INDIUM ZINC OXIDE BASED SPUTTERING TARGET, METHOD OF MANUFACTURING THE SAME, AND INDIUM ZINC OXIDE BASED THIN FILM
    31.
    发明申请
    INDIUM ZINC OXIDE BASED SPUTTERING TARGET, METHOD OF MANUFACTURING THE SAME, AND INDIUM ZINC OXIDE BASED THIN FILM 审中-公开
    基于氧化锌的氧化铟基溅射靶,其制造方法和基于氧化锌的薄膜

    公开(公告)号:US20090211903A1

    公开(公告)日:2009-08-27

    申请号:US12392457

    申请日:2009-02-25

    IPC分类号: C23C14/00 B29C43/02

    CPC分类号: C23C14/3414 C23C14/08

    摘要: Disclosed are an indium (In) zinc (Zn) oxide based sputtering target, a method of manufacturing the same, and an In Zn oxide based thin film deposited using the In Zn oxide based sputtering target. The In Zn oxide based sputtering target has a composition of (MO2)x(In2O3)y(ZnO)z, in which x:y is about 1:0.01 to 1:1, y:z is about 1:0.1 to 1:10, and M is at least one metal selected from a group consisting of hafnium (Hf), zirconium (Zr), and titanium (Ti).

    摘要翻译: 公开了一种铟(In)锌(Zn)氧化物基溅射靶,其制造方法和使用In Zn氧化物基溅射靶沉积的In-Zn氧化物基薄膜。 In Zn氧化物基溅射靶具有(MO 2)x(In 2 O 3)y(ZnO)z的组成,其中x:y为约1:0.01至1:1,y:z为约1:0.1至1:1。 10,M是选自铪(Hf),锆(Zr)和钛(Ti)中的至少一种金属。

    TACTILE AND VISUAL DISPLAY DEVICE
    34.
    发明申请
    TACTILE AND VISUAL DISPLAY DEVICE 有权
    触觉和视觉显示设备

    公开(公告)号:US20080129705A1

    公开(公告)日:2008-06-05

    申请号:US11930348

    申请日:2007-10-31

    IPC分类号: G06F3/045

    CPC分类号: G06F3/016

    摘要: Provided is a tactile and visual display device enabling visual information and tactile information to be simultaneously sensed. The tactile and visual display device includes: a display unit comprising a plurality of scan lines, a plurality of data lines and a plurality of pixels; a tactile sensation generator mounted over the display unit, transmitting light emitted from the pixels, comprising a transistor electrically connecting a plurality of corresponding pixels formed to correspond to the pixels with adjacent corresponding pixels, and generating an electrostatic force and a magnetostatic force; and a sensor in contact with the corresponding pixels to sense the generated electrostatic force or magnetostatic force. Accordingly, the texture of an image displayed on a display is provided as tactile information using an electrostatic force and a magnetostatic force, so that tactile information as well as visual information of the conventional display may be simultaneously provided.

    摘要翻译: 提供了能够同时感测视觉信息和触觉信息的触觉和视觉显示装置。 触觉和视觉显示装置包括:显示单元,包括多条扫描线,多条数据线和多个像素; 触觉感觉发生器,其安装在所述显示单元上,透射从所述像素发射的光,所述触觉感觉发生器包括将形成为对应于所述像素的多个对应像素与相邻的相应像素电连接并产生静电力和静磁力的晶体管; 以及与相应的像素接触以感测所产生的静电力或静磁力的传感器。 因此,使用静电力和静磁力将显示器上显示的图像的纹理提供为触觉信息,从而可以同时提供触觉信息以及常规显示器的视觉信息。

    Light emission device and display device using the light emission device as backlight unit
    36.
    发明申请
    Light emission device and display device using the light emission device as backlight unit 审中-公开
    发光装置和使用发光装置的显示装置作为背光单元

    公开(公告)号:US20080111468A1

    公开(公告)日:2008-05-15

    申请号:US11732609

    申请日:2007-04-03

    申请人: Jin-Ho Lee

    发明人: Jin-Ho Lee

    IPC分类号: H01J63/04

    摘要: A light emission device is disclosed. In one embodiment, the light emission device includes i) first and second substrates facing each other, each of the first and second substrates having an active area and an inactive area surrounding the active area, ii) an electron emission unit provided on the active area of the first substrate and having a plurality of pixels independently controlled in their electron emission, and iii) a light emission unit provided on the active area of the second substrate. The light emission unit may include i) a plurality of phosphor layers formed on the second substrate and spaced apart from each other, ii) a conductive layer disposed between the phosphor layer, and iii) an anode electrode formed on surfaces of the phosphor and conductive layers. The light emission unit may satisfy the following relationship: about 0.89≦A2/A1≦about 0.98. A1 is an area of the active area of the second substrate and A2 is an area of the phosphor layers.

    摘要翻译: 公开了一种发光装置。 在一个实施例中,发光装置包括i)彼此面对的第一和第二基板,第一和第二基板中的每一个具有有源区域和围绕有源区域的无效区域,ii)设置在有源区域上的电子发射单元 并且具有在其电子发射中独立控制的多个像素,以及iii)设置在第二基板的有源区上的发光单元。 发光单元可以包括i)形成在第二基板上并彼此间隔开的多个荧光体层,ii)设置在荧光体层之间的导电层,以及iii)形成在荧光体表面上的阳极电极和导电 层。 发光单元可以满足以下关系:约0.89 <= A 2 / A 1 <=约0.98。 A 1是第二基板的有效面积的面积,A 2是荧光体层的面积。

    MICRO MIRROR AND METHOD FOR FABRICATING THE SAME
    38.
    发明申请
    MICRO MIRROR AND METHOD FOR FABRICATING THE SAME 有权
    微镜和其制造方法

    公开(公告)号:US20070121188A1

    公开(公告)日:2007-05-31

    申请号:US11668713

    申请日:2007-01-30

    IPC分类号: G02B26/08

    CPC分类号: G02B26/0833 G02B26/105

    摘要: Disclosed is a micro mirror having a structure improved to have an increased driving angle while being driven in high speed. The micro mirror comprises a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section comprising mobile combs arranged on the adjoining section, and a fixed comb provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without increasing rotational inertia moment so largely. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.

    摘要翻译: 公开了一种微镜,其具有改进以在高速驱动的同时具有增加的驱动角的结构。 微反射镜包括反射光的可旋转镜部分,用于支撑镜部分的一对弹簧部分,并且当镜部被旋转驱动时用作镜部分的旋转轴线,用于连接镜部分的椭圆形邻接部分和 一对弹簧部分,以及包括设置在相邻部分上的移动梳状部分的驱动部分,以及设置在移动梳状体上方和/或下方的固定梳齿,以对应于移动梳来产生静电力。 根据本发明,通过存在椭圆形相邻部分,可以大大提高力矩而不增加旋转惯性矩。 因此,可以提供具有增加的驱动角度的高速光学扫描仪,这是高分辨率激光电视所需要的。

    Optical scanner and method of fabricating the same

    公开(公告)号:US20070108548A1

    公开(公告)日:2007-05-17

    申请号:US11652694

    申请日:2007-01-12

    IPC分类号: H01L29/00

    CPC分类号: G02B26/0841

    摘要: An optical scanner and a fabricating method thereof are provided. The optical scanner includes a base substrate, a frame, a H-shaped stage, supporters, and a stage driving structure. An interconnection layer having a predetermined pattern is formed on the base substrate. The frame has a rectangular frame shape which is formed on the base substrate. The H-shaped stage has a central area that performs a seesaw motion in the frame with respect to a uniaxial central axis and is positioned on the uniaxial central axis, and four extended areas that extend from two sides of the central area through which the uniaxial central axis passes, parallel the uniaxial central axis. The supporters have support beams that are positioned on the uniaxial central axis and connected to the frame and torsion bars that extend from the support beams and are connected to the central area of the stage. The stage driving structure has moving comb electrodes and fixed comb electrodes beneath the stage and on the base substrate facing the stage, respectively. A plurality of comb electrodes can be formed on the extended areas. Thus, a driving force can greatly be increased, which results in obtaining a similar driving speed using a considerably low voltage. Also, the weight of the stage should greatly be reduced for high-speed driving. For this, the stage is diced into a plurality of stages. Further, to increase the driving force, a plurality of comb electrodes are additionally formed on right and left sides of the stage.

    Lift pin assembly for substrate processing
    40.
    发明授权
    Lift pin assembly for substrate processing 有权
    提升销组件进行基板加工

    公开(公告)号:US07204888B2

    公开(公告)日:2007-04-17

    申请号:US10428967

    申请日:2003-05-01

    IPC分类号: C23C16/00 C23F1/00 H01L21/306

    CPC分类号: H01L21/68742

    摘要: Embodiments of the present invention provide an apparatus for constraining and supporting the lift pins to prevent or minimize lateral movement of the lift pins that causes substrate hand-off problems and associated degradation in substrate processing characteristics and results. In one embodiment, a lift pin assembly for manipulating a substrate above a support surface of a substrate support comprises a plurality of lift pins movable between an up position and a down position. The lift pins include top ends and bottom ends. The top ends are configured to be lifted above the support surface of the substrate support to contact a bottom surface of the substrate in the up position. The top ends are configured to be positioned at or below the support surface of the substrate support in the down position. A lift pin connecting member is attached to the plurality of lift pins at attachment locations at or near the bottom ends of the lift pins to maintain fixed relative distances between the lift pins at the attachment locations and to move with the lift pins between the up position and the down position.

    摘要翻译: 本发明的实施例提供了一种用于约束和支撑提升销的装置,以防止或最小化提升销的横向移动,这导致基板切换问题以及相关的基板处理特性和结果的退化。 在一个实施例中,用于在衬底支撑件的支撑表面上方操作衬底的提升销组件包括可在上升位置和下降位置之间移动的多个提升销。 提升销包括顶端和底端。 顶端构造成被提升在基板支撑件的支撑表面上方以在上方位置接触基板的底表面。 顶端构造成位于下方位置处的基板支撑件的支撑表面上或下方。 提升销连接构件在提升销的底端处或附近的附接位置处附接到多个提升销,以在附接位置处保持提升销之间的固定的相对距离,并且随着提升销在上部位置之间移动 和下降位置。