Technique for improving the resolution of an A/D converter
    231.
    发明授权
    Technique for improving the resolution of an A/D converter 失效
    提高A / D转换器分辨率的技术

    公开(公告)号:US5265039A

    公开(公告)日:1993-11-23

    申请号:US716752

    申请日:1991-06-18

    CPC classification number: G01J3/45 H03M1/201

    Abstract: A technique for improving the resolution of an A/D converter (30). The input analog signal is sampled to generate an analog level and the analog level is held (20) for an interval. A dither signal (22) is superimposed (23) on the held level to generate a fluctuating voltage. This fluctuating voltage is then sampled (25) a plurality of at least N times, and N sampled values are communicated to the A/D converter (30) so that N digitized values are generated. These digitized values are averaged (32) to provide an output having a digitization error reduced by a factor of up to N.sup.1/2.

    Abstract translation: 一种用于提高A / D转换器(30)的分辨率的技术。 输入模拟信号被采样以产生模拟电平,并且模拟电平保持(20)一段间隔。 抖动信号(22)在保持电平上叠加(23)以产生波动电压。 然后对该波动电压进行采样(25)多次至少N次,并且将N个采样值传送到A / D转换器(30),从而生成N个数字化值。 这些数字化值被平均(32),以提供数字化误差降低到N1 / 2的因子的输出。

    Radiation interference devices
    232.
    发明授权
    Radiation interference devices 失效
    辐射干扰装置

    公开(公告)号:US4722604A

    公开(公告)日:1988-02-02

    申请号:US461203

    申请日:1983-01-20

    CPC classification number: G01J9/02 G01J2009/0211 G01J3/45

    Abstract: An interference device for discriminating between radiation sources of differing coherence length comprises means to divide received radiation from a source into two components. A path difference, defining a coherence length cut-off, is introduced into the path of one component and the components are brought together for interference. The recombined light passes through a reticle with alternate opaque and tranparent bars and an optical band-pass filter to a detector. Interference fringes present in the plane of the reticle are swept across the reticle by the action of the collection optical system of the device which includes a scanning rotating mirror. Two similar devices can be arranged for band-pass coherence length filtering and when used in conjunction with a light soruce whose coherence is modulated the device can be used for signalling.

    Abstract translation: 用于区分不同相干长度的辐射源的干扰装置包括将来自源的接收辐射分成两部分的装置。 定义相干长度截止的路径差被引入到一个组件的路径中,并且组件被聚集在一起用于干扰。 重新组合的光通过具有交替的不透明透明棒和光学带通滤光器的掩模版到检测器。 通过包括扫描旋转镜的装置的收集光学系统的作用,存在于掩模版的平面中的干涉条纹扫过光罩。 可以安排两个类似的装置用于带通相干长度滤波,并且当与光耦合器一起使用时,其相干性被调制,该装置可以用于信令。

    Optical device including movable mirror and first light passage

    公开(公告)号:US12031863B2

    公开(公告)日:2024-07-09

    申请号:US16625688

    申请日:2018-07-06

    CPC classification number: G01J3/021 G01B9/02 G02B26/12 G01J3/45

    Abstract: An optical device includes: a base which includes a main surface; a movable mirror which includes a mirror surface; a first and a second elastic support portions which support the movable mirror so as to be movable along a first direction perpendicular to the main surface; an actuator which moves the movable mirror; and a first optical function portion which is disposed at one side of the movable mirror in a second direction perpendicular to the first direction. The first elastic support portion includes a pair of first levers extending from the movable mirror toward both sides of the first optical function portion in a third direction perpendicular to the first and the second directions. A length of each of first levers in the second direction is larger than the shortest distance between an outer edge of the mirror surface and an edge of the first optical function portion.

    Optical MEMS based monitoring system

    公开(公告)号:US11999612B2

    公开(公告)日:2024-06-04

    申请号:US17525950

    申请日:2021-11-14

    Applicant: Naiqian Han

    Inventor: Naiqian Han

    Abstract: Provided is an optical micro-electro-mechanical system (MEMS) based monitoring system, comprising: a broadband light source, a tunable optical filter (TOF), an optical etalon, a plurality of optical receivers, a plurality of optical couplers, and a plurality of optical MEM sensors; the TOF is configured to capture a transmission, reflection or interference spectrum of the optical MEMS sensors; wherein the peak or depression wavelength in the transmission, reflection or interference spectrum corresponds to a parameter of the pressure, temperature or stress, and the peak or depression wavelength can be obtained by comparing the spectrum with the periodic spectrum of the optical etalon, the optical etalon has an absolute wavelength mark; and the optical MEMS sensor comprises an optical MEMS resonator. The parameter of the pressure, temperature or stress can be obtained by the peak or depression wavelength in the transmission, the reflection or the interference spectrum of the optical MEMS sensor.

    LASER DEVICE, EVALUATION METHOD FOR LASER LIGHT SPECTRUM, AND ELECTRONIC DEVICE MANUFACTURING METHOD

    公开(公告)号:US20240003743A1

    公开(公告)日:2024-01-04

    申请号:US18467121

    申请日:2023-09-14

    CPC classification number: G01J3/45

    Abstract: A laser device connectable to an exposure apparatus includes a spectrometer configured to generate a measurement waveform from an interference pattern of laser light output from the laser device; and a processor configured to calculate a first spectral waveform indicating a relationship between a wavelength and a light intensity using the measurement waveform, calculate a representative waveform included in a wavelength range of the first spectral waveform, and calculate an evaluation value of the first spectral waveform using a first integration value obtained by integrating, over the wavelength range, a product of a function of a wavelength deviation from the representative wavelength and the light intensity.

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