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    NEAR FIELD TRANSDUCERS (NFTS) AND METHODS OF FORMING NFTS
    21.
    发明申请
    NEAR FIELD TRANSDUCERS (NFTS) AND METHODS OF FORMING NFTS 审中-公开

    公开(公告)号：US20180073135A1

    公开(公告)日：2018-03-15

    申请号：US15817503

    申请日：2017-11-20

    Applicant: SEAGATE TECHNOLOGY LLC

    Inventor： Tong Zhao ,  Michael C. Kautzky ,  Sarbeswar Sahoo ,  Justin Brons ,  Jie Gong ,  Yuhang Cheng

    IPC: C23C14/58 ,  G11B5/31 ,  G11B5/00 ,  G11B5/60

    CPC classification number: C23C14/5806 ,  G11B5/314 ,  G11B5/6088 ,  G11B2005/0021

    Abstract: Devices having an air bearing surface (ABS), the device including a near field transducer, the near field transducer having a peg and a disc, the peg having a region adjacent the ABS, the peg including a plasmonic material selected from gold (Au), silver (Ag), copper (Cu), ruthenium (Ru), rhodium (Rh), aluminum (Al), or combinations thereof; and at least one other secondary atom selected from germanium (Ge), tellurium (Te), aluminum (Al), antimony (Sb), tin (Sn), mercury (Hg), indium (In), zinc (Zn), iron (Fe), copper (Cu), manganese (Mn), silver (Ag), chromium (Cr), cobalt (Co), and combinations thereof, wherein a concentration of the secondary atom is higher at the region of the peg adjacent the ABS than a concentration of the secondary atom throughout the bulk of the peg. Methods of forming NFTs are also disclosed.

    NEAR FIELD TRANSDUCERS (NFTS) AND METHODS OF MAKING
    24.
    发明申请
    NEAR FIELD TRANSDUCERS (NFTS) AND METHODS OF MAKING 审中-公开

    公开(公告)号：US20170213571A1

    公开(公告)日：2017-07-27

    申请号：US15481866

    申请日：2017-04-07

    Applicant: SEAGATE TECHNOLOGY LLC

    Inventor： Michael C. Kautzky ,  Mark H. Ostrowski ,  David Michael Grundman ,  Martin Blaber

    IPC: G11B5/31 ,  G11B5/60 ,  G11B5/48 ,  G11B5/127

    CPC classification number: G11B5/3163 ,  G11B5/1272 ,  G11B5/3133 ,  G11B5/314 ,  G11B5/3169 ,  G11B5/4866 ,  G11B5/6005 ,  G11B5/6088 ,  G11B2005/0021

    Abstract: Methods of forming a NFT the methods including forming a hard mask positioned over at least a portion of the rod, the hard mask including at least one layer; patterning a resist mask over the hard mask, the resist mask having an edge positioned over at least a portion of the rod; etching a portion of the hard mask to expose a back edge of the rod and to form a back edge of the hard mask, wherein the back edge of the rod is equivalent to the back edge of the peg; and wherein a forward portion of the rod which is the portion of the rod forward of the back edge is covered by the hard mask; forming a disc mask including a void configured to form a disc of a NFT, the disc mask being formed over at least a portion of the hard mask so that the exposed back edge of the rod is within the void configured to form the disc; etching an area exposed in the void of the disc mask to remove both a rear portion of the rod and the surrounding dielectric up to the back edge of the hard mask edge; depositing a disc material in the etched void, wherein the back edge of the hard mask defines the front edge of the disc and the back edge of the rod is in contact with the front edge of the disc; and polishing the deposited disc material to form a top surface substantially planar with the top of the forward rod portion.

    NEAR FIELD TRANSDUCER (NFT) INCLUDING PEG AND DISC OF DIFFERENT MATERIALS
    25.
    发明申请
    NEAR FIELD TRANSDUCER (NFT) INCLUDING PEG AND DISC OF DIFFERENT MATERIALS 有权
    包括PEG和不同材料盘的近场传感器（NFT）

    公开(公告)号：US20160351222A1

    公开(公告)日：2016-12-01

    申请号：US15166799

    申请日：2016-05-27

    Applicant: SEAGATE TECHNOLOGY LLC

    Inventor： Martin Blaber ,  Michael A. Seigler ,  Michael C. Kautzky ,  Tong Zhao ,  Justin Brons ,  John C. Duda ,  Yuhang Cheng

    IPC: G11B5/60

    CPC classification number: G11B5/314 ,  G11B5/3116 ,  G11B5/3133 ,  G11B2005/0021

    Abstract: Devices having air bearing surfaces (ABS), the devices include a near field transducer (NFT) that includes a disc configured to convert photons incident thereon into plasmons; and a peg configured to couple plasmons coupled from the disc into an adjacent magnetic storage medium, wherein the disc includes a disc material and the peg includes a peg material, wherein the disc material is different from the peg material and wherein the disc material has a first real part of the permittivity and a peg material has a second real part of the permittivity and the second real part of the permittivity is not greater than the first real part of the permittivity.

    Abstract translation: 具有空气轴承表面（ABS）的装置包括近场换能器（NFT），其包括被配置成将入射到其上的光子转换成等离子体的光盘; 以及钉构造成将从所述盘耦合的等离子体光束耦合到相邻的磁存储介质中，其中所述盘包括盘材料，并且所述钉包括钉材料，其中所述盘材料与所述钉材料不同，并且其中所述盘材料具有 介电常数的第一个实部和电极材料具有介电常数的第二个实部，并且介电常数的第二个实部不大于介电常数的第一个实部。

    DEVICES INCLUDING A NEAR FIELD TRANSDUCER (NFT) INCLUDING PEG AND DISC FROM DIFFERENT MATERIALS
    26.
    发明申请
    DEVICES INCLUDING A NEAR FIELD TRANSDUCER (NFT) INCLUDING PEG AND DISC FROM DIFFERENT MATERIALS 有权
    包括近场传感器（NFT）的设备，包括不同材料的PEG和DISC

    公开(公告)号：US20160351210A1

    公开(公告)日：2016-12-01

    申请号：US15166765

    申请日：2016-05-27

    Applicant: SEAGATE TECHNOLOGY LLC

    Inventor： Martin Blaber ,  Tong Zhao ,  Michael C. Kautzky ,  Justin Brons ,  John C. Duda ,  Yuhang Cheng ,  Michael A. Seigler

    IPC: G11B5/31 ,  G11B5/60

    CPC classification number: G11B5/314 ,  G11B5/3116 ,  G11B5/3133 ,  G11B2005/0021

    Abstract: Devices that have an air bearing surface (ABS), the device includes a near field transducer (NFT) that includes a disc configured to convert photons incident thereon into plasmons; and a peg configured to couple plasmons coupled from the disc into an adjacent magnetic storage medium, wherein the disc includes a disc material that includes gold or an alloy thereof and the peg includes a peg material, wherein the disc material is different from the peg material and wherein the peg material has a real part of the permittivity that is not greater than that of gold.

    Abstract translation: 具有空气轴承表面（ABS）的装置，该装置包括近场传感器（NFT），其包括被配置为将入射到其上的光子转换成等离子体的光盘; 以及钉构造成将从所述盘耦合的等离子体激元耦合到相邻的磁存储介质中，其中所述盘包括包括金或其合金的盘材料，并且所述钉包括钉材料，其中所述盘材料与所述钉材料不同 并且其中所述栓材料具有不大于金的介电常数的实部。

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