Piezoelectric micromachined ultrasonic transducer comprising a lobed membrane element and methods of manufacturing thereof

    公开(公告)号:US12251729B2

    公开(公告)日:2025-03-18

    申请号:US17497542

    申请日:2021-10-08

    Abstract: A PMUT device includes a membrane element extending perpendicularly to a first direction and configured to generate and receive ultrasonic waves by oscillating about an equilibrium position. At least two piezoelectric elements are included, with each one located over the membrane element along the first direction and configured to cause the membrane element to oscillate when electric signals are applied to the piezoelectric element, and generate electric signals in response to oscillations of the membrane element. The membrane element has a lobed shape along a plane perpendicular to the first direction, with the lobed shape including at least two lobes. The membrane element includes for each piezoelectric member a corresponding membrane portion including a corresponding lobe, with each piezoelectric member being located over its corresponding membrane portion.

    Piezoelectric micromachined ultrasonic transducer having a polymeric member over a damper cavity

    公开(公告)号:US12195327B2

    公开(公告)日:2025-01-14

    申请号:US17497538

    申请日:2021-10-08

    Abstract: A PMUT device includes a membrane element adapted to generate and receive ultrasonic waves by oscillating, about an equilibrium position, at a corresponding resonance frequency. A piezoelectric element is located over the membrane element along a first direction and configured to cause the membrane element to oscillate when electric signals are applied to the piezoelectric element, and generate electric signals in response to oscillations of the membrane element. A damper is configured to reduce free oscillations of the membrane element, and the damper includes a damper cavity surrounding the membrane element, and a polymeric member having at least a portion over the damper cavity along the first direction.

    Methods of forming and using fluid ejection devices and printheads

    公开(公告)号:US11084283B2

    公开(公告)日:2021-08-10

    申请号:US16676070

    申请日:2019-11-06

    Abstract: Ejection device for fluid, comprising a solid body including: first semiconductor body including a chamber for containing the fluid, an ejection nozzle in fluid connection with the chamber, and an actuator operatively connected to the chamber to generate, in use, one or more pressure waves in the fluid such as to cause ejection of the fluid from the ejection nozzle; and a second semiconductor body including a channel for feeding the fluid to the chamber, coupled to the first semiconductor body, in such a way that the channel is in fluid connection with the chamber. The second semiconductor body integrates a damping cavity over which extends a damping membrane, the damping cavity and the damping membrane extending laterally to the channel for feeding the fluid.

    INTEGRATED PRESSURE SENSOR WITH DOUBLE MEASURING SCALE, PRESSURE MEASURING DEVICE INCLUDING THE INTEGRATED PRESSURE SENSOR, BRAKING SYSTEM, AND METHOD OF MEASURING A PRESSURE USING THE INTEGRATED PRESSURE SENSOR
    28.
    发明申请
    INTEGRATED PRESSURE SENSOR WITH DOUBLE MEASURING SCALE, PRESSURE MEASURING DEVICE INCLUDING THE INTEGRATED PRESSURE SENSOR, BRAKING SYSTEM, AND METHOD OF MEASURING A PRESSURE USING THE INTEGRATED PRESSURE SENSOR 有权
    具有双重测量尺寸的集成压力传感器,包括集成压力传感器,制动系统的压力测量装置和使用集成压力传感器测量压力的方法

    公开(公告)号:US20160349129A1

    公开(公告)日:2016-12-01

    申请号:US14989709

    申请日:2016-01-06

    CPC classification number: G01L9/0052 G01L9/0054 G01L15/00

    Abstract: A pressure sensor with double measuring scale includes: a flexible body designed to undergo deflection as a function of a the pressure; piezoresistive transducers for detecting the deflection; a first focusing region designed to concentrate, during a first operating condition, a first value of the pressure in a first portion of the flexible body so as to generate a deflection of the first portion of the flexible body; and a second focusing region designed to concentrate, during a second operating condition, a second value of said pressure in a second portion of the flexible body so as to generate a deflection of the second portion of the flexible body. The piezoresistive transducers correlate the deflection of the first portion of the flexible body to the first pressure value and the deflection of the second portion of the flexible body to the second pressure value.

    Abstract translation: 具有双重测量刻度的压力传感器包括:柔性体,设计成作为压力的函数进行偏转; 用于检测偏转的压阻传感器; 第一聚焦区域,设计成在第一操作条件期间将柔性体的第一部分中的压力的​​第一值集中以产生柔性体的第一部分的偏转; 以及设计成在第二操作条件期间将所述压力的第二值集中在柔性体的第二部分中以便产生柔性体的第二部分的偏转的第二聚焦区域。 压阻传感器将柔性体的第一部分的偏转与第一压力值和柔性体的第二部分的偏转相关联到第二压力值。

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