Positive resist composition and method of pattern formation with the same
    26.
    发明授权
    Positive resist composition and method of pattern formation with the same 有权
    积极的抗蚀剂组成和图案形成方法相同

    公开(公告)号:US09541831B2

    公开(公告)日:2017-01-10

    申请号:US14638471

    申请日:2015-03-04

    Abstract: A positive resist composition comprising: (A) a resin which comes to have an enhanced solubility in an alkaline developing solution by an action of an acid; (B) a compound which generates an acid upon irradiation with actinic rays or a radiation; (C) a fluorine-containing compound containing at least one group selected from the groups (x) to (z); and (F) a solvent, and a method of pattern formation with the composition: (x) an alkali-soluble group; (y) a group which decomposes by an action of an alkaline developing solution to enhance a solubility in an alkaline developing solution; and (z) a group which decomposes by an action of an acid.

    Abstract translation: 一种正型抗蚀剂组合物,其包含:(A)通过酸的作用在碱性显影液中具有增强的溶解度的树脂; (B)在用光化射线或辐射照射时产生酸的化合物; (C)含有选自(x)〜(z)中的至少一种基团的含氟化合物; 和(F)溶剂,以及组合物的图案形成方法:(x)碱溶性基团; (y)通过碱性显影液的作用分解以提高在碱性显影液中的溶解度的基团; 和(z)通过酸的作用分解的基团。

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