公开(公告)号：US08487715B2

公开(公告)日：2013-07-16

申请号：US12311143

申请日：2007-09-20

Applicant: Pritiraj Mohanty ,  Robert L. Badzey

Inventor： Pritiraj Mohanty ,  Robert L. Badzey

IPC: H03H9/70 ,  H03H9/74 ,  H03H9/46 ,  H03H9/24

CPC classification number: H03H3/0072 ,  H03H9/2463 ,  H03H9/2473 ,  H03H9/505

Abstract: A bank of nano electromechanical integrated circuit filters. The bank of integrated circuit filters comprising a silicon substrate; a sacrificial layer; a device layer including at least two resonators, wherein the at least two resonators include sub-micro excitable elements and wherein the at least two resonators posses a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least two resonators is determined by the fundamental frequency of the sub-micron elements. At least one switch connects to the bank of integrated circuit filters.

Abstract translation: 一组纳米机电集成电路滤波器。 集成电路滤波器组，包括硅衬底; 牺牲层; 包括至少两个谐振器的器件层，其中所述至少两个谐振器包括次微可激励元件，并且其中所述至少两个谐振器具有基本模式频率以及集体模式频率，并且其中所述至少两个谐振器的所述集体模式频率至少 两个谐振器由亚微米元件的基频决定。 至少有一个开关连接到集成电路滤波器组。

公开(公告)号：US08314666B2

公开(公告)日：2012-11-20

申请号：US12723687

申请日：2010-03-15

Applicant: Tsun-Che Huang ,  Pin Chang ,  Chin-Hung Wang ,  Wei-Jr Lin ,  Li-Chi Pan

Inventor： Tsun-Che Huang ,  Pin Chang ,  Chin-Hung Wang ,  Wei-Jr Lin ,  Li-Chi Pan

IPC: H03H9/00 ,  H03H9/205

CPC classification number: H03H9/2405 ,  H03H9/0004 ,  H03H9/2463 ,  H03H2009/02291 ,  H03H2009/0233

Abstract: A resonator, an elastic wave transmission element and a method for fabricating the transmission element are provided. The elastic wave transmission element has a first side and a second side. The elastic wave transmission element includes a plurality of structures sequentially arranged along a direction from the first side toward the second side. Each of the structures has a different defect which is different to each other. The impedance of the structures decreases gradually along the direction. As such, the elastic wave transmission element has an impedance match function.

Abstract translation: 提供一种共振器，弹性波传播元件及其制造方法。 弹性波传播元件具有第一侧和第二侧。 弹性波传播元件包括沿着从第一侧朝向第二侧的方向顺序布置的多个结构。 每个结构具有彼此不同的不同缺陷。 结构的阻抗沿着该方向逐渐减小。 这样，弹性波传输元件具有阻抗匹配功能。

公开(公告)号：US20120248932A1

公开(公告)日：2012-10-04

申请号：US13436262

申请日：2012-03-30

Applicant: Jean-Francois Carpentier ,  Fabrice Casset ,  Yoan Civet ,  Skandar Basrour

Inventor： Jean-Francois Carpentier ,  Fabrice Casset ,  Yoan Civet ,  Skandar Basrour

IPC: H01L41/04 ,  H01L41/22

CPC classification number: H03H3/0077 ,  H03H9/02377 ,  H03H9/2436 ,  H03H9/2463 ,  H03H2009/02511

Abstract: The present disclosure relates to a method of adjusting the resonance frequency of a vibrating element, comprising measuring the resonance frequency of the vibrating element, determining, using abacuses and as a function of the resonance frequency measured, a dimension and a position of at least one area of modified thickness to be formed on the vibrating element so that the resonance frequency thereof corresponds to a setpoint frequency, and forming on the vibrating element, an area of modified thickness of the determined dimension and position.

Abstract translation: 本公开涉及一种调节振动元件的谐振频率的方法，包括测量振动元件的谐振频率，使用可笑度和所测得的谐振频率的函数来确定至少一个振动元件的尺寸和位置 要在振动元件上形成改变厚度的区域，使得其谐振频率对应于设定点频率，并且在振动元件上形成所确定的尺寸和位置的改进厚度的区域。

公开(公告)号：US08212324B2

公开(公告)日：2012-07-03

申请号：US12419125

申请日：2009-04-06

Applicant: Gregory Caruyer ,  Karim Segueni ,  Pascal Ancey ,  Bertrand Dubus

Inventor： Gregory Caruyer ,  Karim Segueni ,  Pascal Ancey ,  Bertrand Dubus

IPC: H01L29/84 ,  H01L21/00

CPC classification number: H03H9/02338 ,  H03H9/02433 ,  H03H9/2436 ,  H03H9/2463

Abstract: A Micro Electro Mechanical Systems resonance device includes a substrate, and an input electrode, connected to an alternating current source having an input frequency. The device also includes an output electrode, and at least one anchoring structure, connected to the substrate. The device further includes a vibratile structure connected to an anchoring structure by at least one junction, having a natural acoustic resonant frequency. The vibration under the effect of the input electrode, when it is powered, generates, on the output electrode, an alternating current wherein the output frequency is equal to the natural frequency. The vibratile structure and/or the anchoring structure includes a periodic structure. The periodic structure includes at least first and second zones different from each other, and corresponding respectively to first and second acoustic propagation properties.

Abstract translation: 微机电系统谐振装置包括连接到具有输入频率的交流电源的基板和输入电极。 该装置还包括输出电极和连接到基板的至少一个锚定结构。 该装置还包括通过至少一个接头连接到锚固结构的振动结构，具有自然的声共振频率。 在输入电极的作用下，在输入电极的作用下的振动在输出电极上产生交流电流，其中输出频率等于固有频率。 振动结构和/或锚定结构包括周期性结构。 周期性结构至少包括彼此不同的第一和第二区，并且分别对应于第一和第二声学传播特性。

公开(公告)号：US08174170B1

公开(公告)日：2012-05-08

申请号：US12764703

申请日：2010-04-21

Applicant: Jan H. Kuypers ,  David M. Chen ,  Guiti Zolfagharkhani ,  Alexei Gaidarzhy

Inventor： Jan H. Kuypers ,  David M. Chen ,  Guiti Zolfagharkhani ,  Alexei Gaidarzhy

IPC: H01L41/09

CPC classification number: H03H9/02259 ,  H03H9/02 ,  H03H9/2463 ,  H03H2009/02251 ,  H03H2009/241

Abstract: Mechanical resonating structures and related methods are described. The mechanical resonating structures may provide improved efficiency over conventional resonating structures. Some of the structures have lengths and widths and are designed to vibrate in a direction approximately parallel to either the length or width. They may have boundaries bounding the length and width dimensions, which may substantially align with nodes or anti-nodes of vibration.

Abstract translation: 描述机械谐振结构及相关方法。 与常规谐振结构相比，机械谐振结构可提供改进的效率。 一些结构具有长度和宽度，并且被设计成在大致平行于长度或宽度的方向上振动。 它们可以具有限定长度和宽度尺寸的边界，其可以基本上与振动的节点或反节点对齐。

公开(公告)号：US20120086306A1

公开(公告)日：2012-04-12

申请号：US13330965

申请日：2011-12-20

Applicant: ALEXEI GAIDARZHY ,  Pritiraj Mohanty

Inventor： ALEXEI GAIDARZHY ,  Pritiraj Mohanty

IPC: H02N1/00

CPC classification number: H03H9/02259 ,  B81B3/0086 ,  B81B2201/0271 ,  H03H9/02275 ,  H03H9/02338 ,  H03H9/02417 ,  H03H9/2405 ,  H03H9/2431 ,  H03H9/2463 ,  H03H2009/02354 ,  H03H2009/02464 ,  H03H2009/02496

Abstract: Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure.

Abstract translation: 本文描述了微机械谐振装置以及相关方法。 谐振装置可以包括微机械谐振结构，致动谐振结构的致动结构以及检测谐振结构的运动的检测结构。

公开(公告)号：US08143768B2

公开(公告)日：2012-03-27

申请号：US12784441

申请日：2010-05-20

Applicant: Richard A. Hanson

Inventor： Richard A. Hanson

IPC: H03H9/05 ,  H03H9/19 ,  H03H9/205 ,  H01L41/04 ,  G01P15/097 ,  G01P1/08 ,  G01P1/16

CPC classification number: H03H9/2463 ,  G01L1/106 ,  G01L7/024 ,  H03H9/21 ,  H03H9/2405 ,  H03H9/2473 ,  H03H2009/0244

Abstract: Novel configurations for a miniature vibrating beam mechanical resonator provide low energy transfer to a supporting structure and low sensitivity to mounting misalignment. A symmetric suspended portion includes two vibrating beams that vibrate normal to a quiescent plane of the resonator, 180 degrees out of phase relative to one another. The vibrating beams are attached, at least at one end, to a torsional coupling element that is joined to a mounting pad along a non-translating suspension boundary. Counterbalances are attached to the vibrating beams, and the resonator is configured such that dynamic forces and moments coupled to each torsional coupling element from the vibrating beams are balanced along each nominal non-translating suspension boundary proximate to the symmetry axis and along the symmetry axis proximate to each nominal non-translating suspension boundary. Each non-translating suspension boundary is a torsional axis for a twisting deformation of the first torsional coupling element.

Abstract translation: 用于微型振动梁机械谐振器的新型配置为支撑结构提供低能量传递，并且对安装未对准具有低灵敏度。 对称的悬挂部分包括两个振动梁，其振动垂直于谐振器的静止平面，彼此相位相差180度。 振动梁至少在一端附接到扭转联接元件，该扭转联接元件沿非平移悬挂边界连接到安装垫。 平衡连接到振动梁，并且谐振器被构造成使得耦合到来自振动梁的每个扭转耦合元件的动力和力矩沿着邻近对称轴的每个标称非平移悬浮边界平行，并且沿对称轴接近 到每个标称非翻译悬浮边界。 每个非平移悬挂边界是用于第一扭转耦合元件的扭转变形的扭转轴。

公开(公告)号：US20120050236A1

公开(公告)日：2012-03-01

申请号：US13094707

申请日：2011-04-26

Applicant: Chi Shun Lo ,  Jonghae Kim ,  Sang-June Park ,  Sanghoon Joo ,  Chengjie Zuo ,  Changhan Yun

Inventor： Chi Shun Lo ,  Jonghae Kim ,  Sang-June Park ,  Sanghoon Joo ,  Chengjie Zuo ,  Changhan Yun

IPC: H01P7/00 ,  H04B1/04 ,  H04B1/06 ,  H01P5/12 ,  G09G5/00

CPC classification number: H03H9/0095 ,  G09G3/3493 ,  G09G2310/0267 ,  G09G2310/027 ,  H01P1/2135 ,  H03H9/0014 ,  H03H9/02228 ,  H03H9/2431 ,  H03H9/2436 ,  H03H9/2463 ,  H03H9/564 ,  H03H2003/027 ,  H03H2009/02496 ,  H03H2009/02527 ,  H03H2009/241

Abstract: This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a contour mode resonator device includes a first conductive layer with a plurality of first layer electrodes including a first electrode at which a first input signal can be provided and a second electrode at which a first output signal can be provided. A second conductive layer includes a plurality of second layer electrodes including a first electrode proximate the first electrode of the first conductive layer and a second electrode proximate the second electrode of the first conductive layer. A second signal can be provided at the first electrode or the second electrode of the second conductive layer to cooperate with the first input signal or the first output signal to define a differential signal. A piezoelectric layer is disposed between the first conductive layer and the second conductive layer. The piezoelectric layer includes a piezoelectric material. The piezoelectric layer is substantially oriented in a plane and capable of movement in the plane responsive to an electric field between the first electrodes or the second electrodes.

Abstract translation: 本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。 一方面，轮廓模式谐振器装置包括具有多个第一层电极的第一导电层，所述第一导电层包括能够提供第一输入信号的第一电极和可以提供第一输出信号的第二电极。 第二导电层包括多个第二层电极，其包括靠近第一导电层的第一电极的第一电极和靠近第一导电层的第二电极的第二电极。 可以在第二导电层的第一电极或第二电极处提供第二信号，以与第一输入信号或第一输出信号配合以限定差分信号。 压电层设置在第一导电层和第二导电层之间。 压电层包括压电材料。 压电层基本上定向在平面中并且能够响应于第一电极或第二电极之间的电场在平面中移动。

公开(公告)号：US20120034724A1

公开(公告)日：2012-02-09

申请号：US13275617

申请日：2011-10-18

Applicant: Xiao Yang ,  Dongmin Chen ,  Ye Wang ,  Justin Payne ,  Yuxiang Wang ,  Wook Ji

Inventor： Xiao Yang ,  Dongmin Chen ,  Ye Wang ,  Justin Payne ,  Yuxiang Wang ,  Wook Ji

IPC: H01L21/02

CPC classification number: H03H3/0072 ,  H03H3/0073 ,  H03H9/02244 ,  H03H9/2463 ,  H03H2009/02511 ,  H03H2009/02519

Abstract: A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals.

Abstract translation: 谐振器包括具有第一电极和第二电极的CMOS衬底。 CMOS衬底被配置为向第一电极提供一个或多个控制信号。 谐振器还包括包括硅材料层的谐振器结构。 谐振器结构耦合到CMOS衬底并且被配置为响应于一个或多个控制信号而谐振。

公开(公告)号：US08044750B2

公开(公告)日：2011-10-25

申请号：US12071994

申请日：2008-02-28

Applicant: Seong Chan Jun ,  Sun Il Kim ,  Chan Wook Baik

Inventor： Seong Chan Jun ,  Sun Il Kim ,  Chan Wook Baik

IPC: H03H9/24

CPC classification number: H03H9/2463 ,  B82Y15/00 ,  H03H9/02244 ,  Y10S977/712 ,  Y10S977/72 ,  Y10S977/724 ,  Y10S977/932

Abstract: A nano-resonator including a beam having a composite structure may include a silicon carbide beam and/or a metal conductor. The metal conductor may be vapor-deposited on the silicon carbide beam. The metal conductor may have a density lower than a density of the silicon carbide beam.

Abstract translation: 包括具有复合结构的光束的纳米谐振器可以包括碳化硅束和/或金属导体。 金属导体可以气相沉积在碳化硅束上。 金属导体的密度可以低于碳化硅束的密度。