Film acoustically-coupled transformer
    22.
    发明授权
    Film acoustically-coupled transformer 有权
    薄膜声耦合变压器

    公开(公告)号:US07391285B2

    公开(公告)日:2008-06-24

    申请号:US10965637

    申请日:2004-10-13

    Abstract: One embodiment of the film acoustically-coupled transformer (FACT) includes a decoupled stacked bulk acoustic resonator (DSBAR) having a lower film bulk acoustic resonator (FBAR) an upper FBAR stacked on the lower FBAR, and, between the FBARs, an acoustic decoupler comprising a layer of acoustic decoupling material. Each FBAR has opposed planar electrodes with a piezoelectric element between them. The FACT additionally has first terminals electrically connected to the electrodes of one FBAR and second terminals electrically connected to the electrodes of the other FBAR. Another embodiment has decoupled stacked bulk acoustic resonators (DSBARs), each as described above, a first electrical circuit interconnecting the lower FBARs, and a second electrical circuit interconnecting the upper FBARs. The FACT provides impedance transformation, can linking single-ended circuitry with balanced circuitry or vice versa and electrically isolates primary and secondary. Some embodiments are additionally electrically balanced.

    Abstract translation: 薄膜声耦合变压器(FACT)的一个实施例包括具有下薄膜体声波谐振器(FBAR)的解耦堆叠体声波谐振器(DSBAR),堆叠在下FBAR上的上FBAR,以及在FBAR之间,声解耦器 包括声去耦材料层。 每个FBAR具有相对的平面电极,它们之间具有压电元件。 FACT还具有电连接到一个FBAR的电极的第一端子和电连接到另一个FBAR的电极的第二端子。 另一个实施例已经解耦了堆叠的体声波谐振器(DSBAR),每个如上所述,将第一电路互连到下FBAR,以及互连上FBAR的第二电路。 FACT提供阻抗变换,可以将单端电路与平衡电路相连,反之亦然,并将初级和次级电隔离。 一些实施例另外电平衡。

    Apparatus and method for detecting a target environmental variable that employs film-bulk acoustic wave resonator oscillators
    23.
    发明授权
    Apparatus and method for detecting a target environmental variable that employs film-bulk acoustic wave resonator oscillators 有权
    用于检测使用膜 - 体声波谐振器振荡器的目标环境变量的装置和方法

    公开(公告)号:US07358651B2

    公开(公告)日:2008-04-15

    申请号:US11109108

    申请日:2005-04-18

    CPC classification number: G01K11/265 G01L1/165 G01L9/0025 H03H9/0542

    Abstract: An apparatus and method for detecting a target environmental variable (TEV). A first film-bulk acoustic resonator (FBAR) oscillator that includes a first FBAR with a first response to the target environmental variable generates a first frequency. A second film-bulk acoustic resonator (FBAR) oscillator that includes a second FBAR with a second response to the target environmental variable generates a second frequency. A circuit that is coupled to the first FBAR oscillator and the second FBAR oscillator determines the target environmental variable (e.g., changes in the TEV) based on the first frequency and the second frequency.

    Abstract translation: 一种用于检测目标环境变量(TEV)的装置和方法。 包括对目标环境变量具有第一响应的第一FBAR的第一薄膜体声波谐振器(FBAR)振荡器产生第一频率。 包括具有对目标环境变量的第二响应的第二FBAR的第二薄膜 - 体声波谐振器(FBAR)振荡器产生第二频率。 耦合到第一FBAR振荡器和第二FBAR振荡器的电路基于第一频率和第二频率来确定目标环境变量(例如,TEV的变化)。

    Method of fabricating thin film bulk acoustic resonator (FBAR) and FBAR structure embodying the method
    26.
    发明授权
    Method of fabricating thin film bulk acoustic resonator (FBAR) and FBAR structure embodying the method 有权
    制造薄膜体声共振器(FBAR)的方法和体现该方法的FBAR结构

    公开(公告)号:US06714102B2

    公开(公告)日:2004-03-30

    申请号:US09798496

    申请日:2001-03-01

    CPC classification number: H03H3/02

    Abstract: A method for fabricating an acoustic resonator, for example a Thin Film Bulk Acoustic Resonators (FBAR), on a substrate. A depression is etched and filled with sacrificial material. The FBAR is fabricated on the substrate spanning the depression, the FBAR having an etch hole. The depression may include etch channels in which case the FBAR may include etch holes aligned with the etch channels. A resonator resulting from the application of the technique is suspended in air and includes at least one etch hole and may include etch channels.

    Abstract translation: 一种用于在衬底上制造声共振器的方法,例如薄膜体声波谐振器(FBAR)。 蚀刻凹陷并填充牺牲材料。 FBAR制造在跨越凹陷的衬底上,FBAR具有蚀刻孔。 凹陷可以包括蚀刻通道,在这种情况下,FBAR可以包括与蚀刻通道对准的蚀刻孔。 由施加该技术产生的共振器悬浮在空气中并且包括至少一个蚀刻孔,并且可以包括蚀刻通道。

    Duplexer incorporating thin-film bulk acoustic resonators (FBARs)
    29.
    发明授权
    Duplexer incorporating thin-film bulk acoustic resonators (FBARs) 有权
    掺入薄膜体声共振器(FBAR)的双工器

    公开(公告)号:US06262637B1

    公开(公告)日:2001-07-17

    申请号:US09324618

    申请日:1999-06-02

    CPC classification number: H03H9/568 H03H9/706

    Abstract: An FBAR-based duplexer that comprises a first port, a second port, a third port, a first band-pass filter connected between the first port and the third port and a series circuit connected between the second port and the third port. The first band-pass filter includes a first ladder circuit having shunt and series elements. Each of the elements of the first ladder circuit comprises a film bulk acoustic resonator (FBAR). The series circuit includes a 90° phase shifter in series with a second band-pass filter. The second band-pass filter includes a second ladder circuit having shunt and series elements. Each of the elements of the second ladder circuit comprises a film bulk acoustic resonator. A band-pass filter comprising shunt elements and series elements in which the series elements and the shunt elements are connected to form a ladder circuit, and each of the elements includes a film bulk acoustic resonator (FBAR).

    Abstract translation: 一种基于FBAR的双工器,包括连接在第一端口和第三端口之间的第一端口,第二端口,第三端口,第一带通滤波器以及连接在第二端口和第三端口之间的串联电路。 第一带通滤波器包括具有并联和串联元件的第一梯形电路。 第一梯形电路的每个元件包括膜体声波谐振器(FBAR)。 串联电路包括与第二带通滤波器串联的90°移相器。 第二带通滤波器包括具有分路和串联元件的第二梯形电路。 第二梯形电路的每个元件包括膜体声波谐振器。 一种带通滤波器,包括并联元件和串联元件,其中串联元件和分流元件连接以形成梯形电路,并且每个元件包括膜体声波谐振器(FBAR)。

    Thermally actuated optical fiber switch
    30.
    发明授权
    Thermally actuated optical fiber switch 失效
    热致动光纤开关

    公开(公告)号:US5446811A

    公开(公告)日:1995-08-29

    申请号:US212543

    申请日:1994-03-14

    Abstract: A micromachined device for selectively switching an optical fiber between a first and a second position includes a working leg that undergoes a greater degree of thermal expansion than a second leg with the conduction of an electrical current through the two legs. In a preferred embodiment, the working leg has a cross-sectional area that is less than that of the second leg, thereby presenting a greater electrical resistance to the current flow. The legs are each fixed to a substrate at first ends and are interconnected at second ends that are free to move relative to the substrate. The difference in electrical resistance provides a differential in thermal expansion, as the working leg lengthens to a greater degree than the second leg. The working leg deforms the second leg and the optical fiber is pressed into a second position until current flow is terminated. In another embodiment, the differential in thermal expansion is created by ensuring that the second leg has less thermal isolation from the substrate than the thermal isolation of the working leg from the substrate.

    Abstract translation: 用于在第一位置和第二位置之间选择性地切换光纤的微机械加工装置包括经过两条腿的电流传导而经受比第二腿部更大程度的热膨胀的工作腿部。 在优选实施例中,工作腿的横截面积小于第二腿的横截面积,从而对电流呈现更大的电阻。 腿在第一端各自固定到基底,并且在相对于基底自由移动的第二端处互连。 电阻的差异提供了热膨胀的差异,因为工作腿比第二条腿更大程度地延长。 工作腿使第二腿变形,并将光纤压入第二位置,直到电流流动终止。 在另一个实施例中,热膨胀差异是通过确保第二支腿与工作支脚与基板的热隔离相比具有比基板更小的热隔离来产生的。

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