利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

74 条记录 (耗时 0.024 秒)

    Electron beam measuring apparatus
    22.
    发明授权
    Electron beam measuring apparatus 失效
    电子束测量装置

    公开(公告)号：US5463221A

    公开(公告)日：1995-10-31

    申请号：US216288

    申请日：1994-03-23

    申请人： Tadashi Otaka ,  Hiroyoshi Mori ,  Hideo Todokoro

    发明人： Tadashi Otaka ,  Hiroyoshi Mori ,  Hideo Todokoro

    IPC分类号： G01B11/02 ,  G01B11/24 ,  G01B15/00 ,  G01Q30/02 ,  G01Q30/04 ,  G06T7/60 ,  H01J37/28

    CPC分类号： G01B15/00

    摘要： When an image display unit displays a magnified image of an object being examined, a measuring unit automatically computes the dimensions of the image at the preset position. A tolerance range setting unit has been supplied with an upper and a lower limit value according to which it can judge the dimensions of the object at the preset position to be normal, whereas a comparison-decision unit decides that the dimensions thus computed are held between the upper and lower limit values. When the measured result is found outside the range of upper to lower limit values, the right-or-wrong decision data is stored in a memory and is redisplayed in the form of an image by the image display unit at proper timing.

    摘要翻译： 当图像显示单元显示被检查物体的放大图像时，测量单元自动计算预设位置处的图像的尺寸。 已经提供了公差范围设定单元，其具有上限值和下限值，根据该上限值和下限值，其可以将预设位置处的对象的尺寸判断为正常，而比较判定单元判定如此计算的尺寸保持在 上下限值。 当测量结果被发现在上下限范围之外时，将错误的判定数据存储在存储器中，并且在适当的定时由图像显示单元以图像形式重新显示。

    Scanning electron microscope
    23.
    发明授权
    Scanning electron microscope 失效
    扫描电子显微镜

    公开(公告)号：US5389787A

    公开(公告)日：1995-02-14

    申请号：US137976

    申请日：1993-10-19

    申请人： Hideo Todokoro ,  Tadashi Otaka

    发明人： Hideo Todokoro ,  Tadashi Otaka

    IPC分类号： H01J37/20 ,  H01J37/18 ,  H01J37/244 ,  H01J37/28 ,  H01J31/256

    CPC分类号： H01J37/18 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/0475 ,  H01J2237/04756 ,  H01J2237/057 ,  H01J2237/18 ,  H01J2237/204 ,  H01J2237/244

    摘要： In a scanning electron microscope with such a structure that a retarding static field for an electron beam is produced between an objective lens and a sample, when the following three conditions can be satisfied, a switch for applying a superimposed voltage is closed to apply the superimposed voltage to the sample. In the first condition, a switch for applying an acceleration voltage is closed and the acceleration voltage 5 is applied. In the second condition, both of a valve and a valve are opened which are provided between a cathode and the sample. In the third condition, when the sample is mounted on a sample stage by a sample replacing mechanism 57, a valve through which the sample passes is closed. The sample stage is electrically connected via a discharge resistor to a sample holder, and when the switch is opened, electric charges charged on the sample are discharged through the sample holder and the sample stage. As a result, when the sample is mounted/released onto/from the sample stage, the application of the voltage to the sample is automatically interrupted.

    摘要翻译： 在具有在物镜和样品之间产生电子束的延迟静电场的结构的扫描电子显微镜中，当满足以下三个条件时，关闭用于施加叠加电压的开关，以施加叠加的 样品电压。 在第一条件下，施加加速电压的开关闭合，施加加速电压5。 在第二条件下，打开阀和阀两者，其设置在阴极和样品之间。 在第三条件下，当通过样品更换机构57将样品安装在样品台上时，样品通过的阀关闭。 样品台通过放电电阻器与样品架电连接，当开关断开时，样品上的电荷通过样品架和样品台放电。 结果，当将样品安装/释放到样品台上或从样品台释放时，对样品的电压施加自动中断。

    Scanning electron microscope
    24.
    发明授权
    Scanning electron microscope 失效
    扫描电子显微镜

    公开(公告)号：US5387793A

    公开(公告)日：1995-02-07

    申请号：US133860

    申请日：1993-10-12

    申请人： Mitsugu Sato ,  Hideo Todokoro ,  Tadashi Otaka

    发明人： Mitsugu Sato ,  Hideo Todokoro ,  Tadashi Otaka

    IPC分类号： G01T1/28 ,  H01J37/244 ,  H01J37/28

    CPC分类号： H01J37/244 ,  H01J2237/2443 ,  H01J2237/28

    摘要： Provided between an optical axis of a primary electron beam directed to a specimen and a secondary electron detector for detecting secondary electrons emitted from the specimen is a shielding electrode which has a transparency for secondary electrons and has a shielding effect for an attracting electric field produced by the secondary electron detector. An opposed electrode is provided at a position facing the shielding electrode with the optical path of the electron beam disposed therebetween. Applied across the shielding electrode and the opposed electrode is a voltage which produces a deflecting electric field along the electron beam path in the vicinity of the secondary electron detector. The deflecting electric field deflects the secondary electrons to the shielding electrode side so that they pass therethrough before they are captured by the secondary electron detector. Optical axis correction coils are provided for generating a magnetic field to correct any bending effect on the trajectory of the primary electron beam by the deflecting electric field.

    摘要翻译： 在被检测的一次电子束的光轴与用于检测从试样发出的二次电子的二次电子检测器之间设置有对二次电子具有透明性的屏蔽电极，并且具有对由吸收电场产生的吸引电场的屏蔽效果 二次电子检测器。 在面对屏蔽电极的位置处提供相对电极，其中电子束的光路设置在其间。 施加在屏蔽电极和相对电极两端的是在二次电子检测器附近沿着电子束路径产生偏转电场的电压。 偏转电场将二次电子偏转到屏蔽电极侧，使得它们在被二次电子检测器捕获之前通过它们。 光轴校正线圈用于产生磁场，以通过偏转电场来校正对一次电子束的轨迹的任何弯曲效应。

    Image evaluation method and microscope
    26.
    发明授权
    Image evaluation method and microscope 失效
    图像评估方法和显微镜

    公开(公告)号：US07805023B2

    公开(公告)日：2010-09-28

    申请号：US11802262

    申请日：2007-05-21

    申请人： Tohru Ishitani ,  Mitsugu Sato ,  Hideo Todokoro ,  Tadashi Otaka ,  Takashi Iizumi ,  Atsushi Takane

    发明人： Tohru Ishitani ,  Mitsugu Sato ,  Hideo Todokoro ,  Tadashi Otaka ,  Takashi Iizumi ,  Atsushi Takane

    IPC分类号： G06K9/32 ,  G21K7/00

    CPC分类号： H01J37/28 ,  H01J37/222 ,  H01J37/263 ,  H01J2237/2823

    摘要： Image evaluation method capable of objectively evaluating the image resolution of a microscope image. An image resolution method is characterized in that resolution in partial regions of an image is obtained over an entire area of the image or a portion of the image, averaging is performed over the entire area of the image or the portion of the image, and the averaged value is established as the resolution evaluation value of the entire area of the image or the portion of the image. This method eliminates the subjective impressions of the evaluator from evaluation of microscope image resolution, so image resolution evaluation values of high accuracy and good repeatability can be obtained.

    摘要翻译： 能够客观评价显微镜图像的图像分辨率的图像评价方法。 图像分辨方法的特征在于，在图像的整个区域或图像的一部分上获得图像的部分区域中的分辨率，在图像的整个区域或图像的整个区域上进行平均化， 建立平均值作为图像的整个区域或图像的部分的分辨率评估值。 该方法消除了评估者对显微镜图像分辨率评估的主观印象，因此可以获得高精度和良好重复性的图像分辨率评估值。

    Monochromator and scanning electron microscope using the same
    27.
    发明申请
    Monochromator and scanning electron microscope using the same 有权

    公开(公告)号：US20080237463A1

    公开(公告)日：2008-10-02

    申请号：US11987018

    申请日：2007-11-26

    申请人： Yoichi Ose ,  Shunroku Taya ,  Hideo Todokoro ,  Tadashi Otaka ,  Mitsugu Sato ,  Makoto Ezumi

    发明人： Yoichi Ose ,  Shunroku Taya ,  Hideo Todokoro ,  Tadashi Otaka ,  Mitsugu Sato ,  Makoto Ezumi

    IPC分类号： G01N23/00 ,  G21K1/08

    CPC分类号： H01J37/05 ,  H01J37/153 ,  H01J37/28

    摘要： An invention providing a scanning electron microscope composed of a monochromator capable of high resolution, monochromatizing the energy and reducing chromatic aberrations without significantly lowering the electrical current strength of the primary electron beam. A scanning electron microscope is installed with a pair of sectorial magnetic and electrical fields having opposite deflection directions to focus the electron beam and then limit the energy width by means of slits, and another pair of sectorial magnetic and electrical fields of the same shape is installed at a position forming a symmetrical mirror versus the surface containing the slits. This structure acts to cancel out energy dispersion at the object point and symmetrical mirror positions, and by spatially contracting the point-converged spot beam with a converging lens system, improves the image resolution of the scanning electron microscope.

    Method of forming a sample image and charged particle beam apparatus
    29.
    发明授权
    Method of forming a sample image and charged particle beam apparatus 失效
    形成样品图像和带电粒子束装置的方法

    公开(公告)号：US07361894B2

    公开(公告)日：2008-04-22

    申请号：US11501229

    申请日：2006-08-09

    申请人： Mitsugu Sato ,  Atsushi Takane ,  Takashi Iizumi ,  Tadashi Otaka ,  Hideo Todokoro ,  Satoru Yamaguchi ,  Kazutaka Nimura

    发明人： Mitsugu Sato ,  Atsushi Takane ,  Takashi Iizumi ,  Tadashi Otaka ,  Hideo Todokoro ,  Satoru Yamaguchi ,  Kazutaka Nimura

    IPC分类号： G01N23/22 ,  H01J37/26 ,  H01J37/28 ,  G21K7/00

    CPC分类号： H01J37/28 ,  G06T5/50 ,  G06T7/30 ,  G06T2207/10056 ,  H01J37/222 ,  H01J2237/221 ,  H01J2237/226

    摘要： An object of the present invention is to provide a sample image forming method and a charged particle beam apparatus which are suitable for realizing suppressing of the view area displacement with high accuracy while the influence of charging due to irradiation of the charged particle beam is being suppressed.In order to attain the above object, the present invention provide a method of forming a sample image by scanning a charged particle beam on a sample and forming an image based on secondary signals emitted from the sample, the method comprising the steps of forming a plurality of composite images by superposing a plurality of images obtained by a plurality of scanning times; and forming a further composite image by correcting positional displacements among the plurality of composite images and superposing the plurality of composite images, and a charged particle beam apparatus for realizing the above method.

    摘要翻译： 本发明的目的是提供一种在抑制由于带电粒子束的照射引起的充电的影响被抑制的情况下，能够高精度地实现视区域位移的抑制的样本图像形成方法和带电粒子束装置 。 为了实现上述目的，本发明提供一种通过在样品上扫描带电粒子束并基于从样品发射的二次信号形成图像来形成样品图像的方法，该方法包括以下步骤：形成多个 通过叠加通过多个扫描时间获得的多个图像的合成图像; 以及通过校正多个合成图像之间的位置偏移并叠加多个合成图像来形成另一个合成图像，以及用于实现上述方法的带电粒子束装置。

    Image evaluation method and microscope
    30.
    发明申请
    Image evaluation method and microscope 失效
    图像评估方法和显微镜

    公开(公告)号：US20050199811A1

    公开(公告)日：2005-09-15

    申请号：US11124252

    申请日：2005-05-09

    申请人： Tohru Ishitani ,  Mitsugu Sato ,  Hideo Todokoro ,  Tadashi Otaka ,  Takashi Iizumi ,  Atsushi Takane

    发明人： Tohru Ishitani ,  Mitsugu Sato ,  Hideo Todokoro ,  Tadashi Otaka ,  Takashi Iizumi ,  Atsushi Takane

    IPC分类号： H01J37/04 ,  H01J37/22 ,  H01J37/26 ,  H01J37/28 ,  G21K7/00

    CPC分类号： H01J37/28 ,  H01J37/222 ,  H01J37/263 ,  H01J2237/2823

    摘要： Image evaluation method capable of objectively evaluating the image resolution of a microscope image. An image resolution method is characterized in that resolution in partial regions of an image is obtained over an entire area of the image or a portion of the image, averaging is performed over the entire area of the image or the portion of the image, and the averaged value is established as the resolution evaluation value of the entire area of the image or the portion of the image. This method eliminates the subjective impressions of the evaluator from evaluation of microscope image resolution, so image resolution evaluation values of high accuracy and good repeatability can be obtained.

    摘要翻译： 能够客观评价显微镜图像的图像分辨率的图像评价方法。 图像分辨方法的特征在于，在图像的整个区域或图像的一部分上获得图像的部分区域中的分辨率，在图像的整个区域或图像的整个区域上进行平均化， 建立平均值作为图像的整个区域或图像的部分的分辨率评估值。 该方法消除了评估者对显微镜图像分辨率评估的主观印象，因此可以获得高精度和良好重复性的图像分辨率评估值。