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    Microtomic system and process utilizing electrostatic force to handle sample sections
    34.
    发明授权
    Microtomic system and process utilizing electrostatic force to handle sample sections 有权
    透视系统和利用静电力处理样品部分的工艺

    公开(公告)号：US09464967B2

    公开(公告)日：2016-10-11

    申请号：US14284328

    申请日：2014-05-21

    Applicant: Zhongwei Chen

    Inventor： Zhongwei Chen

    IPC: G01N1/06 ,  G01N1/28 ,  B26D7/18

    CPC classification number: G01N1/06 ,  B26D7/1845 ,  G01N1/286 ,  G01N2001/061 ,  G01N2001/063 ,  G01N2001/066 ,  G01N2001/2873 ,  Y10T83/0448 ,  Y10T83/0453 ,  Y10T83/2066 ,  Y10T83/2096

    Abstract: Provided is a microtomic system and process for the preparation of sections for microscope examination. A cutting edge in the system can cut through a sample block and produce a section one end of which remains attached to the cutting edge. A voltage generator can generate a voltage and apply the voltage between the cutting edge and a section receiver such as a semiconductor chip grid. Through electrostatic force caused by the voltage, another end of the section can anchor to the section receiver. The section is then spread on the receiver. The system is automatable, highly efficient, and does not need liquid to float sample sections, and can therefore maintain the integration of the sample sections.

    Abstract translation: 提供了用于制备用于显微镜检查的切片的显微镜系统和方法。 系统中的切割边缘可以切割出样品块，并产生其一端保持连接到切割边缘的部分。 电压发生器可以产生电压并且在切割边缘和诸如半导体芯片格栅之类的部分接收器之间施加电压。 通过由电压引起的静电力，该部分的另一端可以锚定到部分接收器。 然后将该部分扩展到接收器。 该系统是可自动化的，高效率的，并且不需要液体漂浮样品部分，因此可以保持样品部分的整合。

    Apparatus of plural charged particle beams with multi-axis magnetic lens
    39.
    发明授权
    Apparatus of plural charged particle beams with multi-axis magnetic lens 有权
    具有多轴磁性透镜的多个带电粒子束的装置

    公开(公告)号：US08445862B2

    公开(公告)日：2013-05-21

    申请号：US12968221

    申请日：2010-12-14

    Applicant: Zhongwei Chen ,  Weiming Ren ,  Kenichi Kanai ,  Xuedong Liu

    Inventor： Zhongwei Chen ,  Weiming Ren ,  Kenichi Kanai ,  Xuedong Liu

    IPC: H01J37/143

    CPC classification number: H01J37/141 ,  H01J37/28 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/1534

    Abstract: An apparatus basically uses a simple and compact multi-axis magnetic lens to focus each of a plurality of charged particle beams on sample surface at the same time. In each sub-lens module of the multi-axis magnetic lens, two magnetic rings are respectively inserted into upper and lower holes with non-magnetic radial gap. Each gap size is small enough to keep a sufficient magnetic coupling and large enough to get a sufficient axial symmetry of magnetic scale potential distribution in the space near to its optical axis. This method eliminates the non-axisymmetric transverse field in each sub-lens and the round lens field difference among all sub-lenses at the same time; both exist inherently in a conventional multi-axis magnetic lens. In the apparatus, some additional magnetic shielding measures such as magnetic shielding tubes, plates and house are used to eliminate the non-axisymmetric transverse field on the charged particle path from each charged particle source to the entrance of each sub-lens and from the exit of each sub-lens to the sample surface.

    Abstract translation: 设备基本上使用简单紧凑的多轴磁性透镜来同时将多个带电粒子束中的每一个聚焦在样品表面上。 在多轴磁性透镜的每个子透镜模块中，两个磁环分别插入具有非磁性径向间隙的上孔和下孔中。 每个间隙尺寸足够小以保持足够的磁耦合并且足够大以在靠近其光轴的空间中获得足够的磁标势电位分布的轴向对称性。 该方法同时消除了每个子透镜中的非轴对称横向场和所有子透镜之间的圆透镜场差; 都存在于传统的多轴磁性透镜中。 在该装置中，使用一些额外的磁屏蔽措施，例如磁屏蔽管，板和房子来消除带电粒子路径上从每个带电粒子源到每个子透镜的入口和从出口的入口处的非轴对称横向场 每个子透镜到样品表面。

    Wien filter
    40.
    发明授权
    Wien filter 有权
    维恩过滤器

    公开(公告)号：US08436317B1

    公开(公告)日：2013-05-07

    申请号：US13292455

    申请日：2011-11-09

    Applicant: Zhongwei Chen ,  Xuedong Liu ,  Weiming Ren

    Inventor： Zhongwei Chen ,  Xuedong Liu ,  Weiming Ren

    IPC: H01J1/50

    CPC classification number: H01J37/05 ,  H01J49/288 ,  H01J2237/057

    Abstract: This invention provides a multi-pole type Wien filter, which acts more purely approaching its fundamentally expected performance. A 12-electrode electric device acts as an electric deflector, or acts as an electric deflector and an electric stigmator together. A cylindrical 4-coil magnetic device with a magnetic core acts as a magnetic deflector. Both can produce a dipole field while only incurring a negligibly-small 3rd order field harmonic. The magnetic core enhances the strength and more preciously regulates the distribution of the magnetic field originally generated by the coils. Then two ways to construct a Wien filter are proposed. One way is based on both of the foregoing electric and magnetic devices, and the other way is based on the foregoing electric device and a conventional magnetic deflector. The astigmatism in each of such Wien filters can be compensated by the electric stigmator of the electric device.

    Abstract translation: 本发明提供了一种多极型Wien滤波器，其更加纯粹地接近其根本预期的性能。 12电极电气装置用作电导向器，或者用作电导向器和电极连接器。 具有磁芯的圆柱形4线圈磁性装置用作磁导流板。 两者都可以产生偶极场，同时只产生一个可忽略的小三阶场谐波。 磁芯增强了强度，更加珍贵地调节了最初由线圈产生的磁场的分布。 然后提出构建维恩滤波器的两种方法。 一种方法是基于上述电气和磁性装置两者，另一种方法是基于前述的电气装置和常规的磁导向装置。 每个这样的维恩滤波器中的像散可以通过电气设备的电极来补偿。

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