公开(公告)号：US20110073469A1

公开(公告)日：2011-03-31

申请号：US12736176

申请日：2008-03-19

申请人： Yue Ma ,  Chuan He ,  Zhenxu Pang ,  Guangtao Shi ,  Jiexu Xia ,  Voha Nuch ,  Hui Wang

发明人： Yue Ma ,  Chuan He ,  Zhenxu Pang ,  Guangtao Shi ,  Jiexu Xia ,  Voha Nuch ,  Hui Wang

IPC分类号： C25D17/00

CPC分类号： H01L21/6723 ,  C25D5/48 ,  C25D5/50 ,  C25D17/00 ,  C25D17/001 ,  C25D17/02 ,  C25D17/04 ,  C25D21/02 ,  H01L21/67178

摘要： A electrochemical deposition system which has a 3-D stacked architecture comprises a factory interface for receiving semiconductor wafers, a mainframe comprising a mainframe transfer robot and a plurality of wafer holder assemblies which disposed on the top thereof, a plurality of electroplating cells disposed within the mainframe, a plurality of cleaning cells disposed within the mainframe and located below the electroplating cells, a plurality of thermal treatment chambers disposed in between the mainframe and the factory interface, and a fluid distribution system fluidly connected to the electroplating cells and the cleaning cells, wherein the mainframe transfer robot transfers the semiconductor wafer from the factory interface and within the electroplating cells, the cleaning cells, and the thermal treatment chambers. As a result, the system of the present invention is expandable to accommodate newly-added processing units without overmuch increased footprint.

摘要翻译： 具有3-D堆叠结构的电化学沉积系统包括用于接收半导体晶片的工厂接口，包括主机传送机器人的主机和设置在其顶部的多个晶片保持器组件，多个电镀单元 主机，设置在主机内并位于电镀单元下方的多个清洁单元，设置在主机和工厂界面之间的多个热处理室，以及流体连接到电镀单元和清洁单元的流体分配系统， 其中所述主机传送机器人从所述工厂接口和所述电镀单元，所述清洁单元和所述热处理室中传送所述半导体晶片。 结果，本发明的系统可扩展以容纳新增的处理单元，而不会增加占用空间。

公开(公告)号：US20100240226A1

公开(公告)日：2010-09-23

申请号：US12733436

申请日：2007-08-29

申请人： Yue Ma ,  Chuan He ,  Zhenxu Pang ,  Hui Wang ,  Voha Nuch

发明人： Yue Ma ,  Chuan He ,  Zhenxu Pang ,  Hui Wang ,  Voha Nuch

IPC分类号： H01L21/26 ,  F28C3/00

CPC分类号： H01L21/324 ,  F27B17/0025 ,  H01L21/67109 ,  H01L21/6719

摘要： The present invention provides an apparatus and method for rapid and uniform thermal treatment of semiconductor workpieces in two closely arranged thermal treatment chambers with a retractable door between them. The retractable door moves in between two thermal treatment chambers during heating or cooling process, and additional heating and cooling sources are provided for double-side thermal treatment of the semiconductor workpiece.

摘要翻译： 本发明提供了一种用于在两个紧密布置的热处理室中快速均匀地热处理半导体工件的装置和方法，其间具有可伸缩门。 可伸缩门在加热或冷却过程中在两个热处理室之间移动，并且为半导体工件的双面热处理提供附加的加热和冷却源。

公开(公告)号：US06837227B2

公开(公告)日：2005-01-04

申请号：US09774897

申请日：2001-01-31

申请人： Salim A. Jaliwala ,  Paul R. Miller ,  Larry J. Brackney ,  Thomas A. Dollmeyer ,  Chuan He ,  George Brunemann ,  John F. Wright ,  Stephen J. Charlton

发明人： Salim A. Jaliwala ,  Paul R. Miller ,  Larry J. Brackney ,  Thomas A. Dollmeyer ,  Chuan He ,  George Brunemann ,  John F. Wright ,  Stephen J. Charlton

IPC分类号： F02B29/04 ,  F02D21/08 ,  F02M25/07 ,  F02B47/08

CPC分类号： F02D41/0072 ,  F02B29/0406 ,  F02B29/0493 ,  F02M26/05 ,  F02M26/23 ,  F02M26/33 ,  F02M26/47 ,  Y02T10/47

摘要： A system is disclosed for estimating the mass flow of recirculated exhaust gas (EGR) from an exhaust manifold to an intake manifold of an internal combustion engine via an EGR conduit disposed therebetween and a fraction of EGR attributable to a mass of charge flow entering the intake manifold. An engine controller is responsive to current values of various combinations of the engine exhaust temperature (ETE), intake manifold pressure (IMP), differential pressure (ΔP) across an EGR valve, and EGR valve position (EGRP) to determine an estimate of EGR mass flow. The controller is further operable to estimate EGR fraction as a function of the estimated EGR mass flow value, mass flow of charge entering the intake manifold, and engine speed.

公开(公告)号：US06408834B1

公开(公告)日：2002-06-25

申请号：US09773654

申请日：2001-01-31

申请人： Lary J. Brackney ,  Thomas A. Dollmeyer ,  Paul R. Miller ,  Chuan He

发明人： Lary J. Brackney ,  Thomas A. Dollmeyer ,  Paul R. Miller ,  Chuan He

IPC分类号： F02M2507

CPC分类号： F02D41/0052 ,  F02B37/18 ,  F02B37/24 ,  F02D9/04 ,  F02D41/0007 ,  F02D41/0065 ,  F02D41/1401 ,  F02D2041/1419 ,  F02D2041/1422 ,  F02D2041/1427 ,  F02M26/05 ,  F02M26/10 ,  F02M26/23 ,  F02M26/47 ,  Y02T10/144 ,  Y02T10/47

摘要： A system for decoupling EGR flow and turbocharger swallowing capacity/efficiency control mechanisms includes a multiple-input multiple-output (MIMO) transform manager coupled to one or more of an EGR valve, an exhaust throttle and a variable geometry turbocharger (VGT) actuator of an internal combustion engine. The MIMO transform manager is responsive to commanded charge flow and EGR fraction parameters to decouple the EGR/exhaust throttle and VGT control parameters such that these control mechanisms may be controlled individually and independently of each other. One transform output is provided to a first compensator for controlling EGR flow and/or exhaust throttle operation as a function of charge flow error. The other transform output is provided to a second independent compensator for controlling VGT operation also as a function of charge flow error. Both compensators are configured to provide for transient compensator gain adjustment based on the degree of charge flow error, and the VGT compensator is further configured to provide for transient compensator gain adjustment based on a ratio of commanded fueling and oxygen/fuel ratio. The resulting control strategy provides for independent control of EGR flow/exhaust throttle and a VGT actuator, thereby resulting in better and more consistent control over mass charge flow.

摘要翻译： 用于去耦EGR流和涡轮增压器吞咽能力/效率控制机构的系统包括多输入多输出（MIMO）变换管理器，其耦合到一个或多个EGR阀，排气节流阀和可变几何涡轮增压器（VGT）致动器 内燃机 MIMO变换管理器响应于指令的充电流量和EGR分数参数来解耦EGR /排气节流阀和VGT控制参数，使得这些控制机构可以彼此独立地且独立地被控制。 一个变换输出被提供给第一补偿器，用于控制作为电荷流动误差的函数的EGR流和/或排气节流操作。 另一变换输出提供给第二独立补偿器，用于控制VGT操作，也作为充电流量误差的函数。 两个补偿器被配置为基于充电流量误差的程度来提供瞬时补偿器增益调整，并且VGT补偿器还被配置为基于指令加油和氧气/燃料比的比率来提供瞬时补偿器增益调整。 所得到的控制策略提供了EGR流量/排气节流阀和VGT致动器的独立控制，从而导致对质量流量的更好和更一致的控制。

公开(公告)号：US06185996B1

公开(公告)日：2001-02-13

申请号：US08970821

申请日：1997-11-14

申请人： Chuan He ,  G. George Zhu ,  Dennis O. Taylor ,  Leslie A. Roettgen ,  Mark F. Bares ,  Steven G. Smith ,  Richard D. Johnston ,  Yue Y. Wang ,  Emma Sweetland ,  James A. Rupp ,  Eric K. Bradley

发明人： Chuan He ,  G. George Zhu ,  Dennis O. Taylor ,  Leslie A. Roettgen ,  Mark F. Bares ,  Steven G. Smith ,  Richard D. Johnston ,  Yue Y. Wang ,  Emma Sweetland ,  James A. Rupp ,  Eric K. Bradley

IPC分类号： G01M1500

CPC分类号： G01M15/044

摘要： A system and method for diagnosing output power of an internal combustion engine includes means for diagnosing potential causes of low engine output power or torque and means for estimating actual engine output power or torque. In a preferred embodiment of the diagnosis of engine output power, low engine output power is first investigated for authenticity to verify whether a low engine output power condition exists. If one exists, a zero fueling engine cranking test is conducted to determine whether relative compression values for each of the cylinders are within specification, and any problems associated therewith are corrected by service personnel. If the low engine output power problem is not corrected in accordance with the engine cranking test, a snap-throttle cylinder balancing test is conducted to balance the relative power contribution from each cylinder. If the cylinder balancing test does not correct the low engine output power problem, a road test is conducted to estimate the actual engine output power for comparison with a rated engine output power over a desired range of engine speeds.

摘要翻译： 用于诊断内燃机的输出功率的系统和方法包括用于诊断低发动机输出功率或扭矩的潜在原因的装置以及用于估计实际发动机输出功率或扭矩的装置。 在发动机输出功率诊断的优选实施例中，首先调查低发动机输出功率的真实性，以验证是否存在低发动机输出功率状况。 如果存在，则进行零加油发动机起动试验，以确定每个气缸的相对压缩值是否在规定范围内，并且与其相关的任何问题由维修​​人员校正。 如果根据发动机起动试验不能校正低发动机输出功率问题，则进行快速节气门缸平衡试验以平衡来自每个气缸的相对功率贡献。 如果气缸平衡测试不能纠正低发动机输出功率问题，则进行道路测试以估计实际的发动机输出功率，以便在发动机转速的期望范围内与额定发动机输出功率进行比较。

公开(公告)号：US06181485B2

公开(公告)日：2001-01-30

申请号：US09338888

申请日：1999-06-23

申请人： Chuan He

发明人： Chuan He

IPC分类号： G02B1318

CPC分类号： G02B21/33 ,  B82Y10/00 ,  B82Y20/00 ,  G11B7/1374 ,  G11B7/1387 ,  G11B7/22 ,  G11B11/10532

摘要： A near-field optical or magneto-optical data storage system uses an optical focusing device for focusing an incident optical beam to a small size focal spot. The optical focusing device includes an objective lens, an optically transparent base plate, and an optically transparent adapter. The adapter is secured to, and disposed intermediate the objective lens and the base plate, and includes an opening that faces the base plate. A fluid fills the adapter opening to form a fluid cell when the adapter is secured to the base plate. The fluid has an index of refraction that substantially matches the index of refraction of the base plate.

摘要翻译： 近场光学或磁光数据存储系统使用光聚焦装置将入射光束聚焦到小尺寸焦点。 光学聚焦装置包括物镜，光学透明基板和光学透明适配器。 适配器被固定到物镜和基板之间并且设置在基板的中间，并且包括面向基板的开口。 当适配器固定到基板上时，流体填充适配器开口以形成流体池。 流体具有基本上与基板的折射率匹配的折射率。

公开(公告)号：US5986995A

公开(公告)日：1999-11-16

申请号：US234620

申请日：1999-01-21

申请人： Chuan He ,  Hong Chen ,  Charles C. Cheng, Jr.

发明人： Chuan He ,  Hong Chen ,  Charles C. Cheng, Jr.

IPC分类号： G02B17/08 ,  G11B7/135 ,  G11B11/105 ,  G11B7/00

CPC分类号： G11B11/10543 ,  B82Y10/00 ,  G11B7/1353 ,  G11B7/1372 ,  G11B11/10554 ,  G11B11/1058 ,  G11B2007/13725

摘要： A magneto-optical head using a catadioptric focusing device comprised of an incident surface, a bottom reflective surface, a pedestal, and a body. The incident surface is generally flat and is comprised of a central diffractive, optically transmissive facet and a peripheral facet comprised of a diffractive-reflective surface or facet. In a data writing or reading mode, an incident optical beam, such as a laser beam impinges upon the central facet, and is diffracted thereby. The incident laser beam can be collimated, convergent or divergent. The laser beam passes through the transparent body, and impinges upon the bottom reflective surface. The laser beam is then reflected by the bottom reflective surface, through the body, unto the peripheral diffractive-reflective surface. The laser beam is reflected and also diffracted by the peripheral diffractive-reflective surface as a focused beam, through the body, and is focused as a focal point located at, or in close proximity to a pedestal edge, along a central axis, in very close proximity to the disk. This will allow the focused optical beam to propagate toward, or penetrate the disk through evanescent wave coupling, for enabling the transduction of data to and from the disk.

摘要翻译： 一种使用由入射表面，底部反射表面，基座和主体构成的反折射聚焦装置的磁光头。 入射表面通常是平坦的，并且由中心衍射光学透射小面和由衍射反射表面或小面组成的外围小面组成。 在数据写入或读取模式中，诸如激光束的入射光束照射在中心小面上并被衍射。 入射激光束可以准直，收敛或发散。 激光束穿过透明体并撞击在底部反射面上。 然后激光束被底部反射表面通过主体反射到外围的衍射反射表面。 激光束被作为聚焦光束的外围衍射反射表面反射并衍射穿过本体，并且被非常地聚焦在位于或靠近基座边缘的焦点上 靠近磁盘。 这将允许聚焦的光束通过ev逝波耦合传播或穿透光盘，以使数据能够传输到光盘。

公开(公告)号：US09070723B2

公开(公告)日：2015-06-30

申请号：US12452367

申请日：2007-07-05

申请人： Hui Wang ,  Jian Wang ,  Yue Ma ,  Chuan He

发明人： Hui Wang ,  Jian Wang ,  Yue Ma ,  Chuan He

IPC分类号： B08B3/10 ,  H01L21/67 ,  H01L21/02

CPC分类号： H01L21/02041 ,  B08B3/12 ,  H01L21/02052 ,  H01L21/02063 ,  H01L21/6704 ,  H01L21/67051

摘要： An apparatus for cleaning a surface of wafer or substrate includes a plate being positioned with a gap to surface of the wafer or substrate, and the plate being rotated around an axis vertical to surface of wafer or substrate. The rotating plate surface facing surface of the wafer or substrate has grooves, regular patterns, and irregular patterns to enhance the cleaning efficiency. Another embodiment further includes an ultra sonic or mega sonic transducer vibrating the rotating plate during cleaning process.

摘要翻译： 用于清洁晶片或基板的表面的设备包括板，其定位成与晶片或基板的表面间隔开，并且板围绕垂直于晶片或基板表面的轴线旋转。 晶片或基板的旋转板表面相对表面具有凹槽，规则图案和不规则图案以提高清洁效率。 另一个实施例还包括在清洁过程中振动旋转板的超声波或超声波传感器。

公开(公告)号：US08392730B2

公开(公告)日：2013-03-05

申请号：US13500910

申请日：2010-09-15

申请人： Chuan He

发明人： Chuan He

IPC分类号： G06F1/00 ,  G06F13/00 ,  G05F1/577 ,  H02M7/08 ,  G01R19/00

CPC分类号： H02J1/102 ,  Y02P80/14

摘要： A current sharing method and device for a DC power supply are provided, and the method includes: taking a latest detected bus current as a reference current to perform current sharing control on a local host current; calculating and timing sending time of the local host current according to the latest detected bus current, the local host current, and a preset corresponding relationship between a difference between the local host current and the bus current and the sending time of the local host current, and if no new bus current is detected within a timing time, sending the local host current as a new bus current to a bus when the timing times out. The method has small communication traffic and no master-slave relationship, and is simple to control, which reduces the difficulty of system development and improves the system reliability.

摘要翻译： 提供了一种用于直流电源的电流共享方法和装置，该方法包括：以最新的检测总线电流为参考电流，对本地主机电流进行电流共享控制; 根据最新检测到的总线电流，本地主机电流和本地主机电流与总线电流之间的预置对应关系以及本地主机电流的发送时间来计算和定时发送本地主机电流时间， 并且如果在定时时间内没有检测到新的总线电流，则当定时超时时，将本地主机电流作为新的总线电流发送到总线。 该方法具有通信流量小，无主从关系，易于控制，降低了系统开发难度，提高了系统可靠性。

公开(公告)号：US08209110B2

公开(公告)日：2012-06-26

申请号：US13270819

申请日：2011-10-11

申请人： Dave Charles Weber ,  David John Kubinski ,  Chuan He ,  Michiel J. Van Nieuwstadt

发明人： Dave Charles Weber ,  David John Kubinski ,  Chuan He ,  Michiel J. Van Nieuwstadt

IPC分类号： F02D45/00 ,  F01N11/00

CPC分类号： F01N11/00 ,  F01N2560/025 ,  F01N2560/026 ,  F02D41/123 ,  F02D41/1452 ,  F02D41/1454 ,  F02D41/1456 ,  F02D41/1459 ,  F02D41/146 ,  F02D41/1462 ,  F02D41/2416 ,  F02D41/2454 ,  F02D2041/1433 ,  F02D2041/1468 ,  Y02T10/47

摘要： Various systems and methods are described for controlling an engine in a vehicle in response to an equilibrium value of an exhaust gas constituent generated from an exhaust gas sensor. One example method comprises during engine fueling below a threshold amount where at least one intake valve and one exhaust valve of the engine are operating: generating an equilibrium value of an exhaust gas constituent reading of the exhaust gas sensor, the equilibrium value based on a trajectory of the exhaust gas constituent reading, and under selected engine combusting conditions, adjusting the sensor signal based on the equilibrium value.

摘要翻译： 描述了用于响应于从废气传感器产生的排气成分的平衡值来控制车辆中的发动机的各种系统和方法。 一个示例性方法包括在发动机加油期间低于阈值量，其中发动机的至少一个进气门和一个排气阀正在操作：产生排气传感器的排气构成读数的平衡值，基于轨迹的平衡值 的废气成分读数，并且在选择的发动机燃烧条件下，基于平衡值调节传感器信号。