公开(公告)号：US4997273A

公开(公告)日：1991-03-05

申请号：US400255

申请日：1989-08-29

Applicant: Donald A. Leonard ,  Harold E. Sweeney

Inventor： Donald A. Leonard ,  Harold E. Sweeney

IPC: G01J5/00 ,  G01J9/04 ,  G01N21/63

CPC classification number: G01J5/08 ,  G01J5/00 ,  G01J5/0037 ,  G01J5/007 ,  G01J5/0896 ,  G01J2005/583 ,  G01J3/4412 ,  G01J9/04 ,  G01N2021/1793 ,  G01N2021/638

Abstract: A technique for measuring the unknown subsurface temperature T.sub.s of a bulk transparent medium such as ocean water by generating a continuous (cw) laser beam and pulsed laser beam both having the same wavelength, with the intensity of the pulsed laser beam exceeding the intensity required to produce stimulated Brillouin scattering in the water. By directing the pulsed laser beam into the water, it causes a return phase-conjugate beam to emanate therefrom. The return phase-conjugate beam and the pulsed laser beam are separated, and the phase-conjugate beam and the cw beam are mixed together thereby producing a heterodyne frequency proportional to the temperature T.sub.s. By converting the heterodyne frequency into a temperature value, yields the desired unknown T.sub.s.

Abstract translation: 通过产生具有相同波长的连续（cw）激光束和脉冲激光束来测量大体透明介质如海洋水的未知地下温度Ts的技术，其中脉冲激光束的强度超过了所需的强度 在水中产生刺激的布里渊散射。 通过将脉冲激光束引导到水中，其导致返回相位共轭光束从其发射。 将返回相位共轭光束和脉冲激光束分离，将相位共轭光束和cw光束混合在一起，从而产生与温度Ts成比例的外差频率。 通过将外差频率转换为温度值，产生所需的未知Ts。

公开(公告)号：US09995628B1

公开(公告)日：2018-06-12

申请号：US15155773

申请日：2016-05-16

Applicant: The Board of Regents of the University of Nebraska

Inventor： Ming Han ,  Guigen Liu ,  Weilin Hou

IPC: G01B9/02 ,  G01J3/45 ,  G02B6/293 ,  G02B6/27 ,  G01J3/26 ,  G01K11/32 ,  G01F1/66 ,  G01P5/26

CPC classification number: G01P5/26 ,  G01F1/6884 ,  G01J3/26 ,  G01J5/0821 ,  G01J5/0828 ,  G01J5/0862 ,  G01J5/0896 ,  G01J5/58 ,  G01J2005/583 ,  G01K11/3206 ,  G01K13/02 ,  G02B6/241 ,  G02B6/29359

Abstract: A fiber optic sensor, a process for utilizing a fiber optic sensor, and a process for fabricating a fiber optic sensor are described, where a double-side-polished silicon pillar is attached to an optical fiber tip and forms a Fabry-Pérot cavity. In an implementation, a fiber optic sensor in accordance with an exemplary embodiment includes an optical fiber configured to be coupled to a light source and a spectrometer; and a single silicon layer or multiple silicon layers disposed on an end face of the optical fiber, where each of the silicon layer(s) defines a Fabry-Pérot interferometer, and where the sensor head reflects light from the light source to the spectrometer. In some implementations, the fiber optic sensor may include the light source coupled to the optical fiber; a spectrometer coupled to the optical fiber; and a controller coupled to the high speed spectrometer.

公开(公告)号：US08624187B2

公开(公告)日：2014-01-07

申请号：US11466347

申请日：2006-08-22

Applicant: Hakan Urey ,  Hamdi Torun

Inventor： Hakan Urey ,  Hamdi Torun

IPC: G01J5/00 ,  G01J5/02

CPC classification number: G01J5/58 ,  G01J5/38 ,  G01J5/40 ,  G01J2005/583

Abstract: The present invention relates to thermal detectors and the application of such to devices and methods of detecting the infrared images using thermal detectors. For example, by using optical measuring systems in combination with at least one light source to measure changes position of a movable anchored surface coupled to an absorption surface such that the movable anchored surface changes position due to absorption of infrared radiation by the absorption surface. In another example, by combining a detector pixel (infrared radiation sensitive) with an optical measuring device such as an interferometer.

Abstract translation: 本发明涉及热检测器及其应用于使用热检测器检测红外图像的装置和方法。 例如，通过使用与至少一个光源组合的光学测量系统来测量耦合到吸收表面的可移动锚定表面的变化位置，使得可移动锚定表面由于吸收表面吸收红外辐射而改变位置。 在另一个示例中，通过将检测器像素（红外辐射敏感）与诸如干涉仪的光学测量装置组合。

公开(公告)号：US08573837B2

公开(公告)日：2013-11-05

申请号：US13428198

申请日：2012-03-23

Applicant: Tatsuo Matsudo ,  Chishio Koshimizu

Inventor： Tatsuo Matsudo ,  Chishio Koshimizu

IPC: G01K11/00 ,  B32B3/00

CPC classification number: G01K11/12 ,  G01J5/0007 ,  G01J5/0044 ,  G01J5/0821 ,  G01J2005/583

Abstract: A temperature measuring apparatus and a temperature measuring method that may simultaneously measure temperatures of objects in processing chambers. The temperature measuring apparatus includes a first light separating unit which divides light from the light source into measurement lights; second light separating units which divide the measurement lights from the first light separating unit into measurement lights and reference lights; third light separating units which further divide the measurement lights into first to n-th measurement lights; a reference light reflecting unit which reflects the reference lights; an light path length changing unit which changes light path lengths of the reference lights reflected by the reference light reflecting unit; and photodetectors which measure interference between the first to n-th measurement lights reflected by the objects to be measured and the reference lights reflected by the reference light reflecting unit.

Abstract translation: 可以同时测量处理室中的物体的温度的温度测量装置和温度测量方法。 温度测量装置包括：将来自光源的光分成测量光的第一光分离单元; 第二光分离单元，其将测量光从第一光分离单元分离成测量光和参考光; 第三光分离单元，其进一步将测量光分为第一至第n测量光; 反射参考光的参考光反射单元; 光路长度改变单元，改变由参考光反射单元反射的参考光的光路长度; 以及光检测器，其测量由被测量物体反射的第一至第n测量光与由参考光反射单元反射的参考光之间的干涉。

公开(公告)号：US20120327393A1

公开(公告)日：2012-12-27

申请号：US13529368

申请日：2012-06-21

Applicant: Tatsuo MATSUDO ,  Kenji NAGAI

Inventor： Tatsuo MATSUDO ,  Kenji NAGAI

IPC: G01J5/48

CPC classification number: G01J5/0007 ,  G01J2005/583

Abstract: The temperature measuring apparatus includes a data input portion, a peak interval calculation portion, an optical path length calculation portion, and a temperature calculation portion. The data input portion inputs a spectrum of interference light that is obtained when measuring light is irradiated onto a surface of the object and the measuring light reflected from the surface and the measuring light reflected from a rear surface interfere with each other. The peak interval calculation portion calculates a peak interval of the input spectrum. The optical path length calculation portion calculates an optical path length based on the peak interval. The temperature calculation portion calculates the temperature of the object based on the optical path length.

Abstract translation: 温度测量装置包括数据输入部分，峰值间隔计算部分，光程长度计算部分和温度计算部分。 数据输入部输入将光照射到物体的表面上时所获得的干涉光的光谱和从表面反射的测量光，并且从后表面反射的测量光彼此干涉。 峰值间隔计算部分计算输入光谱的峰值间隔。 光路长度计算部分基于峰值间隔计算光程长度。 温度计算部根据光程长度来计算物体的温度。

公开(公告)号：US20120243572A1

公开(公告)日：2012-09-27

申请号：US13428198

申请日：2012-03-23

Applicant: Tatsuo MATSUDO ,  Chishio KOSHIMIZU

Inventor： Tatsuo MATSUDO ,  Chishio KOSHIMIZU

IPC: G01K11/32

CPC classification number: G01K11/12 ,  G01J5/0007 ,  G01J5/0044 ,  G01J5/0821 ,  G01J2005/583

Abstract: A temperature measuring apparatus and a temperature measuring method that may simultaneously measure temperatures of objects in processing chambers. The temperature measuring apparatus includes a first light separating unit which divides light from the light source into measurement lights; second light separating units which divide the measurement lights from the first light separating unit into measurement lights and reference lights; third light separating units which further divide the measurement lights into first to n-th measurement lights; a reference light reflecting unit which reflects the reference lights; an light path length changing unit which changes light path lengths of the reference lights reflected by the reference light reflecting unit; and photodetectors which measure interference between the first to n-th measurement lights reflected by the objects to be measured and the reference lights reflected by the reference light reflecting unit.

Abstract translation: 可以同时测量处理室中的物体的温度的温度测量装置和温度测量方法。 温度测量装置包括：将来自光源的光分成测量光的第一光分离单元; 第二光分离单元，其将测量光从第一光分离单元分离成测量光和参考光; 第三光分离单元，其进一步将测量光分为第一至第n测量光; 反射参考光的参考光反射单元; 光路长度改变单元，改变由参考光反射单元反射的参考光的光路长度; 以及光检测器，其测量由被测量物体反射的第一至第n测量光与由参考光反射单元反射的参考光之间的干涉。

公开(公告)号：US20120073781A1

公开(公告)日：2012-03-29

申请号：US13240274

申请日：2011-09-22

Applicant: Jun YAMAWAKU ,  Chishio KOSHIMIZU ,  Tatsuo MATSUDO ,  Kenji NAGAI

Inventor： Jun YAMAWAKU ,  Chishio KOSHIMIZU ,  Tatsuo MATSUDO ,  Kenji NAGAI

IPC: B60H1/00

CPC classification number: H01L21/67248 ,  G01J9/02 ,  G01J2005/583

Abstract: The temperature control system includes: a susceptor which allows an object to be processed to be held on a top surface thereof and includes a flow path, through which a temperature adjusting medium flows, formed therein; a temperature measuring unit which measures a temperature of the object to be processed held on the top surface of the susceptor; a first temperature adjusting unit which adjusts a temperature of the temperature adjusting medium flowing through the flow path; and a second temperature adjusting unit which is disposed between the susceptor and the first temperature adjusting unit, and adjusts a temperature of the temperature adjusting medium based on a result of the measurement of the temperature measuring unit.

Abstract translation: 温度控制系统包括：一个允许被处理物体被保持在其顶面上的基座，并且包括在其中形成温度调节介质流过的流路; 温度测量单元，其测量保持在所述基座的顶表面上的被处理物体的温度; 第一温度调节单元，其调节流过所述流路的温度调节介质的温度; 以及第二温度调节单元，其设置在所述基座和所述第一温度调节单元之间，并且基于所述温度测量单元的测量结果来调节所述温度调节介质的温度。

公开(公告)号：US07357570B2

公开(公告)日：2008-04-15

申请号：US10542298

申请日：2004-01-11

Applicant: Georg Schuele

Inventor： Georg Schuele

IPC: G01J5/00 ,  A61B5/00 ,  G01N21/85 ,  G01N21/47 ,  G01N21/63

CPC classification number: G01J5/58 ,  A61B5/0066 ,  A61B5/01 ,  A61F9/008 ,  A61F2009/00851 ,  A61F2009/00863 ,  G01J5/0022 ,  G01J5/0025 ,  G01J2005/583

Abstract: A method and device for determining the temperature of a sample, wherein a probing light beam is directed onto the sample whereby at least two partial beams of the probing light pass through paths of different lengths inside the sample by backscattering or reflecting the beams from at least two different depths in the sample, returning the partial beams to an analysis unit, and producing an interference pattern in the analysis unit by means of an interferometric device which uses one light beam as a reference for evaluating the interference pattern in an evaluating unit, wherein the signal intensity of the partial beam is determined counter to the optical path and the temperature displacement and temperature of the sample are determined by the temperature adjustment of the signal intensity.

Abstract translation: 一种用于确定样品的温度的方法和装置，其中探测光束被引导到样品上，由此探测光的至少两个部分光束通过后向散射或至少反射来自样品中的不同长度的路径 样本中的两个不同的深度，将部分光束返回到分析单元，并且通过使用一个光束作为评估单元中的干涉图案的参考的干涉测量装置在分析单元中产生干涉图案，其中 确定部分光束的信号强度与光路相反，并且通过信号强度的温度调节来确定样品的温度位移和温度。

公开(公告)号：US20070045541A1

公开(公告)日：2007-03-01

申请号：US11466347

申请日：2006-08-22

Applicant: Hakan Urey ,  Hamdi Torun

Inventor： Hakan Urey ,  Hamdi Torun

IPC: G01J5/00

CPC classification number: G01J5/58 ,  G01J5/38 ,  G01J5/40 ,  G01J2005/583

Abstract: The present invention relates to thermal detectors and the application of such to devices and methods of detecting the infrared images using thermal detectors. For example, by using optical measuring systems in combination with at least one light source to measure changes position of a movable anchored surface coupled to an absorption surface such that the movable anchored surface changes position due to absorption of infrared radiation by the absorption surface. In another example, by combining a detector pixel (infrared radiation sensitive) with an optical measuring device such as an interferometer.

Abstract translation: 本发明涉及热检测器及其应用于使用热检测器检测红外图像的装置和方法。 例如，通过使用与至少一个光源组合的光学测量系统来测量耦合到吸收表面的可移动锚定表面的变化位置，使得可移动锚定表面由于吸收表面吸收红外辐射而改变位置。 在另一个示例中，通过将检测器像素（红外辐射敏感）与诸如干涉仪的光学测量装置组合。

公开(公告)号：US20040240517A1

公开(公告)日：2004-12-02

申请号：US10492889

申请日：2004-04-16

Inventor： John Howard

IPC: G01J005/00

CPC classification number: G01J5/58 ,  G01J3/45 ,  G01J5/00 ,  G01J5/0834 ,  G01J2005/583 ,  G01J2005/586

Abstract: Remote sensing of the temperature of a greybody or blackbody radiator is effected by passing its radiation (24) through a modulated infrared filter spectrometer. The infrared filter comprises, in sequence, a band pass filter (20), a first polariser (21) which polarises the radiation, an electro-optical element (22) which splits the polarised radiation into two orthogonally polarised components, and a second polariser (23). A lens (28) images the radiation leaving the second polariser onto a detector (27). The electrical signal from the detector (27) is input to a numerical analyser. The electro-optical element (22), typically comprising a birefringent crystal assembly (25) and a birefringent trim plate (26), is configured so that the net optical delay of the orthogonally polarised components passed through it is such that the recombined components are at or near a peak or trough in their interferogram. A sinusoidally varying voltage is applied to the electro-optical element to modulate the net delay of the components passed through the electro-optical element. The numerical analyser is programmed to compute the harmonic amplitude ratio (the ratio of signal amplitudes at the fundamental and second harmonic of the frequency of the modulating voltage) of the signal that it receives from the detector (27). The harmonic amplitude ratio is a function of the temperature of the radiator, which can be estimated by reference to a calibration look-up table.

Abstract translation: 通过使其辐射（24）通过调制的红外滤光器光谱仪来实现对灰体或黑体辐射体的温度的遥感。 红外滤光器依次包括带通滤波器（20），偏振辐射的第一偏振器（21），将偏振辐射分成两个正交极化分量的电光元件（22）和第二偏振器 （23）。 透镜（28）将离开第二偏振器的辐射图像到检测器（27）上。 来自检测器（27）的电信号被输入到数字分析器。 通常包括双折射晶体组件（25）和双折射装饰板（26）的电光元件（22）被配置为使得通过它的正交极化分量的净光学延迟使得重组组分为 在它们的干涉图中的峰或谷附近。 将正弦变化的电压施加到电光元件以调节通过电光元件的部件的净延迟。 数字分析仪被编程为计算其从检测器（27）接收的信号的谐波振幅比（在调制电压的频率的基波和二次谐波处的信号幅度的比率）。 谐波振幅比是散热器的温度的函数，可以通过参考校准查找表来估计。