Method of ultrasonic mounting and ultrasonic mounting apparatus using the same
    24.
    发明申请
    Method of ultrasonic mounting and ultrasonic mounting apparatus using the same 失效
    超声波安装方法及使用其的超声波安装装置

    公开(公告)号:US20060097028A1

    公开(公告)日:2006-05-11

    申请号:US11062789

    申请日:2005-02-23

    IPC分类号: B23K1/06

    摘要: A method of ultrasonic mounting can increase mounting efficiency by using high-frequency ultrasound and can also mount large semiconductor chips. The method ultrasonically bonds a semiconductor chip 52 to a substrate 50 using an ultrasonic mounting apparatus including a horn 15 that propagates ultrasonic vibration of an ultrasonic vibrator, the horn 15 being made of a ceramic that has a higher vibration propagation speed than metal. The method includes steps of disposing the substrate 50 on a stage 13, disposing the semiconductor chip 52 on the substrate 50, and placing the semiconductor chip 52 in contact with a convex part 15a provided on the horn 15 and applying ultrasonic vibration to bond the semiconductor chip 52 to the substrate 50.

    摘要翻译: 一种超声波安装方法可以通过使用高频超声波提高安装效率,还可以安装大型半导体芯片。 该方法使用包括传播超声波振动器的超声波振动的喇叭15的超声波安装装置将半导体芯片52超声波接合到基板50,喇叭15由具有比金属更高的振动传播速度的陶瓷制成。 该方法包括以下步骤:将基板50设置在台13上,将半导体芯片52配置在基板50上,将半导体芯片52与设置在喇叭15上的凸部15a接触并施加超声波振动, 半导体芯片52到基板50。