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公开(公告)号:US20250112182A1
公开(公告)日:2025-04-03
申请号:US18478226
申请日:2023-09-29
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Masamitsu Matsuura , Daiki Komatsu , Kengo Aoya , Ting-Ta Yen
Abstract: A semiconductor package includes a semiconductor wafer having a first connection pad and a second connection pad spaced apart by a semiconductor region of the semiconductor wafer. Portions of the semiconductor wafer are covered by a protective overcoat. The semiconductor package also includes a cap wafer mounted to the semiconductor wafer and overpassing the semiconductor region of the semiconductor wafer. The cap wafer extends between the first connection pad and the second connection pad of the semiconductor wafer. The semiconductor package further includes an insulation material overlaying the cap wafer. The insulation material comprising vias to the first connection pad and the second connection pad, the vias being filled with a conductive material.
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公开(公告)号:US12212298B2
公开(公告)日:2025-01-28
申请号:US17877206
申请日:2022-07-29
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Hakhamanesh Mansoorzare , Ting-Ta Yen , Jeronimo Segovia-Fernandez , Bichoy Bahr
Abstract: A micro-mechanical resonator die includes: micro-mechanical resonator die layers; a cavity formed in at least one of the micro-mechanical resonator die layers; and a micro-mechanical resonator suspended in the cavity. The micro-mechanical resonator includes: a base; a first resonator portion extending from the base along a first plane; and a second resonator portion extending from the base along a second plane. The first resonator portion is configured to operate in an out-of-plane flexural mode that displaces at least part of the first resonator portion out of the first plane. The second resonator portion is configured to operate in an out-of-plane flexural mode that displaces at least part of the second resonator portion out of the second plane and out-of-phase relative to the first resonator portion.
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公开(公告)号:US20250015783A1
公开(公告)日:2025-01-09
申请号:US18349020
申请日:2023-07-07
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Gokhan Ariturk , Adam Fruehling , Yao Yu , Ting-Ta Yen
Abstract: A filter includes an electromagnetic (EM) resonator having a first EM resonator terminal and a second EM resonator terminal. The second EM filter terminal is coupled to a ground terminal. The filter includes a first bulk acoustic wave (BAW) resonator coupled between the first EM resonator terminal and the ground terminal and includes a second BAW resonator coupled between the first EM resonator terminal and the ground terminal. A third BAW resonator is coupled between a first filter terminal and a first BAW resonator terminal of the first BAW resonator. A fourth BAW resonator is coupled between a second filter terminal and a second BAW resonator terminal of the second BAW resonator.
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公开(公告)号:US20240291466A1
公开(公告)日:2024-08-29
申请号:US18173950
申请日:2023-02-24
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Ting-Ta Yen , Jeronimo Segovia Fernandez , Sean Chang
CPC classification number: H03H9/15 , H03H3/02 , H03H9/02007
Abstract: One example described herein includes an integrated circuit (IC). The IC includes a substrate having opposing first and second sides. The second side can include a curved surface. The IC also includes a resonator on the first side. A curvature of the curved surface can reflect a property of the resonator.
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公开(公告)号:US12054385B2
公开(公告)日:2024-08-06
申请号:US17388301
申请日:2021-07-29
Applicant: Texas Instruments Incorporated
Inventor: Ting-Ta Yen , Jeronimo Segovia-Fernandez , Ricky Alan Jackson , Benjamin Cook
IPC: B81B7/00
CPC classification number: B81B7/0048 , B81B2201/0271 , B81B2203/033
Abstract: A semiconductor system includes a substrate. The substrate has a front side and a back side. A device is formed on the front side of the substrate. A vertical spring is etched in the substrate about the device. A trench is etched in the front side of the substrate about the device. A wall of the trench forms a side of the vertical spring.
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公开(公告)号:US20230253951A1
公开(公告)日:2023-08-10
申请号:US18301324
申请日:2023-04-17
Applicant: Texas Instruments Incorporated
Inventor: Jeronimo Segovia Fernandez , Peter Smeys , Ting-Ta Yen
CPC classification number: H03H9/175 , H03H9/0542 , H03H9/02275 , H03H9/64 , H03H2009/02299 , H03H2009/155
Abstract: A laterally vibrating bulk acoustic wave (LVBAW) resonator includes a piezoelectric plate sandwiched between first and second metal layers. The second metal layer is patterned into an interdigital transducer (IDT) with comb-shaped electrodes having interlocking fingers. The width and pitch of the fingers of the electrodes determine the resonant frequency. A combined thickness of the first and second metal layers and the piezoelectric layer is less than the pitch of the interlocking fingers.
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公开(公告)号:US20230115689A1
公开(公告)日:2023-04-13
申请号:US17488891
申请日:2021-09-29
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Steffen Paul Link , Ting-Ta Yen , Jeronimo Segovia-Fernandez
Abstract: A piezoelectric resonator includes a first conductive layer, and a piezoelectric layer affixed to a first side of the first conductive layer. The piezoelectric resonator also includes a stair step frame structure affixed to a first side of the piezoelectric layer, and a second conductive layer, affixed to the first side of the piezoelectric layer and covering the stair step frame structure.
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公开(公告)号:US11489511B2
公开(公告)日:2022-11-01
申请号:US16236601
申请日:2018-12-30
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Jeronimo Segovia Fernandez , Peter Smeys , Ting-Ta Yen
IPC: H03H3/02 , H03H9/17 , H03H9/13 , C23C16/455 , C23C14/35 , H01L41/316 , H01L41/29
Abstract: A resonator includes a substrate, an acoustic Bragg mirror disposed above the substrate, and a bottom metal layer disposed above the acoustic Bragg mirror. The resonator also includes a piezoelectric plate disposed above the bottom metal layer. The resonator further includes a top metal layer disposed above the piezoelectric plate. The top metal layer comprises multiple fingers within a single plane and the width of each of the fingers is between 75%-125% of a thickness of the piezoelectric plate.
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公开(公告)号:US10727161B2
公开(公告)日:2020-07-28
申请号:US16055395
申请日:2018-08-06
Applicant: Texas Instruments Incorporated
Inventor: Peter Smeys , Ting-Ta Yen , Barry Jon Male , Paul Merle Emerson
IPC: H01L23/433 , H01L23/31 , H01L23/495 , H01L23/00
Abstract: Described examples include microelectronic devices and integrated circuits with an active first circuit in a first segment of a first wafer, a second circuit in a second segment of the first wafer, and second and third wafers bonded to different surfaces of the first wafer to provide first and second cavities with surfaces spaced from the first segment. An opening extends through the first wafer between the first and second cavities to separate portions of the first and second segments and to form a sealed cavity that surrounds the first segment. A bridge segment of the first wafer supports the first segment in the sealed cavity and includes one or more conductive structures to electrically connect the first and second circuits.
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公开(公告)号:US20190052247A1
公开(公告)日:2019-02-14
申请号:US15671996
申请日:2017-08-08
Applicant: Texas Instruments Incorporated
Inventor: Ting-Ta Yen
Abstract: Unreleased plane acoustic wave (PAW) resonators are disclosed. An example unreleased PAW resonator includes a substrate, a first acoustic reflector disposed on the substrate, and a piezoelectric layer disposed on the first acoustic reflector, wherein the first acoustic reflector and the piezoelectric layer are unreleased from the substrate.
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