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公开(公告)号：US09975755B2
公开(公告)日：2018-05-22
申请号：US15455450
申请日：2017-03-10
Inventor： Anne Ghis , Marc Delaunay
CPC classification number: B81B3/0089 , B81B3/0075 , B81B2201/02 , B81B2201/0264 , B81B2201/03 , B81B2201/06 , B81B2203/0127 , B81B2207/115 , B81C1/00158
Abstract: A microelectromechanical system includes a membrane of amorphous carbon having a thickness between 1 nm and 50 nm, and for example between 3 nm and 20 nm.
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公开(公告)号：US20170260041A1
公开(公告)日：2017-09-14
申请号：US15455450
申请日：2017-03-10
Inventor： Anne GHIS , Marc DELAUNAY
IPC: B81B3/00
CPC classification number: B81B3/0089 , B81B3/0075 , B81B2201/02 , B81B2201/0264 , B81B2201/03 , B81B2201/06 , B81B2203/0127 , B81B2207/115 , B81C1/00158
Abstract: A microelectromechanical system includes a membrane of amorphous carbon having a thickness between 1 nm and 50 nm, and for example between 3 nm and 20 nm.
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公开(公告)号：US20170022814A1
公开(公告)日：2017-01-26
申请号：US15282991
申请日：2016-09-30
Applicant: Lee Ervin
Inventor： Lee Ervin
CPC classification number: F01D1/18 , B81B5/00 , B81B2201/03 , B81B2201/034 , B81B2203/06 , F01D25/005 , F01D25/14 , F03B17/00 , Y02E10/20 , Y02E10/28
Abstract: A device for converting the kinetic energy of molecules into useful work includes an actuator configured to move within a fluid or gas due to collisions with the molecules of the fluid or gas. The actuator has dimensions that subject it to the Brownian motion of the surrounding molecules. The actuator utilizes objects having multiple surfaces where the different surfaces result in differing coefficients of restitution. The Brownian motion of surrounding molecules produce molecular impacts with the surfaces. Each surface then experiences relative differences in transferred energy from the kinetic collisions. The sum effect of the collisions produces net velocity in a desired direction. The controlled motion can be utilized in a variety of manners to perform work, such as generating electricity or transporting materials.
Abstract translation: 用于将分子的动能转化为有用功的装置包括致动器，其构造成由于与流体或气体的分子碰撞而在流体或气体内移动。 致动器具有使其受到周围分子的布朗运动的尺寸。 致动器利用具有多个表面的物体，其中不同的表面导致不同的恢复系数。 周围分子的布朗运动与表面产生分子冲击。 每个表面然后经历来自动力学碰撞的转移能量的相对差异。 碰撞的总和效应产生所需方向的净速度。 受控运动可以以各种方式用于执行工作，例如发电或运输材料。
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24.发明申请公开(公告)号：US20120272731A1
公开(公告)日：2012-11-01
申请号：US13345132
申请日：2012-01-06
Applicant: Ryan Supino , Eugen Cabuz , Burgess R. Johnson , Robert D. Horning
Inventor： Ryan Supino , Eugen Cabuz , Burgess R. Johnson , Robert D. Horning
CPC classification number: B81C1/00134 , B81B2201/03 , B81C2203/03 , G01D5/34 , G01P21/00 , Y10T29/49002
Abstract: Systems and methods for two degree of freedom dithering for micro-electromechanical system (MEMS) sensor calibration are provided. In one embodiment, a method for a device comprises forming a MEMS sensor layer, the MEMS sensor layer comprising a MEMS sensor and an in-plane rotator to rotate the MEMS sensor in the plane of the MEMS sensor layer. Further, the method comprises forming a first and second rotor layer and bonding the first rotor layer to a top surface and the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first and second rotor portion of the first and second rotor layers connect to the MEMS sensor. Also, the method comprises separating the first and second rotor portions from the first and second rotor layers, wherein the first and second rotor portions and the MEMS sensor rotate about an in-plane axis of the MEMS sensor layer.
Abstract translation: 提供了用于微机电系统（MEMS）传感器校准的两自由度抖动的系统和方法。 在一个实施例中，用于器件的方法包括形成MEMS传感器层，所述MEMS传感器层包括MEMS传感器和面内旋转器以在MEMS传感器层的平面内旋转MEMS传感器。 此外，该方法包括形成第一转子层和第二转子层，并将第一转子层结合到顶表面，将第二转子层结合到MEMS传感器层的底表面，使得第一和第二转子部分的第一和第二转子部分 转子层连接到MEMS传感器。 此外，该方法包括从第一和第二转子层分离第一和第二转子部分，其中第一和第二转子部分和MEMS传感器围绕MEMS传感器层的面内轴线旋转。
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公开(公告)号：US20240217808A1
公开(公告)日：2024-07-04
申请号：US18609571
申请日：2024-03-19
Applicant: Winbond Electronics Corp.
Inventor： Jin-Neng WU
CPC classification number: B81B3/0018 , B81C3/001 , B81B2201/0214 , B81B2201/03 , B81B2203/033 , B81B2207/09
Abstract: A method for manufacturing package structure is provided, including: providing a substrate having recesses; forming first MEMS chips on the substrate, each with a through-substrate via, and a first sensor or microactuator on the lower surface, located in one of the recesses; forming first intermediate chips on the substrate, each respectively on one of the first MEMS chips, having a through-substrate via, and including a signal conversion unit, a logic operation unit, control unit, or a combination thereof; forming second MEMS chips on the first intermediate chips, each with a through-substrate via, having a second sensor or microactuator on its upper surface, wherein the package structure includes at least one of the first sensor and the second sensor; and forming first capping plates on the second MEMS chips, each providing a receiving space for the second sensor or microactuator on the upper surface of each second MEMS chip.
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Patent Agency Ranking
公开(公告)号：US20230354713A1
公开(公告)日：2023-11-02
申请号：US18220666
申请日：2023-07-11
Applicant: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V. , Christian-Albrechts-Universitaet zu Kiel
Inventor： Bernhard WAGNER , Fabian LOFINK , Dirk KADEN , Simon FICHTNER
CPC classification number: H10N30/853 , H10N30/2042 , B81B7/02 , H10N30/1051 , H10N30/045 , H10N30/50 , B81B2201/03
Abstract: A ferroelectric material includes a mixed crystal having AlN and at least one nitride of a transition metal. The proportion of the nitride of the transition metal is selected such that a direction of an initial or spontaneous polarity of the ferroelectric material is switchable by applying a switchover voltage. The switchover voltage is below a breakdown voltage of the ferroelectric material.
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公开(公告)号：US20230327640A1
公开(公告)日：2023-10-12
申请号：US18119773
申请日：2023-03-09
Applicant: X-Celeprint Limited
Inventor： António José Marques Trindade , Raja Fazan Gul , Lei Liu , Ronald S. Cok
CPC classification number: H03H9/02338 , H10N30/204 , B81B2201/03 , H03H2009/155
Abstract: A suspended device structure comprises a substrate, a cavity disposed in a surface of the substrate, and a device suspended entirely over a bottom of the cavity. The device is a piezoelectric device and is suspended at least by a tether that physically connects the device to the substrate. The tether has a non-linear centerline. A wafer can comprise a plurality of suspended device structures. A device structure can comprise a device over a sacrificial portion or cavity and a tether with a tether opening extending to the sacrificial portion or cavity. The tether or tether opening can have a T shape. The tether can have a tether length at least one third as large as a device length and the device can have a device length at least twice as large as a device width.
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公开(公告)号：US11708263B2
公开(公告)日：2023-07-25
申请号：US17313565
申请日：2021-05-06
Applicant: Sheba Microsystems Inc.
Inventor： Faez Ba-Tis , Ahmed Galaom , Ridha Ben-Mrad
CPC classification number: B81B3/0081 , B81C1/0069 , G02B5/208 , G02B7/02 , H02N1/006 , H04N23/52 , H04N23/54 , B81B2201/03 , B81B2203/0163 , B81B2207/07
Abstract: A camera system incorporating a MEMS actuator to achieve focus adjustments to compensate for the thermal expansion of the lens assembly is disclosed. The camera comprises a lens barrel, lens holder, infra-red (IR) filter, board circuit, MEMS actuator, housing package for the actuator, and an image sensor. The image sensor is directly wire bonded to pads on the circuit board such that these pads are movable at the image sensor end and fixed at the circuit board end. When the camera is exposed to temperature variations, the MEMS actuator moves the sensor along the optical axis to maintain the image in focus.
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公开(公告)号：US20180186626A1
公开(公告)日：2018-07-05
申请号：US15858321
申请日：2017-12-29
Applicant: NEWTONOID TECHNOLOGIES, L.L.C.
Inventor： FIELDING B. STATON , DAVID STRUMPF
CPC classification number: B81B7/04 , B23Q11/0032 , B81B7/0029 , B81B2201/02 , B81B2201/03 , E04H9/00 , E04H9/14 , G01K7/22
Abstract: A construction component for detecting the application of energy and responding to the energy input wherein a plurality of particles are distributed throughout the component with each particle being configured to sense component state information. The component includes at least one processor configured to receive sensing information from the plurality of particle sensors. The processor configured to receive component state information and to process the information to determine a response to selectively alter attributes of the construction component to affect the behavior of the component. The plurality of particles capable of converting a portion of the energy applied to the construction component into an alternative form of energy, wherein the converted energy is harvested for utilization elsewhere.
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公开(公告)号：US09470090B2
公开(公告)日：2016-10-18
申请号：US14696266
申请日：2015-04-24
Applicant: Lee Ervin
Inventor： Lee Ervin
CPC classification number: F01D1/18 , B81B5/00 , B81B2201/03 , B81B2201/034 , B81B2203/06 , F01D25/005 , F01D25/14 , F03B17/00 , Y02E10/20 , Y02E10/28
Abstract: A device for converting the kinetic energy of molecules into useful work includes an actuator configured to move within a fluid or gas due to collisions with the molecules of the fluid or gas. The actuator has dimensions that subject it to the Brownian motion of the surrounding molecules. The actuator utilizes objects having multiple surfaces where the different surfaces result in differing coefficients of restitution. The Brownian motion of surrounding molecules produce molecular impacts with the surfaces. Each surface then experiences relative differences in transferred energy from the kinetic collisions. The sum effect of the collisions produces net velocity in a desired direction. The controlled motion can be utilized in a variety of manners to perform work, such as generating electricity or transporting materials.
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