公开(公告)号：US20240178290A1

公开(公告)日：2024-05-30

申请号：US18059186

申请日：2022-11-28

Applicant: GlobalFoundries U.S. Inc.

Inventor： Megan Lydon-Nuhfer ,  Steven M. Shank ,  Aaron L. Vallett ,  Michel Abou-Khalil ,  Sarah A. McTaggart ,  Rajendran Krishnasamy

IPC: H01L29/423 ,  H01L29/06 ,  H01L29/08 ,  H01L29/40 ,  H01L29/49 ,  H01L29/66

CPC classification number: H01L29/42376 ,  H01L29/0657 ,  H01L29/0847 ,  H01L29/401 ,  H01L29/42356 ,  H01L29/4916 ,  H01L29/6653

Abstract: An integrated circuit (IC) structure includes a V-shaped cavity in a semiconductor substrate. A source region and a drain region are on opposing sides of the V-shaped cavity. A gate structure includes a gate dielectric layer, spacers, and a gate electrode on the gate dielectric layer between the spacers. The gate structure is fully within the V-shaped cavity. The IC structure provides a switch that finds advantageous application as part of a low noise amplifier. The IC structure provides a smaller gate width, decreased capacitance, increased gain and increased radio frequency (RF) performance compared to planar devices or devices without the gate structure fully within V-shaped cavity.

公开(公告)号：US11949034B2

公开(公告)日：2024-04-02

申请号：US17849285

申请日：2022-06-24

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： John J. Ellis-Monaghan ,  Rajendran Krishnasamy ,  Siva P. Adusumilli ,  Ramsey Hazbun

IPC: H01L31/105 ,  H01L31/0288 ,  H01L31/18 ,  H01L31/0216

CPC classification number: H01L31/105 ,  H01L31/0288 ,  H01L31/1804 ,  H01L31/0216

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a photodetector and methods of manufacture. The structure includes: a photodetector; and a semiconductor material on the photodetector, the semiconductor material comprising a first dopant type, a second dopant type and intrinsic semiconductor material separating the first dopant type from the second dopant type.

公开(公告)号：US20240063212A1

公开(公告)日：2024-02-22

申请号：US17890725

申请日：2022-08-18

Applicant: GlobalFoundries U.S. Inc.

Inventor： Anindya Nath ,  Alain F. Loiseau ,  Souvick Mitra ,  Rajendran Krishnasamy

IPC: H01L27/02 ,  H01L29/73 ,  H01L29/735 ,  H01L29/739

CPC classification number: H01L27/0255 ,  H01L29/7302 ,  H01L29/735 ,  H01L29/7393 ,  H01L27/0259

Abstract: Embodiments of the disclosure provide an integrated circuit (IC) structure with a diode over a lateral bipolar transistor. A structure according to the disclosure may include a lateral bipolar transistor within a monocrystalline semiconductor over a substrate. An insulator layer is over a portion of the monocrystalline semiconductor. A diode is within a polycrystalline semiconductor on the insulator layer. A cathode of the diode is coupled to a first well within the monocrystalline semiconductor. The first well defines one of an emitter terminal and a collector terminal of the lateral bipolar transistor.

公开(公告)号：US20230223337A1

公开(公告)日：2023-07-13

申请号：US17572681

申请日：2022-01-11

Applicant: GlobalFoundries U.S. Inc.

Inventor： Mark D. Levy ,  Fuad H. Al-Amoody ,  Siva P. Adusumilli ,  Spencer H. Porter ,  Ephrem Gebreselasie ,  Rajendran Krishnasamy

IPC: H01L23/525 ,  H01L21/768 ,  H01L23/36 ,  H01L23/34 ,  H01L23/522

CPC classification number: H01L23/5256 ,  H01L21/76877 ,  H01L23/36 ,  H01L23/345 ,  H01L21/76832 ,  H01L23/5226 ,  H01L21/76816

Abstract: A semiconductor structure includes a semiconductor device (e.g., an e-fuse or photonic device) and a metallic heating element adjacent thereto. The heating element has a lower portion within a middle of the line (MOL) dielectric layer adjacent to the semiconductor device and an upper portion with a tapered top end that extends into a back end of the line (BEOL) dielectric layer. A method of forming the semiconductor structure includes forming a cavity such that it has both a lower section, which extends from a top surface of a MOL dielectric layer downward toward a semiconductor device, and an upper section, which extends from the top surface of the MOL dielectric layer upward and which is capped by an area of a BEOL dielectric layer having a concave bottom surface. A metallic fill material can then be deposited into the cavity (e.g., through via openings) to form the heating element.

公开(公告)号：US11374040B1

公开(公告)日：2022-06-28

申请号：US17113418

申请日：2020-12-07

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： John J. Ellis-Monaghan ,  Steven M. Shank ,  Rajendran Krishnasamy ,  Ramsey Hazbun

IPC: H01L27/144 ,  H01L31/028 ,  H01L31/18 ,  H01L31/103 ,  H01L31/0312

Abstract: Structures including multiple photodiodes and methods of fabricating a structure including multiple photodiodes. A substrate has a first trench extending to a first depth into the substrate and a second trench extending to a second depth into the substrate that is greater than the first depth. A first photodiode includes a first light-absorbing layer containing a first material positioned in the first trench. A second photodiode includes a second light-absorbing layer containing a second material positioned in the second trench. The first material and the second material each include germanium.

公开(公告)号：US20250072024A1

公开(公告)日：2025-02-27

申请号：US18237195

申请日：2023-08-23

Applicant: GlobalFoundries U.S. Inc.

Inventor： Alvin J. Joseph ,  Mark D. Levy ,  Rajendran Krishnasamy ,  Johnatan A. Kantarovsky ,  Ajay Raman ,  Ian A. McCallum-Cook

IPC: H01L29/66 ,  H01L29/20 ,  H01L29/45 ,  H01L29/778

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a transistor with a thermal plug and methods of manufacture. The structure includes: a semiconductor substrate; a gate structure over the semiconductor substrate; a source region on a first side of the gate structure; a drain region on a second side of the gate structure; and a thermal plug extending from a top side of the semiconductor substrate into an active region of the semiconductor substrate.

公开(公告)号：US12205943B2

公开(公告)日：2025-01-21

申请号：US17890725

申请日：2022-08-18

Applicant: GlobalFoundries U.S. Inc.

Inventor： Anindya Nath ,  Alain F. Loiseau ,  Souvick Mitra ,  Rajendran Krishnasamy

IPC: H01L27/02 ,  H01L29/73 ,  H01L29/735 ,  H01L29/739

Abstract: Embodiments of the disclosure provide an integrated circuit (IC) structure with a diode over a lateral bipolar transistor. A structure according to the disclosure may include a lateral bipolar transistor within a monocrystalline semiconductor over a substrate. An insulator layer is over a portion of the monocrystalline semiconductor. A diode is within a polycrystalline semiconductor on the insulator layer. A cathode of the diode is coupled to a first well within the monocrystalline semiconductor. The first well defines one of an emitter terminal and a collector terminal of the lateral bipolar transistor.

公开(公告)号：US12170329B2

公开(公告)日：2024-12-17

申请号：US17692218

申请日：2022-03-11

Applicant: GlobalFoundries U.S. Inc.

Inventor： Anupam Dutta ,  Vvss Satyasuresh Choppalli ,  Rajendran Krishnasamy

IPC: H01L29/78 ,  H01L21/3215 ,  H01L21/8234 ,  H01L29/06 ,  H01L29/66

Abstract: According to various embodiments, there is provided a MOSFET device. The MOSFET device may include a substrate; a first doped region disposed in the substrate; a second doped region disposed in the substrate, wherein the first doped region and the second doped region are laterally adjacent to each other; a third doped region disposed in the first doped region; a fourth doped region disposed in the second doped region; a gate disposed on the substrate, over the first and second doped regions, and between the third and fourth doped regions; and at least one high resistance region embedded in at least the second doped region, wherein the first doped region has a first conductivity type, wherein the second doped region, the third doped region, and the fourth doped region have a second conductivity type, wherein the first conductivity type and the second conductivity type are different.

公开(公告)号：US12170313B2

公开(公告)日：2024-12-17

申请号：US18324637

申请日：2023-05-26

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Vibhor Jain ,  Anthony K. Stamper ,  John J. Ellis-Monaghan ,  Steven M. Shank ,  Rajendran Krishnasamy

IPC: H01L29/06 ,  H01L21/763 ,  H01L29/08 ,  H01L29/165 ,  H01L29/66 ,  H01L29/737

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to heterojunction bipolar transistors (HBTs) with a buried trap rich region and methods of manufacture. The structure includes: a trap rich isolation region embedded within the bulk substrate; and a heterojunction bipolar transistor above the trap rich isolation region, with its sub-collector region separated by the trap rich isolation region by a layer of the bulk substrate.

公开(公告)号：US20240266422A1

公开(公告)日：2024-08-08

申请号：US18166041

申请日：2023-02-08

Applicant: GlobalFoundries U.S. Inc.

Inventor： Anupam Dutta ,  Satyasuresh Vvss Choppalli ,  Rajendran Krishnasamy ,  Robert J. Gauthier, JR. ,  Anindya Nath

IPC: H01L29/745

CPC classification number: H01L29/7455

Abstract: Disclosed structures include a semiconductor controlled rectifier or bi-directional semiconductor controlled rectifier with a trigger voltage (Vtrig) that is tunable. Some structures include a semiconductor controlled rectifier with an Nwell and Pwell in a semiconductor layer, with a P-type diffusion region in the Nwell, and with an N-type diffusion region in the Pwell. Gate(s) on the well(s) are separated from the junction between the wells and from the diffusion regions. Other structures include a bidirectional semiconductor controlled rectifier with a Pwell between first and second Nwells in a semiconductor layer, with first P-type and N-type diffusion regions in the first Nwell, and with second P-type and N-type diffusion regions in the second Nwell. Gate(s) on the well(s) are separated from junctions between the Nwells and the Pwell and from any diffusion regions. In these structures, the gate(s) can be left floating or biased to tune Vtrig using gate leakage current.