃体 网络。

公开(公告)号：US20230167671A1

公开(公告)日：2023-06-01

申请号：US17922937

申请日：2021-04-26

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Hiroyuki ABE ,  Eiichi URIU ,  Tasuku ISHIBASHI ,  Kazuya HASEGAWA ,  Masataka NONAKA ,  Takeshi SHIMIZU ,  Naoki KOSUGI

IPC: E06B3/66 ,  C03C27/06 ,  E06B3/677

CPC classification number: E06B3/6612 ,  C03C27/06 ,  E06B3/6775 ,  C03C2201/06

Abstract: A glass panel unit includes: a first glass pane; a second glass pane facing the first glass pane; a frame member; an evacuated space; and a gas adsorbent. The frame member hermetically bonds the first glass pane and the second glass pane. The evacuated space is surrounded with the first glass pane, the second glass pane, and the frame member. The gas adsorbent is placed in the evacuated space. The gas adsorbent contains a getter material. The getter material contains a plurality of particles of a zeolite crystal. At least one particle accounting for a half or more of a total weight of the plurality of particles has a particle size equal to or greater than 200 nm. An activable temperature of the at least one particle is equal to or lower than 400° C.