公开(公告)号：US10269432B2

公开(公告)日：2019-04-23

申请号：US15479235

申请日：2017-04-04

Applicant: Silicon Storage Technology, Inc.

Inventor： Hieu Van Tran ,  Anh Ly ,  Thuan Vu ,  Vipin Tiwari ,  Nhan Do

IPC: G11C16/06 ,  G11C16/08 ,  G11C16/14 ,  G11C16/24 ,  G11C16/34 ,  G11C16/26 ,  G11C16/04 ,  G11C16/10 ,  G11C16/28 ,  G11C16/32

Abstract: In one embodiment of the present invention, one row is selected and two columns are selected for a read or programming operation, such that twice as many flash memory cells can be read from or programmed in a single operation compared to the prior art. In another embodiment of the present invention, two rows in different sectors are selected and one column is selected for a read operation, such that twice as many flash memory cells can be read in a single operation compared to the prior art.

公开(公告)号：US20190114097A1

公开(公告)日：2019-04-18

申请号：US15784025

申请日：2017-10-13

Applicant: Silicon Storage Technology, Inc.

Inventor： Hieu Van Tran ,  Vipin Tiwari ,  Nhan Do

IPC: G06F3/06 ,  G06F11/07 ,  G11C16/08 ,  G11C16/26 ,  G11C16/34 ,  G11C16/10 ,  H01L29/423 ,  H01L23/00 ,  H01L21/78 ,  G11C16/04 ,  H01L27/11521

Abstract: Multiple embodiments are disclosed for enhancing security and preventing hacking of a flash memory device. The embodiments prevent malicious actors from hacking a flash memory chip to obtain data that is stored within the chip. The embodiments include the use of fault detection circuits, address scrambling, dummy arrays, password protection, improved manufacturing techniques, and other mechanisms.

公开(公告)号：US20170345840A1

公开(公告)日：2017-11-30

申请号：US15489548

申请日：2017-04-17

Applicant: Silicon Storage Technology, Inc.

Inventor： Chien-Sheng Su ,  Jeng-Wei Yang ,  Man-Tang Wu ,  Chun-Ming Chen ,  Hieu Van Tran ,  Nhan Do

IPC: H01L27/11568 ,  H01L21/306 ,  H01L21/3065 ,  H01L21/8238

CPC classification number: H01L27/11568 ,  H01L21/30604 ,  H01L21/30625 ,  H01L21/3065 ,  H01L21/823821 ,  H01L28/00

Abstract: A method of forming a memory device with memory cells over a planar substrate surface and FinFET logic devices over fin shaped substrate surface portions, including forming a protective layer over previously formed floating gates, erase gates, word line poly and source regions in a memory cell portion of the substrate, then forming fins into the surface of the substrate and forming logic gates along the fins in a logic portion of the substrate, then removing the protective layer and completing formation of word line gates from the word line poly and drain regions in the memory cell portion of the substrate.

公开(公告)号：US09673208B2

公开(公告)日：2017-06-06

申请号：US15264457

申请日：2016-09-13

Applicant: Silicon Storage Technology, Inc.

Inventor： Jinho Kim ,  Chien-Sheng Su ,  Feng Zhou ,  Xian Liu ,  Nhan Do ,  Prateep Tuntasood ,  Parviz Ghazavi

IPC: H01L27/115 ,  H01L29/66 ,  H01L27/11531

CPC classification number: H01L27/11531 ,  H01L27/11524 ,  H01L27/11536 ,  H01L27/11539 ,  H01L27/11541 ,  H01L27/11543

Abstract: A method of forming a memory device on a substrate having memory, core and HV device areas. The method includes forming a pair of conductive layers in all three areas, forming an insulation layer over the conductive layers in all three areas (to protect the core and HV device areas), and then etching through the insulation layer and the pair of conductive layers in the memory area to form memory stacks. The method further includes forming an insulation layer over the memory stacks (to protect the memory area), removing the pair of conductive layers in the core and HV device areas, and forming conductive gates disposed over and insulated from the substrate in the core and HV device areas.

公开(公告)号：US09634019B1

公开(公告)日：2017-04-25

申请号：US15225393

申请日：2016-08-01

Applicant: Silicon Storage Technology, Inc.

Inventor： Feng Zhou ,  Xian Liu ,  Jeng-Wei Yang ,  Chien-Sheng Su ,  Nhan Do

IPC: H01L21/28 ,  H01L21/336 ,  H01L29/66 ,  H01L27/115 ,  H01L27/11521 ,  H01L29/788 ,  H01L29/49 ,  H01L29/423 ,  H01L21/8238

CPC classification number: H01L27/11521 ,  H01L21/28273 ,  H01L21/8238 ,  H01L29/42328 ,  H01L29/42332 ,  H01L29/4916 ,  H01L29/66825 ,  H01L29/7881 ,  H01L29/7883

Abstract: A method of forming a pair of memory cells that includes forming a polysilicon layer over and insulated from a semiconductor substrate, forming a pair of conductive control gates over and insulated from the polysilicon layer, forming first and second insulation layers extending along inner and outer side surfaces of the control gates, removing portions of the polysilicon layer adjacent the outer side surfaces of the control gates, forming an HKMG layer on the structure and removing portions thereof between the control gates, removing a portion of the polysilicon layer adjacent the inner side surfaces of the control gates, forming a source region in the substrate adjacent the inner side surfaces of the control gates, forming a conductive erase gate over and insulated from the source region, forming conductive word line gates laterally adjacent to the control gates, and forming drain regions in the substrate adjacent the word line gates.

公开(公告)号：US20160225878A1

公开(公告)日：2016-08-04

申请号：US15091202

申请日：2016-04-05

Applicant: Silicon Storage Technology, Inc.

Inventor： Willem-Jan Toren ,  Xian Liu ,  Gerhard Metzger-Brueckl ,  Nhan Do ,  Stephan Wege ,  Nadia Miridi ,  Chieng-Sheng Su ,  Cecile Bernardi ,  Liz Cuevas ,  Florence Guyot ,  Yueh-Hsin Chen ,  Henry Om'mani ,  Mandana Tadayoni

IPC: H01L29/66 ,  H01L21/28

CPC classification number: H01L29/66545 ,  H01L21/28273 ,  H01L21/28282 ,  H01L21/76283 ,  H01L27/11521 ,  H01L27/11568

Abstract: A stack gate structure for a non-volatile memory array has a semiconductor substrate having a plurality of substantially parallel spaced apart active regions, with each active region having an axis in a first direction. A first insulating material is between each stack gate structure in the second direction perpendicular to the first direction. Each stack gate structure has a second insulating material over the active region, a charge holding gate over the second insulating material, a third insulating material over the charge holding gate, and a first portion of a control gate over the third insulating material. A second portion of the control gate is over the first portion of the control gate and over the first insulating material adjacent thereto and extending in the second direction. A fourth insulating material is over the second portion of the control gate.

Abstract translation: 用于非易失性存储器阵列的堆叠栅极结构具有半导体衬底，该半导体衬底具有多个基本上平行的间隔开的有源区，每个有源区具有沿第一方向的轴。 在垂直于第一方向的第二方向上，第一绝缘材料位于每个堆叠栅极结构之间。 每个堆叠栅极结构在有源区域上具有第二绝缘材料，在第二绝缘材料上方的电荷保持栅极，电荷保持栅极上方的第三绝缘材料以及位于第三绝缘材料上的控制栅极的第一部分。 控制栅极的第二部分在控制栅极的第一部分之上，并且与第一部分相邻并且在第二方向上延伸。 第四绝缘材料位于控制栅极的第二部分之上。

公开(公告)号：US20160217864A1

公开(公告)日：2016-07-28

申请号：US15085835

申请日：2016-03-30

Applicant: Silicon Storage Technology, Inc.

Inventor： Hieu Van Tran ,  Hung Quoc Nguyen ,  Nhan Do

IPC: G11C16/24 ,  G11C16/26 ,  G11C16/04 ,  G11C16/14

CPC classification number: G11C16/24 ,  G11C16/0408 ,  G11C16/0425 ,  G11C16/10 ,  G11C16/12 ,  G11C16/14 ,  G11C16/26

Abstract: A non-volatile memory device that a semiconductor substrate of a first conductivity type. An array of non-volatile memory cells is in the semiconductor substrate arranged in a plurality of rows and columns. Each memory cell comprises a first region on a surface of the semiconductor substrate of a second conductivity type, and a second region on the surface of the semiconductor substrate of the second conductivity type. A channel region is between the first region and the second region. A word line overlies a first portion of the channel region and is insulated therefrom, and adjacent to the first region and having little or no overlap with the first region. A floating gate overlies a second portion of the channel region, is adjacent to the first portion, and is insulated therefrom and is adjacent to the second region. A coupling gate overlies the floating gate. A bit line is connected to the first region. A negative charge pump circuit generates a first negative voltage. A control circuit receives a command signal and generates a plurality of control signals, in response thereto and applies the first negative voltage to the word line of the unselected memory cells. During the operations of program, read or erase, a negative voltage can be applied to the word lines of the unselected memory cells.

Abstract translation: 一种非易失性存储器件，其是第一导电类型的半导体衬底。 非易失性存储单元的阵列位于配置成多行和列的半导体衬底中。 每个存储单元包括第二导电类型的半导体衬底的表面上的第一区域和第二导电类型的半导体衬底的表面上的第二区域。 沟道区域在第一区域和第二区域之间。 字线覆盖在沟道区域的第一部分上，并且与第一区域绝缘，并且与第一区域相邻并且与第一区域几乎没有或没有重叠。 浮动栅极覆盖沟道区域的第二部分，与第一部分相邻，并与第二部分绝缘并与第二区域相邻。 耦合栅极覆盖浮栅。 位线连接到第一区域。 负电荷泵电路产生第一负电压。 控制电路接收指令信号并响应于此产生多个控制信号，并将第一负电压施加到未选择存储单元的字线。 在程序操作期间，读取或擦除时，可以对未选择的存储单元的字线施加负电压。