公开(公告)号：US20070103660A1

公开(公告)日：2007-05-10

申请号：US11593484

申请日：2006-11-07

申请人： Keiichi Tanaka

发明人： Keiichi Tanaka

IPC分类号： G03B27/42

CPC分类号： G03F7/70716 ,  G03F7/70766

摘要： When a stage on which a wafer is mounted is driven in an X-axis direction by a liner motor, a reaction force of the drive force is generated at a stator and acts on a counterweight via the stator, and thereby the counterweight moves in a direction opposite to the stage in accordance with movement of the stage in the X-axis direction. Accordingly, the reaction force generated by the drive of the stage can substantially be canceled by the movement of the counterweight. Further, since the counterweight has a first section that is connected to the stator, and a second section that is separated from the first section in the X-axis direction and connected to the first section via a connection section, a partition wall of a chamber can be placed using the connected portion as a boundary, and the second section of the counterweight can be located outside the partition wall. Thus, a stage housing space can be set to smaller.

摘要翻译： 当通过衬套马达在X轴方向上安装晶片的阶段时，在定子处产生驱动力的反作用力，并通过定子作用在配重上，由此配重在 根据舞台在X轴方向的移动而与舞台相反的方向。 因此，由平台的驱动产生的反作用力基本上可以通过配重的移动来抵消。 此外，由于配重具有连接到定子的第一部分和与X轴方向上的第一部分分离并且经由连接部分连接到第一部分的第二部分，所以室的分隔壁 可以使用连接部分作为边界放置，并且配重的第二部分可以位于分隔壁外部。 因此，可以将台架容纳空间设定得较小。

公开(公告)号：US20060094688A1

公开(公告)日：2006-05-04

申请号：US10528428

申请日：2003-09-19

申请人： Keiichi Tanaka ,  Takayuki Amano ,  Noboru Muramatsu ,  Miho Tatsuki ,  Toshikazu Asakura ,  Iwao Ito ,  Etsuo Ishikawa ,  Koichi Sato

发明人： Keiichi Tanaka ,  Takayuki Amano ,  Noboru Muramatsu ,  Miho Tatsuki ,  Toshikazu Asakura ,  Iwao Ito ,  Etsuo Ishikawa ,  Koichi Sato

IPC分类号： A61K31/732 ,  A61K47/00

CPC分类号： A61K8/73 ,  A61K31/7016 ,  A61K31/702 ,  A61K31/732 ,  A61K2800/78 ,  A61Q19/00 ,  C07H3/04 ,  C07H3/06

摘要： The present invention provides a histamine release inhibitor comprising a pectin or a salt thereof or a pectin hydrolysate as an active ingredient, and a pharmaceutical composition, a cosmetic, and food and drink comprising the inhibitor.

摘要翻译： 本发明提供了包含果胶或其盐或果胶水解产物作为活性成分的组胺释放抑制剂，以及包含该抑制剂的药物组合物，化妆品和食品和饮料。

公开(公告)号：US06958808B2

公开(公告)日：2005-10-25

申请号：US10458384

申请日：2003-06-11

申请人： Keiichi Tanaka ,  Mike Binnard ,  Andrew J. Hazelton

发明人： Keiichi Tanaka ,  Mike Binnard ,  Andrew J. Hazelton

IPC分类号： G03B27/62 ,  G03F7/20 ,  G03B27/42 ,  G03B27/58

CPC分类号： G03B27/62 ,  G03F7/707 ,  G03F7/70708 ,  G03F7/70766 ,  G03F7/709

摘要： A stage assembly for moving and positioning a device is provided herein. The stage assembly includes a stage base, a stage, a stage mover assembly, a reaction mass assembly, a reaction mover assembly, and a control system. The stage mover assembly moves the stage relative to the stage base. The reaction mass assembly reduces the reaction forces created by the stage mover assembly that are transferred to the stage base. The reaction mover assembly adjusts the position of the reaction mass assembly relative to the stage base. Uniquely, the control system controls and directs current to the reaction mover assembly in a way that minimizes the influence of disturbances created by the reaction mover assembly on the stage assembly. More specifically, the timing and/or the amount of current from the control system directed to the reaction mover assembly is varied to minimize the influence of the disturbances created by the reaction mover assembly on the stage assembly. With this design, the reaction mover assembly has less influence upon the position of the stage base. This allows for more accurate positioning of the device by the stage assembly and better performance of the stage assembly.

摘要翻译： 本文提供了用于移动和定位设备的台架组件。 舞台组件包括舞台基座，舞台，舞台推动器组件，反作用组件，反作用器组件和控制系统。 平台移动器组件相对于舞台底座移动舞台。 反应物料组件减少由载物台组件产生的反应力，这些反作用力被传递到载物台底部。 反应动子组件调整反应物料组件相对于载物台的位置。 独特地，控制系统以最小化由反应动子组件产生在舞台组件上的扰动的影响的方式来控制和引导电流到反应动子组件。 更具体地，改变来自引导到反应动子组件的控制系统的时间和/或电流量，以最小化由反应动子组件产生在舞台组件上的干扰的影响。 通过这种设计，反作用器组件对舞台底座的位置的影响较小。 这允许通过平台组件更好地定位设备并且更好地实现舞台组件的性能。

公开(公告)号：US20050201697A1

公开(公告)日：2005-09-15

申请号：US10514813

申请日：2003-05-16

申请人： Kousuke Tanaka ,  Hiroyasu Sugiyama ,  Takehiro Hosokawa ,  Keiichi Tanaka ,  Tsuyoshi Ikada ,  Kazuaki Negishi ,  Yoshiaki Nagao ,  Toshio Akiyoshi ,  Kazuhiro Sato

发明人： Kousuke Tanaka ,  Hiroyasu Sugiyama ,  Takehiro Hosokawa ,  Keiichi Tanaka ,  Tsuyoshi Ikada ,  Kazuaki Negishi ,  Yoshiaki Nagao ,  Toshio Akiyoshi ,  Kazuhiro Sato

IPC分类号： G02B6/08 ,  G02B6/44

CPC分类号： G02B6/4436 ,  G02B6/08 ,  G02B6/4403 ,  G02B6/4495

摘要： An optical fiber ribbon comprising a plurality of the coated optical fibers 2 arranged in plane and flame-retardant films 4a and 4b to integrate the coated optical fibers 2 is provided. The flame-retardant films 4a and 4b have an adhesive layer 5 formed thereon, and a plurality of the coated optical fibers 2 arranged in plane are integrated by the adhesive layer. The optical fiber ribbon 1 in this constitution uses flame-retardant films, wherein the ribbon thickness can be lowered and separation of single fiber can be facilitated by tearing off the film.

摘要翻译： 提供了包括布置在平面中的多个涂覆光纤2和用于使涂覆光纤2整合的阻燃膜4a和4b的光纤带。 阻燃膜4a和4b在其上形成有粘合剂层5，并且布置在平面中的多个涂覆光纤2通过粘合剂层一体化。 在这种结构中的光纤带1使用阻燃膜，其中可以降低带厚度，并且通过撕下膜可以促进单纤维的分离。

公开(公告)号：US06867534B2

公开(公告)日：2005-03-15

申请号：US10159411

申请日：2002-05-29

申请人： Keiichi Tanaka

发明人： Keiichi Tanaka

IPC分类号： G12B5/00 ,  G03F7/20 ,  H01L21/027 ,  H01L21/68 ,  H02N2/00 ,  H01H41/08

CPC分类号： H01J37/20 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/70716 ,  G03F7/70758 ,  H01J37/3174 ,  H01J2237/2005 ,  H01J2237/202

摘要： Low-mass and compact stage devices are disclosed that exhibit, compared to conventional stage devices, reduced magnetic field fluctuations. An embodiment of such a stage device includes an X-Y coarse-movement stage portion that is drivable in the X-Y directions using respective air cylinders. A fine-movement stage portion is mounted on the X-Y coarse-movement stage portion. The fine-movement stage portion is drivable in any of the six degrees of freedom of motion (i.e., X, Y, Z, θX, θY, and θZ motions) relative to the coarse-movement stage portion. Such fine movements are achieved using six piezo actuators. In a stage device configured for use in a microlithography apparatus, a wafer table or reticle table can be mounted on the fine-movement table.

摘要翻译： 公开了与传统的平台装置相比，减小的磁场波动的低质量和紧凑的平台装置。 这种舞台装置的一个实施例包括可使用相应气缸在X-Y方向上驱动的X-Y粗动台部分。 精细运动台部安装在X-Y粗动台部上。 细运动台部分可以相对于粗移动台部分的六个运动自由度（即，X，Y，Z，θX，θY和θZ运动）中的任何一个是可驱动的。 使用六个压电致动器实现这种精细的运动。 在配置用于微光刻设备的台装置中，可以将晶片台或分划板台安装在微动台上。

公开(公告)号：US06861185B2

公开(公告)日：2005-03-01

申请号：US10751643

申请日：2004-01-06

申请人： Keiichi Tanaka ,  Satoru Kishimoto

发明人： Keiichi Tanaka ,  Satoru Kishimoto

IPC分类号： G02B5/20 ,  G02F1/1335 ,  G03F7/00 ,  G03F7/075 ,  G03F7/20 ,  G03F9/00

CPC分类号： G02F1/133555 ,  G02B5/201 ,  G02F1/133516 ,  G03F7/0007 ,  G03F7/0754 ,  G03F7/203

摘要： A method of manufacturing a color filter in accordance with the present invention includes: (i) a latent image forming step in which, with respect to a polysilane film, first and second exposure processes having different exposure patterns and different ultraviolet light exposure amounts are carried out, and colorants are applied to the polysilane film on which first and second latent images are formed; and a coloration step in which the first and second latent images are colored by applying colorants thereto. With this, it is possible to form a first density area corresponding to transmissive image reproduction and a second density area corresponding to a second density area. Accordingly a high-quality color filter for multi-scene displays can be manufactured with fewer manufacturing steps.

摘要翻译： 根据本发明的制造滤色器的方法包括：（i）潜像形成步骤，其中相对于聚硅烷膜，承载具有不同曝光图案和不同紫外线曝光量的第一和第二曝光工艺 并且将着色剂施加到其上形成有第一和第二潜像的聚硅烷膜; 以及通过对其施加着色剂使第一和第二潜像着色的着色步骤。 由此，可以形成对应于透射图像再现的第一密度区域和对应于第二密度区域的第二密度区域。 因此，可以以较少的制造步骤制造用于多场景显示器的高质量滤色器。

公开(公告)号：US06781669B2

公开(公告)日：2004-08-24

申请号：US09745432

申请日：2000-12-26

申请人： Keiichi Tanaka

发明人： Keiichi Tanaka

IPC分类号： G03B2742

CPC分类号： G03F7/70816 ,  G03F7/7075 ,  G03F7/70758 ,  G03F7/709 ,  G03F7/70991

摘要： Methods and apparatuses for transporting a substrate plate efficiently, for positioning the substrate plate to enable to minimize mechanical motions and generation of vibration associated with conventional substrate positioning, and for holding the substrate. For example, the present exposure apparatus has a plurality of electrodes arranged along the baseplate and a transport apparatus having a control apparatus to impress a voltage on each electrode to first generate static charges in the substrate plate, then to impress a voltage on each of the plurality of electrodes so that the charge code of the electrodes is the same as the charge code of the substrate plate, and to switch the voltage on the electrodes in accordance with the time interval required to produce dielectric polarization in the substrate plate. The substrate plate can be transported by electrostatic forces at high speed without contacting the baseplate.

摘要翻译： 用于定位衬底板以便最小化与常规衬底定位相关的机械运动和产生振动以及用于保持衬底的方法和装置。 例如，本曝光装置具有沿着基板排列的多个电极，以及具有控制装置的输送装置，其对每个电极施加电压，以首先在基板中产生静电荷，然后在每个电极上施加电压 多个电极，使得电极的电荷代码与衬底板的电荷代码相同，并且根据在衬底板中产生电介质极化所需的时间间隔来切换电极上的电压。 基板可以通过静电力高速运输而不与基板接触。

公开(公告)号：US06509957B1

公开(公告)日：2003-01-21

申请号：US09722631

申请日：2000-11-28

申请人： Keiichi Tanaka

发明人： Keiichi Tanaka

IPC分类号： G03B2758

CPC分类号： G03F7/70733 ,  G03F7/70716 ,  G03F7/70758

摘要： A stage device includes a first stationary member, a second stationary member, a moving member and positioning devices. The first stationary member extends in a first direction. The second stationary member extends in the first direction and is spaced apart from the first stationary member in a second direction perpendicular to the first direction. The moving member can cooperate with the first stationary member and with the second stationary member. The positioning devices selectively position the moving member into cooperation with one of the first and second stationary members without physically contacting the moving member with the first and second stationary members. In addition, a stage device provided with a moving member that can move within a two-dimensional plane having a first direction and a second direction perpendicular to the first direction includes a first stationary member and a second stationary member. The first stationary member extends in the first direction and is supported at a first position in a third direction that is perpendicular to the two-dimensional plane. The second stationary member extends in the first direction and is supported at a second position in the third direction, different from the first position. The moving member has a first part that can cooperate with the first stationary member, and a second part that can cooperate with the second stationary member. When two stages are replaced, generation of a positional shift on an object on the stages is prevented, and separate processing can be performed simultaneously with respect to objects on the stages.

公开(公告)号：US06388646B1

公开(公告)日：2002-05-14

申请号：US09494140

申请日：2000-01-28

申请人： Koji Fujiwara ,  Tomohiko Yamamoto ,  Keiichi Tanaka ,  Naoto Inoue ,  Hideki Ichioka

发明人： Koji Fujiwara ,  Tomohiko Yamamoto ,  Keiichi Tanaka ,  Naoto Inoue ,  Hideki Ichioka

IPC分类号： G09G336

CPC分类号： G09G3/3648

摘要： It is an object of the invention to reduce a leakage low-frequency electric field from a panel section of a matrix type. In the case where a panel section has a usual current structure in which the panel section has a single common electrode elongating over the whole of the display region of the panel section, the maximum voltage difference of a reference signal supplied to the common electrode is defined to be 0.3678×x−0.6136 (wherein x is the area of the display region) or less. In the case where the panel section has the so-called counter source structure and a plurality of column electrodes, the maximum voltage difference of a reference signal supplied to the column electrodes is defined to be ax−b (wherein a=0.3565×y−0.6829, b=−0.0937y+0.7091, and y is a ratio of the area of all the column electrodes to the area of the display region) or less. In the case where a panel section has the counter source structure, the average area per unit length of one part of the column electrode opposed to a signal line is smaller than the average area per unit length of the remaining part of the column electrode other than the one part.

摘要翻译： 本发明的一个目的是从矩阵型的面板部分减少泄漏的低频电场。 在面板部具有通常的电流结构的情况下，其中面板部分具有在面板部分的整个显示区域上延伸的单个公共电极，定义提供给公共电极的参考信号的最大电压差 为0.3678xx-0.6136（其中，x为显示区域的面积）以下。 在面板部分具有所谓的反向源结构和多个列电极的情况下，提供给列电极的参考信号的最大电压差定义为ax-b（其中a = 0.3565xy-0.6829 ，b = -0.0937y + 0.7091，y是所有列电极的面积与显示区域的面积的比率）以下。 在面板部具有计数器源结构的情况下，与信号线相对的列电极的一部分的每单位长度的平均面积小于列电极的剩余部分的平均单位长度以外的平均面积 一部分。

公开(公告)号：US06234107B1

公开(公告)日：2001-05-22

申请号：US09235644

申请日：1999-01-22

申请人： Keiichi Tanaka ,  Masaki Sohma ,  Shinsuke Asao ,  Masahito Ozawa

发明人： Keiichi Tanaka ,  Masaki Sohma ,  Shinsuke Asao ,  Masahito Ozawa

IPC分类号： C23C1600

CPC分类号： H01L21/67751 ,  C23C14/566 ,  H01L21/67109 ,  H01L21/6719 ,  H01L21/67201

摘要： An auxiliary vacuum chamber 12 according to the invention comprises a container 30 having an opening 10, 14 for taking an object to be processed W into and out of the container. A holder 33a is movably placed in the container 30, which can hold the object W taken therein. The holder 33a can also form a hermetically closed space 32a with a portion of the container 30 when moved in the container 30. The container 30 is provided with supplying means 38a for supplying a gas from the outside of the container 30 into the hermetically closed space 32a. The container 30 is also provided with exhaust means 37 for exhausting the gas from the hermetically closed space 32a to the outside of the container 30. According to the invention, the auxiliary vacuum chamber 12 need not have gate-valves for being opened and shut to the other chambers 4 and 16.

摘要翻译： 根据本发明的辅助真空室12包括容器30，容器30具有用于将待处理物体W进入和离开容器的开口10,14。 保持器33a可移动地放置在容器30中，其可以保持被吸收在其中的物体W. 当容器30在容器30中移动时，保持器33a还可以形成具有容器30的一部分的气密封闭的空间32a。容器30设置有供应装置38a，用于将气体从容器30的外部供应到气密封闭的空间 32a。 容器30还设置有用于将气体从气密封闭空间32a排出到容器30的外部的排气装置37.根据本发明，辅助真空室12不需要具有用于打开和关闭的闸阀 其他腔室4和16。