公开(公告)号：US5106782A

公开(公告)日：1992-04-21

申请号：US378627

申请日：1989-07-12

申请人： Tadashi Matsuno ,  Hideki Shibata ,  Kazuhiko Hashimoto ,  Hisayo Momose

发明人： Tadashi Matsuno ,  Hideki Shibata ,  Kazuhiko Hashimoto ,  Hisayo Momose

IPC分类号： H01L21/8238 ,  H01L21/225 ,  H01L21/28 ,  H01L21/768 ,  H01L27/092

CPC分类号： H01L21/2257 ,  H01L21/76801 ,  Y10S148/02 ,  Y10S148/026 ,  Y10S148/102

摘要： A method of manufacturing a semiconductor device having a semiconductor substrate of a first conductivity type, an N-type diffusion layer formed in the substrate, and a P-type diffusion layer formed in the substrate. Two contact holes are formed in separate steps, thus exposing the N-type diffusion layer and the P-type diffusion layer, respectively. Hence, when one of the diffusion layers is again doped with an impurity, or again heat-treated, the other diffusion layer is already protected by inter-layer insulation film. Therefore, the impurity cannot diffuse into the contact formed in the contact hole made in the other diffusion layer. As a result of this, SAC technique can be successfully achieved, without deteriorating the characteristic of the contact. In addition, since two contact holes are made in a polysilicon wiring strip and the diffusion layer to which the SAC technique is applied, in separate steps, the SAC technique can be successfully accomplished, without deteriorating the characteristic of the MOSFET formed in the semiconductor device.

摘要翻译： 一种制造半导体器件的方法，该半导体器件具有第一导电类型的半导体衬底，形成在衬底中的N型扩散层，以及形成在衬底中的P型扩散层。 在分开的步骤中形成两个接触孔，从而分别露出N型扩散层和P型扩散层。 因此，当扩散层中的一个再次掺杂杂质或再次热处理时，另一个扩散层已经被层间绝缘膜保护。 因此，杂质不能扩散到在另一扩散层中形成的接触孔中形成的接触中。 作为其结果，可以成功地实现SAC技术，而不会使接触的特性恶化。 此外，由于在多晶硅布线条中形成两个接触孔，并且在单独的步骤中制成SAC技术所用的扩散层，所以可以成功地实现SAC技术，而不会降低在半导体器件中形成的MOSFET的特性 。

公开(公告)号：US5093224A

公开(公告)日：1992-03-03

申请号：US496020

申请日：1990-03-20

申请人： Kazuhiko Hashimoto ,  Kenji Kawakita ,  Noboru Nomura

发明人： Kazuhiko Hashimoto ,  Kenji Kawakita ,  Noboru Nomura

IPC分类号： G03F7/004 ,  G03F7/075 ,  H01L21/027 ,  H01L21/30 ,  H01L21/3213

CPC分类号： G03F7/0754 ,  Y10S430/168

摘要： A process for forming a fine pattern comprising the steps of forming an organic polymer film on a semiconductor substrate followed by heat treatment, applying a resist film consisting of a cyclocarbosilane represented by the general formula (I): ##STR1## where R.sub.1, R.sub.2, R.sub.3 and R.sub.4 are each hydrogen or an alkyl group,a polymer resin, and a photo acid generator, on the organic polymer film followed by heat treatment, exposing to an electric charged beam, forming a resist pattern by developing, and etching the organic polymer film while using the resist pattern as a mask. According to the present invention, a dry etching resistant precise fine resist pattern can be formed with high sensitivity.

公开(公告)号：US5030549A

公开(公告)日：1991-07-09

申请号：US371289

申请日：1989-06-26

申请人： Kazuhiko Hashimoto ,  Taichi Koizumi ,  Kenji Kawakita ,  Noboru Nomura

发明人： Kazuhiko Hashimoto ,  Taichi Koizumi ,  Kenji Kawakita ,  Noboru Nomura

IPC分类号： G03F7/105 ,  G03F1/68 ,  G03F1/80 ,  G03F7/004 ,  G03F7/039 ,  G03F7/09 ,  G03F7/11 ,  G03F7/26 ,  G03F7/38 ,  G03F7/40 ,  H01L21/027 ,  H01L21/30

CPC分类号： G03F7/039 ,  G03F7/0047 ,  G03F7/093

摘要： Provided is a method for forming fine pattern free from shear of pattern caused by charging and high in dry etch resistance by using a high molecular organic film containing an organometallic complex or a metallic salt in single-layer or multi-layer resist process and treating the surface of this film with a reducing agent to form a metallic layer on the surface.

公开(公告)号：US4467452A

公开(公告)日：1984-08-21

申请号：US331066

申请日：1981-12-15

申请人： Shozo Saito ,  Yukimasa Uchida ,  Kazuhiko Hashimoto ,  Norio Endo

发明人： Shozo Saito ,  Yukimasa Uchida ,  Kazuhiko Hashimoto ,  Norio Endo

IPC分类号： H01L29/792 ,  G11C11/40 ,  H01L29/78

CPC分类号： H01L29/792

摘要： A nonvolatile semiconductor memory device having a gate insulating film with a memory function. An impurity layer having the same conductivity type as that of the substrate region is formed in that substrate region, underlying the gate insulating film having a memory function, in which a channel is formed. The impurity layer has an impurity profile in which a peak of an impurity concentration is in the region distanced by 500 .ANG. or less from the surface of the substrate region and the impurity concentration is 1.times.10.sup.18 cm.sup.-3 or less in the region at the depth of 500 .ANG. or more.

摘要翻译： 一种具有具有记忆功能的栅极绝缘膜的非易失性半导体存储器件。 在其中形成沟道的具有记忆功能的栅极绝缘膜下方的衬底区域中形成具有与衬底区域相同的导电类型的杂质层。 杂质层具有杂质浓度在距离衬底区域的表面远离500或更小的区域中的杂质分布，并且在深度的区域中杂质浓度为1×10 18 cm -3或更小 500 ANGSTROM以上。

公开(公告)号：US07779141B2

公开(公告)日：2010-08-17

申请号：US10514658

申请日：2003-03-13

申请人： Kazuhiko Hashimoto ,  Kenji Kida ,  Tadashi Miki ,  Yasuo Yoshimura

发明人： Kazuhiko Hashimoto ,  Kenji Kida ,  Tadashi Miki ,  Yasuo Yoshimura

IPC分类号： G06F15/16 ,  G06F15/173

CPC分类号： H04M11/00 ,  H04L12/5692

摘要： The invention provides a communication apparatus used inside a house, a communication system connected thereto, a communication process, and computer program used therefore. The communication apparatus of the present invention connected via a network to one or more terminal appliances in the house, communicates with the outside via two or more different communication configurations including a first communication configuration with a high speed digital transmission technique and a second communication configuration providing service for telephone subscribers. The communication apparatus is characterized in recognizing a situation thereby to disconnect the first communication configuration and to use only the second communication configuration for communication with the outside.

摘要翻译： 本发明提供了一种在房屋内使用的通信装置，与其连接的通信系统，通信过程和因此使用的计算机程序。 通过网络将本发明的通信装置连接到房屋中的一个或多个终端设备，经由两个或多个不同的通信配置与外部通信，包括具有高速数字传输技术的第一通信配置和提供 服务电话用户。 通信装置的特征在于识别出由此断开第一通信配置并且仅使用第二通信配置来与外部进行通信的情况。

公开(公告)号：US07205090B2

公开(公告)日：2007-04-17

申请号：US11037286

申请日：2005-01-19

申请人： Ichiki Takemoto ,  Kazuhiko Hashimoto ,  Satoshi Yamaguchi

发明人： Ichiki Takemoto ,  Kazuhiko Hashimoto ,  Satoshi Yamaguchi

IPC分类号： G03F7/004

CPC分类号： G03F7/0397 ,  G03F7/0045 ,  Y10S430/115 ,  Y10S430/122

摘要： The present invention provides a chemical amplification type positive resist composition comprising (A) a resin which comprises (i) 5 to 50% by mol of a structural unit of the formula (I), (ii) 5 to 50% by mol of a structural unit of the formula (II) and (iii) 5 to 50% by mol of at least one selected from the group consisting of structural units of the formulas (III) and (IV), and (B) an acid generator. The present composition is suitable for excimer laser lithography using ArF, KrF and the like, and shows various outstanding resist abilities, specifically, gives better effective sensitivity and resolution to resist patterns obtained therefrom, and gives particularly excellent pattern shape and excellent line edge roughness.

摘要翻译： 本发明提供化学放大型正型抗蚀剂组合物

公开(公告)号：US20060192686A1

公开(公告)日：2006-08-31

申请号：US10547545

申请日：2003-04-25

申请人： Kazuhiko Hashimoto ,  Kazunari Nishii ,  Tadashi Miki ,  Yasuo Yoshimura

发明人： Kazuhiko Hashimoto ,  Kazunari Nishii ,  Tadashi Miki ,  Yasuo Yoshimura

IPC分类号： H04Q9/00 ,  G08C15/06

CPC分类号： H04L12/2827 ,  G08B15/00 ,  G08B25/009 ,  G08B25/08 ,  H04L2012/2841 ,  H04L2012/285 ,  H04M11/002 ,  H04M11/04

摘要： A communication system includes an information terminal apparatus having at least a data collecting portion for collecting appliance information of an appliance, a data processing server apparatus and a communication device which can be communicated with the information terminal apparatus, and first and second communication networks for connection between the information terminal apparatus and the data processing server apparatus. The first communication network is a communication configuration with a high speed digital transmission technique, and the second communication network is another communication configuration providing service for telephone subscribers. The information terminal apparatus communicates the appliance information with the data processing server apparatus through the first communication network, and uses the second communication network for communicating a particular appliance information with the communication device.

摘要翻译： 通信系统包括至少具有用于收集设备的设备信息的数据收集部分的信息终端设备，可与信息终端设备通信的数据处理服务器设备和通信设备，以及用于连接的第一和第二通信网络 在信息终端装置和数据处理服务器装置之间。 第一通信网络是具有高速数字传输技术的通信配置，第二通信网络是为电话用户提供服务的另一通信配置。 信息终端装置通过第一通信网络与数据处理服务器装置通信设备信息，并且使用第二通信网络与通信设备通信特定的设备信息。

公开(公告)号：US06894100B2

公开(公告)日：2005-05-17

申请号：US10284376

申请日：2002-10-31

申请人： Takaaki Miyoshi ,  Kazuhiko Hashimoto

发明人： Takaaki Miyoshi ,  Kazuhiko Hashimoto

IPC分类号： C08K3/04

CPC分类号： C08L77/00 ,  C08L71/00 ,  C08L71/12 ,  C08L71/123 ,  C08L77/02 ,  C08L77/06 ,  Y10S977/753

摘要： An electrically conductive resin composition comprising a polyamide, a polyphenylene ether, an impact modifier and an electrically conductive filler, wherein more than 0 and less than 50 wt. % of all of the filler used is preliminarily compounded with a mixture containing the impact modifier and the polyphenylene ether. The resin composition has an excellent balance of electrical conductivity and Dart impact strength at low temperatures, and excellent stiffness at high temperatures, thermal resistance, fluidity, and surface appearance.

摘要翻译： 一种包含聚酰胺，聚苯醚，抗冲改性剂和导电填料的导电树脂组合物，其中大于0重量％ 使用的所有填料的％都预先与含有抗冲改性剂和聚苯醚的混合物混合。 该树脂组合物在低温下具有优异的电导率和落镖冲击强度的平衡，并且在高温下具有优异的刚度，耐热性，流动性和表面外观。

公开(公告)号：US06788620B2

公开(公告)日：2004-09-07

申请号：US10434516

申请日：2003-05-07

申请人： Seigo Shiraishi ,  Norihisa Takahara ,  Masaaki Suzuki ,  Kazuhiko Hashimoto ,  Takashi Hashida ,  Hidetomo Nagahara ,  Masahiko Hashimoto

发明人： Seigo Shiraishi ,  Norihisa Takahara ,  Masaaki Suzuki ,  Kazuhiko Hashimoto ,  Takashi Hashida ,  Hidetomo Nagahara ,  Masahiko Hashimoto

IPC分类号： H04R100

CPC分类号： G10K11/02 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/4913 ,  Y10T29/49155 ,  Y10T29/49165

摘要： An acoustic matching member that is incorporated into an ultrasonic transducer for transmitting and receiving ultrasonic waves, includes: at least two layers including a first layer and a second layer that have different acoustic impedance values from each other. The first layer is made of a composite material of a porous member and a filing material supported by void portions of the porous member, the second layer is made of the filling material or the porous member, and the first layer and the second layer are present in this stated order. A piezoelectric member is disposed on a side of the first layer of the acoustic matching member to form an ultrasonic transducer or an ultrasonic flowmeter. The acoustic matching member does not have independent intermediate layers between the layers, so that delamination hardly occurs and the difficulty in the designing associated with the presence of intermediate layers can be avoided.

摘要翻译： 包括在用于发送和接收超声波的超声波换能器中的声匹配构件包括：包括彼此具有不同声阻抗值的第一层和第二层的至少两层。 第一层由多孔构件的复合材料和由多孔构件的空隙部分支撑的填充材料制成，第二层由填充材料或多孔构件制成，并且第一层和第二层存在 按照这个命令。 压电构件设置在声匹配构件的第一层的一侧，以形成超声波换能器或超声波流量计。 声匹配构件在层之间不具有独立的中间层，使得几乎不发生分层，并且可以避免与中间层的存在相关的设计的困难。

公开(公告)号：US06709799B2

公开(公告)日：2004-03-23

申请号：US09742084

申请日：2000-12-22

申请人： Kazuhiko Hashimoto

发明人： Kazuhiko Hashimoto

IPC分类号： G03C173

CPC分类号： G03F7/004 ,  G03F7/0757 ,  Y10S430/106 ,  Y10S430/11 ,  Y10S430/111

摘要： There is provided a resist composition containing a photosensitive resin and used in photolithography, said photosensitive resin having a transmittance of 40% or more for a light having a wavelength of 157 nm in applying to a thickness of 0.1 &mgr;m. The composition has a characteristic that it allows easy formation of a fine pattern having a good profile, particularly at a wavelength for exposure with an F2 excimer laser.

摘要翻译： 提供了含有感光性树脂并用于光刻的抗蚀剂组合物，所述感光性树脂在施加厚度为0.1μm的情况下对波长为157nm的光具有40％以上的透射率。 该组合物具有容易形成具有良好外形的细微图案的特征，特别是在用F2准分子激光曝光的波长下。