Ferroelectric capacitor and method of manufacturing the same

    公开(公告)号:US07002193B2

    公开(公告)日:2006-02-21

    申请号:US10270521

    申请日:2002-10-16

    Abstract: A ferroelectric capacitor and a method of manufacturing the same are provided, wherein the ferroelectric capacitor of a semiconductor device, which sequentially includes a lower electrode, a ferroelectric layer, and an upper electrode on a conductive layer connected to a transistor formed on a semiconductor substrate, includes an oxidation preventing layer between the conductive layer and the lower electrode. The oxidation preventing layer prevents the conductive layer from being oxidized during high-temperature heat treatment of the ferroelectric layer. Accordingly, the oxidation resistivity of the interfaces of the conductive layer, used as a storage node, and the lower electrode, which faces the conductive layer, increases, so a temperature at which a ferroelectric thin layer is formed can be also increased. Consequently, a ferroelectric thin layer having excellent characteristics may be obtained.

    Single transistor type magnetic random access memory device and method of operating and manufacturing the same
    23.
    发明申请
    Single transistor type magnetic random access memory device and method of operating and manufacturing the same 有权
    单晶体管型磁随机存取存储器件及其操作和制造方法

    公开(公告)号:US20050169048A1

    公开(公告)日:2005-08-04

    申请号:US11097157

    申请日:2005-04-04

    CPC classification number: H01L27/228 B82Y10/00

    Abstract: A single transistor type magnetic random access memory device and a method of operating and manufacturing the same, wherein the single transistor type magnetic random access memory device includes a substrate, first and second doped regions spaced apart from each other, a gate dielectric layer on a portion of the semiconductor substrate between the first and second doped regions, a magnetic tunnel junction on the gate dielectric layer, word lines on the magnetic tunnel junction extending in a first direction which is the same direction as the second doped region, bit lines connected to the first doped region in a second direction perpendicular to the first direction, and an insulating layer covering the gate dielectric layer, the magnetic tunnel junction, and the word lines. The single transistor type magnetic random access memory device has a simple circuit structure, has a prolonged lifetime and is easy to manufacture.

    Abstract translation: 单晶体管型磁随机存取存储器件及其操作和制造方法,其中单晶体管型磁随机存取存储器件包括衬底,彼此间隔开的第一和第二掺杂区,栅极电介质层 在第一和第二掺杂区域之间的半导体衬底的一部分,栅极电介质层上的磁性隧道结,在与第二掺杂区域相同的第一方向延伸的磁性隧道结上的字线,位线连接到 垂直于第一方向的第二方向上的第一掺杂区域和覆盖栅极介电层,磁性隧道结和字线的绝缘层。 单晶体管型磁随机存取存储器件具有简单的电路结构,寿命长,易于制造。

    Single transistor type magnetic random access memory device and method of operating and manufacturing the same
    24.
    发明授权
    Single transistor type magnetic random access memory device and method of operating and manufacturing the same 有权
    单晶体管型磁随机存取存储器件及其操作和制造方法

    公开(公告)号:US06815783B2

    公开(公告)日:2004-11-09

    申请号:US10252532

    申请日:2002-09-24

    CPC classification number: H01L27/228 B82Y10/00

    Abstract: A single transistor type magnetic random access memory device and a method of operating and manufacturing the same, wherein the single transistor type magnetic random access memory device includes a substrate, first and second doped regions spaced apart from each other, a gate dielectric layer on a portion of the semiconductor substrate between the first and second doped regions, a magnetic tunnel junction on the gate dielectric layer, word lines on the magnetic tunnel junction extending in a first direction which is the same direction as the second doped region, bit lines connected to the first doped region in a second direction perpendicular to the first direction, and an insulating layer covering the gate dielectric layer, the magnetic tunnel junction, and the word lines. The single transistor type magnetic random access memory device has a simple circuit structure, has a prolonged lifetime and is easy to manufacture.

    Ferroelectric capacitor with rhodium electrodes
    25.
    发明授权
    Ferroelectric capacitor with rhodium electrodes 失效
    铁电电容与铑电极

    公开(公告)号:US5751540A

    公开(公告)日:1998-05-12

    申请号:US618320

    申请日:1996-03-19

    CPC classification number: H01L28/75 H01L28/60 H01L28/55

    Abstract: A ferroelectric capacitor used as a memory cell in a ferroelectric random access memory (FRAM) is provided. The ferroelectric capacitor includes a substrate, an insulating layer formed on the substrate, a Rh lower electrode provided on the insulating layer, an adhesive layer between the insulating layer and the lower electrode, a ferroelectric layer provided on the lower electrode, and a Rh upper electrode provided on the ferroelectric layer. The Rh used as the electrode material is not affected by diffusion of Si due to its fine structure when compared to a Pt electrode, and has excellent electrical properties due to better electrical conductivity and good heat-transfer properties.

    Abstract translation: 提供了用作铁电随机存取存储器(FRAM)中的存储单元的铁电电容器。 铁电电容器包括基板,形成在基板上的绝缘层,设置在绝缘层上的Rh下电极,绝缘层和下电极之间的粘合层,设置在下电极上的铁电层,以及Rh上电极 设置在铁电层上的电极。 与Pt电极相比,用作电极材料的Rh不受其精细结构的Si的扩散的影响,并且由于更好的导电性和良好的传热性能而具有优异的电性能。

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