公开(公告)号：US07991035B2

公开(公告)日：2011-08-02

申请号：US12599991

申请日：2009-02-24

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01S5/00

CPC classification number: H01S5/42 ,  B82Y20/00 ,  H01S5/041 ,  H01S5/105 ,  H01S5/2027 ,  H01S5/2063 ,  H01S5/2081 ,  H01S5/34326 ,  H01S5/34333 ,  H01S2301/176

Abstract: Provided is a surface emitting laser array using a photonic crystal, which allows an active layer to be shared without disconnecting the active layer between the individual surface emitting lasers adjacent to each other, and enables high-density arraying easily. The surface emitting laser array includes: at least two surface emitting lasers formed on a substrate, each having a laminated structure of multiple semiconductor layers including a semiconductor multilayer mirror, an active layer, and a photonic crystal having a refractive index profile in an in-plane direction, the photonic crystal and the semiconductor multilayer mirror in the laminated structure forming a waveguide for guiding light in a resonance mode; and a region without the photonic crystal provided between adjacent surface emitting lasers in the surface emitting laser array, in which the surface emitting lasers have the same semiconductor multilayer mirror and the same active layer.

Abstract translation: 提供了使用光子晶体的表面发射激光器阵列，其允许共享活性层而不断开彼此相邻的各个表面发射激光器之间的有源层，并且能够容易地进行高密度排列。 表面发射激光器阵列包括：形成在衬底上的至少两个表面发射激光器，每个具有包括半导体多层反射镜，有源层和具有折射率分布的光子晶体的多个半导体层的层叠结构， 平面方向，层叠结构中的光子晶体和半导体多层反射镜，形成用于引导谐振模式的光的波导; 以及在表面发射激光器阵列中的相邻表面发射激光器之间提供没有光子晶体的区域，其中表面发射激光器具有相同的半导体多层反射镜和相同的有源层。

公开(公告)号：US07888149B2

公开(公告)日：2011-02-15

申请号：US12562605

申请日：2009-09-18

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01L21/00

CPC classification number: H01S5/18391 ,  H01S5/18311 ,  H01S5/2086 ,  H01S5/209 ,  H01S2301/166

Abstract: Provided is a surface emitting laser or the like capable of suppressing horizontal misalignment between the surface relief structure and the current confining structure to make higher the precision of the alignment, to thereby obtain single transverse mode characteristics with stability. The surface emitting laser having a semiconductor layer laminated therein includes: a first etching region formed by etching a part of the upper mirror; and a second etching region formed by performing etching from a bottom portion of the first etching region to a semiconductor layer for forming a current confining structure, in which a depth of the second etching region is smaller than a depth of the first etching region.

公开(公告)号：US20110027925A1

公开(公告)日：2011-02-03

申请号：US12837039

申请日：2010-07-15

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01L21/00 ,  H01S5/00 ,  B41J2/435

CPC classification number: H01S5/18311 ,  H01S5/0286 ,  H01S5/18313 ,  H01S5/18316 ,  H01S5/18333 ,  H01S5/18347 ,  Y10S257/918

Abstract: A surface emitting laser includes a lower multilayer mirror, an active layer, and an upper multilayer mirror stacked onto a substrate. A first current confinement layer having a first electrically conductive region and a first insulating region is formed above or below the active layer using a first trench structure. A second current confinement layer having a second electrically conductive region and a second insulating region is formed above or below the first current confinement layer using a second trench structure. The first and second trench structures extend from a top surface of the upper multilayer mirror towards the substrate such that the second trench structure surrounds the first trench structure. When the surface emitting laser is viewed in an in-plane direction of the substrate, a boundary between the first electrically conductive region and the first insulating region is disposed inside the second electrically conductive region.

Abstract translation: 表面发射激光器包括层叠在基板上的下多层反射镜，有源层和上多层反射镜。 使用第一沟槽结构在有源层的上方或下方形成具有第一导电区域和第一绝缘区域的第一电流限制层。 使用第二沟槽结构在第一电流限制层的上方或下方形成具有第二导电区域和第二绝缘区域的第二电流限制层。 第一和第二沟槽结构从上多层反射镜的顶表面延伸到衬底，使得第二沟槽结构围绕第一沟槽结构。 当在基板的面内方向上观察表面发射激光时，第一导电区域和第一绝缘区域之间的边界设置在第二导电区域的内部。

公开(公告)号：US07796667B2

公开(公告)日：2010-09-14

申请号：US12234037

申请日：2008-09-19

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01S5/00

CPC classification number: H01S5/423 ,  B41J2/45

Abstract: Provided is a two-dimensional surface-emitting laser array that enables to dispose more elements in a smaller area and enables compact size, high resolution, and high speed thereof. The two-dimensional surface-emitting laser array includes surface-emitting laser elements arranged in a two-dimensional manner of m rows and n columns (m is an integer of two or larger, and n is an integer of three or larger). The interval between mesas for arranging electrical wirings for individually driving the surface-emitting laser elements is assigned so that the interval in the m row direction increases according to the number of the electrical wirings passing through between the mesas.

Abstract translation: 提供了一种二维表面发射激光器阵列，其能够在更小的面积中配置更多的元件，并且能够实现紧凑的尺寸，高分辨率和高速度。 二维表面发射激光器阵列包括以m行和n列（m为2或更大的整数，n为3或更大的整数）的二维方式布置的表面发射激光器元件。 分配用于单独驱动表面发射激光元件的电气布线的台面之间的间隔被分配，使得m行方向上的间隔根据在台面之间通过的电气布线的数量而增加。

公开(公告)号：US20090232179A1

公开(公告)日：2009-09-17

申请号：US12105481

申请日：2008-04-18

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01S5/00

CPC classification number: H01S5/18 ,  H01S5/0425 ,  H01S5/105

Abstract: A surface emitting laser having a photonic crystal layer 130 on a substrate 105 with an active layer therebetween, in which the photonic crystal layer includes at least a first periodic structure for resonating in an in-plane direction and a second periodic structure for modulating a light intensity distribution in an in-plane direction. The light intensity in the photonic crystal layer is periodically distributed to a region having high light intensity and a region having low light intensity by the second periodic structure. Further, a conductive film 170 for performing current injection into the active layer is selectively provided just above the region having low light intensity. The surface emitting laser provides suppression of light absorption and highly efficient current injection into an active layer to attain a high power.

Abstract translation: 一种表面发射激光器，其具有在衬底105上的光子晶体层130，其间具有有源层，其中光子晶体层至少包括用于在面内方向上谐振的第一周期性结构和用于调制光的第二周期性结构 在平面方向上的强度分布。 光子晶体层中的光强度通过第二周期性结构周期性地分布到具有高光强度的区域和具有低光强度的区域。 此外，用于在有源层进行电流注入的导电膜170选择性地设置在具有低光强度的区域正上方。 表面发射激光器提供抑制光吸收和高效电流注入有源层以获得高功率。

公开(公告)号：US20090086786A1

公开(公告)日：2009-04-02

申请号：US12234037

申请日：2008-09-19

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01S5/026

CPC classification number: H01S5/423 ,  B41J2/45

Abstract: Provided is a two-dimensional surface-emitting laser array that enables to dispose more elements in a smaller area and enables compact size, high resolution, and high speed thereof. The two-dimensional surface-emitting laser array includes surface-emitting laser elements arranged in a two-dimensional manner of m rows and n columns (m is an integer of two or larger, and n is an integer of three or larger). The interval between mesas for arranging electrical wirings for individually driving the surface-emitting laser elements is assigned so that the interval in the m row direction increases according to the number of the electrical wirings passing through between the mesas.

Abstract translation: 提供了一种二维表面发射激光器阵列，其能够在更小的面积中配置更多的元件，并且能够实现紧凑的尺寸，高分辨率和高速度。 二维表面发射激光器阵列包括以m行和n列（m为2或更大的整数，n为3或更大的整数）的二维方式布置的表面发射激光器元件。 分配用于单独驱动表面发射激光元件的电气布线的台面之间的间隔被分配，使得m行方向上的间隔根据在台面之间通过的电气布线的数量而增加。

公开(公告)号：US08897330B2

公开(公告)日：2014-11-25

申请号：US13824710

申请日：2011-10-05

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01S5/00 ,  B41J2/455 ,  B41J2/47 ,  H01S5/183 ,  H01S5/42

CPC classification number: H01S5/18 ,  B41J2/455 ,  B41J2/473 ,  H01S3/02 ,  H01S5/183 ,  H01S5/18313 ,  H01S5/1833 ,  H01S5/18361 ,  H01S5/18391 ,  H01S5/3202 ,  H01S5/423 ,  H01S2301/16 ,  H01S2301/166 ,  H01S2301/18

Abstract: The present invention provides a surface emitting laser that provides a sufficient optical output and is suitable as a light source intended for electrophotographic apparatuses, and a surface-emitting-laser array and an image forming apparatus each including the surface emitting laser.The surface emitting laser includes a first stepped structure on a front surface of a front mirror. In the first stepped structure, a difference L between an optical path length in a first area and an optical path length in a second area satisfies the following expression: (¼+N)λ

Abstract translation: 本发明提供一种表面发射激光器，其提供足够的光输出并且适合作为用于电子照相设备的光源，以及包括表面发射激光器的表面发射激光器阵列和图像形成装置。 表面发射激光器包括在前反射镜的前表面上的第一阶梯结构。 在第一阶梯结构中，第一区域的光路长度与第二区域的光程长度之间的差值L满足以下表达式：（¼+ N）λ<| L | <（¾+ N）λ其中 N是整数。

公开(公告)号：US08331414B2

公开(公告)日：2012-12-11

申请号：US13121677

申请日：2010-09-07

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01S5/00

CPC classification number: H01S5/18327 ,  H01S5/0655 ,  H01S5/18311 ,  H01S5/18394 ,  H01S5/2086 ,  H01S5/423 ,  H01S2301/166

Abstract: A surface-emitting laser includes a surface relief structure provided on an upper multilayer reflector, the surface relief structure including a region of a first laminate, a region of a second laminate that has a larger optical thickness than the first laminate, and a region of a third laminate that has a larger optical thickness than the first laminate and the second laminate.

Abstract translation: 表面发射激光器包括设置在上多层反射器上的表面浮雕结构，表面浮雕结构包括第一层压体的区域，具有比第一层压板更大的光学厚度的第二层压体的区域，以及 具有比第一层压体和第二层压体更大的光学厚度的第三层压体。

公开(公告)号：US08329524B2

公开(公告)日：2012-12-11

申请号：US13413973

申请日：2012-03-07

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01L33/06

CPC classification number: H01S5/18311 ,  H01S5/0286 ,  H01S5/18313 ,  H01S5/18316 ,  H01S5/18333 ,  H01S5/18347 ,  Y10S257/918

Abstract: A surface emitting laser includes a lower multilayer mirror, an active layer, and an upper multilayer mirror stacked onto a substrate. A first current confinement layer having a first electrically conductive region and a first insulating region is formed above or below the active layer using a first trench structure. A second current confinement layer having a second electrically conductive region and a second insulating region is formed above or below the first current confinement layer using a second trench structure. The first and second trench structures extend from a top surface of the upper multilayer mirror towards the substrate such that the second trench structure surrounds the first trench structure. When the surface emitting laser is viewed in an in-plane direction of the substrate, a boundary between the first electrically conductive region and the first insulating region is disposed inside the second electrically conductive region.

Abstract translation: 表面发射激光器包括层叠在基板上的下多层反射镜，有源层和上多层反射镜。 使用第一沟槽结构在有源层的上方或下方形成具有第一导电区域和第一绝缘区域的第一电流限制层。 使用第二沟槽结构在第一电流限制层的上方或下方形成具有第二导电区域和第二绝缘区域的第二电流限制层。 第一和第二沟槽结构从上多层反射镜的顶表面延伸到衬底，使得第二沟槽结构围绕第一沟槽结构。 当在基板的面内方向上观察表面发射激光时，第一导电区域和第一绝缘区域之间的边界设置在第二导电区域的内部。

公开(公告)号：US08249123B2

公开(公告)日：2012-08-21

申请号：US12853393

申请日：2010-08-10

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01S5/00

CPC classification number: H01S5/105 ,  B82Y20/00 ,  H01S5/183 ,  H01S5/2027 ,  H01S5/34326

Abstract: The present invention provides a surface emitting laser having a novel structure which eliminates necessity to provide a low refractive index medium at an interface of a photonic crystal layer on the side of a substrate. A multilayer mirror (1300), an active layer (1200), and a refractive index periodic structure layer (1020) whose refractive index changes periodically are laminated in a direction perpendicular to a substrate (1500). The refractive index periodic structure layer is structured so as to separate a light having a wavelength λ perpendicularly incident on the refractive index periodic structure into at least a transmitted light and a diffracted light. The multilayer mirror is structured so as to have a reflectance with regard to the diffracted light higher than a reflectance with regard to the transmitted light. A resonant mode is realized within a waveguide including the refractive index periodic structure layer and the multilayer mirror.

Abstract translation: 本发明提供了具有新颖结构的表面发射激光器，其消除了在基板侧的光子晶体层的界面处提供低折射率介质的必要性。 折射率周期性变化的多层反射镜（1300），有源层（1200）和折射率周期性结构层（1020）在与基板（1500）垂直的方向上层叠。 折射率周期结构层被构造成将具有垂直入射在折射率周期结构上的波长λ的光分离成至少透射光和衍射光。 多层反射镜被构造为具有相对于相对于透射光的反射率高的衍射光的反射率。 在包括折射率周期性结构层和多层反射镜的波导内实现谐振模式。