Cleaner for molding apparatus of semiconductor chip packages
    24.
    发明授权
    Cleaner for molding apparatus of semiconductor chip packages 失效
    半导体芯片封装成型装置用清洁剂

    公开(公告)号:US06808379B2

    公开(公告)日:2004-10-26

    申请号:US10029165

    申请日:2001-12-20

    Applicant: Cheol Joon Yoo

    Inventor: Cheol Joon Yoo

    Abstract: An apparatus for cleaning a mold die set includes a pair of brushes, a pair of vacuum holes, and multiple nozzles. One of the brushes is positioned to scrub a first surface of the mold die set, and the other of the brushes is positioned to scrub a second surface of the mold die set to separate a residue from the first and second surfaces of the mold die set. The vacuum holes receives the separated residue from the first and second surfaces of the mold die set, and through the nozzles, a parting compound is provided to coat the first and second surfaces of the mold die set. The apparatus further includes multiple air holes through which air is blown to the first and second surfaces of the mold die set. An apparatus for semiconductor manufacturing includes a mold die set having a first surface and a second surface and a mold die set cleaner that can remove a residue from the first and second surfaces of the mold die set and coat a parting compound on the first and second surfaces.

    Abstract translation: 用于清洁模具模具的装置包括一对刷子,一对真空孔和多个喷嘴。 刷子中的一个定位成擦拭模具模具的第一表面,并且另一个刷子被定位成擦拭模具模具的第二表面以将残留物与模具模具的第一和第二表面分离 。 真空孔从模具模具的第一和第二表面接收分离的残留物,并且通过喷嘴,提供分开化合物以涂覆模具模具的第一和第二表面。 该装置还包括多个气孔,空气通过该空气吹送到模具模具的第一和第二表面。 一种用于半导体制造的设备包括具有第一表面和第二表面的模具模具和模具模具清洁器,其可以从模具模具的第一和第二表面去除残留物并在第一和第二表面上涂覆分离化合物 表面。

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