公开(公告)号：US06628039B2

公开(公告)日：2003-09-30

申请号：US09891700

申请日：2001-06-26

Applicant: Vijayakumar R. Dhuler

Inventor： Vijayakumar R. Dhuler

IPC: H02N1000

CPC classification number: H01H1/0036 ,  H01H59/0009 ,  H01H61/02 ,  H01H61/04 ,  H01H2001/0078 ,  H01H2061/006

Abstract: A microelectromechanical (MEMS) device is provided that includes a microelectronic substrate, a microactuator disposed on the substrate and formed of a single crystalline material, and at least one metallic structure disposed on the substrate adjacent the microactuator While the MEMS device can include various microactuators, one embodiment of the microactuator is a thermally actuated microactuator that may include a pair of spaced apart supports disposed on the substrate and at least one arched beam extending therebetween. Thus, on actuation, the microactuator moves between a first position in which the microactuator is spaced apart from the at least one metallic structure to a second position in which the microactuator operably engages the at least one metallic structure.

Abstract translation: 提供了一种微机电（MEMS）器件，其包括微电子衬底，设置在衬底上并由单晶材料形成的微致动器，以及设置在与微致动器相邻的衬底上的至少一个金属结构。虽然MEMS器件可以包括各种微致动器， 微致动器的一个实施例是热致动微致动器，其可以包括设置在基板上的一对间隔开的支撑件和在其间延伸的至少一个拱形梁。 因此，在致动时，微致动器在其中微致动器与至少一个金属结构间隔开的第一位置移动到第二位置，在第二位置，微致动器可操作地接合至少一个金属结构。

公开(公告)号：US06555201B1

公开(公告)日：2003-04-29

申请号：US09570628

申请日：2000-05-15

Applicant: Vijayakumar R. Dhuler ,  David A. Koester ,  Mark D. Walters ,  Karen W. Markus

Inventor： Vijayakumar R. Dhuler ,  David A. Koester ,  Mark D. Walters ,  Karen W. Markus

IPC: B32B310

CPC classification number: G02B26/0841 ,  B81B3/0051 ,  B81B2201/042 ,  B81B2203/058 ,  G02B26/101 ,  Y10S359/90 ,  Y10T428/24273 ,  Y10T428/24322 ,  Y10T428/24355 ,  Y10T428/24479

Abstract: An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90° angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis. Related methods are also disclosed.

Abstract translation: 机电装置包括其中具有第一孔的第一框架，悬挂在第一框架中的第二框架，其中第二框架在其中具有第二孔，以及悬挂在第二孔中的板。 第一对梁相对于第一框架沿着第一轴线支撑第二框架，使得第二框架围绕第一轴线旋转。 第二对梁相对于第二框架沿着第二轴支撑板，使得板相对于框架围绕第二轴线旋转。 第一和第二轴优选地以90°的角度相交。 第一致动器提供用于使第二框架围绕第一轴线相对于第一框架旋转的机械力。 第二致动器提供用于相对于第二框架围绕第二轴线旋转板的机械力。 因此，板可以相对于第一轴线和第二轴线独立地旋转。 还公开了相关方法。

公开(公告)号：US06256134B1

公开(公告)日：2001-07-03

申请号：US09628054

申请日：2000-07-28

Applicant: Vijayakumar R. Dhuler ,  David A. Koester ,  Mark D. Walters ,  Karen W. Markus

Inventor： Vijayakumar R. Dhuler ,  David A. Koester ,  Mark D. Walters ,  Karen W. Markus

IPC: G02B2608

CPC classification number: G02B26/0841 ,  B81B3/0051 ,  B81B2201/042 ,  B81B2203/058 ,  G02B26/101 ,  Y10S359/90 ,  Y10T428/24273 ,  Y10T428/24322 ,  Y10T428/24355 ,  Y10T428/24479

Abstract: An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90° angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis. Related methods are also disclosed.

Abstract translation: 机电装置包括其中具有第一孔的第一框架，悬挂在第一框架中的第二框架，其中第二框架在其中具有第二孔，以及悬挂在第二孔中的板。 第一对梁相对于第一框架沿着第一轴线支撑第二框架，使得第二框架围绕第一轴线旋转。 第二对梁相对于第二框架沿着第二轴支撑板，使得板相对于框架围绕第二轴线旋转。 第一和第二轴优选地以90°的角度相交。 第一致动器提供用于使第二框架围绕第一轴线相对于第一框架旋转的机械力。 第二致动器提供用于相对于第二框架围绕第二轴线旋转板的机械力。 因此，板可以相对于第一轴线和第二轴线独立地旋转。 还公开了相关方法。

公开(公告)号：US6087747A

公开(公告)日：2000-07-11

申请号：US285206

申请日：1999-04-01

Applicant: Vijayakumar R. Dhuler ,  David A. Koester ,  Mark D. Walters ,  Karen W. Markus

Inventor： Vijayakumar R. Dhuler ,  David A. Koester ,  Mark D. Walters ,  Karen W. Markus

IPC: G02B26/10 ,  B32B3/10 ,  B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  H02N1/00

CPC classification number: G02B26/0841 ,  B81B3/0051 ,  G02B26/101 ,  B81B2201/042 ,  B81B2203/058 ,  Y10S359/90 ,  Y10T428/24273 ,  Y10T428/24322 ,  Y10T428/24355 ,  Y10T428/24479

Abstract: An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90.degree. angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis. Related methods are also disclosed.

Abstract translation: 机电装置包括其中具有第一孔的第一框架，悬挂在第一框架中的第二框架，其中第二框架在其中具有第二孔，以及悬挂在第二孔中的板。 第一对梁相对于第一框架沿着第一轴线支撑第二框架，使得第二框架围绕第一轴线旋转。 第二对梁相对于第二框架沿着第二轴支撑板，使得板相对于框架绕第二轴线旋转。 第一和第二轴优选地以90°角相交。 第一致动器提供用于使第二框架围绕第一轴线相对于第一框架旋转的机械力。 第二致动器提供用于相对于第二框架围绕第二轴线旋转板的机械力。 因此，板可以相对于第一轴线和第二轴线独立地旋转。 还公开了相关方法。

公开(公告)号：US6023121A

公开(公告)日：2000-02-08

申请号：US232940

申请日：1999-01-19

Applicant: Vijayakumar R. Dhuler ,  Robert L. Wood ,  Ramaswamy Mahadevan

Inventor： Vijayakumar R. Dhuler ,  Robert L. Wood ,  Ramaswamy Mahadevan

IPC: B81B3/00 ,  B81C1/00 ,  F03G7/06 ,  F15C5/00 ,  F16K99/00 ,  G02B6/38 ,  G02B6/42 ,  H01H1/00 ,  H01H9/14 ,  H01H61/00 ,  H01H61/02 ,  H01H65/00 ,  H01H67/26 ,  H04Q1/16 ,  H02N10/00

CPC classification number: F16K99/0001 ,  B81B3/0024 ,  B81B3/0054 ,  F03G7/06 ,  F15C5/00 ,  F16K99/0011 ,  F16K99/0044 ,  H01H1/0036 ,  H01H61/02 ,  B81B2201/031 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  F16K2099/0071 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K99/0034 ,  G02B6/3803 ,  G02B6/4226 ,  H01H2001/0042 ,  H01H2001/0047 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H61/00 ,  H01H67/26 ,  H01H9/14 ,  Y10T29/49105

Abstract: A MEMS actuator is provided that produces significant forces and displacements while consuming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause further arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.

Abstract translation: 提供了一种MEMS致动器，其在消耗合理的功率的同时产生显着的力和位移。 MEMS致动器包括微电子基板，在基板上的间隔开的支撑件和在间隔开的支撑件之间延伸的金属拱形梁。 MEMS致动器还包括用于加热拱形梁以进一步拱起梁的加热器。 为了有效地将热量从加热器传递到金属拱形梁，金属拱形梁从加热器延伸过去并且稍微间隔开。 因此，MEMS致动器有效地将由加热器产生的热量转换成金属拱形梁的机械运动。 还提供了一系列其它MEMS器件，例如继电器，开关阵列和阀，其包括一个或多个MEMS致动器以便利用其有效的操作特性。 此外，还提供了一种制造MEMS致动器的方法。

公开(公告)号：US5962949A

公开(公告)日：1999-10-05

申请号：US965277

申请日：1997-11-06

Applicant: Vijayakumar R. Dhuler ,  Robert L. Wood

Inventor： Vijayakumar R. Dhuler ,  Robert L. Wood

IPC: G01B21/00 ,  B25J7/00 ,  B81B3/00 ,  B81B7/02 ,  F03G7/06 ,  G01B7/004 ,  G01B7/34 ,  G01N27/00 ,  G02B6/38 ,  G02B6/42 ,  H01H1/00 ,  H01H9/14 ,  H01H61/00 ,  H01H37/32 ,  H01L37/00

CPC classification number: F03G7/06 ,  B81B3/0024 ,  B81B2201/032 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  G02B6/3803 ,  G02B6/4226 ,  H01H1/0036 ,  H01H2001/0042 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H61/00 ,  H01H9/14

Abstract: A microelectromechanical (MEMS) positioning apparatus is provided that can precisely microposition an object in each of the X, Y and Z directions. The MEMS positioning apparatus includes a reference surface, a support disposed in a fixed position to the reference surface, and a stage defining an XY plane that is suspended adjacent to the support and over at least a portion of the reference surface. The MEMS positioning apparatus also includes at least one and, more typically, several actuators for precisely positioning the stage and, in turn, objects carried by the stage. For example, the MEMS positioning apparatus can include first and second MEMS actuators for moving the stage in the XY plane upon actuation. In addition, the MEMS positioning apparatus can include a Z actuator, such as a thermal bimorph structure, for moving the stage in the Z direction. As such, the MEMS positioning apparatus can precisely position the stage as well as any objects carried by the stage in each of the X, Y and Z directions. As a result of the construction of the MEMS positioning apparatus, the MEMS positioning apparatus can also be fabricated in an affordable, reliable and reproducible manner without compromising the precision alignment provided by the MEMS positioning apparatus.

Abstract translation: 提供了一种微机电（MEMS）定位装置，其能够精确地将对象在X，Y和Z方向中的每一个定位。 MEMS定位设备包括参考表面，设置在参考表面的固定位置的支撑件以及限定垂直于支撑件悬挂并在参考表面的至少一部分上方的XY平面的平台。 MEMS定位装置还包括至少一个并且更典型的几个致动器，用于精确地定位平台，并且依次由舞台承载的物体。 例如，MEMS定位装置可以包括用于在致动时在XY平面中移动台的第一和第二MEMS致动器。 此外，MEMS定位装置可以包括用于在Z方向上移动台的Z致动器，例如热双压电晶片结构。 因此，MEMS定位装置可以精确地定位舞台以及在X，Y和Z方向中的每一个中由舞台承载的任何物体。 作为MEMS定位装置的结构的结果，MEMS定位装置也可以以可承受的，可靠的和可再生的方式制造，而不会损害由MEMS定位装置提供的精确对准。

公开(公告)号：US5712609A

公开(公告)日：1998-01-27

申请号：US258427

申请日：1994-06-10

Applicant: Mehran Mehregany ,  Kenneth G. Goldman ,  Vijayakumar R. Dhuler

Inventor： Mehran Mehregany ,  Kenneth G. Goldman ,  Vijayakumar R. Dhuler

IPC: G01L1/18 ,  B81B3/00 ,  G01D9/18 ,  G01D15/00 ,  G01K5/60 ,  G01P15/08 ,  H01H1/00 ,  H01H9/00 ,  H01H35/14 ,  H01H35/34 ,  H01H37/52 ,  H01H37/74 ,  H01H61/02 ,  H01L29/84 ,  H01H37/10

CPC classification number: G01P15/0891 ,  G01P15/0802 ,  G01P2015/0814 ,  H01H1/0036 ,  H01H2001/0047 ,  H01H2037/008 ,  H01H2061/006 ,  H01H35/14 ,  H01H35/34 ,  H01H37/52 ,  H01H37/74 ,  H01H61/02

Abstract: A micromechanical memory sensor. The sensor comprises a latch member mechanically latching upon detection of a threshold value of a variable condition and circuitry for detecting such latching. A sensor further includes a resetting mechanism for electrically unlatching the latch member whereby the sensor latched purely mechanically is electrically reset for repeat use.