METHOD OF LIFT-OFF PATTERNING THIN FILMS IN SITU EMPLOYING PHASE CHANGE RESISTS
    26.
    发明申请
    METHOD OF LIFT-OFF PATTERNING THIN FILMS IN SITU EMPLOYING PHASE CHANGE RESISTS 有权
    在采用相位变化电阻的情况下提取薄膜薄膜的方法

    公开(公告)号:US20120295382A1

    公开(公告)日:2012-11-22

    申请号:US13465065

    申请日:2012-05-07

    CPC classification number: H01L51/0016

    Abstract: Method for making a patterned thin film of an organic semiconductor. The method includes condensing a resist gas into a solid film onto a substrate cooled to a temperature below the condensation point of the resist gas. The condensed solid film is heated selectively with a patterned stamp to cause local direct sublimation from solid to vapor of selected portions of the solid film thereby creating a patterned resist film. An organic semiconductor film is coated on the patterned resist film and the patterned resist film is heated to cause it to sublime away and to lift off because of the phase change.

    Abstract translation: 制造有机半导体图案化薄膜的方法。 该方法包括将固体膜冷凝到冷却至低于抗蚀剂气体冷凝点温度的基底上。 使用图案化的印模选择性地冷凝凝固的固体膜,以引起固体膜的选定部分的固体至蒸气的局部直接升华,从而形成图案化的抗蚀剂膜。 将有机半导体膜涂覆在图案化的抗蚀剂膜上,并且图案化的抗蚀剂膜被加热以使其升华并由于相变而脱落。

    Method and Apparatus for Depositing LED Organic Film
    27.
    发明申请
    Method and Apparatus for Depositing LED Organic Film 审中-公开
    用于沉积LED有机膜的方法和装置

    公开(公告)号:US20120015104A1

    公开(公告)日:2012-01-19

    申请号:US13088323

    申请日:2011-04-15

    CPC classification number: H01L51/0011 B05D1/12 H01L51/56

    Abstract: In one embodiment the disclosure relates to an apparatus for depositing an organic material on a substrate, including a source heater for heating organic particles to form suspended organic particles; a transport stream for delivering the suspended organic particles to a discharge nozzle, the discharge nozzle having a plurality of micro-pores, the micro-pores providing a conduit for passage of the suspended organic particles; and a nozzle heater for pulsatingly heating the micro-pores nozzle to discharge the suspended organic particles from the discharge nozzle.

    Abstract translation: 在一个实施方案中,本公开涉及一种用于在基底上沉积有机材料的装置,包括用于加热有机颗粒以形成悬浮的有机颗粒的源加热器; 用于将悬浮的有机颗粒输送到排出喷嘴的输送流,排出喷嘴具有多个微孔,微孔提供用于悬浮的有机颗粒通过的导管; 以及喷嘴加热器,用于脉动地加热微孔喷嘴以从排出喷嘴排出悬浮的有机颗粒。

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