公开(公告)号：US3343449A

公开(公告)日：1967-09-26

申请号：US52632466

申请日：1966-02-07

Applicant: PHOTO RES CORP

Inventor： RICHARD BLACKWELL HAROLD ,  FRY GLENN A ,  PRITCHARD MILDRED M

IPC: G01J1/04 ,  G01J1/42

CPC classification number: G01J1/42 ,  G01J1/04 ,  G01J1/0455 ,  G01J1/0474

公开(公告)号：US12123829B2

公开(公告)日：2024-10-22

申请号：US17726697

申请日：2022-04-22

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Akira Kurozuka ,  Tatsuo Itoh ,  Kosuke Imawaka ,  Hiroyuki Furuya

IPC: G01N21/3554 ,  G01J1/04 ,  G01N21/359 ,  G01N21/47 ,  G08G1/00

CPC classification number: G01N21/3554 ,  G01J1/0411 ,  G01J1/0455 ,  G01N21/359 ,  G01N21/47 ,  G08G1/00 ,  G01N2021/4761

Abstract: An optical device includes: a light source part configured to project illumination light toward a sensing region; a photodetector configured to receive reflected light of the illumination light reflected on the sensing region; and a condenser mirror. The condenser mirror has a through hole through which the illumination light from the light source part passes and an optical axis of the light source part and an optical axis of the condenser mirror are aligned with each other. A reflection surface of the condenser mirror has a shape obtained by cutting out a columnar body extending in a projection direction of the illumination light, with a spheroid whose rotation axis is a major axis. The photodetector is disposed in a direction toward a first focal position of the condenser mirror. The sensing region is set in a direction toward a second focal position of the condenser mirror.

公开(公告)号：US20170184448A1

公开(公告)日：2017-06-29

申请号：US15394515

申请日：2016-12-29

Applicant: Bio-Rad Laboratories, Inc.

Inventor： Denis Pristinski

IPC: G01J1/04

CPC classification number: G01J1/0455 ,  G01J1/0407 ,  G01J1/0414 ,  G01J1/0425 ,  G01J1/4257

Abstract: System, including methods and apparatus, for optical detection. The system may comprise a light source to generate a beam of light, an optical element, and a detector. The optical element may include a light guide having a shaft and a tip, with the tip forming a beveled end of the light guide. The optical element may extend into the beam, such that the tip and at least a portion of the shaft are located inside the beam, and a window of the optical element is located outside the beam. Light of the beam incident on the tip may be transmitted longitudinally through the light guide and out the window, while light of the beam incident on the shaft may be transmitted transversely through the shaft and remains in the beam downstream. The detector may be configured to detect light received from the window.

公开(公告)号：US20170167913A1

公开(公告)日：2017-06-15

申请号：US15371947

申请日：2016-12-07

Applicant: ADVA Optical Networking SE

Inventor： Patrick Berthoud

IPC: G01J1/04 ,  G01J1/42

CPC classification number: G01J1/0422 ,  G01J1/0455 ,  G01J1/4257 ,  G01J2001/446 ,  G04F5/00 ,  H01S3/13 ,  H01S2301/02

Abstract: Disclosed is a random light collector device including a reflecting cavity configured to enclose a random light source that randomly transmits photons. The reflecting cavity has an inner wall adapted to reflect at least a portion of the photons to an output port and guiding means for directing the photons to a photodetector. The guiding means is a hollow tube having an inner wall adapted to reflect the photons, wherein a first end of the hollow tube is connected to or positioned adjacent to the output port of the reflecting cavity and wherein the photodetector is provided within the hollow tube or at a second end such that a sensitive area of the photodetector covers the cross-section of the second end.

公开(公告)号：US07916274B2

公开(公告)日：2011-03-29

申请号：US11588643

申请日：2006-10-27

Applicant: Michael Sogard

Inventor： Michael Sogard

IPC: G03B27/58

CPC classification number: G01J1/429 ,  G01J1/04 ,  G01J1/0407 ,  G01J1/0455 ,  G03F7/70558 ,  G03F7/7085

Abstract: A monitoring system for an lithographic system that may be utilized in an extreme ultraviolet lithographic system is disclosed. In a monitoring system according to the present invention, a plurality of detectors are positioned to receive radiation from a pattern of positions on a mirror that is part of the lithographic system. In some embodiments, the plurality of detectors may be positioned on the mirror. In some embodiments, the plurality of detectors may be positioned behind the mirror and receive radiation through holes formed in the mirror. In some embodiments, radiation from the pattern of positions may be reflected by facets into the detectors.

Abstract translation: 公开了可用于极紫外光刻系统中的用于光刻系统的监测系统。 在根据本发明的监视系统中，多个检测器被定位成接收来自作为光刻系统的一部分的反射镜上的位置图案的辐射。 在一些实施例中，多个检测器可以位于反射镜上。 在一些实施例中，多个检测器可以位于反射镜后面并且接收通过形成在反射镜中的孔的辐射。 在一些实施例中，来自位置图案的辐射可以被小平面反射到检测器中。

公开(公告)号：US20100098321A1

公开(公告)日：2010-04-22

申请号：US12593811

申请日：2008-03-25

Applicant: Yuichi Furukawa ,  Shingo Nakamura ,  Yuji Okada ,  Fumio Kawahara

Inventor： Yuichi Furukawa ,  Shingo Nakamura ,  Yuji Okada ,  Fumio Kawahara

IPC: G06K9/00

CPC classification number: G01J5/0003 ,  G01J1/0455 ,  G01J2005/0077 ,  G01J2005/0081

Abstract: Feature points (41, 42, 43) in the heat image (10) of a casting die (1) are extracted and a predetermined geometrical conversion processing is performed on the heat image (10) such that the feature points are superimposed on the reference feature points (61, 62, 63) set in a reference heat image (30) picked up previously to generate a corrected heat image (20). A difference image (40) is generated by superimposing the corrected heat image (20) and the reference heat image (30) such that the corrected feature points (51, 52, 53) in the corrected heat image (20) is superimposed on the corresponding reference feature points (61, 62, 63). With such an arrangement, a highly reliable difference image can be generated even when the imaging field of vision slips off among a plurality of heat images.

Abstract translation: 提取铸造模具（1）的加热图像（10）中的特征点（41,42,43），并对加热图像（10）进行预定的几何转换处理，使得特征点叠加在参考 特征点（61,62,63）设置在先前拾取的参考加热图像（30）中以产生校正热图像（20）。 通过将校正热图像（20）和参考加热图像（30）叠加在校正热图像（20）中的校正特征点（51,52,53）叠加在 相应的参考特征点（61,62,63）。 通过这样的布置，即使当多个热图像中的成像视场滑落时，也可以产生高度可靠的差分图像。

公开(公告)号：US20080001060A1

公开(公告)日：2008-01-03

申请号：US11428450

申请日：2006-07-03

Applicant: Jianhua Xu ,  Frank Blaine Metting ,  Gregory T. Gibson ,  Richard A. James

Inventor： Jianhua Xu ,  Frank Blaine Metting ,  Gregory T. Gibson ,  Richard A. James

IPC: G01J1/32

CPC classification number: G01J1/04 ,  G01J1/0411 ,  G01J1/0455 ,  G01J1/32

Abstract: Aspects of the subject matter described herein relate to reducing error in images obtained from an image-acquiring system. An image-acquiring system may be modeled as light received from a primary path, light received from a secondary path, and light received from all other paths. Light received from the secondary and other paths may cause error in images captured by the image-acquiring system. By compensating for this light, the error may be reduced. Other aspects are described in the specification.

Abstract translation: 本文描述的主题的方面涉及减少从图像采集系统获得的图像中的误差。 图像获取系统可以被建模为从主路径接收的光，从次路径接收的光以及从所有其他路径接收的光。 从次要路径和其他路径接收的光线可能会导致由图像采集系统捕获的图像错误。 通过补偿该光，可能会降低误差。 其他方面在说明书中描述。

公开(公告)号：US20070242264A1

公开(公告)日：2007-10-18

申请号：US11737827

申请日：2007-04-20

Applicant: Kazuaki Ohkubo

Inventor： Kazuaki Ohkubo

IPC: G01J1/00

CPC classification number: G01J1/42 ,  G01J1/04 ,  G01J1/0422 ,  G01J1/0455 ,  G01J1/08 ,  G01J2001/0481 ,  G01J2001/4247

Abstract: An optical measuring device according to the present invention includes: a plane mirror (3), which has a central opening that functions as either a light entering window or a light source fitting hole (5) and an observation window 6′ that enables a photodetector (6) to take measurements; and an integrating hemisphere (2), which has its center of radius of curvature defined within the central opening of the plane mirror (3) and of which the inner wall surface functions as a light diffuse reflective surface (1). The plane mirror (3) and the integrating hemisphere (2) form an integrating space inside.

Abstract translation: 根据本发明的光学测量装置包括：平面镜（3），其具有用作光进入窗口或光源装配孔（5）的中心开口和观察窗6'，其能够使光电检测器 （6）进行测量; 以及整体半球（2），其具有限定在平面镜（3）的中心开口内的曲率半径的中心，并且其内壁表面用作光漫反射表面（1）。 平面镜（3）和积分半球（2）在内部形成积分空间。

公开(公告)号：US20060071146A1

公开(公告)日：2006-04-06

申请号：US10959939

申请日：2004-10-05

Applicant: Felix Cheang ,  Fook Ng ,  Choon Ko

Inventor： Felix Cheang ,  Fook Ng ,  Choon Ko

IPC: G01N21/86

CPC classification number: G01J1/04 ,  G01J1/0455 ,  G01J1/32 ,  G02F1/133609 ,  G02F1/133621 ,  G02F2001/13312 ,  G02F2201/58 ,  G09G3/3413 ,  G09G2320/0242 ,  G09G2320/0626 ,  G09G2360/145

Abstract: In one embodiment, apparatus is provided with a light source, an optic element, at least one photosensor, and a control system. The optic element has a reflective material on a surface thereof, and is positioned to receive and reflect light emitted by the light source. The at least one photosensor is mounted to the surface of the optic element on which the reflective material resides, over a portion of the optic element on which the reflective material does not reside. The control system is operably associated with both the photosensor(s) and the light source, to regulate the light source's light output in accordance with measurements received from the photosensor(s).

Abstract translation: 在一个实施例中，设备设置有光源，光学元件，至少一个光电传感器和控制系统。 光学元件在其表面上具有反射材料，并且被定位成接收和反射由光源发射的光。 所述至少一个光电传感器安装到所述反射材料所在的光学元件的表面上，所述光学元件的所述反射材料不在其上的部分上。 控制系统可操作地与光电传感器和光源相关联，以根据从光电传感器接收的测量来调节光源的光输出。

公开(公告)号：US20030102433A1

公开(公告)日：2003-06-05

申请号：US10342480

申请日：2003-01-15

Inventor： Emil W. Ciurczak ,  Kevin C. Bynum

IPC: G02B005/30 ,  G02B005/32 ,  B29C039/22 ,  B29C039/02

CPC classification number: G01N21/35 ,  G01J1/0455 ,  G01J1/4228 ,  G01J3/0243 ,  G01J3/10 ,  G01J3/12 ,  G01J3/1256 ,  G01J3/2803 ,  G01J2003/123 ,  G01J2003/1243 ,  G01J2003/1828 ,  G01J2003/2866 ,  G01N21/359 ,  G01N21/59

Abstract: A hemispherical detector comprising a plurality of photodetectors arranged in a substantially contiguous array, the array being substantially in the shape of a half-sphere, the half-sphere defining a closed end and an open end, the open end defining a substantially circular face. Also provided is a method for constructing a hemispherical detector comprising the steps of making a press mold of the desired shape of the hemispherical detector, pouring a material into the press mold to form a cast, finishing the cast to remove any defects, coating the cast with a coating material, and attaching a plurality of photodetectors to the cast.