Roll-to-roll patterning of transparent and metallic layers

    公开(公告)号:US10546722B2

    公开(公告)日:2020-01-28

    申请号:US15090265

    申请日:2016-04-04

    Inventor: W. Dennis Slafer

    Abstract: Systems and methods are disclosed by which patterns of various materials can be formed on flexible substrates by a continuous roll-to-roll manufacturing process. The patterns may include metallic, transparent conductive, or non-metallic elements with lateral dimensions including in the range from below 100 nanometers to millimeters and with thickness dimensions including the range from tens of Angstroms to greater than 10,000 Angstroms. The substrate may be any material capable of sufficient flexibility for compatibility with roll-based processing equipment, including polymeric films, metallic foils, and thin glass, with polymeric films representing a particularly broad field of application. Methods may include the continuous roll-to-roll formation of a temporary polymeric structure with selected areas open to the underlying substrate, the continuous addition or subtraction of constituent materials, and the continuous removal, where necessary, of the polymeric structure and any excess material.

    Methods and systems for forming OLEDs and thin film devices

    公开(公告)号:US09985248B2

    公开(公告)日:2018-05-29

    申请号:US15293966

    申请日:2016-10-14

    Inventor: W. Dennis Slafer

    CPC classification number: H01L51/5262 H01L51/0096 H01L51/5246

    Abstract: Systems and methods are disclosed for providing working substrates for the deposition of various photonic and electronic devices, in particular for organic light emitting diodes (OLEDs) used for lighting and displays, where these substrates incorporate structural elements that improve the performance of these devices. These elements include nanoscale and microscale relief (3D) patterns on one or both sides of the substrate that are beneficial in controlling light and electrical properties of these devices by, for example, improving light output efficiency and uniformity. The present disclosure describes batch and roll-to-roll (R2R) techniques that allow these performance enhancing substrates to be efficiently formed, and at a much lower cost than can be achieved using prior art. Although one particular application relates to OLED lighting, such substrates can be used to enhance the performance of other devices, including flexible displays, touch screens, energy harvesting cells, sensors, and the like.

    Formation of pattern replicating tools
    23.
    发明授权
    Formation of pattern replicating tools 有权
    形成模式复制工具

    公开(公告)号:US09039401B2

    公开(公告)日:2015-05-26

    申请号:US11711928

    申请日:2007-02-27

    Inventor: W. Dennis Slafer

    Abstract: Systems, methods, and apparatus are disclosed for making patterning tools from one or more discrete elements. Such tools can have one or more “seams” or joints where the individual elements abut which can limit the tools' performance and utility in roll-to-roll manufacturing. Methods are described herein for producing “near-seamless” tools, that is, tools having seams that exhibit minimum disruption of the tool pattern and thus improved material produced by such tools. The patterning tools can be cylindrical and/or closed in shape.

    Abstract translation: 公开了用于从一个或多个离散元件制造图案化工具的系统,方法和装置。 这样的工具可以具有一个或多个“接缝”或接头,其中各个元件邻接,这可以限制工具在卷对卷制造中的性能和效用。 本文描述了用于生产“近无缝”工具的方法,即具有接缝的工具具有工具图案的最小破坏并因此显示出由这些工具产生的改进的材料。 图案形成工具可以是圆柱形和/或封闭形状。

    Addressable flexible patterns
    24.
    发明授权
    Addressable flexible patterns 有权
    可寻址灵活的模式

    公开(公告)号:US08535041B2

    公开(公告)日:2013-09-17

    申请号:US11830718

    申请日:2007-07-30

    Inventor: W. Dennis Slafer

    Abstract: Techniques, methods, systems, and apparatus are disclosed that are useful for creating addressable three-dimensional elements formed on a flexible substrate using continuous roll-to-roll fabrication methods. An array of conductive elements can be formed on a first flexible substrate layer, over which is disposed a second polymer layer containing a three-dimensional micro-scale relief pattern. The second layer can be formed in registration with the underlying electrode pattern. The lowest areas of the micropattern can be etched away, in order to expose the underlying electrode elements. The 3D micropattern can include a volumetric structure capable of being filled with various materials, where the contents of the 3D structure may be further processed by chemical, electrochemical, or physical treatment. The 3D structure may consist of elements in the general form of microvessels disposed in a periodic or non-periodic array.

    Abstract translation: 公开了用于使用连续的卷对卷制造方法在柔性基板上形成可寻址的三维元件的技术,方法,系统和装置。 导电元件阵列可以形成在第一柔性基底层上,在其上设置包含三维微尺度浮雕图案的第二聚合物层。 第二层可以形成为与底层电极图案对准。 可以蚀刻掉微图案的最低面积以暴露下面的电极元件。 3D微图案可以包括能够填充各种材料的体积结构,其中可以通过化学,电化学或物理处理进一步处理3D结构的内容物。 3D结构可以由设置在周期性或非周期性阵列中的微血管的一般形式的元件组成。

    REPLICATION TOOLS AND RELATED FABRICATION METHOS AND APPARATUS
    25.
    发明申请
    REPLICATION TOOLS AND RELATED FABRICATION METHOS AND APPARATUS 审中-公开
    复制工具和相关制造装置和装置

    公开(公告)号:US20110064838A1

    公开(公告)日:2011-03-17

    申请号:US12947132

    申请日:2010-11-16

    Inventor: W. Dennis Slafer

    Abstract: Durable replication tools are disclosed for replication of relief patterns in desired media, for example in optical recording or data storage media. Methods of making such durable replication tools are disclosed, including recording and developing a relief pattern on a selected surface of a support cylinder, creating a durable layer with a complementary relief replica of the pattern, separating the durable layer from the support cylinder. Apparatus are disclosed for fabricating such replication tools, including systems and apparatus for recording a desired relief pattern on a surface of a support cylinder. Also disclosed are electro deposition cells for forming a durable tool sleeve having a desired relief pattern. The replication tool relief features may have critical dimensions down to the micron and nanometer regime.

    Abstract translation: 公开了耐用的复制工具,用于在所需介质中复制浮雕图案,例如在光学记录或数据存储介质中。 公开了制造这种耐久复制工具的方法,包括在支撑圆筒的选定表面上记录和显影浮雕图案,产生具有图案的互补浮雕副本的耐用层,将耐久层与支撑筒分离。 公开了用于制造这种复制工具的装置,包括用于在支撑筒的表面上记录期望的浮雕图案的系统和装置。 还公开了用于形成具有期望的浮雕图案的耐用工具套筒的电沉积池。 复制工具浮雕功能可能具有至微米和纳米方面的关键尺寸。

    ROLL-TO-ROLL PATTERNING OF TRANSPARENT AND METALLIC LAYERS
    26.
    发明申请
    ROLL-TO-ROLL PATTERNING OF TRANSPARENT AND METALLIC LAYERS 有权
    透明和金属层的滚动滚轮图案

    公开(公告)号:US20090130607A1

    公开(公告)日:2009-05-21

    申请号:US12358964

    申请日:2009-01-23

    Inventor: W. Dennis Slafer

    Abstract: Systems and methods are disclosed by which patterns of various materials can be formed on flexible substrates by a continuous roll-to-roll manufacturing process. The patterns may include metallic, transparent conductive, or non-metallic elements with lateral dimensions including in the range from below 100 nanometers to millimeters and with thickness dimensions including the range from tens of Angstroms to greater than 10,000 Angstroms. The substrate may be any material capable of sufficient flexibility for compatibility with roll-based processing equipment, including polymeric films, metallic foils, and thin glass, with polymeric films representing a particularly broad field of application. Methods may include the continuous roll-to-roll formation of a temporary polymeric structure with selected areas open to the underlying substrate, the continuous addition or subtraction of constituent materials, and the continuous removal, where necessary, of the polymeric structure and any excess material.

    Abstract translation: 公开了通过连续的卷对卷制造方法可以在柔性基板上形成各种材料的图案的系统和方法。 图案可以包括具有横向尺寸的金属,透明导电或非金属元件,其包括在低于100纳米至毫米的范围内,并且厚度尺寸包括从几十埃到大于10,000埃的范围。 衬底可以是能够具有足够柔性的任何材料,以便与基于辊的加工设备(包括聚合物膜,金属箔和薄玻璃)相容,其中聚合物膜代表特别广泛的应用领域。 方法可以包括连续的卷对卷形成临时聚合物结构,其中选定的区域通向下面的基底,构成材料的连续添加或减少,以及必要时连续除去聚合物结构和任何多余材料 。

    Tools and methods for forming semi-transparent patterning masks

    公开(公告)号:US10737433B2

    公开(公告)日:2020-08-11

    申请号:US14490332

    申请日:2014-09-18

    Inventor: W. Dennis Slafer

    Abstract: Means, apparatus, systems, and/or methods are described for forming improved rigid or flexible semi-transparent imprinting templates. These templates can be used to produce patterning masks having improved resolution that do not require plasma etching for residue removal. The methods and apparatus are compatible with roll-to-roll manufacturing processes and enable roll-to-roll formation of a wide range of metal patterned films.

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