MICRO HYBRID DIFFERENTIAL/TRIODE ION PUMP
    16.
    发明申请
    MICRO HYBRID DIFFERENTIAL/TRIODE ION PUMP 审中-公开
    微混合差速器/三通离子泵

    公开(公告)号:US20150311048A1

    公开(公告)日:2015-10-29

    申请号:US14448411

    申请日:2014-07-31

    Abstract: An ion pump includes at least one electron source configured to emit electrons into the ion pump; at least one cathode positioned across the ion pump from the at least one electron source; a high-voltage grid positioned between the at least one electron source and the at least one cathode. The high-voltage grid is configured to draw the electrons in between the at least one electron source and the at least one cathode where the electrons collide with gas molecules causing the gas molecules to ionize. The at least one cathode is configured to draw ionized gas molecules toward the at least one cathode such that the ionized gas molecules are trapped by or near the at least one cathode.

    Abstract translation: 离子泵包括配置成将电子发射到离子泵中的至少一个电子源; 从所述至少一个电子源穿过所述离子泵的至少一个阴极; 位于所述至少一个电子源和所述至少一个阴极之间的高压电网。 高电压栅格被配置为将电子吸引在至少一个电子源和至少一个阴极之间,其中电子与气体分子碰撞导致气体分子离子化。 所述至少一个阴极被配置成将离子化气体分子吸向所述至少一个阴极,使得所述电离气体分子被所述至少一个阴极捕获或附近。

    THIN FILM EDGE FIELD EMITTER BASED MICRO ION PUMP
    17.
    发明申请
    THIN FILM EDGE FIELD EMITTER BASED MICRO ION PUMP 审中-公开
    薄膜边缘场发射体微型离子泵

    公开(公告)号:US20150240797A1

    公开(公告)日:2015-08-27

    申请号:US14277309

    申请日:2014-05-14

    Inventor: Steven Tin

    Abstract: A micro-ion pump is provided. The micro-ion pump includes a plurality of thin-film-edge field emitters, a first gate electrode, a second gate electrode, and a high voltage anode. The plurality of thin-film-edge field emitters is in a first X-Z plane. The plurality of thin-film-edge field emitters has a respective plurality of end faces with a high aspect ratio in at least one Y-Z plane. The first gate electrode is in a second X-Z plane offset from the first X-Z plane. The second gate electrode is positioned in a third X-Z plane offset from the first X-Z plane. The high voltage anode is in a fourth X-Z plane offset from the plurality of thin-film-edge field emitters in the first X-Z plane. The second gate electrode is between the high voltage anode and the plurality of thin-film-edge field emitters.

    Abstract translation: 提供微型离子泵。 微离子泵包括多个薄膜边缘场致发射体,第一栅电极,第二栅电极和高电压阳极。 多个薄膜边缘场致发射体处于第一X-Z平面。 多个薄膜边缘场致发射体在至少一个Y-Z平面中具有高纵横比的相应多个端面。 第一栅电极处于从第一X-Z平面偏移的第二X-Z平面。 第二栅电极位于从第一X-Z平面偏移的第三X-Z平面中。 高电压阳极处于与第一X-Z平面中的多个薄膜边缘场发射体偏移的第四X-Z平面。 第二栅电极位于高电压阳极和多个薄膜边缘场发射器之间。

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