Mask-less differential etching and planarization of copper films
    21.
    发明授权
    Mask-less differential etching and planarization of copper films 有权
    铜膜的无掩模差分蚀刻和平面化

    公开(公告)号:US06410442B1

    公开(公告)日:2002-06-25

    申请号:US09640187

    申请日:2000-08-17

    申请人: Kai Yang

    发明人: Kai Yang

    IPC分类号: H01L2100

    摘要: In-laid metallization patterns of copper or a copper alloy are fabricated by a damascene-type process wherein the upper surface of a thick, electroplated copper or copper alloy blanket or overburden layer filling recesses in a substrate surface is subjected to a mask-less, chemically-based differential etching step for partially planarizing/thickness reduction prior to a step of planarization by chemical-mechanical polishing (CMP). The inventive process enables an increase in manufacturing throughput, reduction in cost, and reduction in spent CMP slurry generation.

    摘要翻译: 通过镶嵌型方法制造铜或铜合金的嵌入式金属化图案,其中填充衬底表面中的凹陷的厚电镀铜或铜合金覆盖层或覆盖层的上表面经受无掩模, 通过化学机械抛光(CMP)在平坦化步骤之前进行部分平坦化/厚度还原的基于化学的差示蚀刻步骤。 本发明的方法能够增加制造生产能力,降低成本和减少废CMP废液产生。

    Preventing Cu dendrite formation and growth
    22.
    发明授权
    Preventing Cu dendrite formation and growth 有权
    防止Cu枝晶的形成和生长

    公开(公告)号:US06177349B1

    公开(公告)日:2001-01-23

    申请号:US09206169

    申请日:1998-12-07

    IPC分类号: H01L2144

    CPC分类号: H01L21/7684 H01L21/76819

    摘要: The formation and/or growth of dendrites emanating from Cu or Cu alloy lines into a bordering open dielectric field are prevented or substantially reduced by chemically removing a portion of the surface from the dielectric field and from between the lines after CMP by immersion in and/or double sided brush scrubbing with a chemical agent. Embodiments include removing controlled portions up to 50 Å of silicon oxide by immersion in and/or double sided brush scrubbing with a solution containing ammonium fluoride, diammonium hydrogen citrate, triammonium citrate, a surfactant and dionized water.

    摘要翻译: 从Cu或Cu合金线发射到边界开放介质场中的枝晶的形成和/或生长通过从介电场中化学去除表面的一部分和CMP之后的线之间的浸入和/ 或用化学试剂双面刷洗。 实施例包括通过用含有氟化铵,柠檬酸氢铵,柠檬酸三铵,表面活性剂和二价离子水的溶液浸渍和/或双面刷洗来去除高达50埃的氧化硅的受控部分。

    Feedback loop for selective conditioning of chemical mechanical
polishing pad
    23.
    发明授权
    Feedback loop for selective conditioning of chemical mechanical polishing pad 失效
    用于化学机械抛光垫选择性调节的反馈回路

    公开(公告)号:US6113462A

    公开(公告)日:2000-09-05

    申请号:US993439

    申请日:1997-12-18

    申请人: Kai Yang

    发明人: Kai Yang

    CPC分类号: B24B53/017 B24B37/005

    摘要: An improved method and apparatus for Chemical Mechanical Polishing (CMP) in integrated circuit processing utilizes a film measurement feedback loop for progressively optimizing the polishing pad conditioning recipe. By utilizing this invention, non-uniform pad wearing and elastic property variations are substantially corrected, and Within-Wafer-Non-Uniformity (WIWNU) is minimized.

    摘要翻译: 用于集成电路处理中的化学机械抛光(CMP)的改进方法和装置利用膜测量反馈回路逐渐优化抛光垫调节配方。 通过利用本发明,基本上校正了不均匀的垫磨损和弹性变化,并且使晶片间非均匀性(WIWNU)最小化。

    Power-aware debugging
    24.
    发明授权
    Power-aware debugging 有权
    电源感知调试

    公开(公告)号:US08176453B2

    公开(公告)日:2012-05-08

    申请号:US12558259

    申请日:2009-09-11

    IPC分类号: G06F17/50

    CPC分类号: G06F17/5022 G06F2217/78

    摘要: A debugging system produces displays in response to an IC design and results of a logic simulation of IC behavior based on the IC design. The IC design includes a hardware description language (HDL) model of the IC describing the IC as comprising cell instances communicating via data signals and power sources for supplying power to the cell instances. The IC design also includes power definition markup language (PDML) model describing a power intent of the IC design. The debugging system generates displays representing HDL code that are annotated to indicate how the power intent of the IC design described by the PDML model relates to the portion of the HDL model represented by the display. The debugging system also generates signals trace displays indicating how both the logic and power intent of the IC design affect the value of a user-selected signal at a user-selected time during the logic simulation.

    摘要翻译: 调试系统根据IC设计和基于IC设计的IC行为的逻辑仿真结果生成显示器。 该IC设计包括描述IC的IC的硬件描述语言(HDL)模型,其包括经由数据信号进行通信的小区实例和用于向小区实例供电的电源。 IC设计还包括描述IC设计的功率意图的功率定义标记语言(PDML)模型。 调试系统产生表示HDL代码的显示器,其被注释以指示由PDML模型描述的IC设计的功率意图与由显示器表示的HDL模型的部分有关。 调试系统还生成信号跟踪显示,指示IC设计的逻辑和电源意图如何在逻辑模拟期间在用户选择的时间影响用户选择的信号的值。

    POLARIZATION INDEPENDENT FREQUENCY DOMAIN EQUALIZATION (FDE) FOR CHROMATIC DISPERSION (CD) COMPENSATION IN POLMUX COHERENT SYSTEMS
    26.
    发明申请
    POLARIZATION INDEPENDENT FREQUENCY DOMAIN EQUALIZATION (FDE) FOR CHROMATIC DISPERSION (CD) COMPENSATION IN POLMUX COHERENT SYSTEMS 有权
    用于POLMUX相关系统中色散(CD)补偿的独立频域均衡(FDE)偏振

    公开(公告)号:US20100196009A1

    公开(公告)日:2010-08-05

    申请号:US12607125

    申请日:2009-10-28

    IPC分类号: H04J14/06

    摘要: A method for the polarization independent frequency domain equalization (FDE) chromatic dispersion compensation on polarization multiplexing (POLMUX) coherent systems. Operationally, time domain signals are converted to frequency domain signals such that time domain convolution can be done as simple multiplications in the frequency domain. These frequency domain signals then converted back to time domain for subsequent use. The input signal size and FFT size are advantageously designed so that the output signals can be continuous with some overlap between two successive frames.

    摘要翻译: 一种用于偏振复用(POLMUX)相干系统上的偏振独立频域均衡(FDE)色散补偿的方法。 在操作上,时域信号被转换成频域信号,使得时域卷积可以作为频域中的简单乘法来完成。 然后,这些频域信号被转换回到时域以供后续使用。 有利地设计输入信号尺寸和FFT尺寸,使得输出信号可以是连续的,在两个连续帧之间具有一些重叠。

    DISTRIBUTED MESSAGE-PASSING BASED RESOURCE ALLOCATION IN WIRELESS SYSTEMS
    27.
    发明申请
    DISTRIBUTED MESSAGE-PASSING BASED RESOURCE ALLOCATION IN WIRELESS SYSTEMS 有权
    基于分布式消息传递的无线系统资源分配

    公开(公告)号:US20100091729A1

    公开(公告)日:2010-04-15

    申请号:US12549546

    申请日:2009-08-28

    IPC分类号: H04W72/04 H04L27/28

    摘要: Systems and methods are disclosed to allocate resources in discrete Fourier transform spread orthogonal frequency division multiple access (DFT-S-OFDMA) networks, which involve determining a reward for each user when assigned a frequency chunk (FC) of subcarriers, where each FC is a set of contiguous subcarriers; splitting each user into one or more sub-users, with each sub-user having identical rewards; and assigning resources with a message-passing based FC allocation.

    摘要翻译: 公开了系统和方法来分配离散傅立叶变换扩展正交频分多址(DFT-S-OFDMA)网络中的资源,这些网络涉及当分配子载波的频率块(FC)时确定每个用户的奖励,其中每个FC 一组连续的副载波; 将每个用户分成一个或多个子用户,每个子用户具有相同的奖励; 并使用基于消息传递的FC分配来分配资源。

    Decoding system and method based on context-based adaptive binary arithmetic coding
    28.
    发明授权
    Decoding system and method based on context-based adaptive binary arithmetic coding 有权
    基于上下文的自适应二进制算术编码的解码系统和方法

    公开(公告)号:US07385535B2

    公开(公告)日:2008-06-10

    申请号:US11580734

    申请日:2006-10-12

    IPC分类号: H03M7/00

    摘要: A CABAC decoding system includes at least a decoding unit group. Each decoding unit group includes N decoding units connected with each other. The Mth decoding unit receives parameter information for decoding bins and bit streams to be decoded, decodes the bins of the bit streams to be decoded, obtains the decoding result of the current decoding unit bin, and sends the updated parameter information to the (M+1)th decoding unit and an output unit. The CABAC decoding system achieves high decoding rate and keeps a reasonable cost of hardware resource, and thereby provides a high efficient and reasonable decoding solution.

    摘要翻译: CABAC解码系统至少包括解码单元组。 每个解码单元组包括彼此连接的N个解码单元。 解码单元接收用于解码要解码的存储块和比特流的参数信息,对要解码的比特流的bin进行解码,获得当前解码单元bin的解码结果,并发送 更新参数信息到(M + 1)第个解码单元和输出单元。 CABAC解码系统实现了高解码率,保持了硬件资源的合理成本,从而提供了高效,合理的解码解决方案。

    Decoding system and method based on context-based adaptive binary arithmetic coding
    29.
    发明申请
    Decoding system and method based on context-based adaptive binary arithmetic coding 有权
    基于上下文的自适应二进制算术编码的解码系统和方法

    公开(公告)号:US20070080832A1

    公开(公告)日:2007-04-12

    申请号:US11580734

    申请日:2006-10-12

    IPC分类号: H03M7/00

    摘要: A CABAC decoding system and a method are disclosed. The system includes at least a decoding unit group. Each decoding unit group includes N decoding units connected with each other. The Mth decoding unit receives parameter information for decoding bins and bit streams to be decoded, decodes the bins of the bit streams to be decoded, obtains the decoding result of the current decoding unit bin, and sends the updated parameter information to the (M+1)th decoding unit and an output unit. The present invention achieves high decoding rate, and keeps a reasonable cost of hardware resource. So, the present invention provides a high efficient and reasonable decoding solution.

    摘要翻译: 公开了一种CABAC解码系统和方法。 该系统至少包括解码单元组。 每个解码单元组包括彼此连接的N个解码单元。 解码单元接收用于解码要解码的存储块和比特流的参数信息,对要解码的比特流的bin进行解码,获得当前解码单元bin的解码结果,并发送 更新参数信息到(M + 1)第个解码单元和输出单元。 本发明实现了高解码率,并且保持了合理的硬件资源成本。 因此,本发明提供了一种高效合理的解码解决方案。

    Self-aligned semiconductor interconnect barrier and manufacturing method therefor
    30.
    发明授权
    Self-aligned semiconductor interconnect barrier and manufacturing method therefor 有权
    自对准半导体互连屏障及其制造方法

    公开(公告)号:US06734559B1

    公开(公告)日:2004-05-11

    申请号:US09663021

    申请日:2000-09-15

    IPC分类号: H01L2348

    摘要: A self-aligned semiconductor interconnect barrier between channels and vias is provided which is self-aligned and made of a metallic barrier material. A channel is conventionally formed in the semiconductor dielectric, lined with a first metallic barrier material, and filled with a conductive material. A recess is etched to a predetermined depth into the conductive material, and the second metallic barrier material is deposited and removed outside the channel. This leaves the conductive material totally enclosed in metallic barrier material. The metallic barrier material is selected from metals such as tantalum, titanium, tungsten, compounds thereof, alloys thereof, and combinations thereof.

    摘要翻译: 提供通道和通孔之间的自对准半导体互连屏障,其自对准并由金属阻挡材料制成。 通常在半导体电介质中形成通道,衬有第一金属阻挡材料,并填充有导电材料。 将凹陷蚀刻到导电材料中的预定深度,并且将第二金属阻挡材料沉积并移除到通道外。 这使得导电材料完全封闭在金属阻挡材料中。 金属阻隔材料选自钽,钛,钨等金属,其化合物,合金及其组合。