MEMS actuators and switches
    13.
    发明授权
    MEMS actuators and switches 有权
    MEMS执行器和开关

    公开(公告)号:US08115576B2

    公开(公告)日:2012-02-14

    申请号:US11308358

    申请日:2006-03-18

    IPC分类号: H01H51/22

    摘要: MEMS structures employing movable conductive member and a number of current-carrying stationary contact terminals which advantageously permit higher current carrying capability that prior art devices in which currents flowed through movable conductive members. Current carrying capability in excess of 1.0 amp without the need for additional current limiting devices is realized thereby lowering overall system manufacturing costs for systems employing our structures.

    摘要翻译: 采用可移动导电构件和许多载流固定接触端子的MEMS结构,其有利地允许更高的载流能力,其中电流流过可移动导电构件的现有技术装置。 实现超过1.0安培的载流能力,而不需要额外的限流装置,从而降低了采用我们的结构的系统的整体系统制造成本。

    Metal contact RF MEMS single pole double throw latching switch
    15.
    发明授权
    Metal contact RF MEMS single pole double throw latching switch 失效
    金属接触RF MEMS单刀双掷闭锁开关

    公开(公告)号:US07629194B1

    公开(公告)日:2009-12-08

    申请号:US11845602

    申请日:2007-08-27

    IPC分类号: H01L21/00

    摘要: Apparatus for a micro-electro-mechanical switch that provides single pole, double throw switching action. The switch has two input lines and two output lines. The switch has a seesaw cantilever arm with contacts at each end that electrically connect the input lines with the output lines. The cantilever arm is latched into position by frictional forces between structures on the cantilever arm and structures on the substrate in which the cantilever arm is disposed. The state of the switch is changed by applying an electrostatic force at one end of the cantilever arm to overcome the mechanical force holding the other end of the cantilever arm in place.

    摘要翻译: 用于微机电开关的装置,其提供单极双掷切换动作。 开关有两条输入线和两条输出线。 开关具有跷跷板悬臂,每端具有触点,将输入线与输出线电连接。 悬臂由于悬臂上的结构与设置有悬臂的基板上的结构之间的摩擦力而被锁定到位。 通过在悬臂的一端施加静电力来克服将悬臂的另一端保持就位的机械力来改变开关的状态。

    MEMS thermal actuator and method of manufacture
    16.
    发明授权
    MEMS thermal actuator and method of manufacture 有权
    MEMS热致动器及其制造方法

    公开(公告)号:US07622783B2

    公开(公告)日:2009-11-24

    申请号:US11705739

    申请日:2007-02-14

    IPC分类号: H01L29/82

    摘要: A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.

    摘要翻译: 公开了一种分离的MEMS热致动器,其对热致动器的悬臂梁中的蠕变基本上不敏感。 在分离的MEMS热致动器中,嵌入的悬臂式驱动梁形成在同一平面上,但与被动梁分开,间隙小。 由于嵌入的悬臂驱动梁和被动梁不直接耦合,镶嵌悬臂驱动梁的静止位置的任何变化可能不会传递到被动梁,如果变化的幅度小于间隙的大小 。

    Hysteretic MEMS thermal device and method of manufacture
    17.
    发明授权
    Hysteretic MEMS thermal device and method of manufacture 有权
    迟滞MEMS热装置及其制造方法

    公开(公告)号:US07548145B2

    公开(公告)日:2009-06-16

    申请号:US11334438

    申请日:2006-01-19

    申请人: Paul J. Rubel

    发明人: Paul J. Rubel

    IPC分类号: H01H51/22

    摘要: A MEMS hysteretic thermal device may have a cantilevered beam which bends about one or more points in at least two substantially different directions. In one exemplary embodiment, the MEMS hysteretic thermal device is made from a first segment coupled to an anchor point, and also coupled to a second segment by a joint. Heating two respective drive beams causes the first segment to bend in a direction substantially about the anchor point and the second segment to bend in a direction substantially about the joint. By cooling the first drive beam faster than the second drive beam, the motion of the MEMS thermal device may be hysteretic. The MEMS hysteretic thermal device may be used for example, as an electrical switch or as a valve or piston.

    摘要翻译: MEMS迟滞热装置可以具有悬臂梁,其在至少两个基本上不同的方向上围绕一个或多个点弯曲。 在一个示例性实施例中,MEMS滞后热装置由耦合到锚定点的第一段制成,并且还通过接头耦合到第二段。 加热两个相应的驱动梁使得第一段在基本上围绕锚点的方向上弯曲,而第二段在基本上围绕接头的方向上弯曲。 通过比第二驱动光束更快地冷却第一驱动光束,MEMS热装置的运动可能是滞后的。 MEMS迟滞热装置可以例如用作电开关或阀或活塞。

    Microelectromechanical safing and arming apparatus
    19.
    发明授权
    Microelectromechanical safing and arming apparatus 有权
    微机电安全和布防装置

    公开(公告)号:US07383774B1

    公开(公告)日:2008-06-10

    申请号:US11386345

    申请日:2006-03-22

    IPC分类号: F42C15/24

    摘要: A two-stage acceleration sensing apparatus is disclosed which has applications for use in a fuze assembly for a projected munition. The apparatus, which can be formed by bulk micromachining or LIGA, can sense acceleration components along two orthogonal directions to enable movement of a shuttle from an “as-fabricated” position to a final position and locking of the shuttle in the final position. With the shuttle moved to the final position, the apparatus can perform one or more functions including completing an explosive train or an electrical switch closure, or allowing a light beam to be transmitted through the device.

    摘要翻译: 公开了一种两级加速度感测装置,其具有用于预计弹药的引信组件中的应用。 可以通过体积微加工或LIGA形成的装置可以沿着两个正交方向感测加速度分量,以使梭子从“制造”位置移动到最终位置,并将梭子锁定在最终位置。 当梭子移动到最终位置时,该装置可以执行一个或多个功能,包括完成爆炸火车或电开关闭合,或允许光束通过装置传输。

    Tensile-stressed microelectromechanical apparatus and microelectromechanical relay formed therefrom
    20.
    发明授权
    Tensile-stressed microelectromechanical apparatus and microelectromechanical relay formed therefrom 有权
    拉伸应力微机电装置和由其形成的微机电继电器

    公开(公告)号:US07339454B1

    公开(公告)日:2008-03-04

    申请号:US11103311

    申请日:2005-04-11

    申请人: James G. Fleming

    发明人: James G. Fleming

    IPC分类号: H01H37/48 H01H37/50

    摘要: A microelectromechanical (MEM) apparatus is disclosed which includes a shuttle suspended above a substrate by two or more sets of tensile-stressed beams which are operatively connected to the shuttle and which can comprise tungsten or a silicon nitride/polysilicon composite structure. Initially, the tensile stress in each set of beams is balanced. However, the tensile stress can be unbalanced by heating one or more of the sets of beams; and this can be used to move the shuttle over a distance of up to several tens of microns. The MEM apparatus can be used to form a MEM relay having relatively high contact and opening forces, and with or without a latching capability.

    摘要翻译: 公开了一种微机电(MEM)装置,其包括通过两个或更多组可拉伸应力梁悬挂在基板上方的梭,其可操作地连接到梭,并且其可以包括钨或氮化硅/多晶硅复合结构。 最初,每组梁的拉伸应力是平衡的。 然而,拉伸应力可以通过加热一组或多束光束而不平衡; 并且这可以用于将梭子移动高达几十微米的距离。 可以使用MEM装置来形成具有相对高的接触和打开力并具有或不具有锁定能力的MEM继电器。