摘要:
[Problem] To provide a substrate processing apparatus capable of preventing adherence of hydrogen fluoride to an inner surface the like of a chamber.[Means for Solving] An apparatus housing and processing a substrate W in a chamber includes a hydrogen fluoride gas supply path 61 for supplying a hydrogen fluoride gas into a chamber 40, wherein a part or whole of an inner surface of the chamber 40 is formed of Al or Al alloy which has not been subjected to surface oxidation treatment. The chamber 40 includes a lid 52 closing an upper opening of a chamber main body 51, and at least an inner surface of the lid 52 is formed of the Al or Al alloy which has not been subjected to alumite treatment.
摘要:
An electroconductive resin composition, comprising at least: a multi-component polymer-type resin binder (A) comprising a dispersed phase and a continuous phase, and having a number-average particle size of dispersed phase of 0.001-2 μm, and an electroconductive material (B) in the form of powder and/or fiber. The electroconductive resin composition may preferably be used for a fuel cell separator.
摘要:
Semiconductor wafers are cleaned by placing the semiconductor wafers in a processing vessel, forming a pure water film on the surfaces of the wafers, forming an ozonic water film by dissolving ozone gas in the pure water film, and removing resist films formed on the wafers by the agency of the ozonic water film. The pure water film is formed by condensing steam on the surfaces of the wafers. The resist films formed on the surfaces of the wafers can be removed by also using hydroxyl radicals produced by interaction between steam and ozone gas supplied into the processing vessel. Thus, the resist films can be removed highly effectively.
摘要:
A curable composition comprising: (A) a hydrocarbon compound having a plurality of carbon-carbon double bonds, and (B) a carbonaceous material. The hydrocarbon compound may preferably be 1,2-polybutadiene. The curable composition may be used for a fuel cell separator.
摘要:
An electroconductive curable resin composition comprising: (A) a curable resin and/or curable resin composition having a viscosity of from 0.1 to 1,000 Pa.s at 80° C. and from 0.01 to 100 Pa.s at 100° C.; and (B) a carbonaceous material at a ratio of 80 to 1:20 to 99 in terms of the mass ratio of component (A) to component (B). Such a resin composition is free from separation between a carbonaceous material and a resin at the mold working, excellent in the moldability (e.g., compression molding, transfer molding, injection molding, injection-compression molding) and capable of providing a cured product having high electroconductivity.
摘要:
After semiconductor wafers W have been processed with ozone gas and steam fed into a processing vessel 10, air is fed into the processing vessel 10 from an air supply source connected to an ozone gas supply pipe 42 for feeding ozone gas into the processing vessel 10, whereby an atmosphere of the ozone gas in the processing vessel 10 is replaced with an atmosphere of the air.
摘要:
An on-vehicle display used in automotive vehicles for displaying an image projected from within a dashboard of a vehicle. A first reflecting surface on a windshield of a vehicle. The first reflecting surface is at a first angle with the dashboard. A second reflecting surface on a reflector is mounted in the proximity to a lower end portion of the windshield. The second reflecting surface is at a lower position than the first reflecting surface and at a second angle with the dashboard. A vehicle speed sensor for outputting a vehicle speed signal indicative of said vehicle speed to said controller. A controller guides the image projected from within the dashboard either to the first reflecting surface or to the second reflecting surface depending on a vehicle speed. A photodetector outputs a light intensity signal indicative of an intensity of ambient light in the proximity to the windshield. A controller receives the light intensity signal from the photodetector and guides the image projected from within the dashboard to the second reflecting surface when the light intensity signal is outside a predetermined range.
摘要:
A display apparatus used in automobiles has an indicating device mounted in the steering column to display the car running condition information and a reflecting plate installed in the dashboard to form a virtual image of displayed information at a point on the far side of the reflection surface from the driver. To make it more easy for the driver to see the displayed information, the apparatus incorporates a magnifying cylindrical lens which is installed between the indicating device and the reflection plate in such a way that the display surface of the indicating device is within the focal length of the lens. The virtual image of the displayed information is thus magnified by the lens and formed farther away from the driver's viewing point, making the displayed information more easily recognizable. Another feature of the apparatus is that the cylindrical lens can also be moved to a desired position to magnify the displayed information to any desired size for the driver.
摘要:
In an on-vehicle head up display device employing a catoptric system for a windshield glass of an automobile to project a display image onto an inner surface of the windshield glass, an optical system for letting a virtual image of the display image of a display means enter the windshield glass is adapted to make an angle formed by light beams of the virtual image entering the windshield glass less than a monocular resolving power. Further, an optical means for correcting parallax of the light beams of the virtual image is provided between the optical system and the windshield glass. Thus, a double image formation and binocular parallax may be eliminated.
摘要:
A method for manufacturing a fuel cell which includes layering and compression molding at least one of each of: thermoplastic resin sheets (A) containing 130 to 3,200 parts by weight of a carbonaceous material per 100 parts by weight of a thermoplastic resin; and thermoplastic resin sheets (B) containing 3 to 280 parts by weight of a carbonaceous material per 100 parts by weight of a thermoplastic resin, 50% to 100% by weight of the carbonaceous material being fibrous carbon. The thermoplastic resin sheets (A and B) are compression molded at a temperature 60° C. higher than the higher of the melting points of the two types of sheets such that the ratio between the final thickness (dA) of the compressed first thermoplastic resin sheet(s) (A) and the final thickness (dB) of the compressed second thermoplastic resin sheet(s) (B) satisfies the relation dA/dB≧2.