Method of manufacturing a semiconductor device
    1.
    发明授权
    Method of manufacturing a semiconductor device 失效
    制造半导体器件的方法

    公开(公告)号:US5106782A

    公开(公告)日:1992-04-21

    申请号:US378627

    申请日:1989-07-12

    摘要: A method of manufacturing a semiconductor device having a semiconductor substrate of a first conductivity type, an N-type diffusion layer formed in the substrate, and a P-type diffusion layer formed in the substrate. Two contact holes are formed in separate steps, thus exposing the N-type diffusion layer and the P-type diffusion layer, respectively. Hence, when one of the diffusion layers is again doped with an impurity, or again heat-treated, the other diffusion layer is already protected by inter-layer insulation film. Therefore, the impurity cannot diffuse into the contact formed in the contact hole made in the other diffusion layer. As a result of this, SAC technique can be successfully achieved, without deteriorating the characteristic of the contact. In addition, since two contact holes are made in a polysilicon wiring strip and the diffusion layer to which the SAC technique is applied, in separate steps, the SAC technique can be successfully accomplished, without deteriorating the characteristic of the MOSFET formed in the semiconductor device.

    摘要翻译: 一种制造半导体器件的方法,该半导体器件具有第一导电类型的半导体衬底,形成在衬底中的N型扩散层,以及形成在衬底中的P型扩散层。 在分开的步骤中形成两个接触孔,从而分别露出N型扩散层和P型扩散层。 因此,当扩散层中的一个再次掺杂杂质或再次热处理时,另一个扩散层已经被层间绝缘膜保护。 因此,杂质不能扩散到在另一扩散层中形成的接触孔中形成的接触中。 作为其结果,可以成功地实现SAC技术,而不会使接触的特性恶化。 此外,由于在多晶硅布线条中形成两个接触孔,并且在单独的步骤中制成SAC技术所用的扩散层,所以可以成功地实现SAC技术,而不会降低在半导体器件中形成的MOSFET的特性 。

    Chemically amplified positive resist composition
    3.
    发明授权
    Chemically amplified positive resist composition 有权
    化学放大正光刻胶组合物

    公开(公告)号:US08003296B2

    公开(公告)日:2011-08-23

    申请号:US12536386

    申请日:2009-08-05

    IPC分类号: G03F7/004

    摘要: The present invention provides a chemically amplified positive composition comprising: (A) a resin comprising a structural unit having an acid-labile group and being itself insoluble or poorly soluble in an alkali aqueous solution but becoming soluble in an alkali aqueous solution by the action of an acid, (B) a resin comprising a structural unit represented by the formula (I): wherein R1 represents a hydrogen atom, a halogen atom, a C1-C4 alkyl group or a C1-C4 perfluoroalkyl group, Z represents a single bond or —(CH2)k—CO—X4—, k represents an integer of 1 to 4, X1, X2, X3 and X4 each independently represents an oxygen atom or a sulfur atom, m represents an integer of 1 to 3 and n represents an integer of 0 to 3, and a structural unit having a fluorine atom in a side chain, and an acid generator.

    摘要翻译: 本发明提供了一种化学放大阳性组合物,其包含:(A)包含具有酸不稳定基团的结构单元的树脂,其本身不溶于或难溶于碱性水溶液,但通过作用于 酸,(B)包含由式(I)表示的结构单元的树脂:其中R1表示氢原子,卤素原子,C1-C4烷基或C1-C4全氟烷基,Z表示单键 或 - (CH 2)k -CO-X 4 - ,k表示1〜4的整数,X 1,X 2,X 3,X 4各自独立地表示氧原子或硫原子,m表示1〜3的整数,n表示 0〜3的整数,侧链具有氟原子的结构单元和酸发生剂。

    Monitoring system
    4.
    发明授权
    Monitoring system 失效
    监视系统

    公开(公告)号:US07385496B2

    公开(公告)日:2008-06-10

    申请号:US10510986

    申请日:2003-02-21

    IPC分类号: G08B29/00

    摘要: A monitoring system for preventing crime in a home, includes a plurality of terminals for monitoring whether predetermined monitoring points are in a stationary or nonstationary state. Further, the monitoring system includes a central processing device for controlling the setting/canceling of alarm operations of the terminals. The central processing device has a communication unit that receives stationary/nonstationary information from the terminals and transmits predetermined information including commands to the terminals. Each terminal has a communication unit that transmits stationary/nonstationary information to the central processing device and receives the predetermined information from the central processing device. Thus bidirectional communication can be achieved between the central processing device and the terminals. The terminals may include a terminal with an emergency call unit which, in an emergency, calls or notifies another, and a terminal having a notification unit which indicates that a nonstationary state has been accepted by a predetermined point of contact.

    摘要翻译: 一种用于防止家庭中的犯罪的监视系统包括多个终端,用于监视预定监视点是处于静止状态还是非稳态状态。 此外,监视系统包括用于控制终端的报警操作的设置/取消的中央处理装置。 中央处理装置具有从终端接收静止/不稳定信息的通信单元,并向终端发送包括命令的预定信息。 每个终端具有通信单元,其向中央处理设备发送静止/不稳定信息,并从中央处理设备接收预定信息。 因此,可以在中央处理装置和终端之间实现双向通信。 终端可以包括具有在紧急情况下呼叫或通知另一个的紧急呼叫单元的终端,以及具有指示非稳定状态已经被预定接触点接受的通知单元的终端。

    Ultrasonic transducer and ultrasonic flowmeter
    5.
    发明授权
    Ultrasonic transducer and ultrasonic flowmeter 有权
    超声波换能器和超声波流量计

    公开(公告)号:US07061163B2

    公开(公告)日:2006-06-13

    申请号:US10473752

    申请日:2003-01-27

    IPC分类号: H01L41/08

    CPC分类号: G10K11/02 G01F1/662

    摘要: An ultrasonic transducer according to the present invention includes: a piezoelectric body 4 to set up ultrasonic vibrations; an acoustic matching layer 3 made of a material with a density of 50 kg/m3 to 1,000 kg/m3 and an acoustic impedance of 2.5×103 kg/m2/s to 1.0×106 kg/m2/s; a lower acoustic matching layer 9 provided between the piezoelectric body 4 and the acoustic matching layer 3; and a structure supporting member 6 that supports the lower acoustic matching layer 9 and the piezoelectric body 4 thereon and shields the piezoelectric body 4 from a fluid that propagates the ultrasonic vibrations. The ultrasonic transducer includes a protective portion, which contacts with at least a portion of a side surface of the acoustic matching layer 4. This protective portion is defined by a portion of the lower acoustic matching layer 9 and forms an integral part of the lower acoustic matching layer 9.

    摘要翻译: 根据本发明的超声波换能器包括:压电体4,用于设置超声波振动; 由密度为50kg / m 3至1,000kg / m 3的材料制成的声匹配层3和2.5×10 3的声阻抗, / SUP> kg / m 2 / s至1.0×10 6 kg / m 2 / s; 设置在压电体4和声匹配层3之间的下声匹配层9; 以及在其上支撑下声匹配层9和压电体4的结构支撑构件6,其将压电体4与传播超声波振动的流体进行屏蔽。 超声波换能器包括与声匹配层4的侧表面的至少一部分接触的保护部分。 该保护部分由下声匹配层9的一部分限定,并形成下声匹配层9的整体部分。

    Chemical amplification type positive resist composition
    7.
    发明申请
    Chemical amplification type positive resist composition 有权
    化学放大型正光刻胶组合物

    公开(公告)号:US20050158656A1

    公开(公告)日:2005-07-21

    申请号:US11037286

    申请日:2005-01-19

    摘要: The present invention provides a chemical amplification type positive resist composition comprising (A) a resin which comprises (i) 5 to 50% by mol of a structural unit of the formula (I), (ii) 5 to 50% by mol of a structural unit of the formula (II) and (iii) 5 to 59% by mol of at least one selected from the group consisting of structural units of the formulas (III) and (IV), and (B) an acid generator. The present composition is suitable for excimer laser lithography using ArF, KrF and the like, and shows various outstanding resist abilities, specifically, gives better effective sensitivity and resolution to resist patterns obtained therefrom, and gives particularly excellent pattern shape and excellent line edge roughness.

    摘要翻译: 本发明提供了一种化学扩增型正型抗蚀剂组合物,其包含(A)树脂,其包含(i)5〜50摩尔%的式(I)的结构单元,(ii)5〜50摩尔% 式(II)和(iii)的结构单元为选自由式(III)和(IV)的结构单元组成的组中的至少一种为5至59摩尔%,和(B)酸产生剂。 本发明的组合物适用于使用ArF,KrF等的准分子激光光刻法,并且显示出各种优异的抗蚀剂能力,具体地说,提供更好的有效灵敏度和分辨率以抵抗由其获得的图案,并且具有特别优异的图案形状和优异的线边缘粗糙度。

    Movement pattern recognizing apparatus for detecting movements of human
bodies and number of passed persons
    9.
    发明授权
    Movement pattern recognizing apparatus for detecting movements of human bodies and number of passed persons 失效
    用于检测人体运动和通过人数的运动模式识别装置

    公开(公告)号:US6081619A

    公开(公告)日:2000-06-27

    申请号:US683452

    申请日:1996-07-18

    CPC分类号: G07C9/00 G06K9/00335

    摘要: A movement pattern recognizing apparatus has a movement signal detection device including a sensor for detecting a mobile body in a detection region and for providing a movement signal indicating the position of the mobile body. The signal changes as time elapses. The apparatus further has a movement pattern storage device for storing data about previous movement patterns which were realized when a mobile body moved in the detection region, and a movement pattern selection device for selecting data about the movement pattern from the movement pattern storage device based upon the movement signal detected by the movement signal detection device.

    摘要翻译: 移动模式识别装置具有移动信号检测装置,其包括用于检测检测区域中的移动体的传感器,并且提供表示移动体的位置的移动信号。 信号随着时间的推移而改变。 该装置还具有运动模式存储装置,用于存储当移动体在检测区域中移动时实现的先前运动模式的数据;以及运动模式选择装置,用于基于运动模式存储装置从运动模式存储装置中选择关于运动模式的数据 由移动信号检测装置检测到的移动信号。

    Combustion chamber structure for an engine
    10.
    发明授权
    Combustion chamber structure for an engine 失效
    发动机燃烧室结构

    公开(公告)号:US5335634A

    公开(公告)日:1994-08-09

    申请号:US883335

    申请日:1992-05-14

    摘要: A combustion chamber for an engine is provided between a cylinder bore formed in a cylinder block, a generally conically-shaped wall formed in an under wall of a cylinder head, and a piston in the cylinder bore. The combustion chamber has a structure into which an intake port opens so as to introduce an intake air flow closer to a marginal portion than a central portion of the combustion chamber, thereby generating a swirl flow of intake air in the combustion chamber. The combustion chamber also includes a curved air flow guide wall formed in the generally conically-shaped wall which extends from near the intake port so as to approach the cylinder bore surface gradually, thereby generating what is termed a squish flow of intake air.

    摘要翻译: 用于发动机的燃烧室设置在形成在气缸体中的气缸孔,形成在气缸盖的下壁中的大致锥形的壁和气缸孔中的活塞之间。 燃烧室具有进气口打开的结构,以便引入比燃烧室的中心部分更靠近边缘部分的进气流,从而在燃烧室中产生进气的旋流。 燃烧室还包括形成在大致圆锥形壁上的弯曲气流引导壁,其从进气口附近延伸,以便逐渐接近缸孔表面,从而产生所谓的挤压的进气流。