公开(公告)号：US08809782B2

公开(公告)日：2014-08-19

申请号：US13387424

申请日：2010-07-20

申请人： Tomohisa Ohtaki ,  Masahiko Ajima ,  Sukehiro Ito ,  Mitsuru Onuma ,  Akira Omachi

发明人： Tomohisa Ohtaki ,  Masahiko Ajima ,  Sukehiro Ito ,  Mitsuru Onuma ,  Akira Omachi

IPC分类号： H01J37/00 ,  H01J37/16 ,  F16F15/04 ,  H01J37/28

CPC分类号： H01J37/28 ,  F16F15/04 ,  H01J37/16 ,  H01J2237/0216

摘要： A scanning electron microscope includes a main scanning electron microscope unit having an electron optical column and a sample chamber, a controller over the main scanning electron microscope unit, a single housing that houses both the main scanning electron microscope unit and the controller, and a bottom plate disposed under the single housing, the main scanning electron microscope unit and the controller. A first leg member is attached to a bottom face of the bottom plate on a side of the controller with a first opening hole provided through the bottom plate on a side of the main scanning electron microscope unit, and a damper is fixed to a bottom face of the main scanning electron microscope unit and disposed through the first opening hole.

摘要翻译： 扫描电子显微镜包括具有电子光学柱和样品室的主扫描电子显微镜单元，主扫描电子显微镜单元上的控制器，容纳主扫描电子显微镜单元和控制器的单个壳体，底部 设置在单个壳体下方的主扫描电子显微镜单元和控制器。 第一腿部件在控制器的一侧的底板的底面上，在主扫描电子显微镜单元的一侧具有通过底板提供的第一开孔，并且阻尼器固定到底面 的主扫描电子显微镜单元，并且通过第一开孔设置。

公开(公告)号：US08388089B2

公开(公告)日：2013-03-05

申请号：US12917098

申请日：2010-11-01

申请人： Sukehiro Ito

发明人： Sukehiro Ito

IPC分类号： B41J29/38 ,  B41J29/393 ,  B41J2/135

CPC分类号： B41J2/12 ,  B41J2/04563 ,  B41J2/16579

摘要： A discharge test device including: a head that includes a plurality of nozzles discharging liquid to a medium, a temperature obtaining section that obtains a temperature related to the head, a detection electrode that faces the head with a predetermined distance therebetween, an identification section that applies a predetermined voltage to the detection electrode and identifies an abnormal nozzle on the basis of voltage change of the detection electrode generated by liquid discharge from the nozzles, and a control section that controls the head and the identification section so that: when the temperature obtained by the temperature obtaining section is within a first temperature range, the head discharges the liquid to the medium after the identification section identifies the abnormal nozzle, when the temperature obtained by the temperature obtaining section is outside the first temperature range and within a second temperature range that is larger than the first temperature range, the head discharges the liquid to the medium without the abnormal nozzle being identified by the identification section, and when the temperature obtained by the temperature obtaining section is outside the second temperature range, the abnormal nozzle is not identified and the liquid is not discharged to the medium.

摘要翻译： 一种放电测试装置，包括：头，其包括将液体排出到介质的多个喷嘴，获得与头相关的温度的温度获取部，与其之间具有预定距离的头部的检测电极;识别部， 对检测电极施加预定的电压，并根据从喷嘴的液体排出产生的检测电极的电压变化来识别异常喷嘴;以及控制部，其控制头部和识别部，使得：当获得的温度 通过温度获取部在第一温度范围内，当由温度获取部获得的温度在第一温度范围之外且在第二温度范围内时，在识别部识别异常喷嘴之后，喷头将液体排出到介质 大于第一温度范围t 他的头部将液体排出到介质上，而不会由识别部分识别出异常的喷嘴，当温度获取部分获得的温度超出第二温度范围时，不会识别出异常喷嘴，液体不会排放到 中。

公开(公告)号：US08143573B2

公开(公告)日：2012-03-27

申请号：US12490775

申请日：2009-06-24

申请人： Sukehiro Ito ,  Junichi Katane ,  Shigeru Kawamata ,  Shinichi Tomita

发明人： Sukehiro Ito ,  Junichi Katane ,  Shigeru Kawamata ,  Shinichi Tomita

IPC分类号： G02F1/1335 ,  G01K1/08

CPC分类号： H01J37/1478 ,  H01J37/153 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2611

摘要： A charged particle beam impinging on a specimen is set to have left and right tilt angles corresponding to a parallactic angle. A control unit is provided which scans the beam over the specimen while giving a left tilt and a right tilt corresponding to the parallactic angle alternately to the beam on each scanning line. In this way, images are acquired. A three-dimensional image in which deterioration of the resolution is suppressed is displayed in real time by combining aberration cancellation means with the control of the beam according to the parallactic angle. The aberration cancellation means uses an optical system having plural stages of lenses to provide overall cancellation of aberrations by making use of the action of a lens to deflect the beam back to the optical axis.

摘要翻译： 照射在试样上的带电粒子束被设定为具有对应于副视角的左右倾斜角。 提供了一种控制单元，其在垂直于每个扫描线上的光束上交替地向左侧倾斜和对准视角的右侧倾斜扫描样本上的光束。 以这种方式，获取图像。 通过将像差消除装置与根据近视角的光束的控制组合来实时显示分辨率的劣化被抑制的三维图像。 像差消除装置使用具有多级透镜的光学系统，通过利用透镜的作用将光束偏转回光轴来提供像差的整体消除。

公开(公告)号：US20080073534A1

公开(公告)日：2008-03-27

申请号：US11717093

申请日：2007-03-13

申请人： Junichi Katane ,  Sukehiro Ito

发明人： Junichi Katane ,  Sukehiro Ito

IPC分类号： G21K7/00

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/188 ,  H01J2237/2444 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/2608

摘要： A scanning electron microscope capable of securing a high ion detection efficiency in spite of a short working distance and the adaptability for high resolution is disclosed. An ion detector for detecting ions is arranged nearer to an electron source than a first pressure limiting aperture for maintaining the specimen chamber in a predetermined vacuum. This configuration makes it possible to achieve the high resolution of the semi-in-lens objective lens on one hand and to detect the ions generated by the collision between the secondary electrons and the gas molecules on the other hand.

摘要翻译： 公开了一种能够确保高离子检测效率的扫描电子显微镜，尽管工作距离短，适用于高分辨率。 用于检测离子的离子检测器布置成比用于将样品室保持在预定真空中的第一限压孔更靠近电子源。 这种结构一方面可以实现半透镜物镜的高分辨率，另一方面可以检测由二次电子和气体分子之间的碰撞产生的离子。

公开(公告)号：US09287083B2

公开(公告)日：2016-03-15

申请号：US13979964

申请日：2011-12-16

申请人： Shinichi Tomita ,  Wataru Kotake ,  Sukehiro Ito

发明人： Shinichi Tomita ,  Wataru Kotake ,  Sukehiro Ito

IPC分类号： H01J37/147 ,  H01J37/153 ,  H01J37/28

CPC分类号： H01J37/1478 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/1536 ,  H01J2237/20207 ,  H01J2237/2611

摘要： Provided is a charged particle beam device that is capable of suppressing an field-of-view deviation occurring when observing a tilted image or a left-right parallax-angle image acquired by irradiating a tilted beam on a sample while continuously compensating a focus. By means of an aligner for compensating field-of-view (54) installed between an objective lens (7) that focuses a primary charged particle beam on a surface of the sample (10), and a deflector for controlling tilt angle (53) that tilts the primary charged particle beam, the field-of-view deviation occurring during tilting of the primary charged particle beam is suppressed based on an amount of compensation required by a tilt angle of the deflector for controlling tilt angle (53), lens conditions, and a distance between the objective lens (7) and the sample (10), in conjunction with a focus compensation of the objective lens (7).

摘要翻译： 提供了一种带电粒子束装置，其能够抑制在观察通过在连续补偿焦点的同时对样品照射倾斜光束而获得的倾斜图像或左右视差角图像时发生的视场偏差。 借助于用于补偿视场（54）的对准器，其安装在将初级带电粒子束聚焦在样品（10）的表面上的物镜（7）和用于控制倾斜角（53）的偏转器之间， 使主要带电粒子束倾斜，基于用于控制倾斜角（53）的偏转器的倾斜角所需的补偿量，抑制主要带电粒子束倾斜期间发生的视场偏差（53），透镜条件 ，以及物镜（7）和样本（10）之间的距离，结合物镜（7）的聚焦补偿。

公开(公告)号：US20140021347A1

公开(公告)日：2014-01-23

申请号：US14111174

申请日：2012-03-02

申请人： Yusuke Ominami ,  Sukehiro Ito ,  Tomohisa Ohtaki

发明人： Yusuke Ominami ,  Sukehiro Ito ,  Tomohisa Ohtaki

IPC分类号： H01J37/16 ,  H01J37/28

CPC分类号： H01J37/18 ,  H01J37/16 ,  H01J37/185 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/16 ,  H01J2237/164 ,  H01J2237/1825 ,  H01J2237/2007 ,  H01J2237/2608

摘要： Provided is a charged particle beam apparatus or charged particle microscope capable of observing an observation target sample in an air atmosphere or a gas environment without making significant changes to the configuration of a conventional high vacuum charged particle microscope. In a charged particle beam apparatus configured such that a thin film (10) is used to separate a vacuum environment and an air atmosphere (or a gas environment), an attachment (121) capable of holding the thin film (10) and whose interior can be maintained at an air atmosphere or a gas environment is inserted into a vacuum chamber (7) of a high vacuum charged particle microscope. The attachment (121) is vacuum-sealed and fixed to a vacuum partition of the vacuum sample chamber. Image quality is further improved by replacing the atmosphere in the attachment with helium or a light-elemental gas that has a lower mass than atmospheric gases such as nitrogen or water vapor.

摘要翻译： 提供一种能够在空气气氛或气体环境中观察观察目标样品的带电粒子束装置或带电粒子显微镜，而不会对传统的高真空带电粒子显微镜的构造进行显着变化。 在构成为使用薄膜（10）分离真空环境和空气气氛（或气体环境）的带电粒子束装置中，能够保持薄膜（10）的附件（121），其内部 可以在空气气氛中保持，或者将气体环境插入到高真空带电粒子显微镜的真空室（7）中。 附件（121）被真空密封并固定到真空样品室的真空隔板。 通过用氦气或具有比大气气体如氮气或水蒸气更低的质量的轻质气体代替附件中的气氛来进一步改善图像质量。

公开(公告)号：US20130299715A1

公开(公告)日：2013-11-14

申请号：US13979964

申请日：2011-12-16

申请人： Shinichi Tomita ,  Wataru Kotake ,  Sukehiro Ito

发明人： Shinichi Tomita ,  Wataru Kotake ,  Sukehiro Ito

IPC分类号： H01J37/147

CPC分类号： H01J37/1478 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/1536 ,  H01J2237/20207 ,  H01J2237/2611

摘要： Provided is a charged particle beam device that is capable of suppressing an field-of-view deviation occurring when observing a tilted image or a left-right parallax-angle image acquired by irradiating a tilted beam on a sample while continuously compensating a focus. By means of an aligner for compensating field-of-view (54) installed between an objective lens (7) that focuses a primary charged particle beam on a surface of the sample (10), and a deflector for controlling tilt angle (53) that tilts the primary charged particle beam, the field-of-view deviation occurring during tilting of the primary charged particle beam is suppressed based on an amount of compensation required by a tilt angle of the deflector for controlling tilt angle (53), lens conditions, and a distance between the objective lens (7) and the sample (10) , in conjunction with a focus compensation of the objective lens (7).

摘要翻译： 提供了一种带电粒子束装置，其能够抑制在观察通过在连续补偿焦点的同时对样品照射倾斜光束而获得的倾斜图像或左右视差角图像时发生的视场偏差。 借助于用于补偿视场（54）的对准器，其安装在将初级带电粒子束聚焦在样品（10）的表面上的物镜（7）和用于控制倾斜角（53）的偏转器之间， 使主要带电粒子束倾斜，基于用于控制倾斜角（53）的偏转器的倾斜角所需的补偿量，抑制主要带电粒子束倾斜期间发生的视场偏差（53），透镜条件 ，以及物镜（7）和样本（10）之间的距离，结合物镜（7）的聚焦补偿。

公开(公告)号：US20110291010A1

公开(公告)日：2011-12-01

申请号：US13147980

申请日：2010-01-20

申请人： Junichi Katane ,  Sukehiro Ito

发明人： Junichi Katane ,  Sukehiro Ito

IPC分类号： H01J37/18 ,  H01J37/28

CPC分类号： H01J37/28 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/2605

摘要： The present invention provides a scanning charged particle beam device including a sample chamber (8) and a detector. The detector has: a function of detecting light at least ranging from the vacuum ultraviolet region to the visible light region, of light (17) having image information which is obtained by a light emission phenomenon of gas scintillation when the sample chamber is controlled to a low vacuum (1 Pa to 3,000 Pa); and a function of detecting ion currents (11, 13) having image information which are obtained by cascade amplification of electrons and gas molecules. Accordingly, it becomes possible to realize a device which can deal with observation of various samples. Further, an optimal configuration of the detection unit is devised, to thereby make it possible to add value to an obtained image and provide users in wide-ranging fields with the observation image. In addition, the detector is made usable in combination with a detector for high vacuum, to thereby make it possible to provide wide-ranging users with the image, irrespective of the vacuum mode.

摘要翻译： 本发明提供一种扫描带电粒子束装置，其包括样品室（8）和检测器。 检测器具有：检测至少从真空紫外区域到可见光区域的光的功能，具有通过气体闪烁的发光现象获得的图像信息的光（17），当样品室被控制到 低真空（1Pa〜3,000Pa）; 以及检测具有通过电子和气体分子的级联放大获得的图像信息的离子电流（11,13）的功能。 因此，可以实现可以处理各种样品的观察的装置。 此外，设计了检测单元的最佳配置，从而使得可以向所获得的图像增加值并且向用户提供具有观察图像的广泛范围的用户。 此外，检测器可与用于高真空的检测器组合使用，从而使得可以向广泛的用户提供图像，而不管真空模式如何。

公开(公告)号：US20110085001A1

公开(公告)日：2011-04-14

申请号：US12902895

申请日：2010-10-12

申请人： Sukehiro Ito

发明人： Sukehiro Ito

IPC分类号： B41J29/38

CPC分类号： B41J2/2142 ,  B41J2/16508

摘要： A small-sized module configured of a detection electrode and a determination unit is provided.An ejection examination apparatus is disclosed, including: a head that ejects a liquid from a nozzle; a detection electrode that faces the nozzle with a predetermined interval between the detection electrode and the nozzle; a power source that sets the detection electrode to a predetermined potential; a determination unit that detects a potential change in the detection electrode arising due to ejection of the liquid from the nozzle and determines a nozzle in the head that does not eject liquid based on the potential change in the detection electrode; and a cap portion that makes contact with the head when printing is not being performed and that houses the detection electrode and the determination unit, the determination unit being sealed by an insulator.

摘要翻译： 提供了由检测电极和确定单元构成的小型模块。 公开了一种喷射检查装置，包括：从喷嘴喷射液体的头部; 检测电极，其在检测电极和喷嘴之间以预定的间隔面对喷嘴; 将检测电极设定为规定电位的电源; 确定单元，其检测由于从喷嘴喷射液体而产生的检测电极的电位变化，并且基于检测电极的电位变化确定头部中不喷射液体的喷嘴; 以及在打印时不与头部接触的帽部，容纳检测电极和判定部的判定部由绝缘体密封。

公开(公告)号：US20090185013A1

公开(公告)日：2009-07-23

申请号：US12354713

申请日：2009-01-15

申请人： Sukehiro Ito

发明人： Sukehiro Ito

IPC分类号： B41J2/045

CPC分类号： B41J2/14274 ,  B41J2/1612 ,  B41J2/1623 ,  B41J2002/14362

摘要： An ink jet recording head 10 is provided which includes: piezoelectric elements 17 as a pressure generation unit that causes pressure change in pressure generation chambers 11 which are communicated with nozzle openings 13 that eject liquid; a driving circuit 60 as a driving unit that generates a driving signal for driving the pressure generation unit; a case head 20 that accommodates therein the driving unit; and a thermally conductor 35 that is in contact with the driving unit and the case head 20, in which the thermally conductor 35 and the case head 20 are fixed to each other via an thermally conductive adhesive layer 72 as a thermally conductive layer.

摘要翻译： 提供一种喷墨记录头10，其包括：作为压力产生单元的压电元件17，其产生与喷射液体的喷嘴开口13连通的压力产生室11的压力变化; 作为驱动单元的驱动电路60，其产生用于驱动压力产生单元的驱动信号; 容纳在其中的驱动单元的壳体头20; 以及与驱动单元和壳体头20接触的导热体35，其中导热体35和壳体磁头20通过作为导热层的导热粘合剂层72彼此固定。