公开(公告)号：US20110140729A1

公开(公告)日：2011-06-16

申请号：US13058158

申请日：2009-07-29

申请人： Mitsuhiro Nakamura ,  Hiroshi Toyama ,  Yasuhiko Nara ,  Katsuo Oki ,  Tomoharu Obuki ,  Masahiro Sasajima

发明人： Mitsuhiro Nakamura ,  Hiroshi Toyama ,  Yasuhiko Nara ,  Katsuo Oki ,  Tomoharu Obuki ,  Masahiro Sasajima

IPC分类号： G01R31/26 ,  G21K5/08

CPC分类号： G01R31/307 ,  G01R31/2853 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/2008 ,  H01J2237/24564

摘要： An object of the invention is to provide an inspection device which has a function of preventing electric discharge so that an absorbed current is detected more efficiently.In the invention, absorbed current detectors are mounted in a vacuum specimen chamber and capacitance of a signal wire from each probe to corresponding one of the absorbed current detectors is reduced to the order of pF so that even an absorbed current signal with a high frequency of tens of kHz or higher can be detected. Moreover, signal selectors are operated by a signal selection controller so that signal lines of a semiconductor parameters analyzer are electrically connected to the probes brought into contact with a sample. Accordingly, electrical characteristics of the sample can be measured without limitation of signal paths connected to the probes to transmission of an absorbed current. In addition, a resistance for slow leakage of electric charge is provided in each probe stage or a sample stage.

摘要翻译： 本发明的目的是提供一种检测装置，其具有防止放电的功能，从而更有效地检测吸收的电流。 在本发明中，将吸收电流检测器安装在真空试样室中，并将来自每个探针的信号线的电容与吸收的电流检测器中的相应一个电容器的电容降低到pF的顺序，使得甚至具有高频率的吸收电流信号 可以检测几十kHz或更高。 此外，信号选择器由信号选择控制器操作，使得半导体参数分析仪的信号线电连接到与样品接触的探针。 因此，可以测量样品的电特性，而不限制连接到探针的信号路径以传输吸收的电流。 此外，在每个探针级或样品台中提供电荷缓慢泄漏的电阻。

公开(公告)号：US20100188720A1

公开(公告)日：2010-07-29

申请号：US12656301

申请日：2010-01-25

申请人： Yukio Nakamura ,  Hiroshi Toyama

发明人： Yukio Nakamura ,  Hiroshi Toyama

IPC分类号： G02B5/32 ,  G09G5/00

CPC分类号： H01L27/156 ,  G02B27/01 ,  H01L33/60 ,  H01L33/62 ,  H01L2924/0002 ,  H01L2924/00

摘要： A light source apparatus emits light image information. A reflective layer is formed on a planarization film formed on a metal substrate. LED thin films are arranged in a matrix having columns extending in first directions and rows extending in second directions perpendicular to the first directions, the LED thin films being bonded to the reflective layer by means of intermolecular force. First wires are connected to first electrodes of the LED thin films. Second wires are connected to second electrodes of the LED thin films. A first driver circuit selectively electrically drives the LED thin films, arranged in the rows, via the plurality of first wires. A second driver circuit selectively electrically drives the LED thin films, arranged in the rows, via the plurality of second wires.

摘要翻译： 光源装置发射光图像信息。 在形成在金属基板上的平坦化膜上形成反射层。 LED薄膜以具有沿第一方向延伸的列和与第一方向垂直的第二方向延伸的行的矩阵布置，LED薄膜通过分子间力结合到反射层。 第一导线连接到LED薄膜的第一电极。 第二导线连接到LED薄膜的第二电极。 第一驱动电路经由多条第一布线选择性地驱动配置成行的LED薄膜。 第二驱动器电路经由多条第二布线选择性地电驱动布置成行的LED薄膜。

公开(公告)号：US07439506B2

公开(公告)日：2008-10-21

申请号：US11798239

申请日：2007-05-11

申请人： Yuko Iwabuchi ,  Hideo Todokoro ,  Hiroyoshi Mori ,  Mitsugu Sato ,  Yasutsugu Usami ,  Mikio Ichihashi ,  Satoru Fukuhara ,  Hiroyuki Shinada ,  Yutaka Kaneko ,  Katsuya Sugiyama ,  Atsuko Takafuji ,  Hiroshi Toyama

发明人： Yuko Iwabuchi ,  Hideo Todokoro ,  Hiroyoshi Mori ,  Mitsugu Sato ,  Yasutsugu Usami ,  Mikio Ichihashi ,  Satoru Fukuhara ,  Hiroyuki Shinada ,  Yutaka Kaneko ,  Katsuya Sugiyama ,  Atsuko Takafuji ,  Hiroshi Toyama

IPC分类号： H01J37/256 ,  H01J37/244

CPC分类号： H01J37/28 ,  G01N23/20 ,  G01N23/2251 ,  G03F7/7065 ,  G06T7/001 ,  G06T2207/10056 ,  G06T2207/30148 ,  H01J37/04 ,  H01J37/20 ,  H01J37/265 ,  H01J2237/04756 ,  H01J2237/20221 ,  H01J2237/2444 ,  H01J2237/24592 ,  H01J2237/2817 ,  H01J2237/31766

摘要： Problems encountered in the conventional inspection method and the conventional apparatus adopting the method are solved by the present invention using an electron beam by providing a novel inspection method and an inspection apparatus adopting the novel method which are capable of increasing the speed to scan a specimen such as a semiconductor wafer.The inspection novel method provided by the present invention comprises the steps of: generating an electron beam; converging the generated electron beam on a specimen by using an objective lens; scanning the specimen by using the converged electron beam; continuously moving the specimen during scanning; detecting charged particles emanating from the specimen at a location between the specimen and the objective lens and converting the detected charged particles into an electrical signal; storing picture information conveyed by the electrical signal; comparing a picture with another by using the stored picture information; and detecting a defect of the specimen.

摘要翻译： 通过提供新颖的检查方法和采用这种新方法的检测装置，本发明通过使用电子束的本发明解决了常规检查方法中遇到的问题和采用该方法的传统装置，该方法能够提高扫描样本的速度 作为半导体晶片。 本发明提供的检验新颖方法包括以下步骤：产生电子束; 通过使用物镜将生成的电子束会聚在样品上; 使用会聚电子束扫描样品; 扫描期间连续移动样品; 检测在样本和物镜之间的位置处从样本发出的带电粒子，并将检测到的带电粒子转换成电信号; 存储由电信号传送的图像信息; 通过使用所存储的图像信息将图像与另一图像进行比较; 并检测样本的缺陷。

公开(公告)号：US07083097B2

公开(公告)日：2006-08-01

申请号：US10786093

申请日：2004-02-26

申请人： Hiroshi Toyama ,  Tadao Ooshima ,  Makoto Ito

发明人： Hiroshi Toyama ,  Tadao Ooshima ,  Makoto Ito

IPC分类号： G06K7/10

CPC分类号： G06K7/10732

摘要： The present invention provides an optical information reading apparatus capable of producing uniform and bright illumination light and of projecting the illumination light onto an appropriate position on an object of reading at all times. In the apparatus, a light-receiving optical system including a light-receiving sensor and an image formation lens is provided and illumination optical systems each including an LED and an illumination lens device are placed on both sides of the image formation lens. The illumination optical systems are integrally connected to each other through a connecting portion to form a lens-connected assembly. In an incident surface of the illumination lens device, a plurality of convex lens tiers and a plurality of concave lens tiers are alternately made smoothly to form a multi-tiered lens surface, and an output surface thereof is made into a gentle cylindrical configuration to form a rod-like lens surface.

摘要翻译： 本发明提供了一种能够产生均匀且明亮的照明光并将照明光一直投射到读取对象上的适当位置的光学信息读取装置。 在该装置中，设置了包括光接收传感器和图像形成透镜的光接收光学系统，并且将包括LED和照明透镜装置的照明光学系统放置在成像透镜的两侧。 照明光学系统通过连接部分彼此一体地连接以形成透镜连接组件。 在照明透镜装置的入射面中，多个凸透镜层和多个凹透镜层交替地平滑地形成多层透镜表面，并且其输出表面形成为平缓的圆柱形构造 棒状透镜表面。

公开(公告)号：US07058326B2

公开(公告)日：2006-06-06

申请号：US10698018

申请日：2003-10-31

申请人： Hiroshi Toyama

发明人： Hiroshi Toyama

IPC分类号： G03G15/02

CPC分类号： G03G15/80 ,  G03G2215/0119 ,  G03G2215/02 ,  G03G2215/0634

摘要： A color image forming apparatus includes a plurality of image carriers for at least one color, a plurality of developing devices, each developing a toner image onto each image carrier, a plurality of charging devices, each charging the each image carrier, a first power source, connected to the developing devices in common, a second power source, connected to the charging devices in common, and a controller, changing a process control of at least one of the charging devices and the developing devices in accordance with a color image forming operation and a monochrome image forming operation.

摘要翻译： 彩色图像形成装置包括用于至少一种颜色的多个图像载体，多个显影装置，每个在每个图像载体上显影调色剂图像;多个充电装置，每个对每个图像载体进行充电;第一电源 ，共同连接到显影装置，共同连接到充电装置的第二电源和控制器，根据彩色图像形成操作改变至少一个充电装置和显影装置的处理控制 和单色图像形成操作。

公开(公告)号：US07031646B2

公开(公告)日：2006-04-18

申请号：US10956355

申请日：2004-09-30

申请人： Shinji Yasukawa ,  Nobuhiro Miyakawa ,  Hiroshi Toyama ,  Takeshi Kobayashi ,  Shoji Hiruta

发明人： Shinji Yasukawa ,  Nobuhiro Miyakawa ,  Hiroshi Toyama ,  Takeshi Kobayashi ,  Shoji Hiruta

IPC分类号： G03G15/08

CPC分类号： G03G15/0806 ,  G03G15/065 ,  G03G2215/0634

摘要： An electrostatic latent image is formed on an image carrier. A first roller is opposed to the image carrier with a gap in between. A second roller is in contact with the first roller such that toner of a one-component type is supplied onto the image carrier by way of the first roller to develop the electrostatic latent image as a visible toner image. A single power source supplies a bias voltage in which an AC voltage is superposed on a DC bias voltage. The bias voltage is supplied to the first roller through a first path and to the second roller through a second path. A resistor is provided on the first path between the first roller and a branching point of the first path and the second path.

摘要翻译： 在图像载体上形成静电潜像。 第一辊与图像载体相对，间隔开。 第二辊与第一辊接触，使得通过第一辊将单组分类型的调色剂供应到图像载体上，以将静电潜像显影为可见的调色剂图像。 单个电源提供偏置电压，其中AC电压叠加在DC偏置电压上。 偏压通过第一路径提供给第一辊，并通过第二路径被供给到第二辊。 电阻器设置在第一路径与第一路径和第二路径的分支点之间的第一路径上。

公开(公告)号：US20050095525A1

公开(公告)日：2005-05-05

申请号：US10670798

申请日：2003-09-26

申请人： Masanao Kunugi ,  Atsunori Kitazawa ,  Hiroshi Toyama

发明人： Masanao Kunugi ,  Atsunori Kitazawa ,  Hiroshi Toyama

IPC分类号： G03G9/08 ,  G03G15/08

CPC分类号： G03G15/0812 ,  G03G2215/0617

摘要： A developing method, including the steps of: carrying one-component non-magnetic toner on a developer carrier; pressing the one-component non-magnetic toner by a regulating member so as to regulate a transporting quantity of the one-component non-magnetic toner so that the one-component non-magnetic toner is charged; forming an electrostatic latent image on an image carrier; providing the one-component non-magnetic toner to the electrostatic latent image so as to convert the electrostatic latent image into a visible toner image; and controlling the one-component non-magnetic toner so that the one-component non-magnetic toner pressed by the regulating member satisfies the following relationship: B/A≦1, where A represents a width [μm] of a particle size distribution of the one-component non-magnetic toner; and B represents a width [fC] of a charge quantity distribution of the one-component non-magnetic toner.

摘要翻译： 一种显影方法，包括以下步骤：在显影剂载体上携带单组分非磁性调色剂; 通过调节构件按压单组分非磁性调色剂，以调节单​​组分非磁性调色剂的输送量，使单组分非磁性调色剂充电; 在图像载体上形成静电潜像; 将所述单组分非磁性调色剂提供给所述静电潜像，以便将所述静电潜像转化为可见的调色剂图像; 并且控制单组分非磁性调色剂使由调节构件按压的单组分非磁性调色剂满足以下关系：B / A <= 1，其中A表示粒度分布的宽度[mum] 的单组分非磁性调色剂; B表示单组分非磁性调色剂的电荷量分布的宽度[fC]。

公开(公告)号：US06888138B2

公开(公告)日：2005-05-03

申请号：US10868907

申请日：2004-06-17

申请人： Takashi Ohshima ,  Hiroshi Makino ,  Hiroshi Toyama ,  Hiroyuki Shinada

发明人： Takashi Ohshima ,  Hiroshi Makino ,  Hiroshi Toyama ,  Hiroyuki Shinada

IPC分类号： G01N23/225 ,  G01Q30/02 ,  H01J37/04 ,  H01J37/244 ,  H01J37/28

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2605

摘要： It was hard for conventional SEMs to take measurements at a high speed and take accurate measurements when an insulator exists between an object to probe and the detector, because the conventional SEMs used a continuous electron beam. Also, it was impossible to apply voltage to the sample during the measurement of current. By pulse-modulating the electron beam and extracting a high-frequency signal component from the sample, new SEM equipment disclosed herein detects electrons absorbed in the sample at a high speed and with precision. Precise and high-speed absorption current measurements can be achieved. High-functionality inspection apparatus can be provided.

摘要翻译： 传统的扫描电镜很难在高速下进行测量，并且当物体与探针和检测器之间存在绝缘体时进行精确的测量，因为传统的扫描电镜使用连续的电子束。 此外，在测量电流期间不可能对样品施加电压。 通过脉冲调制电子束并从样品中提取高频信号分量，本文公开的新的SEM设备以高速和精确的方式检测样品中吸收的电子。 可以实现精确和高速吸收电流测量。 可以提供高功能检查装置。

公开(公告)号：US20050045820A1

公开(公告)日：2005-03-03

申请号：US10868907

申请日：2004-06-17

申请人： Takashi Ohshima ,  Hiroshi Makino ,  Hiroshi Toyama ,  Hiroyuki Shinada

发明人： Takashi Ohshima ,  Hiroshi Makino ,  Hiroshi Toyama ,  Hiroyuki Shinada

IPC分类号： G01N23/225 ,  G01Q30/02 ,  H01J37/04 ,  H01J37/244 ,  H01J37/28

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2605

摘要： It was hard for conventional SEMs to take measurements at a high speed and take accurate measurements when an insulator exists between an object to probe and the detector, because the conventional SEMs used a continuous electron beam. Also, it was impossible to apply voltage to the sample during the measurement of current. By pulse-modulating the electron beam and extracting a high-frequency signal component from the sample, new SEM equipment disclosed herein detects electrons absorbed in the sample at a high speed and with precision. Precise and high-speed absorption current measurements can be achieved. High-functionality inspection apparatus can be provided.

摘要翻译： 传统的扫描电镜很难在高速下进行测量，并且当物体与探针和检测器之间存在绝缘体时进行精确的测量，因为传统的扫描电镜使用连续的电子束。 此外，在测量电流期间不可能对样品施加电压。 通过脉冲调制电子束并从样品中提取高频信号分量，本文公开的新的SEM设备以高速和精确的方式检测样品中吸收的电子。 可以实现精确和高速吸收电流测量。 可以提供高功能检查装置。

公开(公告)号：US06730449B2

公开(公告)日：2004-05-04

申请号：US10372504

申请日：2003-02-24

申请人： Hiroshi Toyama

发明人： Hiroshi Toyama

IPC分类号： G03G900

CPC分类号： G03G9/097

摘要： A non-magnetic mono-component toner of the present invention comprises, at least, a plurality of mother particles and a plurality of CCA particles adhering to the mother particles. The non-magnetic mono-component toner satisfies a×d

摘要翻译： 本发明的非磁性单组分调色剂至少包含多个母体颗粒和附着在母体颗粒上的多个CCA颗粒。 非磁性单组分调色剂满足axd <2.5，其中“a”是通过近似相对于颗粒的CCA颗粒的粒径的分布而获得的附着到母体颗粒上的CCA颗粒的近似直线的倾斜度 母体颗粒的直径为最小二乘法，“d”（母体）是调色剂的基于体积的平均粒径。 因此，可以有效地降低非磁性单组分调色剂的一个颗粒上的电荷，从而允许较低的显影电压并实现显影滞后的减少。